Ngā uku Silicon Carbide me ngā uku semiconductor Silicon Carbide: He rauemi kotahi engari he rerekē ngā whāinga e rua

1. Ngā Whakaritenga Parakore Rerekē mō ngā Rauemi Mata

 

He ngāwari ngā whakaritenga parakore mō te SiC karaehe uku mō āna rauemi paura. I te nuinga o te wā, ka taea e ngā hua karaehe arumoni me te parakore 90%-98% te whakatutuki i te nuinga o ngā hiahia tono, ahakoa ko ngā uku hanganga mahi-teitei me hiahia pea ki te parakore 98%-99.5% (hei tauira, ko te SiC here-tauhohe me whai ihirangi silicon kore utu kua whakahaeretia). Ka taea e ia te aro atu ki ētahi poke, ā, i ētahi wā ka whakauruhia ngā āwhina sintering pēnei i te waikura konumohe (Al₂O₃) te waikura yttrium rānei (Y₂O₃) hei whakapai ake i te mahi sintering, hei whakaiti i ngā pāmahana sintering, me te whakarei ake i te kiato o te hua whakamutunga.

 

Ko te SiC taumata-haurua-whakahaere e hiahia ana kia tata ki te tino pai ngā taumata parakore. Ko te SiC tioata kotahi taumata-papa e hiahia ana kia ≥99.9999% (6N) te parakore, ā, ko ētahi tono teitei e hiahia ana kia 7N (99.99999%) te parakore. Me pupuri e ngā paparanga epitaxial ngā kukū paru i raro i te 10¹⁶ ngota/cm³ (inā koa te karo i ngā paru taumata-hōhonu pēnei i te B, Al, me te V). Ahakoa ngā paru iti pēnei i te rino (Fe), te konumohe (Al), te boron (B) rānei, ka pā kino ki ngā āhuatanga hiko mā te whakaputa i te marara o ngā kaikawe, te whakaiti i te kaha o te mara pakaru, ā, i te mutunga ka whakararu i te mahi me te pono o te taputapu, me te hiahia kia tino whakahaere i te paru.

 

Rauemi haurua-haurua silicon carbide

 

2. Ngā Hanganga me te Kounga o te Karaihe Motuhake

 

Ko te SiC karaehe uku te nuinga o te wā he paura polycrystalline, he tinana sintered rānei i titoa mai i ngā tioata moroiti SiC maha kua whakaritea matapōkeretia. Tērā pea kei roto i te rauemi he maha ngā momo polytype (hei tauira, α-SiC, β-SiC) me te kore he mana whakahaere tino tika mō ngā momo polytype motuhake, engari ko te aro nui ki te kiato me te ōritetanga o te rauemi whānui. He maha ngā rohe kōhatu me ngā pūwero moroiti kei roto i tōna hanganga o roto, ā, tērā pea kei roto ngā āwhina sintering (hei tauira, Al₂O₃, Y₂O₃).

 

Me noho te SiC taumata-haurua-arataki hei papa tioata kotahi, hei paparanga epitaxial rānei me ngā hanganga tioata tino raupapa. Me whiwhi i ngā momo-maha motuhake mā roto i ngā tikanga tipu tioata tino tika (hei tauira, 4H-SiC, 6H-SiC). He tino tairongo ngā āhuatanga hiko pēnei i te nekenekehanga irahiko me te āputa roopu ki te kōwhiringa momo-maha, me tino whakahaere. I tēnei wā, ko te 4H-SiC te mea nui rawa atu i te mākete nā ōna āhuatanga hiko pai rawa atu tae atu ki te nekenekehanga kawe teitei me te kaha o te mara pakaru, he mea pai mō ngā taputapu hiko.

 

3. Te Whakataurite i te Uauatanga o te Tukanga

 

He tino māmā noa iho ngā tukanga hangahanga a te SiC uku (te whakarite paura → te hanga → te whakahinuhinu), he rite ki te "hanga pereki." Ko ngā mahi o tēnei tukanga ko:

 

• Te whakaranu i te paura SiC kounga-arumoni (he rahi maikorona te nuinga) me ngā mea here
• Te hanga mā te pēhi
• Te whakapūmau i te pāmahana teitei (1600-2200°C) hei whakatutuki i te whakakīkī mā te horapa matūriki
  Ka taea te whakatutuki i te nuinga o ngā tono me te mātotoru >90%. Kāore te tukanga katoa e hiahia ana ki te whakahaere tika i te tipu o te tioata, engari e arotahi ana ki te hanganga me te ōritetanga o te whakamahana. Ko ngā painga ko te ngāwari o te tukanga mō ngā āhua uaua, ahakoa he iti ake ngā whakaritenga parakore.

 

He uaua rawa atu ngā tukanga o te SiC kounga-haurua (te whakarite paura parakore-teitei → te tipu o te papa kōhatu kotahi-kirihou → te whakatakotoranga o te papa kōhatu epitaxial → te hanga taputapu). Ko ngā mahi matua ko:

 

• Te whakarite i te papa mā te tikanga kawe kohu ā-tinana (PVT)
• Te whakangawari i te paura SiC i ngā āhuatanga tino kino (2200-2400°C, te korehau teitei)
• Te whakahaere tika i ngā pikinga pāmahana (±1°C) me ngā tawhā pēhanga
• Te tipu o te paparanga epitaxial mā te whakatakotoranga kohu matū (CVD) hei hanga i ngā paparanga matotoru ōrite, kua pania (he maha ki te tekau maikorona te nuinga)
  Ko te tukanga katoa e hiahia ana ki ngā taiao tino ma (hei tauira, ngā rūma ma Akomanga 10) hei ārai i te poke. Ko ngā āhuatanga ko te tino tika o te tukanga, me te hiahia ki te whakahaere i ngā mara wera me ngā tere rere hau, me ngā whakaritenga pakari mō te parakore o ngā rauemi mata (>99.9999%) me te matatau o ngā taputapu.

 

4. Ngā Rerekētanga Utu Nui me ngā Aronga Mākete

 

Ngā āhuatanga o te SiC uku-whakairoiro:

• Rauemi mata: Paura kounga-arumoni
• Ngā tukanga tino māmā
• Utu iti: Mano ki te tekau mano RMB ia tana
• Ngā tono whānui: Ngā mea whakakoi, ngā mea whakakā, me ētahi atu ahumahi utu-iti

 

Ngā āhuatanga o te SiC kounga-haurua-arataki:

• Ngā huringa tipu roa o te papa oneone
• Te whakahaere hapa uaua
• Ngā reiti hua iti
• Te utu nui: Mano tāra USD mō ia papa 6-inihi
• Ngā mākete arotahi: Ngā hikohiko mahi-teitei pēnei i ngā taputapu hiko me ngā wāhanga RF
  I te tere o te whanaketanga o ngā waka hiko hou me ngā whakawhitiwhiti kōrero 5G, kei te tino piki haere te hiahia o te mākete.

 

5. Ngā Horopaki Taupānga Rerekē

 

Ko te SiC uku-whakairoiro te "hoiho mahi ahumahi" mō ngā tono hanganga. Mā te whakamahi i ōna āhuatanga miihini pai rawa atu (te pakeke teitei, te ātete ki te kakahu) me ngā āhuatanga wera (te ātete ki te pāmahana teitei, te ātete ki te waikura), ka tino pai ia i roto i:

 

• Ngā mea whakakoi (ngā wira huri, te pepa kirikiri)
• Ngā mea whakakākahu (ngā arai oumu pāmahana teitei)
• Ngā wāhanga ātete-kakahu/waikura (ngā tinana papu, ngā arai paipa)

 

Ngā wāhanga hanganga uku silicon carbide

 

Ko te SiC taumata-haurua te "tino hiko", e whakamahi ana i ōna āhuatanga haurua whānui hei whakaatu i ngā painga ahurei i roto i ngā taputapu hiko:

 

• Ngā taputapu hiko: Ngā kaitahuri hiko hiko, ngā kaitahuri whatunga (te whakapai ake i te pai o te hurihanga hiko)
• Ngā taputapu RF: ngā teihana turanga 5G, ngā pūnaha radar (e āhei ai ngā auau mahi teitei ake)
• Optoelectronics: Rauemi papa mō ngā rama LED kikorangi

 

Wafer epitaxial SiC 200-mirimita

 

Ahu	SiC kounga-uku	SiC taumata-haurua
Hanganga Karaihe	He kiripakariki maha, he momo maha	Kiriata kotahi, he momo momo kua tino tīpakohia
Arotahi Tukanga	Te whakakīkī me te whakahaere āhua	Te kounga tioata me te whakahaere i ngā āhuatanga hiko
Kaupapa Matua o te Mahi	Te kaha ā-mīhini, te ātete ki te waikura, te pumau o te wera	Ngā āhuatanga hiko (te āputa roopu, te āpure pakaru, me ētahi atu)
Ngā horopaki tono	Ngā wāhanga hanganga, ngā wāhanga ātete-kakahu, ngā wāhanga pāmahana teitei	Ngā taputapu mana-tiketike, ngā taputapu auau-tiketike, ngā taputapu optoelectronic
Ngā Ārahi Utu	Ngāwari o te tukanga, te utu o ngā rauemi mata	Te tere tipu o te karaihe, te tika o ngā taputapu, te parakore o ngā rauemi mata

 

Hei whakarāpopototanga, ko te rerekētanga matua i ahu mai i ō rātou kaupapa mahi motuhake: ko te SiC karaehe uku e whakamahi ana i te "āhua (hanganga)" ko te SiC karaehe haurua-ira e whakamahi ana i ngā "āhuatanga (hiko)." Ko te mea tuatahi e whai ana i te mahi miihini/wera iti-utu, ko te mea tuarua e tohu ana i te tihi o te hangarau whakarite rauemi hei rauemi mahi karaihe kotahi-kotahi, he tino parakore. Ahakoa he rite te pūtake matū, he mārama ngā rerekētanga o te SiC karaehe uku me te SiC karaehe haurua-ira i roto i te parakore, te hanganga karaihe, me ngā tukanga hanga - heoi he nui ngā takoha a ēnei ki te whakaputa ahumahi me te whanaketanga hangarau i roto i ō rātou ake mara.