Ko te karawiti hiko (SiC), he momo rauemi haurua-āputa whānui, he mea nui haere tonu i roto i te whakamahinga o te pūtaiao me te hangarau hou. He tino pai te pumau o te karawiti hiko, he nui te ātete ki te mara hiko, he pai te kawe hiko me ētahi atu āhuatanga ā-tinana me te ā-whatu, ā, he whānuitia te whakamahinga i roto i ngā taputapu hiko optoelectronic me ngā taputapu pūngao rā. Nā te pikinga ake o te hiahia mō ngā taputapu hiko whai hua me te pumau, kua noho te matatau ki te hangarau tipu o te karawiti hiko hei wāhi rongonui.
Nā, e hia tō mōhiotanga mō te tukanga tipu SiC?
I tēnei rā ka matapakihia e tātou ngā tikanga matua e toru mō te whakatipu i ngā tioata takitahi o te silicon carbide: te kawe kohu ā-tinana (PVT), te epitaxy wāhanga wai (LPE), me te whakatakotoranga kohu matū pāmahana teitei (HT-CVD).
Tikanga Whakawhiti Kohu Tinana (PVT)
Ko te tikanga whakawhiti kohu ā-tinana tētahi o ngā tukanga tipu karawiti silicon e whakamahia whānuitia ana. Ko te tipu o te karawiti silicon tioata kotahi e whakawhirinaki ana ki te whakangawari o te paura sic me te whakatakotoranga anō ki te tioata purapura i raro i ngā āhuatanga pāmahana teitei. I roto i te para karāpiti kua kati, ka whakamahanahia te paura karawiti silicon ki te pāmahana teitei, mā te whakahaere i te pikinga pāmahana, ka whakapūmau te mamaoa karawiti silicon ki runga i te mata o te tioata purapura, ā, ka tipu haere hei tioata kotahi rahi nui.
Ko te nuinga o te SiC monocrystalline e tukuna ana e mātou i tēnei wā he mea hanga i tēnei ara tipu. Koinei hoki te ara matua i roto i te umanga.
Te epitaxy wāhanga wai (LPE)
Ka whakaritea ngā tioata karawiti silicon mā te epitaxy āhua wai mā te tukanga tipu tioata i te atanga totoka-wai. I tēnei tikanga, ka whakarewaina te paura karawiti silicon ki roto i te otinga karawiti-silicon i te pāmahana teitei, kātahi ka whakaitihia te pāmahana kia puta ai te karawiti silicon mai i te otinga ka tipu ki runga i ngā tioata purapura. Ko te painga matua o te tikanga LPE ko te kaha ki te whiwhi tioata kounga teitei i te pāmahana tipu iti iho, he iti te utu, ā, he pai mō te whakaputa nui.
Te Whakatakotoranga Matū o te Kohu i te pāmahana teitei (HT-CVD)
Mā te whakauru i te hau kei roto te silicon me te waro ki roto i te rūma tauhohenga i te pāmahana teitei, ka whakatakotoria tika te paparanga tioata kotahi o te silicon carbide ki runga i te mata o te tioata purapura mā te tauhohenga matū. Ko te painga o tēnei tikanga ko te taea te whakahaere tika i te tere rere me ngā āhuatanga tauhohenga o te hau, kia whiwhi ai i te tioata silicon carbide he tino parakore, he iti noa ngā hapa. Ka taea e te tukanga HT-CVD te whakaputa tioata silicon carbide he tino pai ngā āhuatanga, he mea tino nui mō ngā tono e hiahiatia ana he rauemi tino kounga teitei.
Ko te tukanga whakatipu o te silicon carbide te tūāpapa o tōna whakamahinga me tōna whanaketanga. Mā te auahatanga hangarau tonu me te arotautanga, ka whai wāhi ēnei tikanga whakatipu e toru ki te whakatutuki i ngā hiahia o ngā wā rerekē, kia mau ai te tūranga nui o te silicon carbide. Mā te hohonu haere o te rangahau me te ahunga whakamua hangarau, ka arotau tonu te tukanga whakatipu o ngā rauemi silicon carbide, ā, ka whakapai ake anō i te mahi a ngā taputapu hiko.
(te aukati)
Wā tuku: Pipiri-23-2024