Ringa ringa pānga pito uku SiC mō te kawe wafer

Whakaahuatanga Poto:

Ko ngā Wafers LiNbO₃ te paerewa koura mō te photonics whakauru me te oro tika, e tuku ana i te mahi tino pai i roto i ngā pūnaha optoelectronic hou. Hei kaihanga matua, kua tino pai ake mātou i te toi o te whakaputa i ēnei papa hangarau mā roto i ngā tikanga taurite kawe kohu matatau, kia tutuki ai te tino pai o te tioata me ngā kiato hapa i raro i te 50/cm².

Ko ngā āheinga whakaputa XKH e horapa ana i te diameter mai i te 75mm ki te 150mm, me te whakahaere tika i te whakatakotoranga (X/Y/Z-tapahi ±0.3°) me ngā kōwhiringa tāpiri motuhake tae atu ki ngā huānga whenua-onge. Ko te huinga ahurei o ngā āhuatanga o ngā Wafers LiNbO₃ – tae atu ki tō rātou tauwehenga r₃₃ whakamiharo (32±2 pm/V) me te whānui o te māramatanga mai i te tata-UV ki te waenganui-IR – e mea nui ana mō ngā ara iahiko photonic o te whakatupuranga e whai ake nei me ngā taputapu oro auau-teitei.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Whakarāpopototanga o te pānga pito uku SiC

He wāhanga nui te pito-whakaputa uku SiC (Silicon Carbide) i roto i ngā pūnaha whakahaere wafer tino tika e whakamahia ana i roto i te hanga semiconductor me ngā taiao hanga moroiti matatau. I hangaia kia tutuki ai ngā whakaritenga nui o ngā taiao tino ma, pāmahana teitei, me te tino pumau, ka whakarite tēnei pito-whakaputa motuhake i te kawe pono me te kore poke o ngā wafer i roto i ngā mahi whakaputa matua pēnei i te lithography, te whakairo, me te whakatakotoranga.

Mā te whakamahi i ngā āhuatanga rauemi papai o te silicon carbide—pērā i te kawe wera nui, te pakeke rawa, te koretake o te matū, me te iti o te horapa wera—ka tukuna e te pito-whakaputa uku SiC te pakari ā-mīhini me te pumau āhuahanga ahakoa i raro i te huringa wera tere, i roto rānei i ngā rūma tukanga waikura. Nā te iti o te whakaputa matūriki me ōna āhuatanga ātete plasma e tino pai ai mō ngā tono tukatuka rūma ma me te korehau, he mea nui te pupuri i te kounga o te mata wafer me te whakaiti i te poke o te matūriki.

Te tono mō te kaiwhakaputa mutunga uku SiC

1. Te Whakahaere i te Wafer Semiconductor

E whakamahia whānuitia ana ngā pito whakarewa uku SiC i roto i te umanga haurua-ira mō te whakahaere i ngā papa silicon i te wā e whakaputa aunoa ana. Ko ēnei pito whakarewa he mea whakanoho ki runga i ngā ringa karetao, ki ngā pūnaha whakawhiti korehau rānei, ā, kua hangaia hei whakauru i ngā papa o ngā rahi rerekē pērā i te 200mm me te 300mm. He mea nui ēnei i roto i ngā tukanga tae atu ki te Whakatakotoranga Kohu Matū (CVD), te Whakatakotoranga Kohu Tinana (PVD), te whakairo, me te horapa—kei hea ngā pāmahana teitei, ngā āhuatanga korehau, me ngā hau waikura. Ko te ātete wera me te pumau matū tino pai o te SiC he mea pai hei rauemi hei tu atu i aua taiao uaua me te kore e pirau.

2. Hototahi ki te Rūma Ma me te Pūrere Korehau

I roto i ngā tautuhinga rūma ma me te korehau, me whakaiti te poke o ngā matūriki, he nui ngā painga o ngā uku SiC. Ka ātete te mata matotoru, maeneene o te rauemi ki te whakaputa matūriki, ka āwhina ki te pupuri i te kounga o te wafer i te wā e kawe ana. Nā tēnei ka tino pai ngā pānga pito SiC mō ngā tukanga nui pēnei i te Extreme Ultraviolet Lithography (EUV) me te Atomic Layer Deposition (ALD), he mea nui te ma. Hei tāpiri, ko te iti o te hau e puta mai ana i waho o te SiC me te ātete plasma teitei ka whakarite i te mahi pono i roto i ngā rūma korehau, ka roa ake te roa o te ora o ngā taputapu me te whakaiti i te auau tiaki.

3. Ngā Pūnaha Tūnga Tika-Teitei

He mea nui te tika me te pumau i roto i ngā pūnaha whakahaere wafer matatau, inā koa i roto i te ine ine, te tirotiro, me ngā taputapu whakarite. He tino iti te tauwehenga o te whakawhānui wera o ngā uku SiC, ā, he tino pakari, e āhei ai te kaiwhakaputa pito ki te pupuri i tōna tika hanganga ahakoa i raro i te huringa wera, i te kawenga miihini rānei. Mā tēnei ka whakarite kia noho tika te whakarite o ngā wafer i te wā e kawe ana, ka whakaiti i te mōrearea o ngā rakuraku moroiti, te hē o te whakarite, ngā hapa ine rānei—he mea nui ake ēnei i ngā pona tukanga sub-5nm.

Ngā Āhuatanga o te Kaiwhakaputa Mutunga Uku SiC

1. Te Kaha me te Pakari o te Mīhini

He tino kaha ā-pūkaha ngā uku SiC, ā, he maha ngā wā ka neke atu i te 400 MPa te kaha piko, ā, he nui ake i te 2000 HV te pakeke o Vickers. Nā tēnei ka tino ātete rātou ki te ahotea ā-pūkaha, te pānga, me te kakahu, ahakoa te whakamahinga roa. Mā te pakari teitei o te SiC ka whakaitihia te piko i te wā e whakawhiti ana i te wafer tere-teitei, kia tika ai te tūnga me te tukurua.

2. Te Pūmautanga Wera Pai rawa atu

Ko tētahi o ngā āhuatanga tino nui o ngā uku SiC ko tōna kaha ki te tu atu i ngā pāmahana tino tiketike—tae atu ki te 1600°C i roto i ngā āhuarangi kore mahi—me te kore e ngaro te kaha ā-mīhini. Nā tōna tauwehenga iti o te whakawhānui wera (~4.0 x 10⁻⁶ /K) ka whakarite i te pumau o ngā āhuatanga i raro i te huringa wera, ā, he mea tino pai mō ngā tono pēnei i te CVD, PVD, me te whakamahana pāmahana teitei.

Pātai me ngā Whakautu mō te pūwhakaputa pito uku SiC

Q: He aha te rauemi e whakamahia ana i roto i te kaiwhakaputa pito wafer?

A：Ko ngā pito whakarewa he mea hanga noa mai i ngā rauemi e kaha ana, e pumau ana i te wera, ā, he iti te whakaputanga matūriki. I roto i ēnei, ko te uku Silicon Carbide (SiC) tētahi o ngā rauemi tino matatau me te tino pai. He tino mārō ngā uku SiC, he pumau i te wera, he koretake te matū, ā, he ātete ki te kakahu, he mea pai mō te whakahaere i ngā whakarewa silicon ngawari i roto i ngā taiao rūma ma me te korehau. Ki te whakatauritea ki te quartz, ki ngā konganuku pania rānei, he pai ake te pumau o te āhua o te SiC i raro i ngā pāmahana teitei, ā, kāore e whakaheke i ngā matūriki, e āwhina ana ki te ārai i te poke.