He pereti uku SiC he karāhe me te paninga CVD SiC mō ngā taputapu.

Kāore ngā uku karawiti silicon e whakamahia ana i te wāhanga whakatakoto kiriata angiangi anake, pērā i te epitaxy, i te MOCVD rānei, i te tukatuka wafer rānei, i te pūtake o taua wāhanga ka tukuna tuatahitia ngā paepae kawe wafer mō te MOCVD ki te taiao whakatakoto, nō reira he tino ātete ki te wera me te waikura. He nui hoki te kawe wera o ngā kawe kua pania ki te SiC, ā, he pai rawa atu ngā āhuatanga tohatoha wera.

Ngā kaikawe anga whakarewa Silicon Carbide (CVD SiC) mō te tukatuka i te Metal Organic Chemical Vapor Deposition (MOCVD) pāmahana teitei.

He tino pai ake ngā kawe papa CVD SiC parakore i ngā kawe papa tuku iho e whakamahia ana i roto i tēnei tukanga, he mea hanga ki te karāpiti, ā, kua pania ki te paparanga CVD SiC. Kāore e taea e ēnei kawe papa kua pania ki te karāpiti te tu atu i ngā pāmahana teitei (1100 ki te 1200 nekehanga Celsius) e hiahiatia ana mō te whakatakotoranga GaN o ngā rama kikorangi me te mā kanapa o ēnei rā. Nā ngā pāmahana teitei ka puta he kōhao iti i roto i te paninga, ā, mā roto i tēnā ka memeha ngā matū tukatuka i te karāpiti i raro. Kātahi ka pakaru ngā matūriki karāpiti ka poke i te GaN, ka whakakapia te kawe papa kua pania.

Ko te parakore o te CVD SiC he 99.999% neke atu rānei, ā, he nui te ātete ki te kawe wera me te ru wera. Nō reira, ka taea e ia te tu atu i ngā pāmahana teitei me ngā taiao uaua o te hanga LED kanapa teitei. He rauemi monolithic totoka e eke ana ki te kiato ariā, he iti noa ngā matūriki e puta ana, ā, he tino teitei te ātete ki te waikura me te horo. Ka taea e te rauemi te huri i te opacity me te kawe me te kore e whakauru i ngā poke konganuku. Ko te whānui o ngā kawe wafer he 17 inihi te whānui, ā, ka taea te pupuri i te 40 wafer 2-4 inihi.