Ngā tokotoko hāparapa ngongo hapaira he āhua motuhake, he KY me te EFG pēhanga teitei

Whakaahuatanga Poto:

He tino ātete ā-mīhini, ā-matū, ā-wera hoki ngā ngongo karāhe hapaira me ngā tokotoko karāhe hapaira, ā, he nui hoki te tuku whatu mai i te 200nm. Ka taea e mātou te tuku ngongo karāhe hapaira me ngā tokotoko mō ngā momo mahi maha.


Ngā Āhuatanga

Whakaahuatanga

He whānuitia ngā mahi e whakamahia ana ngā tokotoko hapaira. Ka taea te hanga i tētahi tokotoko hapaira me ngā mata katoa kua orohia mō ngā mahi whatu me te mau, me ngā mata katoa kua orohia kia pai te huri (kāore i orohia) hei ārai.

Hangarau

I te wā e tangohia ana ngā ngongo hapaira mai i te rewa me te āwhina o te purapura, ka pupurihia te pikinga pāmahana roa i te rohe i waenganui i te mua kua totoka me te rohe e kumea ana, kei waenganui i te 1850 me te 1900 nekehanga C, kaua e neke atu i te 30 nekehanga C/cm. Ka whakamahanahia te ngongo kua whakatipuria i te pāmahana i waenganui i te 1950 me te 2000 nekehanga C mā te whakanui ake i te pāmahana i te tere o te 30 ki te 40 nekehanga C/min, me te pupuri i te ngongo i taua pāmahana mō te wā i waenganui i te 3 me te 4 hāora. Whai muri i tēnā ka whakamataohia te ngongo ki te pāmahana rūma i te tere o te 30-40 nekehanga C/min.

Ngā tono tukatuka haurua-ārahi:

(HPD CVD, PECVD, Whakairo Maroke, Whakairo Mākū)

Ngongo tāpiri plasma

Ngā pūwero hau tukatuka

Pūoko pito

Ngā Ngongo Korona Excimer

Ngā ngongo pupuri toto

Ko te mīhini hiri ngongo plasma he taputapu e whakamahia ana hei takai i ngā wāhanga hiko. Ko tōna kaupapa matua he whakamahi i te pāmahana teitei me te pēhanga teitei o te plasma hei whakarewa i te rauemi takai me te takai ki runga i te wāhanga. Ko ngā wāhanga matua o te mīhini hiri ngongo plasma ko te whakaputa plasma, te rūma hiri ngongo, te pūnaha korehau, te pūnaha whakahaere, me ētahi atu.

Te hipoki tiaki thermocouple (Thermowell): Ko te thermocouple he huānga ine pāmahana e whakamahia whānuitia ana i roto i te taputapu ine pāmahana, ka ine tika i te pāmahana, ka huri i te tohu pāmahana hei tohu kaha hiko thermoelectric, mā te taputapu hiko (taputapu tuarua) ki te pāmahana o te reo ine.

Te maimoatanga/te horoi wai

Ngā Āhuatanga o te Ngongo Hāpaira (Ariā)

Tātai Pūhui Al2O3
Taumaha ngota 101.96
Āhua Ngā ngongo mārama
Te Pūwāhi Rewa 2050 °C (3720 °F)
Te Pūtake Kohua 2,977°C (5,391°F)
Kiato 4.0 karamu/cm3
Te āhua o te tinana Tapatoru (hex), R3c
Te wairewatanga i roto i te H2O 98 x 10-6 karamu/100 karamu
Taupū Whakaata 1.8
Ātete Hiko 17 10x Ω-m
Te Ōwehenga a Poisson 0.28
Wera Motuhake 760 J Kg-1 K-1 (293K)
Kaha Kume 1390 MPa (Mutunga)
Te Arahi Wera 30 W/mK
Whakawhanuitanga Wera 5.3 µm/mK
Te Tauwehenga o te Rangatahi 450 GPa
Papatipu Tika 101.948 karamu/mol
Papatipu Monoisotopic 101.94782 Rā

Kauwhata Taipitopito

Ngā tokotoko hāparapa ngongo hapaira āhua motuhake KY me EFG pēhanga teitei (1)
Ngā tokotoko hāparapa ngongo hapaira āhua motuhake KY me EFG pēhanga teitei (2)
Ngā tokotoko hāparapa ngongo hapaira āhua motuhake KY me EFG pēhanga teitei (3)
Ngā tokotoko hāpara, he āhua motuhake, he pēhanga teitei KY me te EFG (4)

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