Te Tūnga me ngā Auahatanga o te Hangarau Tukatuka Wafer SiC i Nāianei

Hei rauemi papa haurua-whakatipuranga tuatoru,kāpira silicon (SiC)He whānui ngā huarahi whakamahi o te tioata kotahi i roto i te hanga i ngā taputapu hiko auau-teitei me te mana-teitei. He mea nui te hangarau tukatuka o te SiC i roto i te hanga rauemi paparanga kounga teitei. E whakaatu ana tēnei tuhinga i te āhua o nāianei o te rangahau mō ngā hangarau tukatuka SiC i Haina me tāwāhi, e tātari ana, e whakatairite ana hoki i ngā tikanga tapahi, huri, me te whakakanapa, tae atu ki ngā au o te papatahi o te papatahi me te taratara o te mata. E tohu ana hoki i ngā wero o nāianei i roto i te tukatuka papatahi SiC, ā, e matapaki ana i ngā ahunga whanaketanga ā muri ake nei.

Karāhe silicon (SiC)He rauemi tino nui ngā angaanga mō ngā taputapu haurua-ā-ira o te whakatupuranga tuatoru, ā, he mea nui, he pūmanawa mākete hoki i roto i ngā mara pēnei i te hikohiko iti, te hikohiko mana, me te rama haurua-ā-ira. Nā te tino pakeke me te pumau matū oNgā tioata takitahi SiC, kāore ngā tikanga tukatuka haurua-ā-ira tuku iho i te tino pai mō ā rātou mahi miihini. Ahakoa he maha ngā kamupene o te ao kua rangahau whānui mō te tukatuka hangarau uaua o ngā tioata takitahi SiC, ka puritia kia tino muna ngā hangarau e tika ana.

I ngā tau tata nei, kua whakapiki ake a Haina i ngā mahi ki te whakawhanake i ngā rauemi me ngā taputapu tioata kotahi SiC. Heoi, ko te whanaketanga o te hangarau taputapu SiC i roto i te whenua kei te herea e ngā herenga o ngā hangarau tukatuka me te kounga o te wafer. Nō reira, he mea nui kia whakapai ake a Haina i ngā kaha tukatuka SiC hei whakarei ake i te kounga o ngā papa tioata kotahi SiC me te whakatutuki i tā rātou tono mahi me te whakaputa papatipu.

Ko ngā mahi tukatuka matua ko: te tapahi → te huri matotoru → te huri pai → te oro taratara (te oro miihini) → te oro pai (te oro miihini matū, CMP) → te tirotiro.

Te tapahi i ngā tioata takitahi SiC

I te tukatuka oNgā tioata takitahi SiC, ko te tapahi te taahiraa tuatahi, ā, he taahiraa tino nui. Ko te kopere, te whenu, me te rerekētanga matotoru katoa (TTV) o te wafer e puta mai ana i te tukanga tapahi ka whakatau i te kounga me te whai huatanga o ngā mahi huri me te whakakanapa i muri mai.

Ka taea te whakarōpū i ngā taputapu tapahi mā te āhua ki ngā kani diameter roto taimana (ID), ngā kani diameter waho (OD), ngā kani roopu, me ngā kani waea. Ka taea hoki te whakarōpū i ngā kani waea mā te momo nekehanga ki ngā pūnaha waea hurihuri me ngā pūnaha waea porowhita (mutunga kore). I runga i te tikanga tapahi o te mīhini haehae, ka taea te wehewehe i ngā tikanga tapahi kani waea ki ngā momo e rua: te kani waea haehae kore utu me te kani waea taimana haehae pumau.

1.1 Ngā Tikanga Tapahi Tuku Iho

Ko te hohonutanga o te tapahi o ngā kani diameter waho (OD) ka whakawhāitihia e te diameter o te mata. I te wā e tapahia ana, ka ngawari te wiri me te peka ke o te mata, ka hua ake he nui te haruru me te ngoikore o te pakari. Ka whakamahia e ngā kani diameter roto (ID) ngā mea whakakoi taimana ki te porowhita o roto o te mata hei mata tapahi. Ka taea e ēnei mata te angiangi ki te 0.2 mm. I te wā e tapatapahi ana, ka huri te mata ID i te tere teitei i te mea ka neke te rauemi e tapahia ana ki te pokapū o te mata, ka tutuki ai te tapahi i roto i tēnei nekehanga whanaunga.

Me tū pinepine, me huri whakamuri hoki ngā kani poroporo taimana, ā, he tino iti te tere tapahi—kāore e neke atu i te 2 m/s. Ka pāngia hoki rātou e te nui o te pakaru miihini me te nui o ngā utu tiaki. Nā te whānui o te mata kani, kāore e taea te iti rawa te radius tapahi, ā, kāore e taea te tapahi i ngā poro maha. He iti te kaha o ēnei taputapu kani tuku iho nā te pakari o te turanga, ā, kāore e taea te tapahi piko, te huri rānei i ngā radius. Ka taea anake te tapahi tika, he whānui ngā kerf, he iti te tere hua, ā, kāore e pai mō te tapahi.Ngā tioata SiC.

1.2 Kani Waea Whakakorikori Koreutu Tapahi Waea-Maha

Ko te tikanga tapahi waea kore-whakakoi ka whakamahi i te nekehanga tere o te waea hei kawe i te paru ki roto i te kerf, ka taea ai te tango rauemi. Ko te nuinga o te wā ka whakamahia he hanganga tauutuutu, ā, he tikanga kua pakari, kua whakamahia whānuitia hoki i tēnei wā mō te tapahi maha-wafer whai hua o te silicon kotahi-kiriata. Heoi, kāore i te tino rangahauhia tōna whakamahinga i roto i te tapahi SiC.

Ka taea e ngā kani waea kore utu te tukatuka i ngā angaanga he iti iho i te 300 μm te matotoru. He iti te ngaronga o te kerf, he onge te pakaru, ā, he pai te kounga o te mata. Heoi, nā te tikanga tango rauemi—e hangai ana ki te hurihuri me te kōpiko o ngā mea whakakorikori—ka puta he ahotea toenga nui ki te mata o te angaanga, he pakaru moroiti, me ngā paparanga kino hohonu ake. Ka hua ake tēnei i te piko o te angaanga, ka uaua ki te whakahaere i te tika o te kōtaha mata, ā, ka piki ake te kawenga i ngā mahi tukatuka e whai ake nei.

He nui te pānga o te paru ki te mahi tapahi; he mea tika kia mau tonu te koi o ngā mea whakakoi me te kukū o te paru. He nui te utu mō te tukatuka me te hangarua i te paru. Ina tapahia ngā poro nui, ka uaua ki ngā mea whakakoi te uru ki ngā kakau hohonu me ngā kakau roa. I raro i te rahi o te kakau whakakoi kotahi, he nui ake te ngaronga o te kakau i tērā o ngā kani waea whakakoi-mau.

1.3 Kani Waea Taimana Whakapūmau, Tapahi Waea-Maha

Ko ngā kani waea taimana whakapūmau ka hangaia mā te whakauru i ngā matūriki taimana ki runga i te papa waea maitai mā te whakamahi i te hiko whakapuru, te whakapūmau, te here kapia rānei. He painga ngā kani waea taimana whakapuru hiko pērā i ngā kōhao whaiti, te kounga tapahi pai ake, te pai ake o te mahi, te iti ake o te poke, me te kaha ki te tapahi i ngā rauemi pakeke-tiketike.

Ko te kani waea taimana whakakikoruatia te tikanga e whakamahia whānuitia ana mō te tapahi i te SiC. Kei te Whakaahua 1 (kāore i whakaaturia i konei) te papatahi o te mata o ngā anga SiC kua tapahia mā te whakamahi i tēnei tikanga. I te haere tonu o te tapahi, ka piki ake te piko o te anga. Nā te mea ka piki ake te horahanga pā i waenga i te waea me te rauemi i te nekehanga o te waea ki raro, ka piki ake te ātete me te wiri o te waea. Ina tae te waea ki te diameter mōrahi o te anga, ka tae te wiri ki tōna tihi, ka hua ake te piko mōrahi.

I ngā wāhanga whakamutunga o te tapahi, nā te tere o te waea, te tere pumau o te nekehanga, te whakaheke tere, te tū, me te hurihanga, me te uaua ki te tango i ngā paru me te wai whakamatao, ka heke te kounga o te mata o te anga. Ko te hurihanga me te piki me te heke o te tere o te waea, me ngā matūriki taimana nui i runga i te waea, koia ngā tino take o ngā karawarawa o te mata.

1.4 Hangarau Wehewehenga Matao

He tukanga auaha te wehenga matao o ngā tioata takitahi SiC i roto i te ao tukatuka rauemi haurua-whakatipuranga tuatoru. I ngā tau tata nei, kua aro nuihia tēnei hangarau nā ōna painga nui ki te whakapai ake i te hua me te whakaiti i te ngaronga rauemi. E toru ngā āhuatanga o te hangarau e taea te tātari: te mātāpono mahi, te rere o te tukanga, me ngā painga matua.

Te Whakatau i te Aronga o te Tioata me te Huri i te Diameter o Waho: I mua i te tukatuka, me whakatau te aronga o te tioata o te ingot SiC. Kātahi ka hangaia te ingot hei hanganga porotaka (e kiia ana ko te SiC puck) mā te huri i te diameter o waho. Mā tēnei taahiraa ka whakatakoto i te turanga mō te tapahi ahunga me te tapatapahi i muri mai.

Te Tapahi Waea Maha: Ka whakamahia e tēnei tikanga ngā matūriki whakakoi me ngā waea tapahi hei tapatapahi i te porotaka porotaka. Heoi, he nui te ngaronga o te kerf me ngā raruraru o te mata kāore i te ōrite.

Hangarau Tapahi Taiaho: Ka whakamahia he taiaho hei hanga i tētahi paparanga kua whakarerekētia i roto i te tioata, ka taea te tango i ngā poro angiangi mai i reira. Ka whakaitihia e tēnei huarahi te ngaronga o ngā rauemi, ka whakarei ake hoki i te pai o te tukatuka, ka waiho hei huarahi hou e whai hua ana mō te tapahi i te wafer SiC.

Arotautanga Tukanga Tapahi

Te Tapahi Waea Maha-Waea Whakapakari: Koinei te hangarau matua i tēnei wā, he pai mō ngā āhuatanga pakeke o te SiC.

Te Mīhini Tukunga Hiko (EDM) me te Hangarau Wehenga Matao: Ka whakaratohia e ēnei tikanga ngā otinga kanorau kua whakaritea mō ngā whakaritenga motuhake.

Te Tukanga Whakakanapa: He mea nui kia taurite te tere tango rauemi me te kino o te mata. Ka whakamahia te Whakakanapa Matū me te Ā-ringa (CMP) hei whakapai ake i te ōritetanga o te mata.

Aroturukitanga Wā-Tūturu: Kua whakauruhia ngā hangarau tirotiro tuihono hei aroturuki i te taratara o te mata i te wā-tūturu.

Tapatapa Taiaho: Ka whakaitihia e tēnei tikanga te ngaronga o ngā kerf, ka whakapotohia hoki ngā huringa tukatuka, ahakoa he wero tonu te rohe e pāngia ana e te wera.

Ngā Hangarau Tukatuka Ranu: Mā te whakakotahi i ngā tikanga ā-pūkaha me ngā tikanga matū ka whakarei ake i te whai huatanga o te tukatuka.

Kua tae kē tēnei hangarau ki te tono ahumahi. Hei tauira, i hokona e Infineon a SILTECTRA, ā, kei a ia inaianei ngā mana pateni matua e tautoko ana i te hanga papatipu o ngā wafer 8-inihi. I Haina, kua tutuki i ngā kamupene pēnei i a Delong Laser te pai o te putanga o te 30 wafer mo ia ingota mō te tukatuka wafer 6-inihi, he whakapainga 40% i ngā tikanga tuku iho.

I te tere haere o te hanga taputapu ā-whare, e matapaetia ana ka noho tēnei hangarau hei otinga matua mō te tukatuka papa SiC. Nā te piki haere o te diameter o ngā rauemi semiconductor, kua kore e whakamahia ngā tikanga tapahi tuku iho. I roto i ngā kōwhiringa o nāianei, ko te hangarau kani waea taimana tauutuutu te mea e whakaatu ana i ngā tumanakohanga tono tino whai hua. Ko te tapahi laser, hei tikanga hou, he nui ngā painga, ā, e matapaetia ana ka noho hei tikanga tapahi matua ā muri ake nei.

2,Te Hurihanga Karaihe Kotahi SiC

Hei tohu mō ngā haurua-ā-ira tuatoru o te whakatupuranga, he nui ngā painga o te silicon carbide (SiC) nā tōna whānui o te āputa roopu, tōna papa hiko pakaru nui, tōna tere tere o te nekeneke irahiko, me tōna kawe wera pai rawa atu. Nā ēnei āhuatanga ka tino whai hua te SiC i roto i ngā tono ngaohiko teitei (hei tauira, ngā taiao 1200V). Ko te hangarau tukatuka mō ngā papa SiC he wāhanga nui o te hanganga taputapu. Ko te kounga o te mata me te tika o te papa e pā tika ana ki te kounga o te paparanga epitaxial me te mahi a te taputapu whakamutunga.

Ko te kaupapa matua o te tukanga huri ko te tango i ngā tohu kani mata me ngā paparanga kino i puta i te wā e tapatapahia ana, me te whakatika i te rerekētanga i puta mai i te tukanga tapahi. I te mea he tino pakeke te SiC, me whakamahi ngā mea whakakoi mārō pērā i te boron carbide, te taimana rānei hei huri. Ko te huri noa ka wehea ki te huri matotoru me te huri pai.

2.1 Te Huri Pakari me te Huri Pai

Ka taea te whakarōpū i te huri i runga i te rahi o te matūriki whakakoi:

Te Huri Pakari: Ka whakamahia ngā mea whakakoi nunui hei tango i ngā tohu kani me ngā paparanga kino i puta i te wā e tapatapahi ana, hei whakapai ake i te pai o te tukatuka.

Te Huri Pai: Ka whakamahi i ngā mea whakakoi pai ake hei tango i te paparanga kino i mahue mai i te huri taratara, hei whakaiti i te taratara o te mata, hei whakarei ake i te kounga o te mata.

He maha ngā kaihanga papa SiC o te whare e whakamahi ana i ngā tukanga whakaputa nui. Ko tētahi tikanga noa ko te huri taha-rua mā te whakamahi i tētahi pereti rino maka me te para taimana monocrystalline. Ka tangohia e tēnei tukanga te paparanga kino i mahue mai i te kani waea, ka whakatika i te āhua o te wafer, ā, ka whakaiti i te TTV (Total Thickness Variation), te kopere, me te warp. He pumau te tere tango rauemi, e eke ana ki te 0.8–1.2 μm/min. Heoi, he matte te mata wafer hua me te taratara teitei - tata ki te 50 nm - e nui ake ai ngā tono mō ngā mahi whakakanapa i muri mai.

2.2 Te Hurihanga Kotahi-Taha

Ka tukatukahia e te huri taha kotahi te taha kotahi o te papa angiangi i te wā kotahi. I roto i tēnei tukanga, ka whakamaua te papa angiangi ki te ware pi ki runga i tētahi pereti maitai. I raro i te pēhanga, ka paku rerekē te āhua o te papa, ā, ka papatahi te mata o runga. Whai muri i te huri, ka papatahi te mata o raro. Ina tangohia te pēhanga, ka hoki te mata o runga ki tōna āhua taketake, ka pā anō hoki ki te mata o raro kua hurihia kētia—ka piko ngā taha e rua, ka memeha te papatahi.

Heoi anō, ka taea e te pereti huri te piko i roto i te wā poto, ka piko te papa. Hei pupuri i te papatahi o te pereti, me whakamahi pinepine te takai. Nā te iti o te whai huatanga me te kore papatahi o te papa, kāore e pai te huri taha kotahi mō te hanga papatipu.

Ko te tikanga, ka whakamahia ngā wira huri #8000 mō te huri pai. I Hapani, kua tino pakari tēnei tukanga, ā, ka whakamahia hoki ngā wira whakakanapa #30000. Mā tēnei ka taea te tae atu ki te taratara o te mata o ngā papa kua tukatukahia ki raro iho i te 2 nm, kia rite ai ngā papa mō te CMP whakamutunga (Chemical Mechanical Polishing) me te kore he tukatuka tāpiri.

2.3 Hangarau Whakaiti Kotahi-Taha

He tikanga hou te Hangarau Whakangāwari Taimana Kotahi-Taha mō te huri taha-kotahi. E ai ki te Whakaahua 5 (kāore i whakaaturia i konei), ka whakamahia e te tukanga he pereti huri e herea ana ki te taimana. Ka whakapūmauhia te papa mā te mimiti korehau, i te wā e huri tahi ana te papa me te wira huri taimana. Ka neke haere te wira huri ki raro hei whakangāwari i te papa ki te matotoru e hiahiatia ana. Kia oti te mahi i tētahi taha, ka hurihia te papa hei tukatuka i tētahi atu taha.

I muri i te angiangi, ka taea e te anga 100 mm te whakatutuki i:

Kopere < 5 μm

TTV < 2 μm

Te taratara o te mata < 1 nm

He tino pumau, he tino ōrite, he tere hoki te tango rauemi i tēnei tikanga tukatuka angiangi kotahi. Ki te whakatauritea ki te huri taha-rua tikanga, ka pai ake te pai o te hurihanga mā te neke atu i te 50% i tēnei tikanga.

2.4 Te Hurihanga Takirua

Mā te huri taha-rua ka whakamahia te pereti huri o runga me te pereti huri o raro hei huri i ngā taha e rua o te papa i te wā kotahi, kia pai ai te kounga o te mata i ngā taha e rua.

I te wā o te mahi, ka pēhia tuatahitia e ngā pereti huri te āhua ki ngā wāhi teitei o te mea mahi, ka puta te rerekētanga me te tango haere i ngā rauemi i aua wāhi. I te whakatauritenga o ngā wāhi teitei, ka piki haere te pēhanga ki runga i te papa, ka hua ake he rerekētanga ōrite puta noa i te mata katoa. Mā tēnei ka taea te huri ōrite i ngā mata o runga me o raro. Kia oti te huri, kia tukuna te pēhanga, ka hoki ōrite ia wāhanga o te papa nā te pēhanga ōrite i pā ki a ia. Mā tēnei ka iti ake te piko me te papatahi.

Ko te taratara o te mata o te anga i muri i te hurihanga ka whakawhirinaki ki te rahi o te matūriki whakakoi—ka puta he mata maeneene ake i ngā matūriki iti. Ina whakamahia ngā whakakoi 5 μm mō te huri taha-rua, ka taea te whakahaere i te papatahi o te anga me te rerekētanga matotoru i roto i te 5 μm. Ko ngā inenga o te Atomic Force Microscopy (AFM) e whakaatu ana i te taratara o te mata (Rq) tata ki te 100 nm, me ngā poka huri tae atu ki te 380 nm te hohonu me ngā tohu rārangi e kitea ana i puta mai i te mahi whakakoi.

Ko tētahi tikanga matatau ake ko te huri taha-rua mā te whakamahi i ngā papa pahuka polyurethane me te para taimana polycrystalline. Ka puta mai i tēnei tukanga he iti rawa te taratara o te mata, ka tutuki ai te Ra < 3 nm, he tino whai hua mō te whakakanapa i muri mai o ngā papa SiC.

Heoi anō, kei te noho tonu te rakuraku o te mata hei take kāore anō kia whakatauhia. Hei tāpiri, ko te taimana polycrystalline e whakamahia ana i roto i tēnei tukanga ka hangaia mā te hanga pahū, he uaua ki te hangarau, he iti te rahinga e puta mai ana, ā, he tino utu nui.

Te whakakanapa i ngā tioata takitahi SiC

Hei whakatutuki i tētahi mata kua orohia kounga teitei i runga i ngā anga silicon carbide (SiC), me tango katoa e te oro ngā rua huri me ngā nekehanga mata rite ki te nanometer. Ko te whāinga kia puta he mata maeneene, kāore he hapa, kāore he poke, he pirau rānei, kāore he kino o raro i te mata, ā, kāore he taumahatanga mata e toe ana.

3.1 Te Whakakanapa Ā-Mīhini me te CMP o ngā Wafer SiC

I muri i te tipu o te konganuku tioata kotahi SiC, ka āraihia e ngā hapa o te mata te whakamahinga tika mō te tipu epitaxial. Nō reira, me tukatuka anō. Ka hangaia te konganuku kia rite ki te āhua porotaka paerewa mā te whakaawhiwhi, kātahi ka tapatapahia kia rite ki ngā papa angiangi mā te tapahi waea, ā, muri iho ka manatokohia te whakatakotoranga tioata. He taahiraa nui te whakakanapa hei whakapai ake i te kounga o te papa angiangi, hei aro atu ki ngā kino pea o te mata i puta mai i ngā hapa tipu tioata me ngā taahiraa tukatuka o mua.

E whā ngā tikanga matua mō te tango i ngā paparanga kino o te mata i runga i te SiC:

Te whakakanapa ā-mīhini: He māmā noa iho engari ka waiho ngā karawarawa; he pai mō te whakakanapa tuatahi.

Te Whakakanapa Matū Ā-Mīhini (CMP): Ka tango i ngā karawarawa mā te whakairo matū; he pai mō te whakakanapa tika.

Te whakairo hauwai: Me whai taputapu uaua, e whakamahia whānuitia ana i roto i ngā tukanga HTCVD.

Te whakakanapa āwhina-plasma: He uaua, ā, he onge te whakamahinga.

Ka rakuraku te oro mā te whakamahi mīhini anake, engari ka kore e ōrite te whakairo mā te whakamahi matū anake. Ka whakakotahi te CMP i ngā painga e rua, ā, he otinga whai hua, he iti hoki te utu.

Te Mātāpono Mahi a te CMP

Ka mahi te CMP mā te hurihuri i te anga i raro i te pēhanga kua whakaritea ki tētahi papa whakakanapa hurihuri. Mā tēnei nekehanga whanaunga, me te karawarawa ā-pūkaha mai i ngā karawarawa nano-rahi i roto i te paru me te mahi matū o ngā matū tauhohe, ka tutuki ai te whakapūmautanga o te mata.

Ngā rauemi matua i whakamahia:

Parai whakakanapa: Kei roto ngā mea whakakoi me ngā matū tauhohenga.

Papa whakakanapa: Ka memeha haere i te wā e whakamahia ana, ka whakaiti i te rahi o ngā pore me te whai huatanga o te tuku paru. Me whakakakahu auau, me te whakamahi i te tākai taimana, hei whakahoki mai i te taratara.

Tukanga CMP Noa

Whakakoi: 0.5 μm te matotoru o te taimana

Te taratara o te mata whainga: ~0.7 nm

Te Whakakanapa Matū Ā-Mīhini:

Taputapu whakakanapa: AP-810 whakakanapa taha-kotahi

Pēhanga: 200 karamu/cm²

Tere pereti: 50 rpm

Tere o te pupuri uku: 38 rpm

Te hanganga o te paru:

SiO₂ (30 wt%, pH = 10.15)

0–70 wt% H₂O₂ (30 wt%, taumata matū)

Whakatikatikahia te pH ki te 8.5 mā te whakamahi i te 5 wt% KOH me te 1 wt% HNO₃

Te tere rere o te paru: 3 L/min, hurihia anō

Ka whakapai ake tēnei tukanga i te kounga o te anga SiC, ā, ka tutuki hoki i ngā whakaritenga mō ngā tukanga o muri mai.

Ngā Wero Hangarau i roto i te Whakakanapa Mīhini

He mea nui te mahi a te SiC i roto i te umanga hikohiko, he mea ā-tinana, ā, he pai rawa atu ōna āhuatanga ā-matū, ā, he pai hoki mō ngā taiao tino kino, pērā i te pāmahana teitei, te auau teitei, te mana teitei, me te ātete ki te hihi. Heoi, he uaua rawa te huri me te whakakanapa i tōna āhua pakari me tōna pakarukaru.

I te whakawhiti a ngā kaihanga matua o te ao mai i ngā papa wafer 6-inihi ki te 8-inihi, kua nui haere ngā take pēnei i te pakaru me te kino o ngā papa wafer i te wā tukatuka, ā, kua tino pā ki te hua. Ko te aro atu ki ngā wero hangarau o ngā papa SiC 8-inihi he tohu matua mō te ahunga whakamua o te umanga.

I te wā 8-inihi, he maha ngā wero e pā ana ki te tukatuka anga SiC:

He mea tika te whakaine i te anga angiangi hei whakanui ake i te putanga maramara mō ia puranga, hei whakaiti i te ngaronga o te taha, hei whakaiti hoki i ngā utu whakaputa—ina koa i te mea e piki haere ana te hiahia mō ngā tono waka hiko.

Ahakoa kua pakari te tipu o ngā tioata SiC takitahi 8-inihi, kei te raru tonu ngā tukanga o muri pēnei i te huri me te whakakanapa, ā, he iti noa iho ngā hua (40–50% anake).

He uaua ake ngā tohatoha pehanga o ngā papa matotoru nui, ā, ka uaua ake te whakahaere i te ahotea oro me te ōritetanga o te hua.

Ahakoa e tata ana te matotoru o ngā papa angiangi 8-inihi ki tō ngā papa angiangi 6-inihi, he ngāwari ake te pakaru i te wā e whakamahia ana nā te ahotea me te piko.

Hei whakaiti i te ahotea e pā ana ki te tapahi, te piko, me te ngatata, kei te piki haere te whakamahinga o te tapahi taiaho. Heoi anō:

Ka pā kino te wera ki ngā taiaho roa-ngaru.

Ka whakaputahia e ngā taiaho poto-ngaru he paru taumaha, ka hohonu ake te paparanga kino, ka whakapiki ake i te uaua o te oro.

Rerenga Mahi Whakakanapa Mīhini mō te SiC

Ko te rerenga whānui o te tukanga ko:

Te tapahi aronga

Te huri matotoru

Huri pai

Te whakakanapa mīhini

Te Whakakanapa Matū Ā-ringa (CMP) hei taahiraa whakamutunga

He mea nui te whiriwhiri i te tikanga CMP, te hoahoa huarahi tukanga, me te arotau i ngā tawhā. I roto i te hangahanga haurua-ira, ko te CMP te taahiraa whakatau mō te whakaputa i ngā papa SiC me ngā mata tino maeneene, kāore he hapa, kāore hoki he pakaru, he mea nui mō te tipu epitaxial kounga teitei.

(a) Tangohia te poro SiC mai i te para;

(b) Whakahaerehia te hanga tuatahi mā te whakamahi i te huri i te diameter o waho;

(c) Whakatauhia te takotoranga o te tioata mā te whakamahi i ngā papa whakarārangi, i ngā kōhao rānei;

(d) Tapatapahia te poro hei angiangi mā te whakamahi i te kani waea maha;

(e) Whakatutukihia te maeneene o te mata rite ki te whakaata mā te huri me te whakakanapa.

I muri i te otinga o ngā mahi tukatuka, ka koi te taha o waho o te anga SiC, ka nui ake te tūponotanga o te pakaru i te wā e whakamahia ana, e whakamahia ana rānei. Hei karo i tēnei momo pakarukaru, me huri ngā taha.

Haunga ngā tukanga tapatapahi tuku iho, ko tētahi tikanga auaha mō te whakarite i ngā anga SiC ko te hangarau hononga. Mā tēnei huarahi ka taea te hanga anga mā te hono i tētahi paparanga tioata kotahi SiC angiangi ki tētahi paparanga rerekē (paparanga tautoko).

E whakaatu ana te Pikitia 3 i te rere o te tukanga:

Tuatahi, ka hangaia he paparanga wehewehe i te hohonutanga kua tohua ki runga i te mata o te tioata kotahi SiC mā te whakaurunga ira hauwai, mā ngā tikanga rite rānei. Kātahi ka herea te tioata kotahi SiC kua tukatukahia ki tētahi papa tautoko papatahi, ā, ka tukuna ki te pēhanga me te wera. Mā tēnei ka taea te whakawhiti me te wehenga angitu o te paparanga tioata kotahi SiC ki runga i te papa tautoko.

Ka tukatukahia te mata o te paparanga SiC kua wehea kia tutuki ai te papatahi e hiahiatia ana, ā, ka taea te whakamahi anō i ngā tukanga hononga o muri mai. Ki te whakatauritea ki te tapahi tuku iho o ngā tioata SiC, ka whakaitihia e tēnei tikanga te tono mō ngā rauemi utu nui. Ahakoa kei te mau tonu ngā wero hangarau, kei te kaha haere tonu te rangahau me te whanaketanga kia taea ai te hanga wafer iti ake te utu.

I te mea he tino pakeke, he pumau hoki te matū o te SiC—e ātete ana ki ngā tauhohenga i te pāmahana rūma—me whakakanapa ā-ringa hei tango i ngā poka huri pai, hei whakaiti i te kino o te mata, hei whakakore i ngā karawarawa, ngā poka, me ngā hapa o te kiri karaka, hei whakaiti i te taratara o te mata, hei whakapai ake i te papatahi, me te whakarei ake i te kounga o te mata.

Hei whakatutuki i tētahi mata oro kounga teitei, me:

Whakatikatikahia ngā momo whakakoi,

Whakaitihia te rahi o te matūriki,

Arotauhia ngā tawhā tukanga,

Kōwhiria ngā rauemi whakakanapa me ngā papa e tika ana te mārō.

E whakaatu ana te Pikitia 7 ka taea e te oro taha-rua me ngā mea whakakoi 1 μm te whakahaere i te papatahi me te rerekētanga matotoru i roto i te 10 μm, me te whakaiti i te taratara o te mata ki te 0.25 nm.

3.2 Te Whakakanapa Matū Ā-Mīhini (CMP)

Ka whakakotahi te Whakakanapa Matū Ā-ringa (CMP) i te karawarawa matūriki tino pai me te whakairo matū hei hanga i tētahi mata maeneene, papatahi ki runga i te rauemi e tukatukahia ana. Ko te kaupapa matua ko:

Ka puta he tauhohenga matū i waenganui i te paru whakakanapa me te mata o te paparanga, ka hanga he paparanga ngohengohe.

Mā te waku i waenganui i ngā matūriki whakakoi me te paparanga ngohengohe ka tangohia te rauemi.

Ngā painga o te CMP:

Ka wikitoria i ngā ngoikoretanga o te oro ā-mīhini, ā-matū rānei,

Ka whakatutuki i te whakapūmautanga ā-ao me te ā-rohe,

Ka whakaputa i ngā mata he papatahi teitei, he iti hoki te taratara,

Kāore e waiho he kino ki te mata, ki raro rānei.

Ngā taipitopito:

Ka neke te angaanga i raro i te pēhanga e pā ana ki te papa oro.

Ka whai wāhi ngā mea whakakoi i te tauine nanometer (hei tauira, SiO₂) i roto i te paru ki te kutikuti, te whakaiti i ngā hononga honohono Si–C me te whakarei ake i te tango rauemi.

Ngā momo Tikanga CMP:

Te Whakakanapa Koreutu: Ka whakatarewahia ngā mea whakakanapa (hei tauira, te SiO₂) i roto i te paru. Ka puta te tango rauemi mā te whakakanapa tinana-toru (te anga-papa-kanapa). Me whakahaere tika te rahi o te whakakanapa (te nuinga o te wā ko te 60–200 nm), te pH, me te pāmahana kia pai ake ai te ōritetanga.

Te Whakakanapa Whakakoi Pumau: Kua whakauruhia ngā mea whakakanapa ki roto i te papa whakakanapa hei ārai i te kohikohinga—he mea tino pai mō te tukatuka tino tika.

Te Horoi i Muri i te Whakakanapa:

Ko ngā papa wafer kua orohia ka pāngia e:

Te horoi matū (tae atu ki te tango i te wai DI me ngā toenga paru),

te horoi wai DI, me te

Te whakamaroke hauota wera

hei whakaiti i ngā poke o te mata.

Kounga me te Mahi o te Mata

Ka taea te whakaiti i te taratara o te mata ki te Ra < 0.3 nm, kia tutuki ai ngā whakaritenga epitaxy semiconductor.

Te Whakamaherehere Ao: Mā te whakakotahitanga o te whakangawari matū me te tango ā-ringa ka whakaiti i ngā karawarawa me te whakairo kore taurite, ka pai ake te mahi i ngā tikanga ā-ringa, ā-matū rānei.

Teitei o te Whai Hua: He pai mō ngā rauemi mārō, pakarukaru hoki pērā i te SiC, me ngā tere tango rauemi neke atu i te 200 nm/h.

Ētahi atu Tikanga Whakakanapa Hou

Haunga te CMP, kua whakaarohia ētahi atu tikanga kē atu, tae atu ki:

Te whakakanapa hikohiko, te whakakanapa, te whakairo rānei mā te āwhina a te kaiwhakakōkī, me

Te whakakanapa i te iwi matū.

Heoi, kei te wāhanga rangahau tonu ēnei tikanga, ā, kua āta whanake haere nā ngā āhuatanga uaua o te rauemi SiC.

Hei whakamutunga, ko te tukatuka SiC he tukanga āta haere hei whakaiti i te piko me te taratara hei whakapai ake i te kounga o te mata, he mea nui te whakahaere i te papatahi me te taratara puta noa i ia wāhanga.

Hangarau Tukatuka

I te wā hurihanga o te papa, ka whakamahia he paraoa taimana me ngā rahi matūriki rerekē hei huri i te papa ki te papatahi me te taratara o te mata e hiahiatia ana. Whai muri i tēnei ka whakakanapahia, mā te whakamahi i ngā tikanga whakakanapa ā-pūkaha me te ā-matū (CMP) hei whakaputa i ngā papa silicon carbide (SiC) kua whakakanapahia, kāore he kino.

I muri i te whakakanapa, ka tirotirohia te kounga o ngā papa SiC mā te whakamahi i ngā taputapu pēnei i ngā karuārai whatu me ngā inenga hihi-X hei whakarite kia tutuki ngā tawhā hangarau katoa i ngā paerewa e hiahiatia ana. Hei whakamutunga, ka horoia ngā papa kua whakakanapatia mā te whakamahi i ngā kaihoroi motuhake me te wai tino parakore hei tango i ngā poke o te mata. Kātahi ka whakamaroketia mā te whakamahi i te hau hauota tino parakore me ngā whakamaroke hurihuri, hei whakaoti i te tukanga whakaputa katoa.

Whai muri i ngā tau maha o te whakapau kaha, kua kitea he ahunga whakamua nui i roto i te tukatuka tioata kotahi SiC i roto i Haina. I roto i te motu, kua angitu te whakawhanake i ngā tioata kotahi 4H-SiC kua pania ki te haurua-whakamātao 100 mm, ā, ka taea te whakaputa i ngā tioata kotahi momo-n 4H-SiC me te 6H-SiC i roto i ngā puranga. Kua whakawhanakehia kētia e ngā kamupene pēnei i a TankeBlue me TYST ngā tioata kotahi SiC 150 mm.

Mō te hangarau tukatuka anga SiC, kua tūhuratia e ngā umanga ā-rohe ngā tikanga me ngā huarahi tukatuka mō te tapatapahi, te huri, me te whakakanapa tioata. Ka taea e rātou te whakaputa tauira e tutuki ana i ngā whakaritenga mō te hanga taputapu. Heoi, ki te whakaritea ki ngā paerewa o te ao, kei te noho tonu te kounga tukatuka mata o ngā anga ā-rohe ki muri. He maha ngā take:

He tino tiakina ngā ariā SiC o te ao me ngā hangarau tukatuka, ā, he uaua ki te uru atu.

Kāore he rangahau ariā me te tautoko mō te whakapai ake me te arotau i ngā tukanga.

He nui te utu mō te kawemai i ngā taputapu me ngā wāhanga o tāwāhi.

Kei te whakaatu tonu ngā rangahau ā-rohe mō te hoahoa taputapu, te tika o te tukatuka, me ngā rauemi i ngā rerekētanga nui ki ngā taumata o te ao.

I tēnei wā, ko te nuinga o ngā taputapu tino tika e whakamahia ana i Haina he mea kawemai. Me whakapai ake anō hoki ngā taputapu me ngā tikanga whakamātautau.

I te whanaketanga tonu o ngā haurua-ā-ira tuatoru o te whakatupuranga, kei te piki haere tonu te whānui o ngā papa tioata kotahi SiC, me te pikinga ake o ngā whakaritenga mō te kounga tukatuka mata. Kua riro te hangarau tukatuka wafer hei tētahi o ngā mahi tino uaua i muri i te tipu tioata kotahi SiC.

Hei whakatika i ngā wero o nāianei i roto i te tukatuka, he mea nui kia akohia anō ngā tikanga e pā ana ki te tapahi, te huri, me te whakakanapa, me te tūhura i ngā tikanga me ngā huarahi tukatuka e tika ana mō te hanga papa SiC. I taua wā anō, me ako mai i ngā hangarau tukatuka matatau o te ao, me te whakamahi i ngā tikanga me ngā taputapu miihini tino tika hei whakaputa i ngā papa kounga teitei.

I te piki haere o te rahi o te wafer, ka piki ake hoki te uaua o te tipu me te tukatuka tioata. Heoi, ka tino pai ake te whai huatanga o te hanga o ngā taputapu o muri mai, ā, ka whakaitihia te utu o ia wae. I tēnei wā, ko ngā kaiwhakarato wafer SiC matua o te ao e tuku ana i ngā hua mai i te 4 inihi ki te 6 inihi te whānui. Kua tīmata kē ngā kamupene matua pēnei i a Cree me II-VI ki te whakamahere mō te whakawhanake i ngā raina whakaputa wafer SiC 8-inihi.