Rārangi Kaupapa
1.Ngā Whāinga Matua me te Hiranga o te Horoi Wafer
2. Aromatawai Parahanga me ngā Tikanga Tātari Matatau
3. Ngā Tikanga Horoi Matatau me ngā Mātāpono Hangarau
4. Ngā Kaupapa Matua mō te Whakatinanatanga Hangarau me te Whakahaere Tukanga
5. Ngā Auahatanga me ngā Aronga Auaha o te Ao
6.XKH Ngā Otinga Mutunga-ki-Mutu me te Pūnaha Ratonga
He tukanga tino nui te horoi anga i roto i te hanga haurua-haurua, nā te mea ka taea e ngā poke taumata-atomika te whakaheke i te mahi, te hua rānei o te taputapu. He maha ngā mahi o te tukanga horoi hei tango i ngā poke maha, pērā i ngā toenga rauropi, ngā poke konganuku, ngā matūriki, me ngā waikura taketake.
1. Ngā Whāinga o te Horoi Wafer
- Tangohia ngā poke rauropi (hei tauira, ngā toenga ātete-ata, ngā tohu tapumati).
- Whakamutua nga poke konganuku (hei tauira, Fe, Cu, Ni).
- Whakakorea ngā matūriki poke (hei tauira, te puehu, ngā maramara silicon).
- Tangohia ngā waikura taketake (hei tauira, ngā paparanga SiO₂ i hangaia i te wā e pāngia ana e te hau).
2. Te Hiranga o te Horoi Kaha i te Wafer
- Ka whakarite i te hua nui o te tukanga me te mahi a te taputapu.
- Ka whakaiti i ngā hapa me te tere o te para o ngā papa.
- Ka whakapai ake i te kounga me te ōritetanga o te mata.
I mua i te horoinga nui, he mea nui kia aromatawaihia te poke o te mata. Mā te mārama ki te momo, te tohatoha rahi, me te whakaritenga ā-wāhi o ngā poke i runga i te mata o te papa, ka pai ake te matū horoi me te whakaurunga pūngao miihini.
3. Ngā Tikanga Tātari Matatau mō te Aromatawai i te Parahanga
3.1 Te Tātari Matūriki Mata
- Ka whakamahia e ngā kaute matūriki motuhake te marara taiaho, te tirohanga rorohiko rānei, hei tatau, hei rahi, hei mahere hoki i ngā para o te mata.
- E pā ana te kaha o te marara o te mārama ki te rahi o ngā matūriki he iti noa iho i ngā tekau nanometer me ngā kiato he iti noa iho i te 0.1 matūriki/cm².
- Mā te whakatikatika ki ngā paerewa ka pono te taputapu. Mā ngā matawai i mua me muri i te horoinga ka whakamanahia te whai huatanga o te tango, me te whakapai ake i ngā tukanga.
3.2 Tātari Mata Huānga
- Mā ngā tikanga aro-mata e tautuhi te hanganga huānga.
- Te Matawai Irahiko Whakaahua-X (XPS/ESCA): Te tātari i ngā āhua matū o te mata mā te whakakā i te anga ki ngā hihi-X me te ine i ngā irahiko kua tukuna.
- Mātai Whakamātautau Tukunga Ātaahua (GD-OES): Ka pupuhi i ngā paparanga mata tino angiangi i ia raupapa, i te wā e tātari ana i ngā āwhata kua tukuna hei whakatau i te hanganga huānga e whakawhirinaki ana ki te hohonu.
- Ka eke ngā herenga kimi ki ngā wāhanga mō ia miriona (ppm), e ārahi ana i te kōwhiringa matū horoi tino pai.
3.3 Tātaritanga Parahanga Āhua
- Te Karuārai Irahiko Matawai (SEM): Ka hopu whakaahua taumira teitei hei whakaatu i ngā āhua me ngā ōwehenga āhua o ngā poke, e tohu ana i ngā tikanga piri (matū me te miihini).
- Te Karuārai Kaha Atomika (AFM): Te mahere i te āhua whenua nano hei ine i te teitei o te matūriki me ngā āhuatanga hangarau.
- Te Karuārai Hiko Arotahi (FIB) Mira + Tuku Irahiko (TEM): Ka whakarato i ngā tirohanga ā-roto o ngā poke kua tanumia.
4. Ngā Tikanga Horoi Matatau
Ahakoa he pai te tango a te horoi whakarewa i ngā poke rauropi, me whai tikanga matatau anō hoki mō ngā matūriki kore-rauropi, ngā toenga konganuku, me ngā poke ioni:
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4.1 Te Horoi RCA
- I whakawhanakehia tēnei tikanga e RCA Laboratories, ā, e whakamahi ana i tētahi tukanga kaukau-rua hei tango i ngā poke matūriki.
- SC-1 (Paerewa Horoi-1): Ka tango i ngā poke me ngā matūriki waro mā te whakamahi i te ranunga o NH₄OH, H₂O₂, me te H₂O (hei tauira, te ōwehenga 1:1:5 i te ~20°C). Ka hanga he paparanga angiangi o te hauhā silicon.
- SC-2 (Paerewa Horoi-2): Ka tango i ngā poke whakarewa mā te whakamahi i te HCl, H₂O₂, me te H₂O (hei tauira, te ōwehenga 1:1:6 i te ~80°C). Ka waiho he mata kua kore e whakamahia.
- Ka whakataurite i te ma me te tiaki i te mata.
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4.2 Te Whakamaemaetanga o te Ozone
- Ka rumakina ngā papa angiangi ki roto i te wai whakakore ion kua mākūkū ki te ozone (O₃/H₂O).
- Ka whai hua te waikura me te tango i ngā mea rauropi me te kore e kino ki te papa whakarewa, ka waiho he mata kua kore e pāngia e te matū.
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4.3 Horoi Megasonic'
- E whakamahi ana i te pūngao ultrasonic auau-tiketike (te nuinga o te 750–900 kHz) me ngā wai horoi.
- Ka whakaputa i ngā mirumiru cavitation e pana ana i ngā poke. Ka uru ki ngā āhuahanga uaua me te whakaiti i te kino ki ngā hanganga ngawari.
4.4 Te Horoi Kirioho
- Ka tere te whakamatao i ngā papa wafer ki ngā pāmahana cryogenic, ka pakarukaru i ngā poke.
- Mā te horoi, te paraihe mārie rānei i muri mai ka tangohia ngā matūriki kua wetekina. Ka ārai i te poke anō me te horapa ki te mata.
- He tukanga tere, maroke, me te iti rawa o te whakamahinga matū.
Whakamutunga:
Hei kaiwhakarato otinga haurua-whakamua matua, ko XKH e akiakihia ana e te auahatanga hangarau me ngā hiahia o te kiritaki ki te whakarato i tētahi pūnaha ratonga mutunga-ki-mutunga e kapi ana i te tuku taputapu teitei, te hanga wafer, me te horoi tika. Ehara i te mea ko ngā taputapu haurua-whakamua rongonui o te ao anake e tukuna ana e mātou (hei tauira, ngā mīhini tuhi, ngā pūnaha whakairo) me ngā otinga kua whakaritea, engari ko ngā hangarau rangatira anō hoki—tae atu ki te horoi RCA, te purenga ozone, me te horoinga megasonic—kia whakarite ai i te horoi taumata-atomika mō te hanga wafer, kia nui ake ai te hua o te kiritaki me te pai o te whakaputa. Mā te whakamahi i ngā tīma urupare tere ā-rohe me ngā whatunga ratonga atamai, ka whakaratohia e mātou he tautoko whānui mai i te tāutanga taputapu me te arotau tukanga ki te tiaki matapae, e whakamana ana i ngā kiritaki ki te wikitoria i ngā wero hangarau me te ahu whakamua ki te whanaketanga haurua-whakamua tika me te pumau. Kōwhiria mātou mō te hononga rua-toa o te tohungatanga hangarau me te uara arumoni.
Wā tuku: Hepetema-02-2025