Pereti/tirei uku SiC mō te pupuri wafer 4 inihi 6 inihi mō te ICP

Whakaahuatanga Poto:

Ko te pereti uku SiC he wāhanga mahi-teitei i hangaia mai i te Silicon Carbide tino parakore, i hangaia mō te whakamahi i roto i ngā taiao wera, matū, me te miihini tino kino. He rongonui mō tōna pakeke tino pai, tōna kawe wera, me te ātete ki te waikura, e whakamahia whānuitia ana te pereti SiC hei kaikawe wafer, hei ārai, hei wāhanga hanganga rānei i roto i ngā ahumahi semiconductor, LED, photovoltaic, me te rererangi.

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Ngā Āhuatanga

Pereti uku SiC Whakarāpopototanga

Mā te pumau o te pāmahana tae atu ki te 1600°C me te ātete pai ki ngā hau tauhohe me ngā taiao plasma, ka whakarite te pereti SiC i te mahi pumau i roto i ngā tukanga whakairo pāmahana teitei, te whakatakotoranga, me te tohatoha. Ko tōna hanganga moroiti matotoru, kore-porous ka whakaiti i te whakaputanga matūriki, he mea tino pai mō ngā tono tino-ma i roto i ngā tautuhinga korehau, rūma ma rānei.

Te tono pereti uku SiC

1. Te Hanganga Ārahi-Hau

E whakamahia whānuitia ana ngā pereti uku SiC hei kawe i ngā papa, hei ārai, hei pereti turanga hoki i roto i ngā taputapu hanga haurua-ira pērā i te CVD (Te Whakatakotoranga Kohu Matū), te PVD (Te Whakatakotoranga Kohu Tinana), me ngā pūnaha whakairo. Nā te pai o te kawe wera me te iti o te horapa wera ka taea e rātou te pupuri i te tohatoha pāmahana ōrite, he mea nui mō te tukatuka papa tino tika. Mā te ātete o te SiC ki ngā hau waikura me ngā plasma ka mau tonu te kaha i roto i ngā taiao uaua, ka āwhina i te whakaiti i te poke o ngā matūriki me te tiaki i ngā taputapu.

2. Ahumahi LED – Te Whakairo ICP

I roto i te rāngai hangahanga LED, ko ngā pereti SiC he wāhanga matua i roto i ngā pūnaha whakairo ICP (Inductively Coupled Plasma). Hei pupuri i ngā papa, ka whakaratohia he tūāpapa pumau, pakari hoki ki te wera hei tautoko i ngā papa hapaira, GaN rānei i te wā e tukatukahia ana te plasma. Ko tō rātou ātete plasma pai rawa atu, te papatahi o te mata, me te pumau o ngā āhuatanga ka āwhina i te whakarite i te tika me te ōrite o te whakairo, ka hua ake te hua me te mahi a te taputapu i roto i ngā maramara LED.

3. Ngā Pūngao Whakaahua (PV) me te Pūngao Rā

Ka whakamahia hoki ngā pereti uku SiC i roto i te hanga pūtau rā, inā koa i ngā wā e whakamahana ana i te pāmahana teitei me te whakamahana. Ko tō rātou kore e nekeneke i ngā pāmahana teitei me te kaha ki te ātete i te piko ka whakarite kia rite tonu te tukatuka o ngā papa silicon. Hei tāpiri, he mea nui te iti o te mōrearea poke hei pupuri i te whai huatanga o ngā pūtau photovoltaic.

Ngā Āhuatanga o te pereti uku SiC

1. Te Kaha me te Pakari Mīhini Tino Pai

He tino kaha te kaha ā-ringa o ngā pereti uku SiC, ā, ko te kaha piko noa iho e neke atu i te 400 MPa, ā, ko te pakeketanga o Vickers e eke ana ki te >2000 HV. Nā tēnei ka tino ātete rātou ki te kakahu ā-ringa, te pakū, me te whakarerekētanga, kia roa ai te ora ahakoa i raro i te kawenga nui, i te huringa wera auau rānei.

2. Te Aroturuki Wera Teitei

He tino pai te kawe wera o te SiC (120–200 W/m·K te tikanga), ā, ka taea e ia te tohatoha ōrite i te wera puta noa i tōna mata. He mea nui tēnei āhuatanga i roto i ngā tukanga pēnei i te whakairo wafer, te whakatakoto, te sintering rānei, ina pā tika te ōritetanga o te pāmahana ki te hua me te kounga o te hua.

3. Te Pūmautanga Wera Pai Rawa

He teitei te ira rewa (2700°C) me te iti o te tauwehenga whakawhanuitanga wera (4.0 × 10⁻⁶/K), ka mau tonu te tika o ngā āhuatanga me te hanganga o ngā pereti uku SiC i raro i ngā huringa whakamahana me te whakamatao tere. Nā tēnei ka pai mō ngā whakamahinga i roto i ngā oumu pāmahana teitei, ngā rūma korehau, me ngā taiao plasma.

Ngā Āhuatanga Hangarau
Rārangi	Wāhanga	Uara
Ingoa Rauemi		Tauhohenga Sitron Carbide	Carbide Silicon Sintered Kore Pēhanga	Karāpire Hiraka Whakakāhoretia
Te hanganga		RBSiC	SSiC	R-SiC
Te Kīanga Papatipu	karamu/cm3	3	3.15 ± 0.03	2.60-2.70
Kaha Whakapiko	MPa (kpsi)	338(49)	380(55)	80-90 (20°C) 90-100 (1400°C)
Kaha Pehi	MPa (kpsi)	1120(158)	3970(560)	> 600
Te pakeketanga	Kōpu	2700	2800	/
Te Pakaru i te Manawanui	MPa m1/2	4.5	4	/
Te Arahi Wera	W/mk	95	120	23
Tauwehenga o te Whanuitanga Wera	10^-6.1/°C	5	4	4.7
Wera Motuhake	Joule/karamu 0k	0.8	0.67	/
Te pāmahana mōrahi i te hau	℃	1200	1500	1600
Tauwehenga Ātete	GPA	360	410	240

Pātai me ngā Whakautu mō te pereti uku SiC

Q: He aha ngā āhuatanga o te pereti silicon carbide?

A： E mōhiotia ana ngā pereti silicon carbide (SiC) mō tō rātou kaha teitei, te pakeke, me te pumau o te wera. He pai te kawe wera me te iti o te horapa wera, e whakarite ana i te mahi pono i raro i ngā pāmahana tino kino. He koretake hoki te matū o te SiC, ā, he ātete ki ngā waikawa, ki ngā kawakore, me ngā taiao plasma, he mea tino pai mō te tukatuka semiconductor me te LED. Ko tōna mata matotoru, maeneene ka whakaiti i te whakaputanga matūriki, ka pupuri i te hototahi ki te rūma ma. He whānuitia te whakamahinga o ngā pereti SiC hei kaikawe wafer, hei tautoko, hei tautoko i ngā taiao pāmahana teitei me te waikura puta noa i ngā ahumahi semiconductor, photovoltaic, me te rererangi.