Ko te horoi mākū (Wet Clean) tētahi o ngā mahi matua o ngā tukanga hanga haurua-waea, e aro ana ki te tango i ngā poke maha mai i te mata o te papa whakarewa kia taea ai te mahi i ngā mahi e whai ake nei ki runga i tētahi mata ma.
I te mea kei te whakaiti haere tonu te rahi o ngā taputapu haurua-ira me te piki haere o ngā whakaritenga mō te tika, kua tino kaha haere ngā whakaritenga hangarau mō ngā tukanga horoi wafer. Ahakoa ngā matūriki iti rawa, ngā rauemi rauropi, ngā katote konganuku, ngā toenga waikura rānei i runga i te mata o te wafer, ka pā nui ki te mahi a te taputapu, ā, ka pā ki te hua me te pono o ngā taputapu haurua-ira.
Ngā Mātāpono Matua o te Horoi Wafer
Ko te kaupapa matua o te horoinga o te papa wafer ko te tango tika i ngā poke mai i te mata o te papa wafer mā roto i ngā tikanga ā-tinana, ā-matū, me ētahi atu tikanga, kia ma ai te mata o te papa wafer e tika ana mō te tukatuka i muri mai.
Momo Parahanga
Ngā Awe Matua ki ngā Āhuatanga o te Pūrere
| te poke o te tuhinga | Ngā hapa tauira
Ngā hapa whakaurunga katote
Ngā hapa pakaru o te kiriata ārai
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| Te Parahanga Whakarewa | Ngā konganuku kawakore | Te kore pumau o te transistor MOS
Te pakaru/te pirau o te kiriata waikura kuaha
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| Ngā konganuku taumaha | Te pikinga o te au turuturu whakamuri o te hononga PN
Ngā hapa pakaru o te kiriata waikura kuaha
Te hekenga o te roanga o te oranga o te kaikawe tokoiti
Te whakaputanga hapa o te paparanga whakaoho waikura
| |
| Te Parahanga Matū | Rauemi Ora | Ngā hapa pakaru o te kiriata waikura kuaha
Ngā rerekētanga o te kiriata CVD (ngā wā whakatipu)
Ngā rerekētanga matotoru o te kiriata waikura wera (te waikura tere)
Te puta mai o te kohu (te angaanga, te arotahi, te whakaata, te kopare, te reticle)
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| Ngā Tāpiringa Kore-Waro (B, P) | Ngā nekehanga Vth o te transistor MOS
Ngā rerekētanga ātete ki te papa Si me te ātete teitei ki te pepa poly-silicon
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| Ngā Pūtake Kore-Waro (āmine, haukini) me ngā Waikawa (SOx) | Te whakahekenga o te taumira o ngā ātete kua whakanuia e te matū
Te putanga mai o te poke matūriki me te kohu nā te hanga tote
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| Ngā Kiriata Waikura Taketake me ngā Kiriata Matū nā te Makuku, te Hau | Te ātete whakapā nui ake
Te pakaru/te pirau o te kiriata waikura kuaha
| |
Ko ngā whāinga o te tukanga horoi wafer ko:
Tango Matūriki: Mā te whakamahi i ngā tikanga ā-tinana, ā-matū rānei hei tango i ngā matūriki iti e piri ana ki te mata o te papa. He uaua ake te tango i ngā matūriki iti nā te kaha o te hiko pūmau i waenganui i a rātou me te mata o te papa, me whai maimoatanga motuhake.
Te Tango Rauemi Ora: Ka piri pea ngā poke ora pēnei i te hinu me ngā toenga photoresist ki te mata o te papa whakarewa. Ko te tikanga ka tangohia ēnei poke mā te whakamahi i ngā matū whakahāora kaha, i ngā whakarewa rānei.
Te Tango i te Katote Konganuku: Ka taea e ngā toenga katote konganuku i runga i te mata o te papa whakarewa te whakaiti i te mahi hiko, ā, ka pā ki ngā mahi tukatuka o muri mai. Nō reira, ka whakamahia ngā otinga matū motuhake hei tango i ēnei katote.
Te Tango Waikura: Ko ētahi tukanga e hiahia ana kia kore he paparanga waikura i te mata o te papa, pērā i te waikura silicon. I roto i ēnei āhuatanga, me tango ngā paparanga waikura tūturu i roto i ētahi mahi horoi.
Ko te wero o te hangarau horoi wafer kei roto i te tango whai hua i ngā poke me te kore e pā kino ki te mata o te wafer, pērā i te ārai i te taratara o te mata, te waikura, me ētahi atu kino tinana.
2. Te Rere o te Tukanga Horoi Wafer
He maha ngā mahi e hiahiatia ana mō te horoi i te papa angiangi hei tango katoa i ngā poke, kia tino ma ai hoki te mata.
Pikitia: Te Whakataurite i waenga i te Horoi Momo-Puranga me te Horoi Wafer-Kotahi
Ko ngā mahi matua e whai ake nei i roto i te tukanga horoi wafer:
1. Te Horoi-Mua (Te Horoi-Mua)
Ko te kaupapa o te horoinga-mua he tango i ngā poke me ngā matūriki nunui mai i te mata o te papa, e tutukihia ana mā te horoi wai whakakore-ion (DI Water) me te horoinga ultrasonic. Ka taea e te wai whakakore-ion te tango tuatahi i ngā matūriki me ngā poke rewa mai i te mata o te papa, engari ka whakamahia e te horoinga ultrasonic ngā pānga cavitation hei wawahi i te hononga i waenga i ngā matūriki me te mata o te papa, kia māmā ake ai te tango atu.
2. Te Horoi Matū
Ko te horoi matū tētahi o ngā mahi matua o te tukanga horoinga wafer, e whakamahi ana i ngā otinga matū hei tango i ngā rauemi waro, ngā katote konganuku, me ngā waikura mai i te mata o te wafer.
Te Tango Rauemi Ora: I te nuinga o te wā, ka whakamahia te acetone, te ranunga haukini/peroxide rānei (SC-1) hei whakarewa me te whakawairakau i ngā poke ora. Ko te ōwehenga noa mō te otinga SC-1 ko NH₄OH
₂O₂
₂O = 1:1:5, me te pāmahana mahi tata ki te 20°C.
Te Tango i te Ion Konganuku: Ka whakamahia te waikawa hauota, te ranunga waikawa hauwaihauora/peroxide rānei (SC-2) hei tango i ngā ion konganuku mai i te mata o te papa. Ko te ōwehenga noa mō te otinga SC-2 ko HCl.
₂O₂
₂O = 1:1:6, me te pāmahana e mau tonu ana ki te 80°C.
Te Tango Waikura: I ētahi tukanga, me tango te paparanga waikura taketake mai i te mata o te papa, ā, ka whakamahia te otinga waikawa hauwaiwai (HF). Ko te ōwehenga noa mō te otinga HF ko HF
₂O = 1:50, ā, ka taea te whakamahi i te pāmahana rūma.
3. Te Horoi Whakamutunga
I muri i te horoinga matū, ka horoia ngā papa wafer kia kore ai he toenga matū e toe ana ki te mata. Ko te horoinga whakamutunga ka whakamahia te wai whakakore iona hei horoi pai. Hei tāpiri, ka whakamahia te horoinga wai ozone (O₃/H₂O) hei tango atu i ngā poke e toe ana i te mata o te papa wafer.
4. Te whakamaroke
Me whakamaroke wawe ngā papa kua horoia kia kore ai e kitea he tohu wai, kia kore ai hoki e piri anō ngā poke. Ko ngā tikanga whakamaroke noa ko te whakamaroke hurihuri me te tango hauota. Ko te tikanga tuatahi ka tango i te makuku mai i te mata o te papa mā te hurihuri i ngā tere teitei, ko te tikanga tuarua ka whakarite kia maroke rawa mā te pupuhi i te hau hauota maroke puta noa i te mata o te papa.
Parahanga
Ingoa o te Tukanga Horoi
Whakaahuatanga o te Ranunga Matū
Ngā matū
| Ngā matūriki | Pīranha (SPM) | Waikawa whanariki/waikawa hauwai/wai DI | H2SO4/H2O2/H2O 3-4:1; 90°C |
| SC-1 (APM) | Wai haukiniuma/waikawa hauwai/wai DI | NH4OH/H2O2/H2O 1:4:20; 80°C | |
| Ngā konganuku (ehara i te parahi) | SC-2 (HPM) | Waikawa hauwai/waikawa hauwai/wai DI | HCl/H2O2/H2O1:1:6; 85°C |
| Pīranha (SPM) | Waikawa whanariki/waikawa hauwai/wai DI | H2SO4/H2O2/H2O3-4:1; 90°C | |
| Te mate huka (DHF) | Whakaranua te wai waikawa hauwaiwai/wai DI (e kore e tango i te parahi) | HF/H2O1:50 | |
| Ngā mea rauropi | Pīranha (SPM) | Waikawa whanariki/waikawa hauwai/wai DI | H2SO4/H2O2/H2O 3-4:1; 90°C |
| SC-1 (APM) | Wai haukiniuma/waikawa hauwai/wai DI | NH4OH/H2O2/H2O 1:4:20; 80°C | |
| DIO3 | Ozone i roto i te wai whakakore-ioniti | Ngā Ranunga Arotau O3/H2O | |
| Waikura Taketake | Te mate huka (DHF) | Wai waikawa hauwaiwai/wai DI whakaranua | HF/H2O 1:100 |
| BHF | Waikawa hauwaiwai pūhaumāota | NH4F/HF/H2O |
3. Ngā Tikanga Horoi Wafer Noa
1. Tikanga Horoi RCA
Ko te tikanga horoi RCA tētahi o ngā tikanga horoi wafer rongonui rawa atu i roto i te umanga haurua-ira, i whakawhanakehia e te RCA Corporation neke atu i te 40 tau ki muri. Ko te tikanga matua o tēnei tikanga he tango i ngā poke rauropi me ngā poke katote konganuku, ā, ka taea te whakaoti i roto i ngā taahiraa e rua: SC-1 (Paerewa Horoi 1) me SC-2 (Paerewa Horoi 2).
Te Horoi SC-1: Ko te tikanga o tēnei mahi he tango i ngā poke me ngā matūriki rauropi. Ko te otinga he ranunga o te haukini, te hauwai waikura, me te wai, e hanga ana i tētahi paparanga angiangi o te waikura silicon ki runga i te mata o te papa.
Te Horoi SC-2: Ko te tikanga matua o tēnei mahi ko te tango i ngā poke ion whakarewa, mā te whakamahi i te ranunga o te waikawa hauwaiora, te hauwai waikura, me te wai. Ka waiho he paparanga angiangi hei ārai i te poke anō.
2. Tikanga Horoi Piranha (Piranha Etch Clean)
He tikanga tino whai hua te tikanga horoi Piranha mō te tango i ngā rauemi rauropi, mā te whakamahi i te ranunga o te waikawa whanariki me te hauwai waikura, i te ōwehenga o te 3:1, 4:1 rānei. Nā te kaha o ngā āhuatanga waikura o tēnei otinga, ka taea te tango i te nui o ngā mea rauropi me ngā poke uaua. Me tino whakahaere i ngā āhuatanga o tēnei tikanga, inā koa te pāmahana me te kukū, kia kore ai e pakaru te wafer.
Ka whakamahia e te horoinga ultrasonic te pānga cavitation i hangaia e ngā ngaru oro auau-teitei i roto i te wai hei tango i ngā poke mai i te mata o te wafer. Ki te whakatauritea ki te horoinga ultrasonic tuku iho, ka mahi te horoinga megasonic i te auau teitei ake, ka taea ai te tango pai ake i ngā matūriki iti-micron te rahi me te kore e kino ki te mata o te wafer.
4. Te Horoi i te Ozone
Ka whakamahia e te hangarau horoi ozone ngā āhuatanga waikura kaha o te ozone hei pirau me te tango i ngā poke rauropi mai i te mata o te papa, ā, ka huri hei hauhā waro me te wai kore kino. Kāore e hiahiatia he matū utu nui hei whakamahi i tēnei tikanga, ā, ka iti ake te parahanga o te taiao, ka waiho hei hangarau hou i roto i te mara o te horoi papa.
4. Ngā Taputapu Tukanga Horoi Wafer
Hei whakarite i te whai huatanga me te haumaru o ngā tukanga horoi wafer, he maha ngā taputapu horoi matatau e whakamahia ana i roto i te hanga semiconductor. Ko ngā momo matua ko:
1. Taputapu Horoi Mākū
Kei roto i ngā taputapu horoi mākū ngā momo tāke rumaki, ngā tāke horoi ultrasonic, me ngā whakamaroke hurihuri. Ka whakakotahihia e ēnei taputapu ngā kaha miihini me ngā matū hei tango i ngā poke mai i te mata o te papa. Ko ngā tāke rumaki he pūnaha whakahaere pāmahana hei whakarite i te pumau me te whai huatanga o ngā otinga matū.
2. Taputapu Horoi Maroke
Ko ngā taputapu horoi maroke ko ngā kaihoroi parāma, e whakamahi ana i ngā matūriki kaha-nui i roto i te parāma hei tauhohe me te tango i ngā toenga mai i te mata o te papa. He tino pai te horoi parāma mō ngā tukanga e hiahia ana kia mau tonu te kounga o te mata me te kore e whakauru i ngā toenga matū.
3. Ngā Pūnaha Horoi Aunoa
I te whānui haere tonu o te hanga haurua-ira, kua noho ko ngā pūnaha horoi aunoa te mea pai mō te horoinga wafer nui. He maha ngā wā kei roto i ēnei pūnaha ngā tikanga whakawhiti aunoa, ngā pūnaha horoi maha-tāke, me ngā pūnaha whakahaere tika hei whakarite i ngā hua horoi ōrite mō ia wafer.
5. Ngā Auahatanga o te Ao
I te mea kei te whakaiti haere tonu te maha o ngā taputapu haurua-ira, kei te whanake haere te hangarau horoi wafer ki ngā otinga whai hua ake, ā, he pai hoki mō te taiao. Ka arotahi ngā hangarau horoi ā muri ake nei ki:
Te Tango i ngā Matūriki iti-nanometer: Ka taea e ngā hangarau horoi o nāianei te whakahaere i ngā matūriki iti-nanometer, engari nā te whakaiti haere i te rahi o te taputapu, ka noho hei wero hou te tango i ngā matūriki iti-nanometer.
Te Horoi Kakariki, Ātaahua hoki ki te Taiao: Ka nui haere te hiranga o te whakaiti i te whakamahinga o ngā matū kino ki te taiao, me te whakawhanake i ngā tikanga horoi pai ake ki te taiao, pērā i te horoi ozone me te horoi nui-oro.
Ngā Taumata Aunoatanga me te Mātauranga Teitei Ake: Mā ngā pūnaha atamai ka taea te aroturuki me te whakarerekē i ngā tawhā rerekē i te wā horoi, ka whakapai ake i te whai huatanga o te horoi me te whai huatanga o te whakaputa.
He mahi nui te hangarau horoi anga wafer i roto i te hanga haurua-haurua, hei whakarite kia ma ngā mata o te haurua-haurua mō ngā tukanga e whai ake nei. Mā te whakakotahitanga o ngā tikanga horoi rerekē ka tangohia ngā poke, ka whakaratohia he mata papa ma mō ngā taahiraa e whai ake nei. I te whanaketanga o te hangarau, ka haere tonu te whakapai ake i ngā tukanga horoi kia tutuki ai ngā tono mō te tika teitei ake me te iti iho o ngā reiti hapa i roto i te hanga haurua-haurua.
Wā tuku: Oketopa-08-2024