Ngā Wafer Hiraka me ngā Wafer Karāhe: He aha tā tātou e horoi ana? Mai i te Matū Rauemi ki ngā Otinga Horoi e Hangai ana ki te Tukanga

Ahakoa he rite tonu te whāinga o ngā anga silicon me ngā anga karāhe kia "horoia", he tino rerekē ngā wero me ngā momo rahunga e pā ana ki a rāua i te wā horoi. I puta mai tēnei rerekētanga i ngā āhuatanga rauemi me ngā whakaritenga whakatakotoranga o te silicon me te karāhe, tae atu ki te "whakaaro" motuhake o te horoinga e ahu mai ana i ā rāua whakamahinga whakamutunga.

Tuatahi, me whakamārama tātou: He aha tonu tā tātou e horoi nei? He aha ngā poke kei roto?

E whā ngā wāhanga e taea ai te whakarōpū i ngā poke:

1. Ngā Parahanga Matūriki

   • Puehu, matūriki whakarewa, matūriki waro, matūriki whakakoi (mai i te tukanga CMP), me ētahi atu.

   • Ka taea e ēnei poke te whakararu i te tauira, pērā i te poto o ngā hiko, te ara iahiko tuwhera rānei.

2. Ngā Parahanga Ora

   • Kei roto ko ngā toenga photoresist, ngā tāpiringa kapia, ngā hinu kiri tangata, ngā toenga whakarewa, me ētahi atu.

   • Ka taea e ngā poke rauropi te hanga i ngā kopare e aukati ana i te whakairo, i te whakaurunga rānei o ngā katote, ā, ka whakaiti i te piri o ētahi atu kiriata angiangi.

3. Ngā Parahanga Ion Konganuku

   • Ko te rino, te parahi, te konutai, te pāhare pākawa, te konupūmā, me ētahi atu, e ahu mai ana i ngā taputapu, ngā matū, me te pā ki te tangata.

   • I roto i ngā haurua-ā-ira, he poke "whakamate" ngā katote konganuku, e whakauru ana i ngā taumata pūngao ki te awhi rāhui, e whakanui ana i te ia turuturu, e whakapoto ana i te roanga o te ora o te kaikawe, ā, e tino kino ana hoki ngā āhuatanga hiko. I roto i te karāhe, ka pā pea ēnei ki te kounga me te piri o ngā kiriata angiangi e whai ake nei.

4. Paparanga Waikura Taketake

   • Mō ngā paparanga silicon: Ka puta noa mai he paparanga angiangi o te silicon dioxide (Native Oxide) ki runga i te mata i te rangi. He uaua ki te whakahaere i te matotoru me te ōritetanga o tēnei paparanga waikura, ā, me tango katoa i te wā e hangaia ana ngā hanganga matua pērā i ngā waikura kuaha.

   • Mō ngā anga karāhe: He hanganga whatunga silica te karāhe tonu, nō reira kāore he take o te "tango i tētahi paparanga waikura taketake." Heoi anō, kua whakarerekētia pea te mata nā te poke, ā, me tango atu tēnei paparanga.

I. Ngā Whāinga Matua: Te Rerekētanga i waenga i te Mahi Hiko me te Tino Pai o te Tinana

• Ngā Waferi Silikon

  • Ko te whāinga matua o te horoi ko te whakarite i te mahi hiko. Ko ngā whakaritenga he whakauru i te tatau me te rahi o ngā matūriki (hei tauira, me tango pai ngā matūriki ≥0.1μm), ngā kukū katote konganuku (hei tauira, me whakahaere te Fe, Cu ki te ≤10¹⁰ ngota/cm², iti iho rānei), me ngā taumata toenga rauropi. Ahakoa te poke moroiti ka arahi pea ki ngā poto o te ara iahiko, ngā ia turuturu, te korenga rānei o te kaha o te waikura kuaha.

• Ngā Wafer Karāhe

  • Hei papa, ko ngā whakaritenga matua ko te tino pai o te tinana me te pumau o te matū. Ka arotahi ngā whakatakotoranga ki ngā āhuatanga whānui pēnei i te korenga o ngā karawarawa, ngā paru e kore e taea te tango, me te pupuri i te taratara o te mata me te āhua taketake. Ko te whāinga matua o te horoi ko te whakarite kia ma te tirohanga me te piri pai mō ngā tukanga e whai ake nei pēnei i te paninga.

II. Te Āhua Rauemi: Te Rerekētanga Taketake i waenga i te Kiriata me te Kore-āhua

• Hiraka

  • He rauemi tioata te silicon, ā, ka tupu noa i tōna mata he paparanga waikura silicon dioxide (SiO₂) kāore i te ōrite. He mōrearea tēnei paparanga waikura ki te mahi hiko, ā, me tango katoa, me te ōrite hoki.

• Karāhe

  • He whatunga silica kore-āhua te karāhe. He rite te hanganga o tōna rauemi papatipu ki te paparanga waikura silicon o te silicon, arā, ka taea te keri tere e te waikawa hydrofluoric (HF) ā, ka ngāwari hoki ki te horo kaha o te kawakore, ka piki ake te taratara o te mata, te rerekētanga rānei. Ko tēnei rerekētanga taketake e kī ana ka taea e te horoinga o te papa silicon te aro atu ki te mārama, te keri whakahaeretia hei tango i ngā poke, ko te horoinga o te papa karāhe me tino tupato kia kore ai e pakaru te rauemi turanga.

III. Te Whakataurite i ngā Wairewa Horoi

I runga i ngā whāinga me ngā āhuatanga o te rauemi kua whakahuatia ake nei, he rerekē ngā otinga horoi mō ngā papa silicon me te karāhe:

• Te Tukanga Horoi Wafer Karāhe

  • I tēnei wā, ko te nuinga o ngā wheketere tukatuka karāhe e whakamahi ana i ngā tikanga horoi e ahu mai ana i ngā āhuatanga o te rauemi karāhe, e whakawhirinaki ana ki ngā kaihoroi kawakore ngoikore.

  • Ngā Āhuatanga o te Kaihoko Horoi:Ko ēnei kaihoroi motuhake he kawakore ngoikore te nuinga, me te pH tata ki te 8-9. Kei roto i ēnei he surfactants (hei tauira, te alkyl polyoxyethylene ether), he kaihoko chelating whakarewa (hei tauira, te HEDP), me ngā āwhina horoi rauropi, i hangaia hei whakaemulsify me te wawahi i ngā poke rauropi pērā i ngā hinu me ngā tapumati, me te iti rawa o te waikura ki te anga karāhe.

  • Rere Tukanga:Ko te tukanga horoi noa ko te whakamahi i tētahi kukū motuhake o ngā kaihoroi kawakore ngoikore i ngā pāmahana mai i te pāmahana rūma ki te 60°C, me te horoinga ultrasonic. Whai muri i te horoinga, ka horoia ngā paparanga maha ki te wai parakore, ā, ka whakamaroke mārie (hei tauira, te hiki puhoi, te whakamaroke kohu IPA rānei). Ka tutuki pai i tēnei tukanga ngā whakaritenga o te paparanga karāhe mō te ma o te tirohanga me te ma whānui.

• Te Tukanga Horoi Angiangi Silicon

  • Mō te tukatuka haurua-haurua, ka horoia ngā papa silicon ki te RCA paerewa, he tikanga horoi tino whai hua e taea ai te whakatika pūnaha i ngā momo poke katoa, me te whakarite kia tutukihia ngā whakaritenga mahi hiko mō ngā taputapu haurua-haurua.

IV. Ina tutuki te karāhe i ngā paerewa "ma" teitei ake

Ina whakamahia ngā anga karāhe i roto i ngā tono e hiahia ana kia tino tika te tatau matūriki me ngā taumata katote whakarewa (hei tauira, hei papa i roto i ngā tukanga haurua-ā-ira, hei mata whakatakoto kiriata angiangi pai rānei), kāore pea e ranea te tukanga horoi ā-roto. I tēnei take, ka taea te whakamahi i ngā mātāpono horoi haurua-ā-ira, me te whakauru i tētahi rautaki horoi RCA kua whakarerekētia.

Ko te kaupapa matua o tēnei rautaki he whakaiti me te arotau i ngā tawhā tukanga RCA paerewa kia urutau ki te āhua tairongo o te karāhe:

• Te Tango i ngā Parahanga Ora:Ka taea te whakamahi i ngā otinga SPM, i te wai ozone ngawari rānei, hei wawahi i ngā poke waro mā te waikura kaha.

• Te Tango i te Matūriki:Ka whakamahia te otinga SC1 tino waimeha i ngā pāmahana iti iho me ngā wā maimoatanga poto ake hei whakamahi i ōna pānga pana hiko me te whakairo moroiti hei tango i ngā matūriki, me te whakaiti hoki i te waikura i runga i te karāhe.

• Te Tango i te Ion Konganuku:Ka whakamahia te otinga SC2 kua whakaranua, ngā otinga waikawa hauwai hauwai/waikawa hauota kua whakaranua rānei hei tango i ngā poke whakarewa mā te chelation.

• Ngā Ārai Tino Kaha:Me tino karohia te DHF (di-ammonium fluoride) hei ārai i te waikura o te papa karāhe.

I roto i te tukanga whakarerekētanga katoa, mā te whakakotahi i te hangarau megasonic ka tino whakarei ake i te whai huatanga o te tango i ngā matūriki nano-rahi, ā, he ngawari ake ki te mata.

Whakamutunga

Ko ngā tukanga horoi mō ngā papa silicon me te karāhe he hua kore e taea te karo o te hangarau whakamuri i runga i ngā whakaritenga tono whakamutunga, ngā āhuatanga rauemi, me ngā āhuatanga ā-tinana me ā-matū. Ko te horoinga papa silicon e rapu ana i te "ma taumata-atomika" mō te mahi hiko, ko te horoinga papa karāhe e arotahi ana ki te whakatutuki i ngā mata ā-tinana "tino pai, kāore i pakaru". I te mea kei te piki haere te whakamahinga o ngā papa karāhe i roto i ngā tono haurua-ira, ka whanake haere tonu ā rātou tukanga horoi ki tua atu i te horoinga kawakore ngoikore tuku iho, ka whakawhanake i ngā otinga kua whakatikatikaina, kua whakaritea ake pērā i te tukanga RCA kua whakarerekētia kia tutuki ai ngā paerewa ma teitei ake.