Ko ngā tikanga matua mō te whakatipu tioata takitahi o te silicon carbide ko te Kawe Kohu Tinana (PVT), te Whakatipu Otinga Pūtake-Runga (TSSG), me te Whakatakoto Kohu Matū Pāmahana-Teitei (HT-CVD).

I roto i ēnei, kua noho te tikanga PVT hei tikanga matua mō te whakaputa ahumahi nā te mea he māmā noa te whakatakotoranga taputapu, he ngāwari ki te whakahaere me te whai hua, ā, he iti ake hoki ngā utu taputapu me ngā utu whakahaere.

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Ngā Kaupapa Hangarau Matua o te Tipu Tioata SiC Mā te Whakamahi i te Tikanga PVT

Hei whakatipu i ngā tioata silicon carbide mā te whakamahi i te tikanga PVT, me āta tirotiro i ētahi āhuatanga hangarau:

1. Te Parakore o ngā Rauemi Graphite i te Marae Wera
   Me tutuki i ngā rauemi karāpiti e whakamahia ana i roto i te mara wera o te tipu tioata ngā whakaritenga parakore tino pakari. Me iti iho i te 5×10⁻⁶ te nui o te poke i roto i ngā wāhanga karāpiti, ā, mō ngā mea whakamahana me iti iho i te 10×10⁻⁶. Ina koa, me iti iho i te 0.1×10⁻⁶ te nui o te boron (B) me te konumohe (Al).

2. Te Tika o te Porowhita o te Karaihe Purapura
   E whakaatu ana ngā raraunga whakamātautau he pai te mata-C (0001) mō te whakatipu tioata 4H-SiC, ko te mata-Si ia (0001) he pai mō te whakatipu 6H-SiC.

3. Te Whakamahinga o ngā Kiriata Kākano i waho o te Tuaka
   Ka taea e ngā purapura kei waho o te tuaka te whakarerekē i te ōritetanga tipu, te whakaiti i ngā hapa tioata, me te whakatairanga i te kounga tioata pai ake.

4. Tikanga Here Karaihe Pūtake Pono
   He mea nui te hononga tika i waenga i te tioata purapura me te kaipupuri kia pumau ai te tipu i te wā e tupu ana.

5. Te Pupuri i te Pūmautanga o te Atanga Tipu
   I roto i te huringa tipu tioata katoa, me noho pumau te atanga tipu kia pai ai te kounga o te whanaketanga tioata.

 

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Ngā Hangarau Matua i roto i te Tipu Tioata SiC

1. Hangarau Doping mō te Paura SiC

Mā te tāpiri i te paura SiC ki te cerium (Ce) ka taea te whakau i te tipu o tētahi momo kotahi pērā i te 4H-SiC. Kua whakaatuhia e ngā mahi ka taea e te tāpiringa Ce te:

• Whakanuia te tere tipu o ngā tioata SiC;

• Whakapai ake i te whakatakotoranga o te tioata kia ōrite ake ai te tipu me te ahunga o te tipu;

• Whakaitihia ngā poke me ngā hapa;

• Āraihia te waikura o te taha whakamuri o te karaihe;

• Whakapai ake i te tere hua o te tioata kotahi.

2. Te Whakahaere i ngā Rōnaki Wera Tuai me te Rōnaki

Ka pāngia te momo tioata me te tere tipu e ngā pikinga pāmahana tuaka. Mā te pikinga iti rawa ka taea te whakauru i ngā momo tioata me te whakaiti i te kawe rauemi i roto i te wāhanga kohu. He mea nui te arotau i ngā pikinga tuaka me ngā pikinga radial mō te tipu tioata tere me te pumau me te kounga pumau.

3. Hangarau Whakahaere i te Nekehanga Papa Tuturu (BPD)

Ko te nuinga o ngā BPD ka puta mai i te nui haere o te ahotea kutikuti i te paepae matua i roto i ngā tioata SiC, ka whakahohe i ngā pūnaha paheke. I te mea he poutū ngā BPD ki te ahunga tipu, ka puta ake i te wā e tipu ana te tioata me te whakamatao. Mā te whakaiti i te ahotea ā-roto ka taea te whakaiti i te kiato o te BPD.

4. Te Mana Whakahaere i te Tauwehenga Hanganga Āhuatanga Kohu

Ko te whakanui ake i te ōwehenga waro-ki-silicon i roto i te wāhanga kohu he tikanga kua whakamātauhia hei whakatairanga i te tipu momo-maha kotahi. Mā te ōwehenga C/Si teitei ka whakaiti i te puranga macrostep, ā, ka pupuri i te tukunga iho o te mata mai i te tioata purapura, ā, ka pehi i te hanganga o ngā momo-maha kāore e hiahiatia.

5. Ngā Tikanga Tipu Āwangawanga-Iti

Ka arahi pea te ahotea i te wā e tipu ana te tioata ki ngā papa whatu piko, ngā kapiti, me ngā kiato BPD teitei ake. Ka taea e ēnei hapa te kawe ki ngā paparanga epitaxial me te pā kino ki te mahi a te taputapu.

He maha ngā rautaki hei whakaiti i te ahotea o roto o te karaihe:

• Te whakarerekē i te tohatoha o te papa wera me ngā tawhā tukanga hei whakatairanga i te tipu tata-taurite;

• Te arotau i te hoahoa o te oko whakarewa kia taea ai e te karaihe te tipu noa me te kore he herenga ā-mīhini;

• Te whakapai ake i te hanganga o te pupuri purapura hei whakaiti i te koretake o te horapa wera i waenga i te purapura me te karāpeti i te wā e whakamahana ana, mā te waiho i te āputa 2 mm i waenga i te purapura me te pupuri;

• Te whakamahine i ngā tukanga whakamahana, te tuku i te karaihe kia whakamatao i roto i te oumu, me te whakarerekē i te pāmahana me te roa hei whakamamae katoa i te ahotea o roto.

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Ngā Auahatanga i roto i te Hangarau Tipu Tioata SiC

1. Ngā Rahi Karaihe Nui Ake
Kua piki ake ngā diameter o te tioata kotahi SiC mai i ētahi mirimita noa iho ki ngā wafer 6-inihi, 8-inihi, tae atu ki te 12-inihi. Mā ngā wafer nui ake ka whakapiki ake i te pai o te whakaputa me te whakaiti i ngā utu, me te whakatutuki anō hoki i ngā tono o ngā tono taputapu mana-teitei.

2. Kounga Karaihe Teitei Ake
He mea nui ngā tioata SiC kounga teitei mō ngā taputapu mahi teitei. Ahakoa ngā whakapainga nui, kei te mau tonu ngā hapa o ngā tioata o nāianei pērā i ngā paipa iti, ngā pakaru, me ngā poke, ā, ka taea e ēnei katoa te whakaiti i te mahi me te pono o te taputapu.

3. Te Whakaiti i te Utu
He nui tonu te utu mō te hanga tioata SiC, ā, he iti iho te whakamahinga whānui. He mea nui te whakaiti i ngā utu mā te whakapai ake i ngā tukanga tipu, te whakapiki ake i te pai o te whakaputa, me te whakaiti i ngā utu rauemi mata hei whakawhānui ake i ngā tono mākete.

4. Te Hanganga Atamai
I te whanaketanga o te matauranga horihori me ngā hangarau raraunga nui, kei te anga whakamua te tipu o te tioata SiC ki ngā tukanga atamai, aunoa. Ka taea e ngā pūoko me ngā pūnaha whakahaere te aroturuki me te whakarerekē i ngā āhuatanga tipu i te wā tūturu, ka whakapai ake i te pumau o te tukanga me te matapae. Ka taea e ngā tātari raraunga te whakapai ake i ngā tawhā tukanga me te kounga tioata.

Ko te whanaketanga o te hangarau tipu tioata kotahi SiC kounga teitei te arotahi nui ki te rangahau rauemi haurua-ira. I te whanaketanga o te hangarau, ka haere tonu te whanake me te whakapai ake i ngā tikanga tipu tioata, ka whakarato i te turanga pakari mō ngā tono SiC i roto i ngā taputapu hiko pāmahana teitei, auau teitei, me te mana teitei.