Ngā Whakaaro Matua mō te Whakaritenga o te Karaihe Takitahi Silicon Carbide Kounga-Teitei

Ko ngā tikanga matua mō te whakarite i te karaihe kotahi o te silicon ko: Te Kawe Kohu Tinana (PVT), te Whakatipu Otinga Pūtake-Runga (TSSG), me te Whakatakoto Kohu Matū Pāmahana-Teitei (HT-CVD). I roto i ēnei, e whakamahia whānuitia ana te tikanga PVT i roto i te hanga ahumahi nā te mea he māmā ngā taputapu, he ngāwari ki te whakahaere, he iti hoki ngā utu taputapu me ngā utu whakahaere.

Ngā Kaupapa Hangarau Matua mō te Whakatipu PVT o ngā Tioata Silicon Carbide

I te whakatipu i ngā tioata silicon carbide mā te whakamahi i te tikanga Physical Vapor Transport (PVT), me whai whakaaro ki ngā āhuatanga hangarau e whai ake nei:

1. Te Parakore o ngā Rauemi Karāpiti i roto i te Rūma Whakatipu: Me iti iho i te 5×10⁻⁶ te nui o te paru i roto i ngā wāhanga karāpiti, me iti iho hoki i te 10×10⁻⁶ te nui o te paru i roto i te muka whakamahana. Me pupuri ngā huānga pēnei i te B me te Al kia iti iho i te 0.1×10⁻⁶.
2. Te Kōwhiringa Tika o te Pōrotanga o te Karaihe Kākano: E whakaatu ana ngā rangahau whakamātautau he pai te mata C (0001) mō te whakatipu i ngā karaihe 4H-SiC, ko te mata Si (0001) ia e whakamahia ana mō te whakatipu i ngā karaihe 6H-SiC.
3. Te Whakamahinga o ngā Tioata Kākano kei Waho i te Tuaka: Ka taea e ngā tioata kākano kei waho i te tuaka te whakarerekē i te ōritetanga o te tipu tioata, ka whakaiti i ngā hapa o te tioata.
4. Te Tukanga Here Karaihe Kākano Kounga Teitei.
5. Te Pupuri i te Pūmautanga o te Atanga Tipu Tioata i te Wā o te Huringa Tipu.

Ngā Hangarau Matua mō te Tipu Tioata Silicon Carbide

1. Hangarau Doping mō te Paura Silicon Carbide
   Mā te tāpiri i te paura silicon carbide ki te nui o te Ce e tika ana ka taea te whakau i te tipu o ngā tioata takitahi 4H-SiC. E whakaatu ana ngā hua mahi ka taea e te tāpiringa Ce te:

• Whakanuia te tere tipu o ngā tioata silicon carbide.
• Whakahaerehia te ahunga o te tipu o te tioata, kia ōrite, kia mahorahora hoki.
• Pehi i te hanganga o te poke, whakaiti i ngā hapa, me te whakahaere i te hanga o ngā tioata kotahi-kirikiri me ngā tioata kounga teitei.
• Ārai i te waikura o muri o te tioata, ā, whakapai ake i te hua o te tioata kotahi.

• Hangarau Whakahaere Rōrahi Pāmahana Tuai me te Radial
  Ko te pikinga pāmahana tuaka te mea nui ka pā ki te momo tipu me te whai huatanga o te tioata. Ka taea e te pikinga pāmahana iti rawa te arahi ki te hanganga polycrystalline me te whakaiti i ngā tere tipu. Mā ngā pikinga pāmahana tuaka me te tuaka tika ka āwhina i te tipu tere o te tioata SiC me te pupuri tonu i te kounga tioata pumau.
• Hangarau Whakahaere i te Nekehanga Papa Tuturu (BPD)
  Ka puta ake ngā hapa BPD ina nui ake te ahotea kutikuti i roto i te tioata i te ahotea kutikuti matua o te SiC, ka whakahohe i ngā pūnaha paheke. Nā te mea he poutū ngā BPD ki te ahunga tipu tioata, ka puta tuatahi i te wā e tipu ana te tioata me te whakamatao.
• Hangarau Whakatikatika Tauwehenga Hanganga Āhuatanga Kohu
  He huarahi whai hua te whakanui ake i te ōwehenga waro-ki-te-hiraka i roto i te taiao tipu hei whakau i te tipu o te tioata kotahi. Mā te ōwehenga waro-ki-te-hiraka teitei ake ka whakaiti i te puranga hikoinga nui, ka tiaki i ngā mōhiohio tipu o te mata tioata purapura, ā, ka pehi i te hanganga momo-maha.
• Hangarau Whakahaere Taumahatanga Iti
  Ka taea e te ahotea i te wā e tipu ana te tioata te piko o ngā papa tioata, ka hua ake he kounga tioata ngoikore, he ngatata rānei. Ka whakanuia hoki e te ahotea nui ngā nekehanga papa turanga, ka pā kino ki te kounga o te paparanga epitaxial me te mahi a te taputapu.

Whakaahua matawai wafer SiC 6-inihi

Ngā Tikanga hei Whakaiti i te Taumahatanga i roto i ngā Kiriata:

• Whakatikatikahia te tohatoha o te mara pāmahana me ngā tawhā tukanga kia taea ai te tipu tata-taurite o ngā tioata takitahi SiC.
• Arotauhia te hanganga o te oko whakarewa kia taea ai te tipu noa o te tioata me te iti rawa o ngā here.
• Whakarerekētia ngā tikanga whakapiri i te tioata purapura hei whakaiti i te koretake o te horapa wera i waenga i te tioata purapura me te pupuri karāpeti. Ko te huarahi noa ko te waiho i te āputa 2 mm i waenga i te tioata purapura me te pupuri karāpeti.
• Whakapai ake i ngā tukanga whakamahana mā te whakatinana i te whakamahana i roto i te oumu, te whakarerekē i te pāmahana me te roa o te whakamahana kia tukuna katoatia ai te ahotea o roto.

Ngā Auahatanga o te Hangarau Tipu Tioata Silicon Carbide ā-Mārama

I te tirohanga whakamua, ka whanake te hangarau whakarite karaihe kotahi SiC kounga teitei i ngā huarahi e whai ake nei:

1. Te tipu nui
   Kua whanake te whānui o ngā tioata takitahi silicon carbide mai i ētahi mirimita ki te 6-inihi, 8-inihi, tae atu ki ngā rahi nui ake, 12-inihi. Mā ngā tioata SiC whānui ka pai ake te whai huatanga o te whakaputa, ka whakaiti i ngā utu, ā, ka tutuki hoki ngā hiahia o ngā taputapu mana-teitei.
2. Te Tipu Kounga-Teitei
   He mea nui ngā tioata takitahi SiC kounga teitei mō ngā taputapu mahi teitei. Ahakoa kua nui ngā ahunga whakamua kua tutuki, kei te mau tonu ngā hapa pēnei i ngā paipa iti, ngā nekehanga, me ngā poke, e pā ana ki te mahi me te pono o te taputapu.
3. Te Whakaiti Utu
   Nā te nui o te utu mō te whakarite karaihe SiC ka whakawhāitihia tōna whakamahinga i roto i ētahi mara. Mā te arotau i ngā tukanga tipu, te whakapai ake i te whai huatanga o te whakaputa, me te whakaiti i ngā utu o ngā rauemi mata ka āwhina i te whakaiti i ngā whakapaunga whakaputa.
4. Te Tipu Atamai
   I te whanaketanga o te AI me ngā raraunga nui, ka piki haere te whakamahi a te hangarau tipu tioata SiC i ngā otinga atamai. Mā te aroturuki me te whakahaere i te wā tūturu mā te whakamahi i ngā pūoko me ngā pūnaha aunoa ka whakarei ake i te pumau me te kaha whakahaere o te tukanga. Hei tāpiri, ka taea e ngā tātari raraunga nui te arotau i ngā tawhā tipu, te whakapai ake i te kounga tioata me te whai huatanga o te whakaputa.

Ko te hangarau whakarite karaihe kotahi kounga teitei te arotahi matua i roto i te rangahau rauemi haurua-ira. I te whanaketanga o te hangarau, ka haere tonu te whanaketanga o ngā tikanga whakatipu karaihe SiC, ka whakarato i te turanga pakari mō ngā tono i roto i ngā mara pāmahana teitei, auau teitei, me te mana teitei.