Ngā Mātāpono Hangarau me ngā Tukanga o ngā Wafer Epitaxial LED

Mai i te mātāpono mahi a ngā rama LED, e kitea ana ko te rauemi wafer epitaxial te wāhanga matua o te rama LED. Inaa, ko ngā tawhā matua optoelectronic pēnei i te roanga ngaru, te kanapa, me te ngaohiko whakamua ka whakatauhia nuitia e te rauemi epitaxial. He mea nui te hangarau me ngā taputapu wafer epitaxial ki te tukanga hanga, ko te Metal-Organic Chemical Vapor Deposition (MOCVD) te tikanga matua mō te whakatipu i ngā paparanga tioata kotahi angiangi o ngā matū III-V, II-VI, me ō rātou koranu. Kei raro nei ētahi o ngā au o te hangarau wafer epitaxial LED ā muri ake nei.

1. Whakapai ake i te Tukanga Tipu e Rua-Hipanga

I tēnei wā, e rua ngā taahiraa o te tukanga whakatipu e whakamahia ana e te hanga arumoni, engari he iti noa te maha o ngā papa ka taea te uta i te wā kotahi. Ahakoa kua pakari ngā pūnaha 6-wafer, kei te whanake tonu ngā mīhini e whakahaere ana i te 20 wafer. Ko te whakanui ake i te maha o ngā wafer ka arahi ki te kore e ōrite te rahi o ngā paparanga epitaxial. Ka arotahi ngā whanaketanga ā muri ake nei ki ngā huarahi e rua:

• Te whakawhanake i ngā hangarau e taea ai te uta i ngā papa maha ki roto i te rūma tauhohenga kotahi, kia pai ake ai mō te whakaputa nui me te whakaiti i te utu.
• Te whakatairanga i ngā taputapu angiangi kotahi tino aunoa, ka taea te tukurua.

2. Hangarau Epitaxy Āhuatanga Kohu Waipiro (HVPE)

Mā tēnei hangarau ka taea te tipu tere o ngā kiriata matotoru me te iti o te kiato o te nekehanga, ka taea te whakamahi hei papa mō te tipu homoepitaxial mā te whakamahi i ētahi atu tikanga. Hei tāpiri, ko ngā kiriata GaN kua wehea mai i te papa ka taea te whakamahi hei whakakapi i ngā maramara GaN kotahi-kiriata. Heoi, he ngoikoretanga anō hoki tō te HVPE, pērā i te uaua ki te whakahaere matotoru tika me ngā hau tauhohenga waikura e aukati ana i te whakapai ake i te parakore o ngā rauemi GaN.

HVPE-GaN i pania ki te Si

(a) Hanganga o te tauhohenga HVPE-GaN kua tāpirihia ki te Si; (b) Whakaahua o te HVPE-GaN kua tāpirihia ki te Si, 800 μm te matotoru;

(c) Te tohatoha o te kukū kaikawe kore utu i te diameter o te HVPE-GaN kua tāpirihia ki te Si

3. Te Tipu Epitaxial Whiriwhiri, te Hangarau Tipu Epitaxial Taha rānei

Ka taea e tēnei tikanga te whakaiti i te kiato o te nekehanga me te whakapai ake i te kounga tioata o ngā paparanga epitaxial GaN. Ko ngā mahi o te tukanga ko:

• Te whakatakoto i tētahi paparanga GaN ki runga i tētahi papa e tika ana (hapaira, SiC rānei).
• Te whakatakoto i tētahi paparanga kopare SiO₂ polycrystalline ki runga.
• Te whakamahi i te whakaahua-ipurangi me te whakairo hei hanga matapihi GaN me ngā rīpene kopare SiO₂.I te tipu o muri mai, ka tipu poutū a GaN i roto i ngā matapihi, kātahi ka tipu taha ki runga ake i ngā rīpene SiO₂.

Te angaanga GaN-i-runga-i-te-hapai a XKH

4. Hangarau Pendeo-Epitaxy

Ka whakaitihia e tēnei tikanga ngā hapa whatunga i puta mai i te kore ōrite o te whatunga me te wera i waenga i te papa me te paparanga epitaxial, ka whakarei ake i te kounga o te tioata GaN. Kei roto i ngā mahi:

• Te whakatipu i tētahi paparanga epitaxial GaN ki runga i tētahi papa e tika ana (6H-SiC, Si rānei) mā te whakamahi i tētahi tukanga e rua-taahiraa.
• Te mahi i te whakairo tīpako o te paparanga epitaxial ki raro ki te papa, ka hangaia he pou tauutuutu (GaN/pūtāhui/papa) me ngā hanganga awaawa.
• E tipu haere ana ngā paparanga GaN tāpiri, e toro atu ana ki te taha mai i ngā pakitara taha o ngā pou GaN taketake, e iri ana ki runga ake i ngā awaawa.Nā te mea kāore he kōpare e whakamahia ana, ka karohia te pa atu o te GaN me ngā rauemi kōpare.

Te anga GaN-on-Silicon a XKH

5. Te Whakawhanaketanga o ngā Rauemi Epitaxial UV LED Roanga-Poto

He tūāpapa pakari tēnei mō ngā rama LED mā e ahu mai ana i te phosphorus UV-excited. He maha ngā phosphorus tino whai hua ka taea te whakaoho e te mārama UV, e tuku ana i te pai o te kanapa teitei ake i te pūnaha YAG:Ce o nāianei, ā, nā reira ka whakatairanga i te mahi a te rama LED mā.

6. Hangarau Maramara Puna Maha-Kuantum (MQW)

I roto i ngā hanganga MQW, ka tāpirihia ngā poke rerekē i te wā e tipu ana te paparanga e whakaputa ana i te mārama hei hanga i ngā puna irahiko rerekē. Mā te whakakotahitanga o ngā photon e tukuna ana mai i ēnei puna ka puta tika te mārama mā. Ka whakapai ake tēnei tikanga i te whai huatanga o te māramatanga, ka whakaiti i ngā utu, ka whakangawari i te takai me te whakahaere ara iahiko, ahakoa he nui ake ngā wero hangarau.

7. Te Whakawhanaketanga o te Hangarau "Whakamahi Anō i ngā Whakaahua"

I te marama o Hānuere 1999, i whakawhanakehia e te kamupene Sumitomo o Hapani tētahi rama LED mā te whakamahi i te rauemi ZnSe. Ko te hangarau nei ko te whakatipu i tētahi kiriata angiangi CdZnSe ki runga i tētahi papa tioata kotahi ZnSe. Ina whakakāhia te hiko, ka tukuna e te kiriata te mārama kikorangi, ka taunekeneke ki te papa ZnSe hei whakaputa i te mārama kōwhai tāpiri, ka hua ake he mārama mā. Waihoki, i whakarārangihia e te Pokapū Rangahau Photonics o Te Whare Wānanga o Boston tētahi matū haurua-ā-ira AlInGaP ki runga i tētahi rama GaN-LED kikorangi hei whakaputa i te mārama mā.

8. Rere Tukanga Angiangi Epitaxial LED

① Te Hanganga o te Angaanga Epitaxial:
Papaaho → Hoahoa hanganga → Tipu paparanga pūmau → Tipu paparanga GaN momo-N → Tipu paparanga tuku-mārama MQW → Tipu paparanga GaN momo-P → Whakamahana → Whakamātautau (whakaahua-whakaahua, hihi-X) → Wafer Epitaxial

② Te Hanga Maramara:
Te papa epitaxial → Te hoahoa me te hanga kopare → Te whakaahua whakaahua → Te whakairo katote → Te hiko momo-N (te whakatakotoranga, te whakamahana, te whakairo) → Te hiko momo-P (te whakatakotoranga, te whakamahana, te whakairo) → Te tapahi → Te tirotiro me te whakarōpū maramara.

Te anga GaN-on-SiC a ZMSH