He waitara a SiC wafer

Ko nga wafers Silicon carbide (SiC) kua noho hei taputapu whiriwhiri mo te hiko teitei, te auau teitei, me te hikohiko teitei-nui puta noa i nga waahanga miihini, hiko hou, me nga waahanga rererangi. Kei roto i ta maatau putea nga momo polytypes matua me nga kaupapa doping—hauota-doped 4H (4H-N), high-purity semi-insulating (HPSI), hauota-doped 3C (3C-N), me te momo-p 4H/6H (4H/6H-P)—e tapaea ana i roto i nga reanga kounga e toru: PRIME (kua oti te whakakoi, te whakakorikori taputapu me nga taputapu DUM) RANGAHAU (papanga epi ritenga me nga whakaaturanga doping mo te R&D). 2″, 4″, 6″, 8″, me te 12″ te roa o te angiangi kia rite ki nga taputapu tuku iho me nga papanga teitei. Ka tukuna ano e matou nga putea monocrystalline me nga tioata kakano e tika ana hei tautoko i te tipu o te karaihe i roto i te whare.

Ko o tatou angiangi 4H-N e whakaatu ana i te kiato kawe mai i te 1×10¹⁶ ki te 1×10¹⁹ cm⁻³ me te parenga o te 0.01–10 Ω·cm, e tuku ana i te nekeneke irahiko me nga mara pakaru i runga ake i te 2 MV/cm—he pai mo nga diodes Schottky, MOSFETs. Ko nga taputapu HPSI kua neke ake i te 1×10¹² Ω·cm te parenga me te mootiti moroiti kei raro iho i te 0.1 cm⁻², kia iti te rerenga mo nga taputapu RF me te ngaruiti. Cubic 3C-N, e waatea ana i roto i nga whakatakotoranga 2″ me te 4″, ka taea te heteroepitaxy ki runga silicon me te tautoko i nga tono whakaahua me te MEMS. Momo-P 4H/6H-P nga angiangi, he mea whakahiato ki te konumohe ki te 1×10¹⁶–5×10¹⁸ cm⁻³, ka whakaahuru i nga hoahoanga taputapu.

Ko nga angiangi PRIME ka whakakorikori matū-miihini ki te <0.2 nm RMS te taratara o te mata, te rereketanga o te matotoru i raro i te 3 µm, me te kopere <10 µm. Ko nga taputapu DUMMY ka whakatere i nga whakamatautau whakahiato me te whakakakahu, engari ko nga mea angiangi RANGAHAU e whakaatu ana i te matotoru o te papa-epi 2–30 µm me te doping. Ko nga hua katoa e whakamanahia ana e te whakamaarama o te hihi-a-rorohiko (te piupiu toka <30 arcsec) me te tirohanga a Raman, me nga whakamatautau hiko—te inenga o te whare, te tohu C-V, me te matawai moroiti—te whakarite kia tutuki te JEDEC me te SEMI.

Ka whakatipuhia nga poiha ki te 150 mm te whanui ma te PVT me te CVD me te 1x10³ cm⁻² me te iti o te micropipe. Ka tapahia nga tioata kakano i roto i te 0.1° o te tuaka-c hei whakapumau i te tipu ka taea te whakaputa me te nui o nga hua tapahi.

Ma te whakakotahi i nga momo polytypes maha, nga momo doping, nga tohu kounga, te rahi angiangi, me te boule i roto i te whare me te hanga kirikiri-kakano, ka whakahiatohia e ta maatau papaapapa SiC nga mekameka tuku me te whakatere i te whanaketanga taputapu mo nga waka hiko, matiti atamai, me nga tono-taiao kino.

He waitara a SiC wafer

Te pikitia angiangi SiC

6inihi 4H-N te pepa raraunga a SiC wafer

6inihi SiC angiangi pepa raraunga
Tawhā	Tawhā-iti	Z Kōeke	P Koeke	Kōeke D
Diamita		149.5–150.0 mm	149.5–150.0 mm	149.5–150.0 mm
Te matotoru	4H‑N	350 µm ± 15 µm	350 µm ± 25 µm	350 µm ± 25 µm
Te matotoru	4H‑SI	500 µm ± 15 µm	500 µm ± 25 µm	500 µm ± 25 µm
Takotoranga Wafer		Tuaka atu: 4.0° ki te <11-20> ±0.5° (4H-N); I runga tuaka: <0001> ±0.5° (4H-SI)	Tuaka atu: 4.0° ki te <11-20> ±0.5° (4H-N); I runga tuaka: <0001> ±0.5° (4H-SI)	Tuaka atu: 4.0° ki te <11-20> ±0.5° (4H-N); I runga tuaka: <0001> ±0.5° (4H-SI)
Kiatotanga Micropipe	4H‑N	≤ 0.2 cm⁻²	≤ 2 cm⁻²	≤ 15 cm⁻²
Kiatotanga Micropipe	4H‑SI	≤ 1 cm⁻²	≤ 5 cm⁻²	≤ 15 cm⁻²
Te ātete	4H‑N	0.015–0.024 Ω·cm	0.015–0.028 Ω·cm	0.015–0.028 Ω·cm
Te ātete	4H‑SI	≥ 1×10¹⁰ Ω·cm	≥ 1×10⁵ Ω·cm
Kaupapa Papatahi Tuatahi		[10-10] ± 5.0°	[10-10] ± 5.0°	[10-10] ± 5.0°
Te Roa Papatahi Tuatahi	4H‑N	47.5 mm ± 2.0 mm
Te Roa Papatahi Tuatahi	4H‑SI	Kaniwha
Whakakorenga Tapa			3 mm
Warp/LTV/TTV/Kopere		≤2.5 µm / ≤6 µm / ≤25 µm / ≤35 µm	≤5 µm / ≤15 µm / ≤40 µm / ≤60 µm
Te taratara	Porohia	Ra ≤ 1 nm
Te taratara	CMP	Ra ≤ 0.2 nm		Ra ≤ 0.5 nm
Nga Kapiti Tapa		Karekau		Te roa whakaemi ≤ 20 mm, kotahi ≤ 2 mm
Papa Hex		Horahanga whakahiato ≤ 0.05%	Horahanga whakahiato ≤ 0.1%	Horahanga whakahiato ≤ 1%
Nga Waahi Polytype		Karekau	Horahanga whakahiato ≤ 3%	Horahanga whakahiato ≤ 3%
Wao whakauru		Horahanga whakahiato ≤ 0.05%		Horahanga whakahiato ≤ 3%
Nga Rakuraku Mata		Karekau		Te roa whakaemi ≤ 1 × te angiangi angiangi
Tipi Tipi		Kore e whakaaetia ≥ 0.2 mm te whanui me te hohonu		Tae atu ki te 7 maramara, ≤ 1 mm ia
TSD (Wehenga Tiu Miro)		≤ 500 cm⁻²		N/A
BPD (Te Wehenga Rererangi Turanga)		≤ 1000 cm⁻²		N/A
Parahanga Mata		Karekau
Te takai		Ripene angiangi maha, ipu angiangi kotahi ranei	Ripene angiangi maha, ipu angiangi kotahi ranei	Ripene angiangi maha, ipu angiangi kotahi ranei

4inihi 4H-N te pepa raraunga a SiC wafer

4inihi te pepa angiangi SiC
Tawhā	Kore MPD Production	Koeke Whakaputa Paerewa (Keke P)	Kōeke Dummy (Kōeke D)
Diamita	99.5 mm–100.0 mm
Matotoru (4H-N)	350 µm±15 µm		350 µm±25 µm
Matotoru (4H-Si)	500 µm±15 µm		500 µm±25 µm
Takotoranga Wafer	Tuaka atu: 4.0° ki te <1120> ±0.5° mo te 4H-N; I runga i te tuaka: <0001> ± 0.5° mo 4H-Si
Kiatotanga Micropipe (4H-N)	≤0.2 cm⁻²	≤2 cm⁻²	≤15 cm⁻²
Kiatotanga Micropipe (4H-Si)	≤1 cm⁻²	≤5 cm⁻²	≤15 cm⁻²
Ātete (4H-N)		0.015–0.024 Ω·cm	0.015–0.028 Ω·cm
Ātete (4H-Si)	≥1E10 Ω·cm		≥1E5 Ω·cm
Kaupapa Papatahi Tuatahi		[10-10] ±5.0°
Te Roa Papatahi Tuatahi		32.5 mm ±2.0 mm
Te Roa Papatahi Tuarua		18.0 mm ±2.0 mm
Takotoranga Papatahi Tuarua		Ka anga ake te Silicon: 90° CW mai i te papa tuatahi ±5.0°
Whakakorenga Tapa		3 mm
LTV/TTV/Kopere	≤2.5 µm/≤5 µm/≤15 µm/≤30 µm		≤10 µm/≤15 µm/≤25 µm/≤40 µm
Te taratara	Ra Polish ≤1 nm; CMP Ra ≤0.2 nm		Ra ≤0.5 nm
Nga Kapiti Tapa Na Te Maama Nui	Karekau	Karekau	Te roa whakaemi ≤10 mm; kotahi te roa ≤2 mm
Nga Pereti Hex Na Te Maama Nui	Horahanga whakahiato ≤0.05%	Horahanga whakahiato ≤0.05%	Horahanga whakahiato ≤0.1%
Nga Rohe Polytype Ma te Maama Maama Nui	Karekau		Horahanga whakahiato ≤3%
Nga Whakauru Wao Ataata	Horahanga whakahiato ≤0.05%		Horahanga whakahiato ≤3%
Nga Rakuraku o te Mata Silicon Na Te Maama Nui	Karekau		Roa whakaemi ≤1 angiangi diameter
Tapahi Tapa Na Te Maama Kaha Teitei	Kore e whakaaetia ≥0.2 mm te whanui me te hohonu		5 whakaaetia, ≤1 mm ia
Ko te Whakakino o te Mata o Silicon Na te Maama Maama Nui	Karekau
Wehenga hurihanga miro	≤500 cm⁻²	N/A
Te takai	Ripene angiangi maha, ipu angiangi kotahi ranei	Ripene angiangi maha, ipu angiangi kotahi ranei	Ripene angiangi maha, ipu angiangi kotahi ranei

4inihi HPSI momo SiC wafer's pepa raraunga

4inihi HPSI momo SiC wafer's pepa raraunga
Tawhā	Kore MPD Koeke Whakaputa (Keke Z)	Koeke Whakaputa Paerewa (Keke P)	Kōeke Dummy (Kōeke D)
Diamita		99.5–100.0 mm
Matotoru (4H-Si)	500 µm ±20 µm		500 µm ±25 µm
Takotoranga Wafer	Tuaka atu: 4.0° ki te <11-20> ±0.5° mo te 4H-N; I runga i te tuaka: <0001> ± 0.5° mo 4H-Si
Kiatotanga Micropipe (4H-Si)	≤1 cm⁻²	≤5 cm⁻²	≤15 cm⁻²
Ātete (4H-Si)	≥1E9 Ω·cm		≥1E5 Ω·cm
Kaupapa Papatahi Tuatahi	(10-10) ±5.0°
Te Roa Papatahi Tuatahi	32.5 mm ±2.0 mm
Te Roa Papatahi Tuarua	18.0 mm ±2.0 mm
Takotoranga Papatahi Tuarua	Ka anga ake te Silicon: 90° CW mai i te papa tuatahi ±5.0°
Whakakorenga Tapa		3 mm
LTV/TTV/Kopere	≤3 µm/≤5 µm/≤15 µm/≤30 µm		≤10 µm/≤15 µm/≤25 µm/≤40 µm
Te taratara (C kanohi)	Porohia	Ra ≤1 nm
Roughness (Si kanohi)	CMP	Ra ≤0.2 nm	Ra ≤0.5 nm
Nga Kapiti Tapa Na Te Maama Nui	Karekau		Te roa whakaemi ≤10 mm; kotahi te roa ≤2 mm
Nga Pereti Hex Na Te Maama Nui	Horahanga whakahiato ≤0.05%	Horahanga whakahiato ≤0.05%	Horahanga whakahiato ≤0.1%
Nga Rohe Polytype Ma te Maama Maama Nui	Karekau		Horahanga whakahiato ≤3%
Nga Whakauru Wao Ataata	Horahanga whakahiato ≤0.05%		Horahanga whakahiato ≤3%
Nga Rakuraku o te Mata Silicon Na Te Maama Nui	Karekau		Roa whakaemi ≤1 angiangi diameter
Tapahi Tapa Na Te Maama Kaha Teitei	Kore e whakaaetia ≥0.2 mm te whanui me te hohonu		5 whakaaetia, ≤1 mm ia
Ko te Whakakino o te Mata o Silicon Na te Maama Maama Nui	Karekau		Karekau
Wehenga Tiu Miro	≤500 cm⁻²	N/A
Te takai		Ripene angiangi maha, ipu angiangi kotahi ranei

Wā tuku: Hune-30-2025

Silicon Carbide Wafers: He Aratohu Matawhānui mo nga Rawa, Hanga, me nga Tono

He waitara a SiC wafer

He waitara a SiC wafer

Te pikitia angiangi SiC

6inihi 4H-N te pepa raraunga a SiC wafer

4inihi 4H-N te pepa raraunga a SiC wafer

4inihi HPSI momo SiC wafer's pepa raraunga