Ringa Marau Ukume SiC / Kaiwhakaputa Mutunga – Te Whakahaere Tika Matatau mō te Hanganga Ārahi-Haupapa
Kauwhata Taipitopito
Tirohanga Whānui o te Hua
Ko te Ringa Marau Uku SiC, e mōhiotia whānuitia ana ko te Kaiwhakaputa Pito Uku, he wāhanga whakahaere tino tika te mahi, i hangaia mō te kawe i ngā wafer, te whakatikatika, me te whakanoho i roto i ngā ahumahi hangarau teitei, inā koa i roto i te hanga semiconductor me te photovoltaic. He mea hanga mā te whakamahi i ngā uku silicon carbide tino parakore, ka whakakotahi tēnei wāhanga i te kaha miihini tino pai, te whakawhānui wera tino iti, me te ātete pai ki te ru wera me te waikura.
He rerekē ngā pūwero mutunga tuku iho i hangaia mai i te konumohe, te maitai kore waikura, tae noa ki te quartz, ka tukuna e ngā pūwero mutunga uku SiC he mahi tino pai i roto i ngā rūma korehau, ngā rūma ma, me ngā taiao tukatuka uaua, ka waiho hei wāhanga nui o ngā karetao whakahaere wafer o te whakatupuranga e whai ake nei. I te pikinga ake o te hiahia mō te whakaputa kore-paru me ngā manawanui pakari ake i roto i te hanga maramara, kei te tere haere te whakamahinga o ngā pūwero mutunga uku hei paerewa ahumahi.
Te Kaupapa Hanga
Te hangahanga oNgā Pūwhakaputa Mutunga Ukume SiCkei roto i tēnei he raupapa o ngā tukanga tino tika, tino parakore e whakarite ana i te mahi me te roa o te wā. E rua ngā tukanga matua e whakamahia ana:
Te Warowaihā Hiraka Hononga-Tauhohenga (RB-SiC)
I roto i tēnei tukanga, ka whakauruhia he mea hanga mai i te paura silicon carbide me te mea here ki roto i te silicon rewa i ngā pāmahana teitei (~1500°C), ka tauhohe ki te waro toenga hei hanga i tētahi hiato SiC-Si matotoru, pakari. He pai rawa te whakahaere i ngā āhuatanga o tēnei tikanga, ā, he iti hoki te utu mō te whakaputa nui.
Carbide Silikoni Kore-Pēhanga (SSiC)
Ka hangaia te SSiC mā te whakakorikori i te paura SiC tino pai, tino parakore i ngā pāmahana tino teitei (>2000°C) me te kore e whakamahi i ngā tāpiringa, i tētahi wāhanga here rānei. Ka hua ake he hua tata ki te 100% te matotoru me ngā āhuatanga miihini me te wera teitei rawa atu i roto i ngā rauemi SiC. He mea tino pai mō ngā tono whakahaere wafer tino-tino.
Tukatuka-muri
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Mīhini CNC Tika: Ka tutuki te papatahi me te whakarara teitei.
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Whakaoti Mata: Ka whakaitihia te taratara o te mata e te oro taimana ki te <0.02 µm.
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TirotiroHei manatoko i ia wahi, ka whakamahia te ine whakawhiti whatu, te CMM, me te whakamātautau kore-whakangaro.
Mā ēnei mahi ka whakamanahia teKaiwhakaputa mutunga SiCka tukuna he tika te whakatakotoranga o te anga whakarewa, he tino papatahi, ā, he iti noa te whakaputanga matūriki.
Ngā Āhuatanga Matua me ngā Painga
| Āhuatanga | Whakaahuatanga |
|---|---|
| Tino-Teitei te Mārō | Te pakeke o Vickers > 2500 HV, ātete ki te pakaru me te pakaru. |
| Whānuitanga Wera Iti | CTE ~4.5×10⁻⁶/K, e āhei ai te pumau o ngā āhuatanga i roto i te huringa wera. |
| Te Āhuakore o te Matū | Ātete ki te HF, te HCl, ngā hau plasma, me ētahi atu mea waikura. |
| Ātete Ru Wera Pai rawa atu | He pai mō te whakamahana/whakamatao tere i roto i ngā pūnaha korehau me te oumu. |
| Teitei o te Pakari me te Kaha | Tautoko ana i ngā ringa marau roa e taea te whakapiko, me te kore e piko. |
| Te Whakaputa Hau Iti | He pai mō ngā taiao korehau tino tiketike (UHV). |
| Kua rite mō te Rūma Ma o te Akomanga 1 ISO | Mā te mahi kore-matūriki ka pumau te angaanga. |
Ngā tono
He whānuitia te whakamahinga o te SiC Ceramic Fork Arm / End Effector i roto i ngā ahumahi e hiahia ana ki te tino tika, te ma, me te ātete ki ngā matū. Ko ngā āhuatanga matua o te whakamahinga ko:
Hanganga Ārahi-Hau
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Te uta/te tango i te anga whakarewa i roto i ngā pūnaha whakatakoto (CVD, PVD), te whakairo (RIE, DRIE), me ngā pūnaha horoi.
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Te kawe i ngā anga karetao i waenga i ngā FOUP, ngā rīpene, me ngā taputapu tukatuka.
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Te whakahaere i te pāmahana tiketike i te wā e tukatukahia ana, e whakamahanatia ana rānei.
Te Hanga Pūtau Whakaahua-Voltaic
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Te kawe ātaahua o ngā papa silicon pakarukaru, ngā papa rā rānei i roto i ngā raina aunoa.
Ahumahi Whakaaturanga Papatahi (FPD)
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Te nuku i ngā panera karāhe nunui, i ngā papa rānei i roto i ngā taiao hanga OLED/LCD.
Pūnaha Whakahaere Matū / MEMS
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Whakamahia ai i roto i ngā raina hanga GaN, SiC, me MEMS ina he mea nui te whakahaere poke me te tika o te tūnga.
He mea tino nui tōna tūranga hei kaiwhakaputa whakamutunga kia kore ai he hapa, kia pumau hoki te whakahaere i ngā mahi tairongo.
Ngā Āheinga Whakaritenga
Ka tukuna e mātou he whakaritenga whānui hei whakatutuki i ngā whakaritenga rerekē mō ngā taputapu me ngā tukanga:
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Hoahoa Marau: Ngā tahora e rua ngā mātā, maha ngā matihao, ngā tahora taumata-wehewehe rānei.
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Hototahi Rahi o te WaferMai i ngā angaanga 2” ki te 12”.
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Ngā Atanga WhakamauHototahi ki ngā ringa karetao OEM.
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Te Matotoru me ngā Ātete Mata: Kei te wātea te papatahi taumata-maikorona me te whakaawhiwhi taha.
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Ngā Āhuatanga Ārai-Paheke: He kakano mata whiriwhiri, he paninga rānei hei pupuri i te pūmau o te papa.
Iate pānga pito ukui hangaia tahitia me ngā kiritaki kia tino tika ai te whakaurunga me te iti o ngā huringa taputapu.
Ngā Pātai Auau (FAQ)
P1: He aha te pai ake o te SiC i te quartz mō te whakamahinga o te end effector?
A1:Ahakoa e whakamahia whānuitia ana te quartz mō tōna parakore, kāore i te pakari ā-mīhini, ā, ka pakaru ngāwari i raro i te kawenga, i te ru rānei i te pāmahana. He kaha ake te SiC, he ātete ki te kakahu, me te pumau o te wera, ka whakaiti nui i te mōrearea o te wā whakatā me te pakaru o te wafer.
Q2: E hototahi ana tēnei ringa marau uku ki ngā kaiwhakahaere wafer karetao katoa?
A2:Ae, he hototahi ā mātou pūwhakairo pito uku ki te nuinga o ngā pūnaha whakahaere angiangi nui, ā, ka taea te whakarerekē ki ō tauira karetao motuhake me ngā tuhi hangarau tino tika.
Q3: Ka taea e ia te whakahaere i ngā anga 300 mm me te kore e piko?
A3:Āe. Mā te pakari o te SiC ka taea e ngā ringa marau angiangi, roa hoki te pupuri i ngā anga 300 mm me te kore e piko, e hēke rānei i te wā e neke ana.
Q4: He aha te roanga mahi o tētahi pūwhakauru pito uku SiC?
A4:Mēnā ka whakamahia tika, ka roa ake te ora o te pūwhakamahi pito SiC mō te 5 ki te 10 ngā wā i ngā tauira kiripaka, konumohe rānei tuku iho, nā te mea he tino ātete ki te ahotea wera me te ahotea miihini.
Q5: Kei te tuku ratonga whakakapinga, ratonga tauira tere rānei koe?
A5:Ae, e tautoko ana mātou i te hanga tauira tere, ā, e tuku ana hoki i ngā ratonga whakakapinga i runga i ngā tuhi CAD, i ngā wāhanga kua hurihia rānei mai i ngā taputapu o nāianei.
Mō Mātou
He tohunga a XKH ki te whakawhanake hangarau teitei, te whakaputa, me te hoko i ngā karāhe whatu motuhake me ngā rauemi tioata hou. E mahi ana ā mātou hua ki ngā hiko whatu, ki ngā hiko kaihoko, me te ope taua. E tuku ana mātou i ngā wāhanga whatu Sapphire, ngā taupoki arotahi waea pūkoro, ngā uku, LT, Silicon Carbide SIC, Quartz, me ngā anga karaihe haurua-ira. Me te tohungatanga pūkenga me ngā taputapu hou, e tino matatau ana mātou ki te tukatuka hua kore-paerewa, me te whai kia noho hei hinonga hangarau teitei rauemi optoelectronic matua.
