Ngā papa SOI (Silicon-On-Insulator)he rauemi haurua-ā-ira motuhake kei roto he paparanga silicon tino-angiangi i hangaia ki runga i te paparanga waikura ārai. Ka tukuna e tēnei hanganga hanawiti ahurei he whakarei ake i te mahi mō ngā taputapu haurua-ā-ira.
Te Hanganga Hanganga:
Papa Pūrere (Te Hiraka Runga):
Ko te matotoru mai i ētahi nanometer ki ētahi maikiromita, e mahi ana hei paparanga hohe mō te hanga transistor.
Paparanga Waikura Tanumia (POUAKA):
He paparanga ārai hiko hauhā (0.05-15μm te matotoru) e wehe ana i te paparanga taputapu mai i te papa raro mā te hiko.
Papa Tūāpapa:
He silicon papatipu (100-500μm te matotoru) e tautoko ana i te miihini.
E ai ki te hangarau tukanga whakarite, ka taea te whakarōpū i ngā ara tukanga matua o ngā anga silicon SOI hei: SIMOX (hangarau wehe werohanga hāora), BESOI (hangarau angiangi hononga), me Smart Cut (hangarau tango mohio).
Ko te SIMOX (hangarau wehe werohanga hāora) he tikanga e uru ana ki te werohanga i ngā katote hāora pūngao-nui ki roto i ngā paparanga silicon hei hanga i tētahi paparanga silicon hauhā kua whakauruhia, kātahi ka whakamahanahia ki te pāmahana teitei hei whakatika i ngā hapa whatunga. Ko te matua he werohanga hāora katote tika hei hanga i tētahi paparanga hāora kua tanumia.
Ko te BESOI (Hangarau Whakaiti Hononga) he hononga i ngā anga silicon e rua, kātahi ka whakaiti i tētahi mā te huri ā-ringa me te whakairo matū hei hanga i tētahi hanganga SOI. Ko te uho kei roto i te hononga me te whakaiti.
Mā te Smart Cut (hangarau Intelligent Exfoliation) ka hangaia he paparanga exfoliation mā te werohanga ira hauwai. Whai muri i te hononga, ka mahia he maimoatanga wera hei tango i te kiri o te paparanga silicon i te taha o te paparanga ira hauwai, ka hangaia he paparanga silicon tino angiangi. Ko te uho ko te tango i te werohanga hauwai.
I tēnei wā, kei reira tētahi atu hangarau e mōhiotia ana ko SIMBOND (hangarau here werohanga hāora), i whakawhanakehia e Xinao. Inaa, he ara e whakakotahi ana i ngā hangarau wehe werohanga hāora me te here. I roto i tēnei ara hangarau, ka whakamahia te hāora i werohangahia hei paparanga ārai angiangi, ā, ko te paparanga hāora i tanumia he paparanga waikura wera. Nō reira, ka whakapai ake i ngā tawhā pēnei i te ōritetanga o te silicon o runga me te kounga o te paparanga hāora i tanumia.
He rerekē ngā tawhā mahi o ngā anga silicon SOI i hangaia e ngā huarahi hangarau rerekē, ā, he pai mō ngā horopaki tono rerekē.
Kei raro nei he ripanga whakarāpopototanga o ngā painga matua o ngā papa silicon SOI, me ōna āhuatanga hangarau me ngā horopaki tono tūturu. Ki te whakatauritea ki te silicon papatipu tuku iho, he nui ngā painga o te SOI i roto i te taurite o te tere me te whakapaunga hiko. (PS: He tata te mahi a te 22nm FD-SOI ki tērā o te FinFET, ā, kua heke te utu mā te 30%.)
| Painga Mahi | Kaupapa Hangarau | Whakaaturanga Motuhake | Ngā horopaki tono noa |
| Te Pūngao Parasitic Iti | Ka ārai te paparanga ārai (BOX) i te hononga utu i waenga i te taputapu me te papa | Kua piki ake te tere whakawhiti mā te 15%-30%, kua heke te whakapaunga hiko mā te 20%-50% | 5G RF, Maramara whakawhitiwhiti auau-teitei |
| Te Whakaiti i te Au Puta | Ka pehia e te paparanga ārai ngā ara o te rerenga iahiko | Kua whakaitihia te ia turuturu mā te >90%, kua roa ake te ora o te pākahiko | Ngā taputapu IoT, Ngā taputapu hiko ka taea te mau |
| Te Pakaritanga o te Irahiko Whakarei Ake | Ka ārai te paparanga ārai i te kohikohinga utu i puta mai i te hihi | Kua pai ake te manawanui ki te irahiko i te 3-5 ngā wā, kua whakaitihia ngā raruraru kotahi-takahanga | Waka ātea, Taputapu ahumahi karihi |
| Mana Pānga Hongere-Poto | Ka whakaitihia e te paparanga silicon angiangi te pokanoa o te mara hiko i waenga i te waikeri me te pūtake | Te pumau o te ngaohiko paepae kua whakapaitia, te pari paepae iti kua arotauhia | Ngā maramara arorau pūnga matatau (<14nm) |
| Whakahaere Wera Whakapai Ake | Ka whakaitihia e te paparanga ārai te hononga kawe wera | 30% te iti o te kohikohinga wera, 15-25°C te iti iho o te pāmahana whakahaere | Ngā IC 3D, Ngā hikohiko motuka |
| Arotau Auau-Tiketike | Te whakaiti i te kaha o te pirinoa me te whakanui ake i te nekehanga kawe | 20% te iti iho o te whakaroa, e tautoko ana i te tukatuka tohu >30GHz | Whakawhitiwhiti kōrero mmWave, Maramara whakawhitiwhiti kōrero amiorangi |
| Te Ngāwari o te Hoahoa | Kāore e hiahiatia he tāpiringa pai, e tautoko ana i te whakahāngai tuara | 13%-20% te iti iho o ngā mahi tukanga, 40% te teitei ake o te kiato whakauru | Ngā IC tohu-whakaranu, Ngā Pūoko |
| Ārai Mate Pupuri | Ka wehea e te paparanga ārai ngā hononga PN pirinoa | Kua piki ake te paepae iahiko whakapuru ki >100mA | Ngā taputapu hiko ngaohiko teitei |
Hei whakarāpopototanga, ko ngā painga matua o te SOI: he tere tana oma, he pai ake hoki te whakamahi i te hiko.
Nā ēnei āhuatanga mahi o te SOI, he whānuitia ōna tono i roto i ngā mara e hiahia ana ki te mahi auau tino pai me te mahi whakapau hiko tino pai.
E ai ki te whakaaturanga i raro nei, i runga i te ōwehenga o ngā āpure tono e pā ana ki te SOI, ka kitea ko te nuinga o te mākete SOI ko ngā taputapu RF me te hiko.
| Mara tono | Te Wāhanga Mākete |
| RF-SOI (Auautanga Reo Irirangi) | 45% |
| Mana SOI | 30% |
| FD-SOI (Kua Pau Katoa) | 15% |
| SOI whatu | 8% |
| Pūoko SOI | 2% |
I te tipu haere o ngā mākete pēnei i te whakawhitiwhiti kōrero pūkoro me te taraiwa motuhake, e matapaetia ana hoki ka mau tonu te tere tipu o ngā anga silicon SOI.
Ko XKH, hei kaihanga auaha matua i roto i te hangarau wafer Silicon-On-Insulator (SOI), e tuku ana i ngā otinga SOI whānui mai i te R&D ki te whakaputa rahinga mā te whakamahi i ngā tukanga hanga matua o te ahumahi. Kei roto i tā mātou putea katoa ngā wafer SOI 200mm/300mm e kapi ana i ngā momo RF-SOI, Power-SOI me FD-SOI, me te mana kounga pakari e whakarite ana i te ōritetanga mahi tino pai (te matotoru ōrite i roto i te ±1.5%). E tuku ana mātou i ngā otinga ritenga me te matotoru o te paparanga waikura tanumia (BOX) mai i te 50nm ki te 1.5μm me ngā whakatakotoranga ātete rerekē hei whakatutuki i ngā whakaritenga motuhake. Mā te whakamahi i te 15 tau o te tohungatanga hangarau me te mekameka tuku kaha o te ao, ka whakaratohia e mātou he rauemi papa SOI kounga teitei ki ngā kaihanga semiconductor taumata teitei o te ao, e āhei ai ngā auahatanga maramara matatau i roto i ngā whakawhitiwhitinga 5G, ngā hikohiko motuka, me ngā tono matauranga horihori.
XKH'ngā papa SOI:
Wā tuku: 24 Paenga-whāwhā 2025