Papa SiC 3inihi 350um te matotoru Momo HPSI Prime Grade Dummy grade
Ngā Āhuatanga
| Tawhā | Taumata Whakaputa | Taumata Rangahau | Tauira Tauira | Wāhanga |
| Tau | Taumata Whakaputa | Taumata Rangahau | Tauira Tauira | |
| Diameter | 76.2 ± 0.5 | 76.2 ± 0.5 | 76.2 ± 0.5 | mm |
| Matotoru | 500 ± 25 | 500 ± 25 | 500 ± 25 | µm |
| Te Aronga o te Wafer | I runga i te tuaka: <0001> ± 0.5° | I runga i te tuaka: <0001> ± 2.0° | I runga i te tuaka: <0001> ± 2.0° | tohu |
| Te Matotoru o te Paipa Maikoro (MPD) | ≤ 1 | ≤ 5 | ≤ 10 | cm−2^-2−2 |
| Ātete Hiko | ≥ 1E10 | ≥ 1E5 | ≥ 1E5 | Ω·cm |
| Tāpiri | Kua whakakorea te waipiro | Kua whakakorea te waipiro | Kua whakakorea te waipiro | |
| Te whakatakotoranga papatahi tuatahi | {1-100} ± 5.0° | {1-100} ± 5.0° | {1-100} ± 5.0° | tohu |
| Roa Papatahi Tuatahi | 32.5 ± 3.0 | 32.5 ± 3.0 | 32.5 ± 3.0 | mm |
| Roa Papatahi Tuarua | 18.0 ± 2.0 | 18.0 ± 2.0 | 18.0 ± 2.0 | mm |
| Te whakatakotoranga papatahi tuarua | 90° CW mai i te papatahi tuatahi ± 5.0° | 90° CW mai i te papatahi tuatahi ± 5.0° | 90° CW mai i te papatahi tuatahi ± 5.0° | tohu |
| Te Whakakore i te Tapa | 3 | 3 | 3 | mm |
| LTV/TTV/Pīkau/Whā | 3 / 10 / ±30 / 40 | 3 / 10 / ±30 / 40 | 5 / 15 / ±40 / 45 | µm |
| Te Pākari o te Mata | Mata-Si: CMP, Mata-C: Orohia | Mata-Si: CMP, Mata-C: Orohia | Mata-Si: CMP, Mata-C: Orohia | |
| Ngā Kapiti (Te Mārama Kaha-Nui) | Kāore | Kāore | Kāore | |
| Pereti Hex (Rama Kaha-Tiketike) | Kāore | Kāore | Te horahanga tāpiri 10% | % |
| Ngā Rohe Momo-maha (Marama Kaha-Tiketike) | Te horahanga tāpiri 5% | Te horahanga tāpiri 20% | Te horahanga tāpiri 30% | % |
| Ngā Karakura (Te Mārama Kaha-Nui) | ≤ 5 ngā karawarawa, te roanga o te katoa ≤ 150 | ≤ 10 ngā karawarawa, te roanga o te katoa ≤ 200 | ≤ 10 ngā karawarawa, te roanga o te katoa ≤ 200 | mm |
| Tapahi Tapa | Kāore he whānui/hohonu ≥ 0.5 mm | 2 e whakaaetia ana ≤ 1 mm te whānui/te hohonu | 5 e whakaaetia ana ≤ 5 mm te whānui/te hohonu | mm |
| Te Parahanga o te Mata | Kāore | Kāore | Kāore |
Ngā tono
1. Ngā Hikohiko Mana-Tiketike
Nā te pai o te kawe wera me te whānui o te āputa o ngā papa SiC, he mea tino pai mō ngā taputapu kaha-teitei, auau-teitei:
●Ngā MOSFET me ngā IGBT mō te whakawhiti hiko.
●Ngā pūnaha hiko waka hiko matatau, tae atu ki ngā inverters me ngā rihi.
●Hangarau whatunga atamai me ngā pūnaha pūngao hou.
2. Ngā Pūnaha RF me te Ngaruiti
Ka taea e ngā papa SiC te whakamahi i te RF auau-tiketike me te ngaruiti me te iti o te ngaronga tohu:
●Ngā pūnaha whakawhitiwhiti kōrero me ngā pūnaha amiorangi.
●Ngā pūnaha radar ā-rangi.
●Ngā wāhanga whatunga 5G matatau.
3. Ngā Optoelectronics me ngā Pūoko
Ko ngā āhuatanga ahurei o te SiC e tautoko ana i ngā momo tono optoelectronic:
●Ngā pūoko UV mō te aroturuki taiao me te pūoko ahumahi.
●Ngā papa LED me te rēseri mō ngā rama totoka me ngā taputapu tika.
●Ngā pūoko pāmahana teitei mō ngā ahumahi rererangi me ngā ahumahi motuka.
4. Rangahau me te Whakawhanake
Mā te kanorau o ngā momo (Te Hanga, Te Rangahau, Te Tauira) ka taea te whakamātautau matatau me te hanga tauira taputapu i roto i te ao mātauranga me te ahumahi.
Ngā Painga
●Pono:He ātete tino pai me te pumau puta noa i ngā taumata.
●Whakaritenga:Ngā whakatakotoranga me ngā matotoru kua whakaritea kia rite ki ngā hiahia rerekē.
●Teitei te Parakore:Mā te hanganga kāore i tāpirihia ka iti ake ngā rerekētanga e pā ana ki te poke.
●Te Āhua Tauine:E tutuki ana i ngā whakaritenga o te whakaputa papatipu me te rangahau whakamātautau.
Ko ngā papa SiC parakore-teitei 3-inihi te huarahi ki ngā taputapu mahi-teitei me ngā whanaketanga hangarau auaha. Mō ngā pātai me ngā whakatakotoranga taipitopito, whakapā mai ki a mātou i tēnei rā.
Whakarāpopototanga
Ko ngā Wafers Silicon Carbide (SiC) Teitei Parakore 3-inihi, e wātea ana i roto i ngā Wāhanga Whakaputa, Rangahau, me ngā Wāhanga Tauira, he paparanga kounga teitei i hangaia mō ngā hikohiko mana-teitei, ngā pūnaha RF/ngaruiti, ngā hikohiko opto, me te R&D matatau. Kei roto i ēnei wafers ngā āhuatanga kore-whakapiripiri, haurua-whakamaroke me te ātete pai rawa atu (≥1E10 Ω·cm mō te Wāhanga Whakaputa), te iti o te kiato paipa iti (≤1 cm−2^-2−2), me te kounga mata tino pai. Kua arotauhia ēnei mō ngā tono mahi-teitei, tae atu ki te hurihanga hiko, te whakawhitiwhiti kōrero, te pūoko UV, me ngā hangarau LED. Me ngā whakatakotoranga ka taea te whakarite, te kawe wera pai ake, me ngā āhuatanga miihini pakari, ka taea e ēnei wafers SiC te hanga taputapu whai hua, pono me ngā auahatanga hou puta noa i ngā ahumahi.
Kauwhata Taipitopito
