Te tikanga o te oumu tipu karaihe hapaira KY Kyropoulos mō te hanga anga hapaira me te matapihi whatu
Kaupapa Mahi
Ko te kaupapa matua o te tikanga KY ko te whakarewa i ngā rauemi mata Al₂O₃ parakore-teitei i roto i te ipu tungsten/molybdenum i te 2050°C. Ka tukuna he tioata purapura ki roto i te rewa, ā, muri iho ka tangohia te matū (0.5–10 mm/h) me te hurihanga (0.5–20 rpm) kia tutuki ai te tipu ahunga o ngā tioata takitahi α-Al₂O₃. Ko ngā āhuatanga matua ko:
• Ngā tioata rahi-rahi (mōrahi Φ400 mm × 500 mm)
• Hapira kounga whatu ahotea-iti (whakarerekētanga o te mata ngaru <λ/8 @ 633 nm)
• Ngā tioata kua tāpirihia (hei tauira, te tāpiritanga Ti³⁰ mō te hapaira whetu)
Ngā Wāhanga Pūnaha Matua
1. Pūnaha Rewa Pāmahana-Teitei
• Para whakakoi tungsten-molybdenum (mahana mōrahi 2300°C)
• He whakamahana karāhe maha-rohe (whakahaere pāmahana ±0.5°C)
2. Pūnaha Tipu Karaihe
• Tikanga kukume servo-driven (±0.01 mm te tika)
• Hiri hurihuri wai aukume (whakahaere tere kore-taahiraa 0–30 rpm)
3. Whakahaere Papa Wera
• Whakahaere pāmahana motuhake e 5-rohe (1800–2200°C)
• Parenga wera ka taea te whakarite (±2°C/cm te pikinga)
• Pūnaha Korehau me te Āhuarangi
• 10⁻⁴ Pa te horoi tino teitei
• Whakahaere hau whakaranu Ar/N₂/H₂
4. Aroturuki Maamaa
• Te aroturuki i te diameter tioata CCD wā-tūturu
• Te kimi taumata rewa maha-ātea
Te Whakataurite i te Tikanga KY me te Tikanga CZ
| Tawhā | Tikanga KY | Tikanga CZ |
| Rahi Tioata Mōrahi | Φ400 mm | Φ200 mm |
| Te Tere Tipu | 5–15 mm/h | 20–50 mm/h |
| Te Kīanga o te Koha | <100/cm² | 500–1000/cm² |
| Te Whakamahinga Pūngao | 80–120 kWh/kg | 50–80 kWh/kg |
| Ngā tono noa | Matapihi whatu/ngā angaanga nui | Ngā papa/whakapaipai LED |
Ngā Taupānga Matua
1. Ngā Matapihi Optoelectronic
• Ngā kōpuku IR hōia (te whakawhiti >85%@3–5 μm)
• Ngā matapihi taiaho UV (e tu atu ana ki te 200 W/cm² te mātotoru o te mana)
2. Ngā Papa Whakatakotoranga Ā-Haumaru
• Ngā papa epitaxial GaN (2–8 inihi, TTV <10 μm)
• Ngā papa SOI (te taratara o te mata <0.2 nm)
3. Ngā Hikohiko Kaihoko
• Karāhe taupoki kāmera waea atamai (mārō Mohs 9)
• Ngā whakaaturanga mataaratanga atamai (10× te ātete ki te rakuraku)
4. Ngā Rauemi Motuhake
• Ngā whatu IR tino parakore (taunga mimiti <10⁻³ cm⁻¹)
• Ngā matapihi tirotiro tauhohenga karihi (ātete ki te irahiko: 10¹⁶ n/cm²)
Ngā Painga o ngā Taputapu Whakatipu Tioata Hapaira o Kyropoulos (KY)
He painga hangarau tino pai ngā taputapu whakatipu karaihe hapaira e ahu mai ana i te tikanga Kyropoulos (KY), e whakanoho ana i a ia hei otinga matatau mō te whakaputanga tauine ahumahi. Ko ngā painga matua ko:
1. Te Āheinga Nui: Ka taea te whakatipu i ngā tioata hapaira tae atu ki te 12 inihi (300 mm) te whānui, ka taea ai te whakaputa hua nui o ngā wafer me ngā wāhanga whatu mō ngā tono matatau pēnei i te epitaxy GaN me ngā matapihi taumata hōia.
2. Te Matū Hapa Tino Iti: Ka tutuki i ngā mātū nekehanga <100/cm² mā te hoahoa papa wera kua arotauhia me te whakahaere tika i te pikinga pāmahana, kia pai ai te kounga o te tioata mō ngā taputapu hiko-whakaata.
3. Mahi Tirohanga Kounga-Teitei: Ka tukuna te whakawhiti >85% puta noa i ngā hihi infrared e kitea ana (400–5500 nm), he mea nui mō ngā matapihi taiaho UV me ngā hihi infrared.
4. Aunoatanga Matatau: Kei roto ngā tikanga kukume servo-driven (±0.01 mm te tika) me ngā hiri hurihuri wai aukume (0–30 rpm te mana whakahaere kore-taahiraa), e whakaiti ana i te wawaotanga a te tangata me te whakarei ake i te ōritetanga.
5. Ngā Kōwhiringa Tāpiri Ngāwari: Ka tautoko i te whakaritenga me ngā tāpiri pēnei i te Cr³⁰ (mō te rupi) me te Ti³⁰ (mō te hapaira whetu), e aro ana ki ngā mākete motuhake i roto i ngā hikohiko me ngā whakapaipai.
6. Whai Hua Pūngao: Mā te whakamahana wera kua whakapaitia (te ipu tungsten-molybdenum) ka whakaitihia te whakapaunga pūngao ki te 80–120 kWh/kg, he whakataetae ki ngā tikanga whakatipu rerekē.
7. Te Whakaputa Tauine: Ka tutuki he putanga marama o te 5,000+ ngā wafers me ngā wā huringa tere (8–10 ngā rā mō ngā tioata 30–40 kg), kua whakamanahia e te neke atu i te 200 ngā whakaurunga o te ao.
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8. Te Pakari o te Pae Hōia: Kei roto ko ngā hoahoa ātete-ira me ngā rauemi ātete-wera (e tu ana i te 10¹⁶ n/cm²), he mea nui mō ngā mahi rererangi me ngā mahi karihi.
Mā ēnei auahatanga ka whakapūmau i te tikanga KY hei paerewa koura mō te whakaputa tioata hapaira mahi-teitei, ka akiaki i ngā whanaketanga i roto i ngā whakawhitiwhiti kōrero 5G, te rorohiko irahiko, me ngā hangarau ārai.
Ngā Ratonga XKH
Ka whakaratohia e XKH ngā otinga whānui mō ngā pūnaha tipu karaihe hapaira, tae atu ki te tāutanga, te arotautanga tukanga, me te whakangungu kaimahi kia pai ai te whakaurunga mahi. Ka tukuna e mātou ngā tohutao tipu kua whakamanahia i mua (50+) kua whakaritea mō ngā hiahia ahumahi kanorau, ka whakaitihia te wā R&D mō ngā kiritaki. Mō ngā tono motuhake, ka taea e ngā ratonga whanaketanga ritenga te whakarite i ngā kōhao (Φ200–400 mm) me ngā pūnaha tāpiri matatau (Cr/Ti/Ni), e tautoko ana i ngā wāhanga whatu mahi-teitei me ngā rauemi ātete-ira.
Ko ngā ratonga tāpiri uara ko te tukatuka i muri i te tipu pēnei i te tapatapahi, te huri, me te whakakanapa, me te tautoko i te whānuitanga o ngā hua hapaira pēnei i ngā wafers, ngā ngongo, me ngā kohatu utu nui. Ka tukuna e ēnei tuku ngā momo mahi mai i ngā hikohiko kaihoko ki te rererangi. Ka whakamanahia e tā mātou tautoko hangarau he whakamana 24-marama me te tātaritanga mamao wā-tūturu, kia iti ai te wā mutu me te pumau o te mahi whakaputa.
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