Hoe Whakarewa Silicon Carbide (Hoe Whakarewa SiC)

Hoe Cantilever Silicon Carbide (Hoe Cantilever SiC) Whakaahua Matua

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Ngā Āhuatanga

Kauwhata Taipitopito

Tirohanga Whānui o te Hua

Ko te hoe cantilever silicon carbide, he mea hanga mai i te silicon carbide here-tauhohenga mahi-teitei (RBSiC), he wāhanga nui e whakamahia ana i roto i ngā pūnaha uta me te whakahaere wafer mō ngā tono semiconductor me te photovoltaic.
Ki te whakatauritea ki ngā hoe quartz, graphite rānei tuku iho, he kaha ake te kaha ā-ringa o ngā hoe cantilever SiC, he pakeke rawa, he iti te horapa o te wera, ā, he tino ātete ki te waikura. Ka mau tonu te pumau o te hanganga i raro i ngā pāmahana teitei, ka tutuki i ngā whakaritenga pakari o ngā rahi wafer nui, te roa o te ora ratonga, me te tino iti o te parahanga.

I te whanaketanga tonu o ngā tukanga haurua-ira ki te whakatutuki i ngā diameter wafer nui ake, te kaha whakaputa nui ake, me ngā taiao tukatuka ma ake, kua āta whakakapia ngā rauemi tuku iho e ngā hoe cantilever SiC, ā, kua noho hei whiringa pai mō ngā oumu horapa, te LPCVD, me ngā taputapu pāmahana-tiketike e pā ana.

Ngā Āhuatanga o te Hua

Te Pūmautanga Mahana-Tiketike Pai rawa atu
- He pono te mahi i te 1000–1300℃, kāore he rerekētanga.
- Te pāmahana ratonga mōrahi tae atu ki te 1380℃.
Te Kaha Whakamau Kawenga Teitei
- Ko te kaha piko tae atu ki te 250–280 MPa, he teitei ake i ngā hoe kuata.
- Ka taea te whakahaere i ngā angaanga nui te whānui (300 mm me runga ake).
Te Roa o te Ora Ratonga me te Tiaki iti
- He iti te tauwehenga whānui wera (4.5 × 10⁻⁶ K⁻¹), he pai te hono ki ngā rauemi paninga LPCVD.
- Ka whakaiti i ngā kapiti me te tihore i puta mai i te ahotea, ka roa ake ai ngā huringa horoi me te tiaki.
Ātete ki te Waikura me te Parakore
- He ātete tino pai ki ngā waikawa me ngā kawakore.
- Hanganga moroiti kikī me te pūngao tuwhera <0.1%, e whakaiti ana i te whakaputanga matūriki me te tukunga poke.
Hoahoa Hototahi-Aunoatanga
- He āhuahanga whakawhiti-wāhanga pumau me te tino tika o ngā āhuatanga.
- Ka hono pai ki ngā pūnaha uta me te tango i ngā wafers karetao, ka taea ai te whakaputa aunoa katoa.

Ngā Āhuatanga Ā-tinana me te Matū

Taonga	Wāhanga	Raraunga
Te pāmahana ratonga mōrahi	℃	1380
Kiato	karamu/cm³	3.04 – 3.08
Pūwero Tuwhera	%	< 0.1
Kaha Piko	MPa	250 (20℃), 280 (1200℃)
Te Tauwehenga o te Āhuatanga	GPa	330 (20℃), 300 (1200℃)
Te Arahi Wera	W/m·K	45 (1200℃)
Tauwehenga Whānui Wera	K⁻¹×10⁻⁶	4.5
Te Pakari o Vickers	HV2	≥ 2100
Ātete Waikawa/Kawakore	-	Tino pai

Ngā roa paerewa:2378 mm, 2550 mm, 2660 mm
Kei te wātea ngā āhuatanga ritenga ina tonoa

Ngā tono

Ahumahi Ārahi-Haumaru
- LPCVD (Te Whakatakotoranga Kohu Matū Pēhanga Iti)
- Ngā tukanga horapa (fosfor, boron, me ētahi atu)
- Waikura wera
Ahumahi Photovoltaic
- Te horapa me te paninga o te polysilicon me te monocrystalline wafer
- Te whakamahana me te whakakorenga pāmahana teitei
Ngā Mara kē atu
- Ngā taiao waikura pāmahana teitei
- Ngā pūnaha whakahaere wafer tino tika e hiahia ana kia roa te ora mahi me te iti o te poke

Ngā Painga a te Kaihoko

Ngā Utu Whakahaere kua Whakaitihia– He roa ake te ora ki te whakaritea ki ngā hoe quartz, e whakaiti ana i te wā kore mahi me te auau whakakapinga.
Hua Teitei Ake– Mā te tino iti o te parahanga ka ma te mata o te papa angiangi, ka whakaitihia hoki ngā reiti hapa.
Ārai i te Ao o Muri Mai– Hototahi ki ngā rahi wafer nui me ngā tukanga semiconductor o te whakatupuranga e whai ake nei.
Te Whakarei Ake i te Hua– He tino hototahi ki ngā pūnaha aunoatanga karetao, e tautoko ana i te hanga nui-rahi.

Ngā Pātai Auau – Hoe Cantilever Silicon Carbide

Q1: He aha te hoe cantilever silicon carbide?
A: He wāhanga tautoko me te whakahaere wafer i hangaia mai i te silicon carbide honohono-tauhohenga (RBSiC). He whānuitia te whakamahinga i roto i ngā oumu horapa, LPCVD, me ētahi atu tukanga semiconductor me te photovoltaic pāmahana-tiketike.

Q2: He aha i whiriwhiria ai te SiC i ngā hoe quartz?
A: Ki te whakatauritea ki ngā hoe quartz, ko ngā mea e tukuna ana e ngā hoe SiC:

Te kaha ake o te miihini me te kaha ki te kawe kawenga
He pai ake te pumau o te wera i ngā pāmahana tae atu ki te 1380℃
He roa ake te ora ratonga me te whakaiti i ngā huringa tiaki
He iti ake te mōrearea o te whakaputa matūriki me te poke
Hototahi ki ngā rahi wafer nui ake (300 mm me runga ake)

Q3: He aha ngā rahi o te wafer ka taea e te hoe cantilever SiC te tautoko?
A: Kei te wātea ngā hoe paerewa mō ngā pūnaha oumu 2378 mm, 2550 mm, me te 2660 mm. Kei te wātea ngā inenga ritenga hei tautoko i ngā angaanga tae atu ki te 300 mm me tua atu.

Mō Mātou

He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.