Ehara i te mea he hangarau nui noa iho te Silicon carbide (SiC) mō te tiaki whenua, engari he rauemi matua hoki mō ngā ahumahi motuka me te pūngao o te ao. Hei taahiraa tuatahi nui i roto i te tukatuka tioata kotahi SiC, ko te tapahi wafer te mea tika hei whakatau i te kounga o te angiangi me te oro i muri mai. He maha ngā wā ka puta mai ngā kapiti o te mata me te raro o te mata i ngā tikanga tapahi tuku iho, ka piki ake te tere o te pakaru o te wafer me ngā utu hanga. Nō reira, he mea nui te whakahaere i te kino o te kapiti o te mata hei whakatairanga i te hanga taputapu SiC.
I tēnei wā, e rua ngā wero nui e pā ana ki te tapahi i te konganuku SiC:
- Te nui o te ngaronga rauemi i roto i te kani waea maha tuku iho:Nā te tino pakeke me te pakarukaru o te SiC, ka ngāwari te piko me te ngatata i te wā e tapahi ana, e huri ana, e whakakanapa ana hoki. E ai ki ngā raraunga a Infineon, ko te kani waea maha e honoa ana ki te taimana-reini tuku iho ka eke ki te 50% anake o te whakamahinga rauemi i te wā e tapahi ana, ā, ko te ngaronga katoa o te anga kotahi e eke ana ki te ~250 μm i muri i te whakakanapa, ā, he iti noa iho ngā rauemi e taea te whakamahi.
- He iti te whai huatanga me te roa o ngā huringa whakaputa:E whakaatu ana ngā tatauranga whakaputa o te ao, e 273 ngā rā e pau ana mō te whakaputa i ngā anga 10,000 mā te whakamahi i te kani waea maha tonu mō ngā haora 24. He nui ngā taputapu me ngā mea e pau ana mō tēnei tikanga, ā, he nui hoki te taratara o te mata me te parahanga (puehu, wai para).
Hei whakatika i ēnei take, kua whakawhanakehia e te tīma a Ahorangi Xiu Xiangqian i Te Whare Wānanga o Nanjing he taputapu tapahi taiaho tino tika mō te SiC, mā te whakamahi i te hangarau taiaho tino tere hei whakaiti i ngā hapa me te whakanui ake i te hua. Mō te ingota SiC 20-mm, ka ruarua te hua o te wafer i tēnei hangarau ki te whakataurite ki te kani waea tuku iho. Hei tāpiri, he pai ake te ōritetanga āhuahanga o ngā wafer i tapahia ki te taiaho, ka taea ai te whakaiti i te matotoru ki te 200 μm mō ia wafer, ā, ka piki ake te putanga.
Ngā Painga Matua:
- Kua oti te R&D i runga i ngā taputapu tauira nui, kua whakamanahia mō te tapatapahi i ngā anga SiC haurua-whakamaroke 4–6-inihi me ngā poro SiC kawe hiko 6-inihi.
- Kei te manatokohia te tapahi ingota 8-inihi.
- He poto ake te wā tapahi, he nui ake te putanga ā-tau, ā, he >50% te pikinga o te hua.
Te papa SiC a XKH o te momo 4H-N
Pūmanawa Mākete:
Kua rite tēnei taputapu hei otinga matua mō te tapahi ingota SiC 8-inihi, e whakamahia ana e ngā kawemai Hapanihi me ngā utu nui me ngā here kaweake. Neke atu i te 1,000 ngā waeine o te tono ā-rohe mō ngā taputapu tapahi/whakaiti laser, engari kāore anō kia puta he huarahi kē atu i hangaia i Haina. He nui te uara mākete me te pūmanawa ōhanga o te hangarau a Te Whare Wānanga o Nanjing.
Hototahi ki ngā Rauemi Maha:
Haunga te SiC, ka tautokohia e te taputapu te tukatuka taiaho o te gallium nitride (GaN), te konumohe waikura (Al₂O₃), me te taimana, ka whānui ake ai ōna tono ahumahi.
Mā te hurihanga i te tukatuka anga SiC, ka arohia e tēnei auahatanga ngā arai nui i roto i te hanga haurua-ā-ira, me te hangai anō ki ngā au o te ao ki ngā rauemi mahi-teitei, whai hua-pūngao.
Whakamutunga
Hei kaiārahi ahumahi i roto i te hanga papa SiC (SiC), he tohunga a XKH ki te whakarato papa SiC rahi-katoa 2-12-inihi (tae atu ki te momo 4H-N/SEMI, momo 4H/6H/3C) i hangaia mō ngā rāngai tipu tere pēnei i ngā waka pūngao hou (NEV), te rokiroki pūngao photovoltaic (PV), me ngā whakawhitiwhiti kōrero 5G. Mā te whakamahi i te hangarau tapahi iti-ngaronga papa rahi-rahi me te hangarau tukatuka tino tika, kua tutuki i a mātou te hanga papatipu o ngā papa 8-inihi me ngā putanga hou i roto i te hangarau tipu karaihe SiC kawe 12-inihi, me te whakaiti nui i ngā utu maramara mō ia wae. I te haere whakamua, ka haere tonu mātou ki te arotau i te tapahi taiaho taumata-ingot me ngā tukanga whakahaere ahotea atamai hei whakanui ake i te hua papa 12-inihi ki ngā taumata whakataetae o te ao, me te whakamana i te umanga SiC ā-rohe ki te wawahi i ngā mana motuhake o te ao me te whakateretere i ngā tono tauine i roto i ngā rohe teitei pēnei i ngā maramara kounga-aunoa me ngā putunga hiko tūmau AI.
Te papa SiC a XKH o te momo 4H-N
Wā tuku: 15 o Ākuhata-2025