Q: He aha ngā hangarau matua e whakamahia ana i roto i te tapatapahi me te tukatuka i te wafer SiC?
A:Karāhe silicon (SiC) he rite te pakeke ki te taimana, ā, e kiia ana he rauemi tino mārō, he pakarukaru hoki. He roa te wā e pau ana ki te tapahi i ngā tioata kua tipu hei angiangi, ā, he ngāwari ki te pakaru. Hei te taahiraa tuatahi ki teSiCI roto i te tukatuka tioata kotahi, ka nui te pānga o te kounga o te tapatapahi ki te huri, te whakakanapa, me te angiangi i muri mai. He maha ngā wā ka puta mai ngā kapiti o te mata me te raro o te mata i te tapatapahi, ka piki ake te tere o te pakaru o te papa me ngā utu whakaputa. Nō reira, he mea nui te whakahaere i te kino o te kapiti o te mata i te wā e tapatapahia ana hei whakatairanga i te hanganga taputapu SiC.
Ko ngā tikanga tapahi SiC e pūrongohia ana i tēnei wā ko te tapahi ā-pūmau, te tapahi ā-kore utu, te tapahi taiaho, te whakawhiti paparanga (wehenga makariri), me te tapahi tuku hiko. I roto i ēnei, ko te tapahi waea maha-waea tauutuutu me ngā mea whakakoi taimana pūmau te tikanga e whakamahia whānuitia ana mō te tukatuka i ngā tioata takitahi SiC. Heoi, i te mea ka eke te rahi o te ingot ki te 8 inihi me runga ake, ka iti ake te whai hua o te kani waea tuku iho nā te nui o ngā tono taputapu, ngā utu, me te iti o te whai huatanga. He hiahia nui mō ngā hangarau tapahi iti te utu, iti te ngaronga, teitei te whai huatanga.
Q: He aha ngā painga o te tapahi laser i runga i te tapahi maha-waea tuku iho?
A: Mā te kani waea tuku iho ka tapahia teIngota SiCi tētahi ahunga motuhake ki roto i ngā poro e rau rau maikorona te matotoru. Kātahi ka hurihia ngā poro mā te whakamahi i te paru taimana hei tango i ngā tohu kani me ngā kino o raro i te mata, ā, muri iho ka whakakanapahia mā te miihini matū (CMP) hei whakatutuki i te whakapūmautanga whānui, ā, hei whakamutunga ka horoia kia whiwhi ai i ngā angiangi SiC.
Heoi, nā te pakeke me te pakarukaru o te SiC, ka taea e ēnei mahi te whakapiko, te ngatata, te pikinga o ngā tere pakaru, te pikinga o ngā utu whakaputa, ā, ka hua ake he taratara nui o te mata me te poke (puehu, wai para, me ētahi atu). Hei tāpiri, he puhoi te kani waea, ā, he iti te hua. E whakaatu ana ngā whakatau tata ko te tapahi waea maha tuku iho ka eke ki te 50% anake te whakamahinga rauemi, ā, tae atu ki te 75% o te rauemi ka ngaro i muri i te whakakanapa me te huri. E whakaatu ana ngā raraunga whakaputa o tāwāhi o mua ka roa pea te 273 rā o te whakaputa tonu 24-hāora ki te whakaputa i te 10,000 wafers—he tino roa te wā.
I roto i te motu, he maha ngā kamupene whakatipu karaihe SiC e arotahi ana ki te whakanui ake i te kaha o te oumu. Heoi, kaua e whakanui noa i te putanga, he mea nui ake te whakaaro me pēhea te whakaiti i ngā ngaronga - ina koa kāore anō kia tino pai te hua o te tipu karaihe.
Ka taea e ngā taputapu tapahi taiaho te whakaiti i te ngaronga rauemi me te whakapai ake i te hua. Hei tauira, mā te whakamahi i tētahi taputapu tapahi kotahi 20 mmIngota SiCKa taea e te kani waea te whakaputa i te 30 ngā papa rakau, he 350 μm te matotoru. Ka taea e te tapahi reera te whakaputa i te neke atu i te 50 ngā papa rakau. Mena ka whakaitihia te matotoru o te papa rakau ki te 200 μm, ka taea te whakaputa neke atu i te 80 ngā papa rakau mai i te ingota kotahi. Ahakoa e whakamahia whānuitia ana te kani waea mō ngā papa rakau 6 inihi me te iti iho, ko te tapahi i te ingota SiC 8-inihi ka roa pea i te 10-15 ngā rā me ngā tikanga tuku iho, me te hiahia ki ngā taputapu teitei me te utu nui me te iti o te whai huatanga. I raro i ēnei āhuatanga, ka mārama ngā painga o te tapahi reera, ka waiho hei hangarau matua mō ngā papa rakau 8-inihi.
Mā te tapahi taiaho, ka taea te wā tapatapahi mō ia papa 8-inihi i raro iho i te 20 meneti, me te ngaronga rauemi mō ia papa i raro iho i te 60 μm.
Hei whakarāpopototanga, ki te whakaritea ki te tapahi maha-waea, he tere ake te tapahi taiaho, he pai ake te hua, he iti ake te ngaronga rauemi, ā, he ma ake te tukatuka.
Q: He aha ngā wero hangarau matua i roto i te tapahi taiaho SiC?
A: E rua ngā taahiraa matua o te tukanga tapatapahi taiaho: te whakarerekētanga taiaho me te wehenga papatahi.
Ko te kaupapa matua o te whakarerekētanga taiaho ko te hanga hihi me te arotau i ngā tawhā. Ko ngā tawhā pēnei i te mana taiaho, te whānui o te ira, me te tere matawai ka pā ki te kounga o te tango rauemi me te angitu o te wehenga papatahi i muri mai. Ko te āhua o te rohe kua whakarerekētia e whakatau ana i te taratara o te mata me te uaua o te wehenga. Ko te taratara o te mata ka uaua ake te huri i muri mai, ā, ka nui ake te ngaronga o ngā rauemi.
I muri i te whakarerekētanga, ka tutuki te wehenga o te angaanga mā roto i ngā kaha kutikuti, pērā i te whati makariri, te ahotea ā-mīhini rānei. Ka whakamahia e ētahi pūnaha ā-whare ngā whakawhiti ultrasonic hei whakaoho i ngā wiri mō te wehenga, engari ka taea e tēnei te pakaru me te hapa taha, ka whakaiti i te hua whakamutunga.
Ahakoa ehara i te mea uaua ēnei mahi e rua, ko ngā rerekētanga o te kounga tioata—nā ngā tukanga tipu rerekē, ngā taumata tāpiringa, me ngā tohatoha ahotea ā-roto—ka pā nui ki te uauatanga o te tapahi, te hua, me te ngaronga rauemi. Ko te tautuhi noa i ngā wāhi raruraru me te whakarerekē i ngā rohe matawai taiaho, kāore pea e tino whakapai ake i ngā hua.
Ko te kī ki te whānui o te whakamahinga ko te whakawhanake i ngā tikanga me ngā taputapu auaha ka taea te urutau ki te whānuitanga o ngā āhuatanga tioata mai i ngā kaihanga rerekē, te arotau i ngā tawhā tukanga, me te hanga pūnaha tapatapahi taiaho me te whakamahinga whānui.
Q: Ka taea te whakamahi i te hangarau tapahi taiaho ki ētahi atu rauemi haunga te SiC?
A: Kua roa te hangarau tapahi taiaho e whakamahia ana ki te whānuitanga o ngā rauemi. I roto i ngā haurua-ā-ira, i whakamahia tuatahitia mō te tapahi i ngā konganuku, ā, mai i taua wā kua whānui haere ki te tapatapahi i ngā tioata takitahi nui.
Haunga te SiC, ka taea hoki te whakamahi i te tapahi taiaho mō ētahi atu rauemi mārō, pakarukaru rānei pērā i te taimana, te gallium nitride (GaN), me te gallium oxide (Ga₂O₃). Kua whakaatuhia e ngā rangahau tuatahi mō ēnei rauemi te whaihua me ngā painga o te tapahi taiaho mō ngā tono semiconductor.
Q: Kei te wātea ngā taputapu tapahi taiaho ā-rohe kua oti kē te whakarite i tēnei wā? Kei tehea taumata o tāu rangahau?
A: Ko ngā taputapu tapahi taiaho SiC whānui-diameter e kiia whānuitia ana ko ngā taputapu matua mō te heke mai o te hanga anga SiC 8-inihi. I tēnei wā, ko Hapani anake ka taea te whakarato i aua pūnaha, ā, he utu nui, ā, kei raro i ngā here kaweake.
E ai ki ngā mahere whakaputa SiC me te kaha kani waea o nāianei, e tata ana ki te 1,000 ngā waeine e hiahiatia ana mō ngā pūnaha tapahi/whakaiti laser. He nui te haumi a ngā kamupene nui o te rohe ki te whanaketanga, engari kāore anō kia tae ki te whakatinanatanga ahumahi ngā taputapu o te rohe kua pakari, kua wātea hoki mō te hokohoko.
Kua whakawhanakehia e ngā rōpū rangahau te hangarau tango-reihana motuhake mai i te tau 2001, ā, kua whakawhānuihia tēnei ki te tapahi me te whakaitiiti i te reihana SiC whānui-rahi. Kua whakawhanakehia e rātou he pūnaha tauira me ngā tukanga tapahi ka taea te: Te tapahi me te whakaitiiti i ngā papa SiC haurua-whakamaroke 4–6 inihi Te tapahi i ngā poro SiC kawe 6–8 inihi Ngā paearu mahi: SiC haurua-whakamaroke 6–8 inihi: te wā tapahi 10–15 meneti/papa; te ngaronga rauemi <30 μm SiC kawe 6–8 inihi: te wā tapahi 14–20 meneti/papa; te ngaronga rauemi <60 μm
Neke atu i te 50% te pikinga o te hua o te wafer
Whai muri i te tapatapahi, ka tutuki i ngā papa angiangi ngā paerewa ā-motu mō te āhuahanga i muri i te huri me te whakakanapa. E whakaatu ana hoki ngā rangahau kāore he pānga nui o ngā pānga wera i puta mai i te taiaho ki te ahotea, ki te āhuahanga rānei o ngā papa angiangi.
Kua whakamahia hoki taua taputapu hei manatoko i te whaihuatanga o te tapatapahi i te taimana, te GaN, me te Ga₂O₃ tioata takitahi.
Wā tuku: Mei-23-2025