1. Kupu Whakataki
Ahakoa ngā tekau tau o te rangahau, kāore anō kia eke te 3C-SiC heteroepitaxial i whakatipuria ki runga i ngā papa silicon ki te kounga tioata e ranea ana mō ngā tono hiko ahumahi. Ko te tipu ka mahia i runga i ngā papa Si(100) me Si(111) rānei, he rerekē ngā wero o ia papa: ngā rohe anti-phase mō (100) me te pakaru mō (111). Ahakoa he āhuatanga whai hua ngā kiriata [111]-oriented pērā i te whakaiti i te kiato hapa, te whakapai ake i te āhua o te mata, me te iti o te ahotea, kāore anō kia tino rangahauhia ngā aronga rerekē pērā i (110) me (211). E kī ana ngā raraunga o nāianei ko ngā āhuatanga tipu pai rawa atu he mea motuhake ki te aronga, ka uaua ai te rangahau pūnaha. He mea nui, kāore anō kia pūrongohia te whakamahinga o ngā papa Si teitei ake te taupū Miller (hei tauira, (311), (510)) mō te heteroepitaxy 3C-SiC, e waiho ana he wāhi nui mō te rangahau tūhura mō ngā tikanga tipu e whakawhirinaki ana ki te aronga.
2. Whakamātautau
I whakatakotoria ngā paparanga 3C-SiC mā te whakatakoto i te kohu matū pēhanga-hau (CVD) mā te whakamahi i ngā hau mua o te SiH4/C3H8/H2. Ko ngā papa he papa Si 1 cm² me ngā whakatakotoranga rerekē: (100), (111), (110), (211), (311), (331), (510), (553), me te (995). I runga i te tuaka ngā papa katoa engari mō (100), i reira i whakamatautauria anō ngā papa tapahi 2°. Ko te horoinga i mua i te tipu i uru ki te tango hinu ultrasonic i roto i te methanol. Ko te tikanga whakatipu i whakaurua ki te tango i te waikura taketake mā te whakamahana H2 i te 1000°C, ā, i muri mai ka whai i tētahi tukanga paerewa e rua ngā taahiraa: te whakakākā mō ngā meneti 10 i te 1165°C me te 12 sccm C3H8, kātahi ka epitaxy mō ngā meneti 60 i te 1350°C (ōwehenga C/Si = 4) mā te whakamahi i te 1.5 sccm SiH4 me te 2 sccm C3H8. I roto i ia oma whakatipu e whā ki te rima ngā aronga Si rerekē, me te iti rawa kotahi (100) te papa tohutoro.
3. Ngā Hua me te Kōrero
Ko te āhua o ngā paparanga 3C-SiC i whakatipuria ki runga i ngā momo paparanga Si (Pikitia 1) i whakaatu i ngā āhuatanga mata motuhake me te taratara. I te tirohanga, ko ngā tauira i whakatipuria ki runga i te Si(100), (211), (311), (553), me te (995) i rite ki te whakaata, ko ētahi i ahu mai i te miraka ((331), (510)) ki te mangu ((110), (111)). Ko ngā mata maeneene rawa (e whakaatu ana i te hanganga moroiti tino pai) i whiwhihia ki runga i ngā paparanga (100)2° me (995). He mea whakamiharo, i noho kore pakaru ngā paparanga katoa i muri i te whakamatao, tae atu ki te 3C-SiC(111) e ngawari ana ki te ahotea. Ko te rahi o te tauira iti pea i ārai i te pakaru, ahakoa ko ētahi tauira i whakaatu i te piko (30-60 μm te piko mai i waenganui ki te taha) ka kitea i raro i te karuārai whatu i te whakanui 1000× nā te ahotea wera kua kohia. Ko ngā paparanga piko rawa i tipu ake i runga i ngā papa Si(111), (211), me (553) i whakaatu i ngā āhua kōpiko e tohu ana i te taumahatanga kume, e hiahia ana kia nui ake ngā mahi whakamātautau me ngā mahi ariā hei hono atu ki te whakatakotoranga tioata.
E whakarāpopoto ana te Pikitia 1 i ngā hua XRD me te AFM (matawai i te 20×20 μ m2) o ngā paparanga 3C-SC i whakatipuria ki runga i ngā papa Si me ngā whakatakotoranga rerekē.
I tautokona ngā tirohanga whatu e ngā whakaahua karuārai kaha ngota (AFM) (Pikitia 2). I whakaūtia ngā mata tino maeneene i runga i ngā papa (100)2° me (995) ngā uara pakiaka-mean-square (RMS), e whakaatu ana i ngā hanganga rite ki te witi me ngā taha 400-800 nm. Ko te paparanga (110) te mea tino taratara, i te mea i puta mai ngā āhuatanga roa me/ranei whakarara me ngā rohe koi i ētahi wā i roto i ētahi atu aronga ((331), (510)). I whakaatuhia e ngā matawai X-ray diffraction (XRD) θ-2θ (i whakarāpopototia i roto i te Ripanga 1) he heteroepitaxy angitu mō ngā papa iti-Miller-index, engari mō Si(110) i whakaatu i ngā tihi 3C-SiC(111) me (110) whakauru e tohu ana i te polycrystallinity. Kua pūrongohia tēnei ranunga aronga mō Si(110), ahakoa i kitea e ētahi rangahau te 3C-SiC motuhake (111)-oriented, e kī ana he mea nui te arotautanga o te āhua tipu. Mō ngā tāurangi Miller ≥5 ((510), (553), (995)), kāore i kitea he tihi XRD i roto i te whirihoranga θ-2θ paerewa nā te mea kāore ēnei papa tāurangi-teitei e wehewehe ana i roto i tēnei āhuahanga. Ko te korenga o ngā tihi 3C-SiC tāurangi-iti (hei tauira, (111), (200)) e kī ana he tipu kotahi-kiriata, me whakatītaha te tauira hei kite i te wehewehenga mai i ngā papa tāurangi-iti.
E whakaatu ana te Pikitia 2 i te tatau i te koki papatahi i roto i te hanganga karaihe CFC.
I whakaatuhia e ngā koki tioata i tatauhia i waenga i ngā papa teitei-taupū me ngā papa iti-taupū (Ripanga 2) ngā he nui (>10°), e whakamārama ana i tō rātou ngaro i roto i ngā matawai θ-2θ paerewa. Nō reira, i whakahaerehia te tātari āhua pou i runga i te tauira (995) nā tōna āhua rerekē o te kirikiri (tērā pea nō te tipu poutū, te māhanga rānei) me te iti o te taratara. He tata rite tonu ngā āhua pou (111) (Pikitia 3) mai i te papa Si me te paparanga 3C-SiC, e whakaū ana i te tipu epitaxial me te kore māhanga. I puta te ira waenga i te χ≈15°, e ōrite ana ki te koki ariā (111)-(995). E toru ngā ira ōrite-taurite i puta i ngā tūranga e tumanakohia ana (χ=56.2°/φ=269.4°, χ=79°/φ=146.7° me te 33.6°), ahakoa me rangahau anō he ira ngoikore kāore i matapaetia i te χ=62°/φ=93.3°. Ko te kounga tioata, i aromatawaitia mā te whānui o te ira i roto i ngā matawai φ, he āhua pai, ahakoa me ine te pihi hurihuri hei whakatau i te rahinga. Me whakaoti tonu ngā tatauranga pou mō ngā tauira (510) me (553) hei whakaū i tō rātou āhua epitaxial e kiia ana.
E whakaatu ana te Pikitia 3 i te hoahoa tihi XRD i tuhia ki te tauira (995), e whakaatu ana i ngā papa (111) o te papa Si (a) me te paparanga 3C-SiC (b).
4. Whakamutunga
I angitu te tipu heteroepitaxial 3C-SiC i te nuinga o ngā aronga Si engari ko (110), i puta ai he rauemi polycrystalline. Ko ngā papa Si(100)2° off me (995) i whakaputa i ngā paparanga maeneene rawa (RMS <1 nm), ko (111), (211), me (553) i whakaatu i te piko nui (30-60 μm). Ko ngā papa teitei-taupū me whai whakaahua XRD matatau (hei tauira, ngā āhua pou) hei whakaū i te epitaxy nā te korenga o ngā tihi θ-2θ. Kei roto i ngā mahi tonu ko ngā inenga pihi ru, te tātari ahotea Raman, me te whakawhānui atu ki ngā aronga teitei-taupū hei whakaoti i tēnei rangahau tūhura.
Hei kaihanga poutū kua whakauruhia, ka whakaratohia e XKH ngā ratonga tukatuka ritenga ngaio me te whānuitanga o ngā paparanga silicon carbide, e tuku ana i ngā momo paerewa me ngā momo motuhake tae atu ki te 4H/6H-N, 4H-Semi, 4H/6H-P, me te 3C-SiC, e wātea ana i ngā diameter mai i te 2-inihi ki te 12-inihi. Ko tō mātou tohungatanga pito-ki-te-pito ki te tipu tioata, te miihini tika, me te whakapumautanga kounga e whakarite ana i ngā otinga kua whakaritea mō ngā hikohiko mana, RF, me ngā tono hou.
Wā tuku: Akuhata-08-2025