Anga Epitaxial SiC mō ngā Pūrere Mana – 4H-SiC, Momo-N, Kiato Hapa Iti

Te Wafer Epitaxial SiC mō ngā Pūrere Mana – 4H-SiC, Momo-N, Kikonga Hapa Iti te Whakaahua Matua

Whakaahuatanga Poto:

Ko te Wafer Epitaxial SiC te pūtake o ngā taputapu semiconductor mahi-teitei o ēnei rā, inā koa ko ērā i hangaia mō ngā mahi mana-teitei, auau-teitei, me te pāmahana-teitei. Ko te whakarāpopototanga mō te Wafer Epitaxial Silicon Carbide, he paparanga epitaxial SiC kounga teitei, angiangi i whakatipuria ki runga i tētahi papa SiC nui. Kei te tere haere te whakamahinga o te hangarau Wafer Epitaxial SiC i roto i ngā waka hiko, ngā whatunga atamai, ngā pūnaha pūngao whakahou, me te rererangi nā te mea he pai ake ōna āhuatanga ā-tinana me te hiko ki te whakataurite ki ngā wafer e hangai ana ki te silicon tuku iho.

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Ngā Mātāpono Hanga o te Wafer Epitaxial SiC

Ko te hanga i tētahi Wafer Epitaxial SiC me whai tukanga whakatakoto kohu matū (CVD) tino whakahaeretia. Ko te paparanga epitaxial ka whakatipuria i runga i tētahi papa SiC monocrystalline mā te whakamahi i ngā hau pērā i te silane (SiH₄), te propane (C₃H₈), me te hauwai (H₂) i ngā pāmahana neke atu i te 1500°C. Mā tēnei tipu epitaxial pāmahana teitei ka whakarite kia tino pai te tūnga tioata me te iti o ngā hapa i waenga i te paparanga epitaxial me te papa.

Kei roto i te tukanga he maha ngā wāhanga matua:

Te Whakarite i te PapatūānukuKa horoia te anga SiC turanga, ka orohia kia maeneene rite ki te ngota ngota.
Te tipu o te CVDI roto i tētahi tauhohenga parakore-teitei, ka tauhohe ngā hau ki te whakatakoto i tētahi paparanga SiC tioata kotahi ki runga i te papa.
Te Mana Whakahaere i te DopingKa whakauruhia te tāpiritanga momo-N, momo-P rānei i te wā epitaxy ana hei whakatutuki i ngā āhuatanga hiko e hiahiatia ana.
Tirotiro me te Ine IneKa whakamahia te karuārai whatu, te AFM, me te whakarara hihi-X hei manatoko i te matotoru o te paparanga, te kukū o te paninga, me te kiato o ngā hapa.

Ka āta tirotirohia ia Wafer Epitaxial SiC kia mau tonu ai ngā āheinga ki te ōrite o te matotoru, te papatahi o te mata, me te ātete. He mea nui te kaha ki te whakatikatika i ēnei tawhā mō ngā MOSFET ngaohiko teitei, ngā diode Schottky, me ētahi atu taputapu hiko.

Whakatakotoranga

Tawhā	Whakatakotoranga
Ngā Kāwai	Pūtaiao Rauemi, Papanga Kiriata Kotahi
Momo maha	4H
Te whakamahi i te tarukino	Momo N
Diameter	101 mm
Te Manawanui o te Diameter	± 5%
Matotoru	0.35 mm
Manawanui Matotoru	± 5%
Roa Papatahi Tuatahi	22 mm (± 10%)
TTV (Rerekētanga Matotoru Katoa)	≤10 µm
Wāwhati	≤25 µm
FWHM	≤30 Āwhata-hēkona
Whakaotinga Mata	Rq ≤0.35 nm

Ngā tono o te Wafer Epitaxial SiC

He mea nui ngā hua SiC Epitaxial Wafer i roto i ngā rāngai maha:

Ngā Waka Hiko (EV)Ka whakanui ake ngā taputapu e hangai ana ki te SiC Epitaxial Wafer i te pai o te pūnaha hiko me te whakaiti i te taumaha.
Pūngao WhakahouE whakamahia ana i roto i ngā pūwhakahuri mō ngā pūnaha hiko o te rā me te hau.
Ngā Pūnaha Hiko AhumahiWhakahohe i te whakawhiti auau-tiketike, pāmahana-tiketike me ngā mate iti iho.
Te Rererangi me te TiakiHe pai mō ngā taiao uaua e hiahia ana ki ngā haurua-ā-ira pakari.
Ngā Teihana Pūtake 5GKa tautokohia e ngā wāhanga SiC Epitaxial Wafer ngā kiato mana teitei ake mō ngā tono RF.

Mā te Wafer Epitaxial SiC ka taea ngā hoahoa kiato, te whakawhiti tere ake, me te pai ake o te huringa pūngao ki te whakaritea ki ngā wafer silicon.

Ngā Painga o te Wafer Epitaxial SiC

He nui ngā painga o te hangarau SiC Epitaxial Wafer:

Ngaohiko Pakaru Teitei: Ka tu atu i ngā ngaohiko tae atu ki te 10 ngā wā teitei ake i ngā papa Si.
Te Arahi WeraKa tere ake te whakamarara o te wera e te SiC Epitaxial Wafer, ka taea ai e ngā taputapu te oma mātao ake, me te oma pono ake.
Ngā Tere Whakawhiti TeiteiMā te iti o ngā mate whakawhiti ka taea te whakanui ake i te pai o te mahi me te whakaitiiti.
Āputa WhānuiKa whakarite i te pumau i ngā ngaohiko me ngā pāmahana teitei ake.
Te Pakari o ngā RauemiHe ngoikore te matū o te SiC, he kaha hoki ki te miihini, he mea tino pai mō ngā tono uaua.

Nā ēnei painga ka waiho te SiC Epitaxial Wafer hei rauemi whiriwhiri mā te whakatupuranga hou o ngā semiconductors.

Ngā Pātai Auau: Te Wafer Epitaxial SiC

P1: He aha te rerekētanga i waenga i te anga SiC me te anga Epitaxial SiC?
Ko te anga SiC e pā ana ki te paparanga papatipu, ko te anga SiC Epitaxial ia he paparanga kua whakatōkia motuhaketia hei hanga i te taputapu.

Q2: He aha ngā matotoru e wātea ana mō ngā paparanga Wafer Epitaxial SiC?
Ko te whānui o ngā paparanga epitaxial kei waenga i te torutoru maikiromita ki te neke atu i te 100 μm, i runga i ngā whakaritenga tono.

Q3: He pai te SiC Epitaxial Wafer mō ngā taiao pāmahana teitei?
Ae, ka taea e te SiC Epitaxial Wafer te mahi i roto i ngā āhuatanga neke atu i te 600°C, he nui ake te pai o te mahi i te silicon.

P4: He aha te hiranga o te kiato hapa i roto i te Wafer Epitaxial SiC?
Ka pai ake te mahi me te hua o te taputapu mā te iti o te mātotoru hapa, inā koa mō ngā tono ngaohiko tiketike.

Q5: Kei te wātea ngā Wafer Epitaxial SiC momo-N me te momo-P?
Ae, ka hangaia ngā momo e rua mā te whakamahi i te whakahaere hau tāpiri tika i te wā o te tukanga epitaxial.

Q6: He aha ngā rahi papa angiangi paerewa mō te Papa Angiangi Epitaxial SiC?
Ko ngā diameter paerewa ko te 2-inihi, 4-inihi, 6-inihi, me te 8-inihi ka piki haere mō te nui o te hanga.

Q7: He aha te pānga o te SiC Epitaxial Wafer ki te utu me te whai huatanga?
Ahakoa he nui ake te utu i te silicon i te tīmatanga, ka whakaitihia e te SiC Epitaxial Wafer te rahi o te pūnaha me te ngaronga hiko, ka whakapai ake i te whai huatanga o te utu mō te wā roa.

O mua: Ngongo Hapira mō te Tiakitanga o te Thermocouple – Te Tika o te Pāmahana-Teitei i roto i ngā Taiao Pakari

Panuku: Wafer Epitaxial Momo 4H-N SiC Ngaohiko Teitei Auautanga Teitei