Hangarau Horoi Wafer i roto i te Hanganga Ārahi-Haupapa

Hangarau Horoi Wafer i roto i te Hanganga Ārahi-Haupapa

He taahiraa nui te horoinga o te angaanga puta noa i te tukanga hangahanga haurua-ira, ā, ko tētahi o ngā mea matua e pā tika ana ki te mahi a te taputapu me te hua o te whakaputanga. I te wā e hanga ana i te maramara, ahakoa te iti o te poke ka taea te whakaiti i ngā āhuatanga o te taputapu, te pakaru rānei. Nō reira, ka whakamahia ngā tukanga horoi i mua atu, i muri mai hoki i te nuinga o ngā taahiraa hangahanga hei tango i ngā poke o te mata, hei whakarite hoki i te ma o te angaanga. Ko te horoinga hoki te mahi tino auau i roto i te hanga haurua-ira, e tata ana ki te30% o ngā mahi katoa.

I te whanaketanga tonu o te whakaurunga tauine-rahi (VLSI), kua neke whakamua ngā pona tukanga ki28 nm, 14 nm, me tua atu, e akiaki ana i te kiato nui ake o te taputapu, te whānui whaiti o ngā raina, me te rere o ngā tukanga uaua haere. He tino tairongo ake ngā pona matatau ki te poke, engari ko ngā rahi āhuatanga iti ake ka uaua ake te horoi. Nō reira, ka piki haere tonu te maha o ngā mahi horoi, ā, kua uaua ake, kua tino nui ake, kua wero ake hoki te horoi. Hei tauira, ko te maramara 90 nm te tikanga e hiahiatia ana mō te90 ngā mahi horoi, engari ko te maramara 20 nm e hiahia ana ki te tata ki215 ngā mahi horoiI te ahu whakamua o te hanga ki te 14 nm, 10 nm, me ngā pona iti ake, ka piki haere tonu te maha o ngā mahi horoi.

Ko te tikanga,Ko te horoinga o te wafer e pā ana ki ngā tukanga e whakamahi ana i ngā maimoatanga matū, ngā hau, ngā tikanga ā-tinana rānei hei tango i ngā poke mai i te mata o te wafer. Ka taea e ngā poke pēnei i ngā matūriki, ngā konganuku, ngā toenga rauropi, me ngā waikura taketake te pā kino ki te mahi a te taputapu, te pono, me te hua. Ko te horoi te "piriti" i waenga i ngā mahi hanga - hei tauira, i mua i te whakatakotoranga me te tuhi whakaahua, i muri rānei i te whakairo, te CMP (te oro matū), me te whakaurunga katote. I te nuinga o te wā, ka taea te wehewehe i te horoinga wafer kihoroi mākūmehoroi maroke.

Horoi Mākū

Ka whakamahia e te horoi mākū ngā whakarewa matū, te wai whakakore iona rānei (DIW) hei horoi i ngā papa. E rua ngā huarahi matua e whakamahia ana:

• Tikanga rumaki: ka rumakina ngā angaanga ki roto i ngā tāke kua whakakiia ki ngā whakarewa, ki te DIW rānei. Koinei te tikanga e whakamahia whānuitia ana, inā koa mō ngā pūnga hangarau kua pakeke.

• Tikanga rehu: ka rehuhia ngā whakarewa, ngā DIW rānei ki runga i ngā papa hurihuri hei tango i ngā poke. Ahakoa ka taea e te rumaki te tukatuka puranga i ngā papa maha, ka taea e te horoi rehu te whakahaere i te kotahi papa mō ia rūma engari ka pai ake te whakahaere, ka nui haere te kitea i roto i ngā pūnga matatau.

Horoi Maroke

E ai ki te ingoa, ka karohia e te horoi maroke ngā whakarewa, ngā DIW rānei, engari ka whakamahia ngā hau, te plasma rānei hei tango i ngā poke. I te pana ki ngā pūnga matatau, kei te piki haere te hiranga o te horoi maroke nā te meatino tikame te whai huatanga ki ngā mea rauropi, ngā hauota, me ngā waikura. Heoi, me whaihe nui ake te haumitanga ki ngā taputapu, he uaua ake te whakahaere, me te kaha ake o te whakahaere tukangaKo tētahi atu painga ko te whakaiti i te nui o te wai para e puta mai ana i ngā tikanga mākū mā te horoi maroke.

Ngā Tikanga Horoi Mākū Noa

1. Te Horoi DIW (Wai Whakakore Iona)

Ko te DIW te mea horoi e whakamahia whānuitia ana mō te horoi mākū. Kāore i rite ki te wai kāore i rongoatia, kāore he katote kawe hiko o te DIW, e ārai ana i te waikura, i ngā tauhohenga hikohiko, i te pirau rānei o te taputapu. E rua ngā huarahi e whakamahia ai te DIW:

1. Te horoi tika i te mata o te anga– I te nuinga o te wā ka mahia i roto i te aratau kotahi-wafer me ngā roera, ngā paraihe, ngā pūwero rehu rānei i te wā e hurihuri ana te wafer. Ko tētahi wero ko te kohikohinga utu hiko, ka puta pea he hapa. Hei whakaiti i tēnei, ka whakarewaina te CO₂ (me te NH₃ i ētahi wā) ki roto i te DIW hei whakapai ake i te kawe hiko me te kore e poke i te wafer.

2. Te horoi i muri i te horoinga matū– Ka tangohia e te DIW ngā toenga o ngā otinga horoi e waikura ana te papa whakarewa, e whakaiti ana rānei i te mahi a te taputapu mēnā ka waiho noa ki te mata.

2. Te Horoi HF (Waikawa Waikawa)

Ko te HF te matū tino whai hua mō te tangongā paparanga waikura taketake (SiO₂)i runga i ngā papa silicon, ā, ko te tuarua anake ki te DIW te hiranga. Ka whakarewahia hoki e ia ngā konganuku piri, ā, ka pehi i te waikura anō. Heoi, ka taea e te whakairo HF te whakararuraru i ngā mata papa, ā, ka whakaeke kino i ētahi konganuku. Hei whakatika i ēnei take, ko ngā tikanga pai ake ka whakaiti i te HF, ka tāpirihia he waikura, he matū horoi, he matū whakararuraru rānei hei whakarei ake i te whiriwhiringa me te whakaiti i te poke.

3. Horoi SC1 (Horoi Paerewa 1: NH₄OH + H₂O₂ + H₂O)

He tikanga utu-whai hua, he tino whai hua hoki a SC1 mō te tangongā toenga rauropi, ngā matūriki, me ētahi konganuku. Ka whakakotahi te tikanga i te mahi whakahāora o te H₂O₂ me te pānga whakarewa o te NH₄OH. Ka panaia hoki e ia ngā matūriki mā roto i ngā kaha hiko-pūmau, ā, mā te āwhina ultrasonic/megasonic ka pai ake te whai huatanga. Heoi anō, ka taea e te SC1 te whakararuraru i ngā mata wafer, me te arotau tupato i ngā ōwehenga matū, te whakahaere i te kukū o te mata (mā roto i ngā surfactants), me ngā kaihoko chelating hei pehi i te whakatakotoranga anō o te konganuku.

4. Horoi SC2 (Horoi Paerewa 2: HCl + H₂O₂ + H₂O)

Ka tautoko a SC2 i a SC1 mā te tangongā poke whakarewa. Nā tōna kaha ki te whakakotahi i ngā konganuku kua waikuratia, ka hurihia hei tote wairewa, hei matatini rānei, ka horoia atu. Ahakoa he whai hua te SC1 mō ngā mea rauropi me ngā matūriki, he tino whai hua te SC2 mō te aukati i te mimiti o te konganuku me te whakarite kia iti te poke o te konganuku.

5. Te Horoi O₃ (Ozone)

Ko te horoinga ozone te mea e whakamahia nuitia ana mōte tango i ngā mea rauropimete patu huakita DIWHe kaha te mahi a te O₃ hei waikura, engari ka taea te whakahoki anō i te wai, nō reira ka honoa pinepinetia ki te HF. He mea nui te arotau i te pāmahana nā te mea ka heke te wairewatanga o te O₃ i roto i te wai i ngā pāmahana teitei ake. Kāore i rite ki ngā patu huakita e hangai ana ki te chlorine (kāore e whakaaetia i roto i ngā whare hanga semiconductor), ka pirau te O₃ hei hāora me te kore e poke i ngā pūnaha DIW.

6. Horoi Whakarewa Ora

I roto i ētahi tukanga motuhake, ka whakamahia ngā whakarewa rauropi ina kore e ranea, e kore rānei e tika ngā tikanga horoi paerewa (hei tauira, ina me karohia te hanganga waikura).

Whakamutunga

Ko te horoinga o te wafer tete taahiraa tino auaui roto i te hanga haurua-ā-ira, ā, ka pā tika ki te hua me te pono o te taputapu. Me te neke whakamua kingā angaanga nui ake me ngā āhuahanga taputapu iti ake, kei te piki haere te kaha o ngā whakaritenga mō te ma o te mata o te papa angiangi, te āhua matū, te taratara, me te matotoru o te waikura.

I arotakehia e tēnei tuhinga ngā hangarau horoi wafer tawhito me ngā hangarau horoi wafer matatau, tae atu ki ngā tikanga DIW, HF, SC1, SC2, O₃, me te whakarewa waro, me ō rātou tikanga, painga, me ngā herenga. Mai i ngā mea e ruangā tirohanga ōhanga me te taiao, he mea nui ngā whakapainga tonutanga o te hangarau horoi wafer hei whakatutuki i ngā hiahia o te hanga haurua-haurua matatau.