I roto i te tukanga whanaketanga puāwai o te umanga semiconductor, ko te tioata kotahi kua orohiangā papa siliconHe mahi nui tā rātou. Ko rātou te rauemi matua mō te hanga i ngā momo taputapu hiko iti. Mai i ngā ara iahiko whakauru matatini me te tika ki ngā tukatuka tere-teitei me ngā pūoko maha-mahi, ka orohia te karaihe kotahingā papa siliconhe mea nui. Ko ngā rerekētanga o ā rātou mahi me ngā whakaritenga ka pā tika ki te kounga me te mahi a ngā hua whakamutunga. Kei raro nei ngā whakaritenga me ngā tawhā noa o ngā anga silicon karaihe kotahi kua orohia:

Diameter: Ka inehia te rahi o ngā papa silicon tioata kotahi semiconductor mā te diameter, ā, he maha ngā whakatakotoranga. Ko ngā diameter noa ko te 2 inihi (50.8mm), 3 inihi (76.2mm), 4 inihi (100mm), 5 inihi (125mm), 6 inihi (150mm), 8 inihi (200mm), 12 inihi (300mm), me te 18 inihi (450mm). He rerekē ngā diameter e tika ana mō ngā hiahia whakaputa me ngā whakaritenga tukanga. Hei tauira, he mea noa te whakamahi i ngā papa diameter iti mō ngā taputapu hiko iti motuhake, ā, ko ngā papa diameter nui ake e whakaatu ana i te pai o te whakaputa me ngā painga utu i roto i te hanga ara iahiko whakauru nui. Ka whakarōpūtia ngā whakaritenga mata hei taha kotahi kua orohia (SSP) me te taha rua kua orohia (DSP). Ka whakamahia ngā papa orohia taha kotahi mō ngā taputapu e hiahia ana kia papatahi te taha kotahi, pērā i ētahi pūoko. He mea noa te whakamahi i ngā papa orohia taha rua mō ngā ara iahiko whakauru me ētahi atu hua e hiahia ana kia tino tika te mata e rua. Te Whakaritenga Mata (Mutu): SSP oro taha-kotahi / DSP oro taha-rua.

Momo/Whakapiri: (1) Ārahi Momo-N: Ina whakaurua ētahi ngota poke ki roto i te ārahi ā-roto, ka whakarerekētia tōna kawe hiko. Hei tauira, ina tāpirihia ngā huānga pentavalent pēnei i te hauota (N), te whākawa (P), te ātene (As), te antimony rānei (Sb), ka hangaia e ō rātou irahiko valence he hononga covalent me ngā irahiko valence o ngā ngota silicon e karapoti ana, ka waiho he irahiko tāpiri kāore i herea e te hononga covalent. Ko te hua o tēnei he nui ake te kukū irahiko i te kukū o te kōhao, ka hangaia he ārahi momo-N, e mōhiotia ana ko te ārahi momo-irahiko. He mea nui ngā ārahi momo-N ki te hanga taputapu e hiahia ana i ngā irahiko hei kaikawe utu matua, pēnei i ētahi taputapu hiko. (2) Ārahi Momo-P: Ina whakaurua ngā huānga poke trivalent pēnei i te boron (B), te gallium (Ga), te indium (In) rānei ki roto i te ārahi silicon, ka hangaia e ngā irahiko valence o ngā ngota poke he hononga covalent me ngā ngota silicon e karapoti ana, engari kāore i a rātou te iti rawa i te kotahi irahiko valence, ā, kāore e taea te hanga i tētahi hononga covalent katoa. Ka hua ake tēnei i te kukū o te kōhao nui atu i te kukū o te irahiko, ka hangaia he haurua-ā-ira momo-P, e mōhiotia ana ko te haurua-ā-ira momo-kōhao. He mahi nui tā ngā haurua-ā-ira momo-P i roto i te hanga taputapu e mahi ana ngā kōhao hei kaikawe utu matua, pērā i ngā diode me ētahi transistors.

Ātete: Ko te ātete he rahinga ā-tinana matua e ine ana i te kawe hiko o ngā papa silicon tioata kotahi kua orohia. Ko tōna uara e whakaata ana i te mahi kawe hiko o te rauemi. Ko te iti o te ātete, ko te pai ake o te kawe hiko o te papa silicon; i tetahi atu taha, ko te teitei ake o te ātete, ko te ngoikore o te kawe hiko. Ko te ātete o ngā papa silicon ka whakatauhia e ō rātou āhuatanga rauemi ā-roto, ā, he pānga nui anō hoki te pāmahana. I te nuinga o te wā, ka piki ake te ātete o ngā papa silicon me te pāmahana. I roto i ngā tono mahi, he rerekē ngā whakaritenga ātete o ngā taputapu hiko iti mō ngā papa silicon. Hei tauira, ko ngā papa e whakamahia ana i roto i te hanga ara iahiko whakauru me whakahaere tika i te ātete kia mau ai te mahi a te taputapu me te pono.

Te Aronga: Ko te aronga tioata o te papa anga e tohu ana i te ahunga tioata o te whatunga silicon, e tohua ana e ngā tohu Miller pēnei i te (100), (110), (111), me ētahi atu. He rerekē ngā āhuatanga ā-tinana o ngā aronga tioata rerekē, pēnei i te kiato rārangi, e rerekē ana i runga i te aronga. Ka pā pea tēnei rerekētanga ki te mahi a te papa anga i ngā mahi tukatuka e whai ake nei me te mahi whakamutunga o ngā taputapu hiko moroiti. I roto i te tukanga hanga, mā te whiriwhiri i tētahi papa anga silicon me te aronga tika mō ngā whakaritenga taputapu rerekē ka taea te whakapai ake i te mahi a te taputapu, te whakapai ake i te pai o te whakaputa, me te whakarei ake i te kounga hua.

Papatahi/Ngātahi: He mahi nui tā te taha papatahi (Papatahi) me te V-notch (Ngātahi) rānei i te porowhita o te wafer silicon i roto i te whakahāngai i te whakatakotoranga tioata, ā, he tohu nui hoki i roto i te hanga me te tukatuka o te wafer. Ko ngā wafer o ngā diameter rerekē e rite ana ki ngā paerewa rerekē mō te roa o te Papatahi, te Notch rānei. Ka whakarōpūtia ngā taha whakahāngai ki te papatahi tuatahi me te papatahi tuarua. Ko te papatahi tuatahi te mea nui hei whakatau i te whakatakotoranga tioata taketake me te tohutoro tukatuka o te wafer, ko te papatahi tuarua ka āwhina anō i te whakahāngai me te tukatuka tika, kia tika ai te mahi me te ōrite o te wafer puta noa i te raina whakaputa.

Matotoru: Ko te matotoru o te wafer ka tohua i roto i ngā maikiromita (μm), me te matotoru noa i waenga i te 100μm me te 1000μm. He pai ngā wafer o ngā matotoru rerekē mō ngā momo taputapu hiko moroiti rerekē. Ko ngā wafer angiangi (hei tauira, 100μm – 300μm) ka whakamahia pinepine mō te hanga maramara e hiahia ana kia tino whakahaeretia te matotoru, kia whakaitihia te rahi me te taumaha o te maramara me te whakanui ake i te kiato whakauru. Ko ngā wafer matotoru (hei tauira, 500μm – 1000μm) ka whakamahia whānuitia i roto i ngā taputapu e hiahia ana kia kaha ake te miihini, pēnei i ngā taputapu haurua hiko, kia mau tonu ai te pumau i te wā e whakamahia ana.

Te Pakaru o te Mata: Ko te pakari o te mata tētahi o ngā tawhā matua mō te aromatawai i te kounga o te wafer, nā te mea ka pā tika ki te piri i waenga i te wafer me ngā rauemi kiriata angiangi kua whakatakotoria i muri mai, tae atu ki te mahi hiko o te taputapu. Ko te tikanga ka whakaatuhia hei pakari o te pūtake toharite tapawhā (RMS) (i roto i te nm). Ko te iti o te pakari o te mata he tikanga he maeneene ake te mata o te wafer, ka āwhina i te whakaiti i ngā āhuatanga pēnei i te marara irahiko me te whakapai ake i te mahi me te pono o te taputapu. I roto i ngā tukanga hanga semiconductor matatau, kei te piki haere te kaha o ngā whakaritenga pakari o te mata, inā koa mō te hanga ara iahiko whakauru teitei, me whakahaere te pakari o te mata ki te torutoru nanometer, ki raro iho rānei.

Te Rerekētanga o te Matotoru Katoa (TTV): Ko te rerekētanga o te matotoru katoa e pā ana ki te rerekētanga i waenga i te matotoru mōrahi me te matotoru iti rawa i inehia i ngā pūwāhi maha i runga i te mata o te papa, e whakaatuhia ana i roto i te μm. Tērā pea ka arahi te TTV teitei ki ngā rerekētanga i roto i ngā tukanga pēnei i te whakaahua me te whakairo, ka pā ki te pumau me te hua o te mahi a te taputapu. Nō reira, ko te whakahaere i te TTV i te wā e hanga ana i te papa he taahiraa matua hei whakarite i te kounga o te hua. Mō te hanga taputapu hiko moroiti tino tika, me noho te TTV i roto i te torutoru maikiromita.

Kopere: Ko te kopere e pā ana ki te rerekētanga i waenga i te mata o te angaanga me te papa papatahi tino pai, e inehia ana i roto i te μm. Ko ngā angaanga he nui rawa te piko ka pakaru, ka pāngia rānei e te ahotea kore taurite i te wā tukatuka i muri mai, ka pā ki te whai huatanga o te whakaputa me te kounga o te hua. Ina koa i roto i ngā tukanga e hiahia ana kia papatahi te angaanga, pērā i te whakaahua-ipurangi, me whakahaere te piko i roto i tētahi whānuitanga motuhake hei whakarite i te tika me te ōrite o te tauira whakaahua-ipurangi.

Wheke: Ko te weheke e tohu ana i te rerekētanga i waenga i te mata o te papatahi me te āhua porowhita tino pai, e inehia ana hoki i roto i te μm. Pērā i te kopere, he tohu nui te weheke mō te papatahi o te papatahi. Ehara i te mea ko te weheke nui anake ka pā ki te tika o te whakatakotoranga o te papatahi i roto i ngā taputapu tukatuka engari ka puta hoki ngā raruraru i te wā o te tukanga tākai maramara, pērā i te hononga ngoikore i waenga i te maramara me te rauemi tākai, ka pā ki te pono o te taputapu. I roto i te hanga haurua-haurua teitei, kei te kaha haere ngā whakaritenga weheke hei whakatutuki i ngā hiahia o te hanga maramara matatau me ngā tukanga tākai.

Kōtaha Tapa: He mea nui te kōtaha tapa o te wafer mō tana tukatuka me te whakahaere i muri mai. Ko te tikanga ka tohua e te Rohe Ārai Tapa (EEZ), e tautuhi ana i te tawhiti mai i te taha wafer ki te kore e whakaaetia te tukatuka. Mā te kōtaha tapa kua hoahoatia tika me te whakahaere EEZ tika ka āwhina i te karo i ngā hapa taha, ngā kukū ahotea, me ētahi atu take i te wā tukatuka, ka whakapai ake i te kounga me te hua o te wafer whānui. I roto i ētahi tukanga hanga matatau, me noho te tika o te kōtaha tapa ki te taumata iti-micron.

Tatau Matūriki: Ko te maha me te rahi o ngā matūriki i runga i te mata o te papa wafer ka pā nui ki te mahi a ngā taputapu hiko moroiti. Mā ngā matūriki nui rawa, nui rawa rānei ka raru pea te taputapu, pērā i te ara iahiko poto, te turuturu rānei, ka whakaiti i te hua o te hua. Nō reira, ko te nuinga o te wā ka inehia te maha o ngā matūriki mā te tatau i ngā matūriki mō ia wāhi horahanga, pērā i te maha o ngā matūriki nui atu i te 0.3μm. Ko te whakahaere pakari i te maha o ngā matūriki i te wā e hanga ana i te papa wafer he mea nui hei whakarite i te kounga o te hua. Ka whakamahia ngā hangarau horoi matatau me te taiao whakaputa ma hei whakaiti i te poke o ngā matūriki i runga i te mata o te papa wafer.

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