Whakarāpopototanga:Kua whakawhanakehia e mātou he arataki ngaru lithium tantalate e hangai ana ki te ārai 1550 nm me te ngaronga o te 0.28 dB/cm me te tauwehenga kounga o te mowhiti resonator o te 1.1 miriona. Kua rangahaua te whakamahinga o te kore-raina χ(3) i roto i ngā photonics kore-raina. Ko ngā painga o te lithium niobate i runga i te ārai (LNoI), e whakaatu ana i ngā āhuatanga kore-raina pai rawa atu o te χ(2) me te χ(3) me te here whatu kaha nā tōna hanganga "whakakā-i runga", kua arahi ki ngā whanaketanga nui i roto i te hangarau arataki ngaru mō ngā modulators tino tere me ngā photonics kore-raina whakauru [1-3]. Haunga te LN, kua rangahaua hoki te lithium tantalate (LT) hei rauemi photonic kore-raina. Ki te whakatauritea ki te LN, he paepae kino whatu teitei ake a te LT me te matapihi mārama whatu whānui ake [4, 5], ahakoa he rite ana tawhā whatu, pēnei i te taupū whakaata me ngā tauwehenga kore-raina, ki ērā o te LN [6, 7]. Nō reira, ko te LToI tētahi atu rauemi kaha mō ngā tono photonic kore-raina kaha teitei. Heoi anō, kei te huri te LToI hei rauemi matua mō ngā taputapu tātari ngaru oro mata (SAW), e whakamahia ana i roto i ngā hangarau pūkoro me te ahokore tere-teitei. I roto i tēnei horopaki, tera pea ka noho ko ngā wafer LToI hei rauemi noa ake mō ngā tono photonic. Heoi anō, tae noa ki tēnei wā, he iti noa ngā taputapu photonic e hangai ana ki te LToI kua pūrongohia, pērā i ngā resonators microdisk [8] me ngā electro-whatu phase shifters [9]. I roto i tēnei pepa, ka whakaatuhia e mātou he arataki ngaru LToI iti-ngaronga me tana tono i roto i te resonator mowhiti. Hei tāpiri, ka whakaratohia e mātou ngā āhuatanga kore-raina χ(3) o te arataki ngaru LToI.
Ngā Kaupapa Matua:
• E tuku ana i ngā paparanga LToI 4-inihi ki te 6-inihi, ngā paparanga lithium tantalate kiriata-angiangi, me ngā matotoru o te paparanga o runga mai i te 100 nm ki te 1500 nm, e whakamahi ana i ngā hangarau ā-whare me ngā tukanga kua pakeke.
• SINOI: Ngā angiangi kiriata angiangi o te silicon nitride ngaronga tino iti.
• SICOI: Ngā papa angiangi angiangi silicon carbide haurua-whakamātao teitei mō ngā ara iahiko whakauru photonic silicon carbide.
• LTOI: He whakataetae kaha ki ngā papa angiangi lithium niobate, ngā papa angiangi lithium tantalate.
• LNOI: LNOI 8-inihi e tautoko ana i te whakaputanga papatipu o ngā hua niobate lithium kiriata-angiangi nui ake.
Te Hanga i runga i ngā Aratohu Ngaru Whakamarumaru:I roto i tēnei rangahau, i whakamahia e mātou ngā paparanga LToI 4-inihi. Ko te paparanga LT o runga he paparanga LT tapahi-Y hurihuri 42° arumoni mō ngā taputapu SAW, e hono tika ana ki tētahi paparanga Si me te paparanga waikura wera matotoru 3 µm, e whakamahi ana i tētahi tukanga tapahi atamai. E whakaatu ana te Pikitia 1(a) i te tirohanga o runga o te paparanga LToI, me te matotoru o te paparanga LT o runga he 200 nm. I aromatawaihia e mātou te taratara o te mata o te paparanga LT o runga mā te whakamahi i te karuārai kaha ngota (AFM).
Pikitia 1.(a) Tirohanga o runga o te paparanga LToI, (b) Whakaahua AFM o te mata o te paparanga LT o runga, (c) Whakaahua PFM o te mata o te paparanga LT o runga, (d) Wāhanga whakawhiti hoahoa o te arataki ngaru LToI, (e) Kōtaha aratau TE taketake i tatauhia, me te (f) Whakaahua SEM o te matua arataki ngaru LToI i mua i te whakatakotoranga paparanga SiO2. E ai ki te whakaaturanga i te Pikitia 1 (b), he iti iho i te 1 nm te taratara o te mata, ā, kāore i kitea he rārangi karawarawa. I tua atu, i tirotirohia e mātou te āhua pōraritanga o te paparanga LT o runga mā te whakamahi i te karuārai kaha urupare piezoelectric (PFM), e ai ki te whakaaturanga i te Pikitia 1 (c). I whakaū mātou i mau tonu te pōraritanga ōrite ahakoa i muri i te tukanga hononga.
Mā te whakamahi i tēnei papa LToI, i hangaia e mātou te arataki ngaru penei. Tuatahi, i whakatakotoria he paparanga kopare whakarewa hei whakairo maroke i muri mai o te LT. Kātahi ka mahia te whakaahua hihi irahiko (EB) hei tautuhi i te tauira matua arataki ngaru i runga i te paparanga kopare whakarewa. Muri iho, i whakawhitihia e mātou te tauira ātete EB ki te paparanga kopare whakarewa mā te whakairo maroke. Muri iho, i hangaia te matua arataki ngaru LToI mā te whakamahi i te whakairo plasma electron cyclotron resonance (ECR). Hei whakamutunga, i tangohia te paparanga kopare whakarewa mā te tukanga mākū, ā, i whakatakotoria he paparanga SiO2 mā te whakamahi i te whakatakotoranga kohu matū whakarei ake i te plasma. E whakaatu ana te Pikitia 1 (d) i te wāhanga whakawhiti o te arataki ngaru LToI. Ko te teitei matua katoa, te teitei pereti, me te whānui matua he 200 nm, 100 nm, me te 1000 nm. Kia mahara ko te whānui matua ka whānui ki te 3 µm i te taha arataki ngaru mō te hononga muka whatu.
E whakaatu ana te Pikitia 1 (e) i te tohatoha kaha whatu kua tatauhia o te aratau hiko whakawhiti taketake (TE) i te 1550 nm. E whakaatu ana te Pikitia 1 (f) i te ahua o te karu hiko matawai (SEM) o te matua arataki ngaru LToI i mua i te whakatakotoranga o te paparanga SiO2.
Ngā Āhuatanga o te Aratohu Ngaru:I arotakehia tuatahitia e mātou ngā āhuatanga o te ngaronga raina mā te whakauru i te mārama TE-polarized mai i te pūtake tukunga ohorere kua whakanuia te roangaru 1550 nm ki roto i ngā arataki ngaru LToI o ngā roa rerekē. I whiwhihia te ngaronga horapa mai i te pari o te whanaungatanga i waenga i te roa o te arataki ngaru me te tuku i ia roangaru. Ko ngā ngaronga horapa i inehia ko 0.32, 0.28, me te 0.26 dB/cm i te 1530, 1550, me te 1570 nm, ia, e whakaaturia ana i te Pikitia 2 (a). I whakaatuhia e ngā arataki ngaru LToI i hangaia he mahi iti-ngaronga rite ki ngā arataki ngaru LNoI hou [10].
Muri iho, i aromatawaihia e mātou te kore-raina o te χ(3) mā te hurihanga roangaru i hangaia e te tukanga whakaranu ngaru-whā. I whakaurua e mātou he rama papu ngaru tonu i te 1550.0 nm me te rama tohu i te 1550.6 nm ki roto i te arataki ngaru 12 mm te roa. E ai ki te whakaaturanga i te Pikitia 2 (b), i piki ake te kaha tohu ngaru rama honohono-wāhanga (whakangāwari) me te pikinga o te mana whakauru. Ko te whakaurunga i te Pikitia 2 (b) e whakaatu ana i te whānuitanga putanga noa o te whakaranu ngaru-whā. Mai i te whanaungatanga i waenga i te mana whakauru me te whai huatanga o te hurihanga, i whakatauhia e mātou ko te tawhā kore-raina (γ) he tata ki te 11 W^-1m.
Pikitia 3.(a) Whakaahua karuārai o te kaiwhakaoho mowhiti kua hangaia. (b) Ngā hihi tuku o te kaiwhakaoho mowhiti me ngā tawhā āputa rerekē. (c) Ngā hihi tuku i inehia me te whakaurua ki te Lorentzian o te kaiwhakaoho mowhiti me te āputa o te 1000 nm.
Muri iho, i hangaia e mātou he kaiwhakaoho mowhiti LToI, ā, i arotakehia ōna āhuatanga. E whakaatu ana te Pikitia 3 (a) i te ahua karuārai whatu o te kaiwhakaoho mowhiti i hangaia. Kei te kaiwhakaoho mowhiti he whirihoranga "ara whakataetae", he rohe piko me te radius o te 100 µm me te rohe tika o te 100 µm te roa. Ka rerekē te whānui o te āputa i waenga i te mowhiti me te matua arataki ngaru pahi i roto i ngā pikinga o te 200 nm, inā koa i te 800, 1000, me te 1200 nm. E whakaatu ana te Pikitia 3 (b) i ngā hihi tuku mō ia āputa, e tohu ana ka huri te ōwehenga whakamōmona me te rahi o te āputa. Mai i ēnei hihi, i whakatauhia e mātou ko te āputa 1000 nm e whakarato ana i ngā āhuatanga hononga tata ki te tino nui, nā te mea e whakaatu ana i te ōwehenga whakamōmona teitei rawa atu o te -26 dB.
Mā te whakamahi i te pūorooro honohono-nui, i whakatauhia e mātou te tauwehenga kounga (tauwehenga Q) mā te whakauru i te whānuitanga tuku raina ki te pihi Lorentzian, ka whiwhi i te tauwehenga Q ā-roto o te 1.1 miriona, e whakaaturia ana i te Pikitia 3 (c). Ki tā mātou e mōhio ana, koinei te whakaaturanga tuatahi o te pūorooro mowhiti LToI honohono-ngaru. He mea nui, ko te uara tauwehenga Q i tutuki i a mātou he nui ake i tērā o ngā pūorooro kōpae iti LToI honohono-muka [9].
Whakatau:I whakawhanakehia e mātou he arataki ngaru LToI me te ngaronga o te 0.28 dB/cm i te 1550 nm me te tauwehe Q o te mowhiti resonator o te 1.1 miriona. He rite te mahi i whiwhi ki tērā o ngā arataki ngaru LNoI ngaronga iti hou. I tua atu, i tirotirohia e mātou te kore-raina χ(3) o te arataki ngaru LToI i hangaia mō ngā tono kore-raina i runga i te maramara.
Wā tuku: Whiringa-ā-rangi 20-2024