Te Ouma Tipu Ingota SiC mō ngā Tikanga TSSG/LPE Tioata SiC Diameter Nui
Kaupapa Mahi
Ko te kaupapa matua o te tipu o te ingot silicon carbide wai-wāhanga ko te whakarewa i ngā rauemi mata SiC tino parakore ki roto i ngā konganuku rewa (hei tauira, Si, Cr) i te 1800-2100°C hei hanga i ngā otinga kua mākū, ā, muri iho ka whakahaerehia te tipu ahunga o ngā tioata takitahi SiC i runga i ngā tioata purapura mā te whakatikatika pāmahana tika me te whakahaere i te supersaturation. He tino pai tēnei hangarau mō te whakaputa tioata takitahi 4H/6H-SiC tino parakore (>99.9995%) me te iti o te kiato hapa (<100/cm²), e tutuki ana i ngā whakaritenga papatipu mō ngā hikohiko mana me ngā taputapu RF. Mā te pūnaha tipu wai-wāhanga ka taea te whakahaere tika i te momo kawe tioata (momo N/P) me te ātete mā te hanganga otinga kua arotauhia me ngā tawhā tipu.
Ngā Wāhanga Matua
1. Pūnaha Para Motuhake: Para hiato karāpeti/tantalum tino parakore, ātete ki te pāmahana >2200°C, ātete ki te waikura rewa SiC.
2. Pūnaha Whakamahana Maha-Rohe: Whakamahana ātete/whakamahana arataki whakakotahi me te tika o te whakahaere pāmahana o te ±0.5°C (awhe 1800-2100°C).
3. Pūnaha Nekehanga Tika: Mana whakahaere takirua mō te hurihanga purapura (0-50rpm) me te hiki (0.1-10mm/h).
4. Pūnaha Whakahaere Āhuarangi: Parenga hauota/hauota parakore teitei, pēhanga mahi ka taea te whakarite (0.1-1atm).
5. Pūnaha Whakahaere Maamaa: PLC + mana whakahaere PC ahumahi me te aroturuki atanga tipu wā-tūturu.
6. Pūnaha Whakamatao Whai Hua: Mā te hoahoa whakamatao wai kua whakaritea ka mau tonu te mahi mō te wā roa.
Te Whakataurite i te TSSG me te LPE
| Ngā Āhuatanga | Tikanga TSSG | Tikanga LPE |
| Te pāmahana tipu | 2000-2100°C | 1500-1800°C |
| Te Tere Tipu | 0.2-1mm/h | 5-50μm/h |
| Rahi o te karaihe | Ngā porotiti 4-8 inihi | Ngā paparanga-epi 50-500μm |
| Taupānga Matua | Te whakarite i te papa | Ngā paparanga-epi o te taputapu hiko |
| Te Kīanga o te Koha | <500/cm² | <100/cm² |
| Ngā momo momo e tika ana | 4H/6H-SiC | 4H/3C-SiC |
Ngā Taupānga Matua
1. Hikohiko Mana: Ngā papaaho 4H-SiC 6-inihi mō ngā MOSFET/diode 1200V+.
2. Ngā Pūrere RF 5G: Ngā papa SiC haurua-whakamaroke mō ngā PA teihana turanga.
3. Ngā Whakamahinga EV: Ngā paparanga-epi matotoru rawa (>200μm) mō ngā kōwae taumata-aunoa.
4. Ngā Pūwhakahuri PV: Ngā papa iti-hapa e āhei ai te pai o te huringa >99%.
Ngā Painga Matua
1. Te Hiranga o te Hangarau
1.1 Hoahoa Tikanga Maha Whakauru
Ka whakakotahi auaha tēnei pūnaha whakatipu ingota SiC āhua-wai i ngā hangarau whakatipu tioata TSSG me te LPE. Ka whakamahia e te pūnaha TSSG te whakatipu otinga purapura-runga me te whakahaere tika i te whakawhiti rewa me te pāmahana (ΔT≤5℃/cm), ka taea ai te tipu pumau o ngā ingota SiC whānui-rahi 4-8 inihi me ngā hua kotahi-oma o te 15-20kg mō ngā tioata 6H/4H-SiC. Ka whakamahia e te pūnaha LPE te hanganga whakarewa kua arotauhia (pūnaha koranu Si-Cr) me te whakahaere supersaturation (±1%) hei whakatipu i ngā paparanga epitaxial matotoru kounga teitei me te kiato hapa <100/cm² i ngā pāmahana iti (1500-1800℃).
1.2 Pūnaha Whakahaere Maamaa
Kei roto i te mana whakahaere tipu atamai o te whakatupuranga tuawhā ngā āhuatanga:
• Te aroturuki i roto i te wāhi maha-āputa (te whānuitanga o te roangaru 400-2500nm)
• Te kimi taumata rewa e ahu mai ana i te taiaho (±0.01mm te tika)
• Mana whakahaere porowhita kati-whānui e hangai ana ki te CCD (te piki me te heke o te <±1mm)
• Te arotautanga o ngā tawhā tipu e whakamahia ana e te AI (15% te penapena pūngao)
2. Ngā Painga o te Mahi Tukanga
2.1 Ngā Kaha Matua o te Tikanga TSSG
• Kaha nui: Ka tautoko i te tipu tioata tae atu ki te 8-inihi me te diameter ōrite >99.5%
• Teitei o te tioata: Te kiato nekenekehanga <500/cm², te kiato paipa iti <5/cm²
• Te ōritetanga o te tāpiringa: <8% te rerekētanga ātete momo-n (ngā papa 4-inihi)
• Te tere tipu kua arotauhia: Ka taea te whakarerekē i te 0.3-1.2mm/h, 3-5× te tere ake i ngā tikanga āhua-kohu
2.2 Ngā Kaha Matua o te Tikanga LPE
• Te iti rawa o te epitaxy hapa: Te mātotoru āhua atanga <1×10¹¹cm⁻²·eV⁻¹
• Te whakahaere matotoru tika: 50-500μm ngā paparanga-epi me te rerekētanga matotoru <±2%
• Te pai o te pāmahana iti: 300-500℃ te iti iho i ngā tukanga CVD
• Te tipu o te hanganga matatini: Tautoko ana i ngā hononga pn, ngā whāriki, me ētahi atu.
3. Ngā Painga o te Whai Hua o te Whakaputa
3.1 Te Whakahaere Utu
• 85% te whakamahinga o ngā rauemi mata (ki te 60% te whakamahinga tuku iho)
• 40% te iti iho o te whakapaunga pūngao (ki te whakarite ki te HVPE)
• 90% te wā mahi o ngā taputapu (ka whakaitihia te wā kore mahi mā te hoahoa ā-pūrere)
3.2 Te Whakapūmau Kounga
• Mana whakahaere tukanga 6σ (CPK>1.67)
• Te kimi hapa tuihono (taumira 0.1μm)
• Te whai i ngā raraunga tukatuka-katoa (2000+ ngā tawhā wā-tūturu)
3.3 Te Whakawhanuitanga
• Hototahi ki ngā momo momo 4H/6H/3C
• Ka taea te whakapai ake ki ngā kōwae tukanga 12-inihi
• Tautoko i te whakauru-whakakotahitanga SiC/GaN
4. Ngā Painga o te Taupānga Ahumahi
4.1 Ngā Pūrere Hiko
• Ngā papa iti-ātete (0.015-0.025Ω·cm) mō ngā taputapu 1200-3300V
• Ngā papa whakamātao-haurua (>10⁸Ω·cm) mō ngā tono RF
4.2 Ngā Hangarau Hou
• Whakawhitiwhiti kōrero matū: Ngā papa haruru tino iti (1/f haruru <-120dB)
• Ngā taiao tino kino: Ngā tioata ātete-ira (<5% te pirau i muri i te 1×10¹⁶n/cm² te hihi)
Ngā Ratonga XKH
1. Taputapu Whakarite: Ngā whirihoranga pūnaha TSSG/LPE kua whakaritea.
2. Whakangungu Tukanga: Ngā kaupapa whakangungu hangarau whānui.
3. Tautoko i muri i te hoko: Te urupare hangarau me te tiaki 24/7.
4. Ngā Otinga Tūturu: Ratonga whānuitanga-katoa mai i te tāutanga ki te whakamana tukanga.
5. Tukunga Rauemi: Kei te wātea ngā papa SiC/epi-wafer 2-12 inihi.
Ko ngā painga matua ko:
• Te kaha ki te tipu tioata tae atu ki te 8-inihi.
• Te ōritetanga o te ātete <0.5%.
• Te roa o te mahi a te taputapu >95%.
• Tautoko hangarau 24/7.
