He maha ngā painga o te whakatipu i tētahi atu paparanga o ngā ngota silicon ki runga i tētahi papa angiangi silicon:
I roto i ngā tukanga silicon CMOS, ko te tipu epitaxial (EPI) i runga i te papa wafer he taahiraa tukanga nui.
1、Te whakapai ake i te kounga o te karaihe
Ngā hapa me ngā poke tuatahi o te papa: I te wā o te tukanga hanga, tera pea he hapa me ētahi poke o te papa wafer. Mā te tipu o te paparanga epitaxial ka taea te whakaputa i tētahi paparanga silicon monocrystalline kounga teitei me te iti o ngā hapa me ngā poke i runga i te papa, he mea nui tēnei mō te hanganga taputapu i muri mai.
Hanganga tioata ōrite: Mā te tipu epitaxial ka whakarite kia ōrite ake te hanganga tioata, ka whakaitihia te pānga o ngā rohe witi me ngā hapa i roto i te rauemi papa, ā, ka whakapai ake i te kounga tioata whānui o te papa.
2, whakapai ake i te mahi hiko.
Te arotau i ngā āhuatanga o te taputapu: Mā te whakatipu i tētahi paparanga epitaxial ki runga i te papa, ka taea te whakahaere tika i te kukū tāpiringa me te momo silicon, me te arotau i te mahi hiko o te taputapu. Hei tauira, ka taea te whakarite pai i te tāpiringa o te paparanga epitaxial hei whakahaere i te ngaohiko paepae o ngā MOSFET me ētahi atu tawhā hiko.
Te whakaiti i te ia turuturu: He iti ake te mātotoru hapa o te paparanga epitaxial kounga teitei, ā, ka āwhina tēnei ki te whakaiti i te ia turuturu i roto i ngā taputapu, ā, ka whakapai ake i te mahi me te pono o te taputapu.
3, whakapai ake i te mahi hiko.
Te Whakaiti i te Rahi Āhuatanga: I roto i ngā pūnga tukanga iti ake (pēnei i te 7nm, 5nm), ka haere tonu te whakaiti i te rahi āhuatanga o ngā taputapu, me te hiahia kia pai ake te whakamahi i ngā rauemi kounga teitei. Ka taea e te hangarau tipu epitaxial te whakatutuki i ēnei tono, me te tautoko i te hanga i ngā ara iahiko whakauru mahi-teitei me te kiato-teitei.
Te Whakapai Ake i te Ngaohiko Pakaru: Ka taea te hoahoa i ngā paparanga epitaxial me ngā ngaohiko pakaru teitei ake, he mea nui tēnei mō te hanga i ngā taputapu mana-tiketike me ngā taputapu ngaohiko-tiketike. Hei tauira, i roto i ngā taputapu hiko, ka taea e ngā paparanga epitaxial te whakapai ake i te ngaohiko pakaru o te taputapu, ka whakanui ake i te awhe mahi haumaru.
4、Te Hototahi Tukanga me ngā Hanganga Papa Maha
Ngā Hanganga Papamaha: Mā te hangarau tipu epitaxial ka taea te tipu o ngā hanganga papamaha ki runga i ngā papa, me ngā paparanga rerekē he rerekē ngā kukū me ngā momo tāpiringa. He tino whai hua tēnei mō te hanga i ngā taputapu CMOS matatini me te whakahohe i te whakaurunga toru-ahu.
Hototahi: He tino hototahi te tukanga tipu epitaxial ki ngā tukanga hangahanga CMOS o nāianei, e māmā ai te whakauru atu ki ngā rerengamahi hangahanga o nāianei me te kore e hiahiatia he whakarerekētanga nui ki ngā raina tukanga.
Whakarāpopototanga: Ko te whakamahinga o te tipu epitaxial i roto i ngā tukanga silicon CMOS e whai ana ki te whakarei ake i te kounga o te tioata wafer, te arotau i te mahi hiko o te taputapu, te tautoko i ngā pona tukanga matatau, me te whakatutuki i ngā hiahia o te hanga ara iahiko whakauru mahi-teitei me te kiato-teitei. Mā te hangarau tipu epitaxial ka taea te whakahaere tika i te tāpiringa rauemi me te hanganga, te whakapai ake i te mahi whānui me te pono o ngā taputapu.
Wā tuku: Oketopa-16-2024