Mai i te tekau tau atu i 1980, kua piki haere te mātotoru whakauru o ngā ara iahiko hiko i te tere ā-tau o te 1.5×, neke atu rānei. Mā te whakaurunga teitei ake ka nui ake te mātotoru o te iahiko me te whakaputa wera i te wā e mahi ana.Ki te kore e mimiti pai, ka raru pea te wera i te pūnaha hiko, ā, ka poto ake te roa o te ora o ngā wāhanga hiko.
Hei whakatutuki i ngā hiahia e piki haere ana te whakahaere wera, kei te rangahauhia whānuitia, kei te arotauhia hoki ngā rauemi tākai hiko matatau me te kawe wera pai rawa atu.
Rauemi whakahiato taimana/parahi
01 Taimana me te Parahi
Ko ngā rauemi takai tuku iho ko ngā uku, ngā kirihou, ngā konganuku, me ō rātou koranu. Ko ngā uku pēnei i te BeO me te AlN he rite ngā CTE ki ngā semiconductors, he pai te pumau matū, me te kawe wera ngawari. Heoi, ko te uaua o te tukatuka, te utu nui (ina koa ko te BeO paitini), me te pakarukaru ka whakawhāiti i ngā tono. He iti te utu, he māmā te taumaha, he ārai hoki ngā takai kirihou engari he ngoikore te kawe wera me te kore pumau o te pāmahana. He nui te kawe wera o ngā konganuku parakore (Cu, Ag, Al) engari he nui rawa te CTE, ko ngā koranu (Cu-W, Cu-Mo) ka whakararu i te mahi wera. Nō reira, me tere te hiahia ki ngā rauemi takai hou e whakataurite ana i te kawe wera teitei me te CTE tino pai.
| Whakakaha | Te Arahi Wera (W/(m·K)) | CTE (×10⁻⁶/℃) | Kiato (g/cm³) |
| Taimana | 700–2000 | 0.9–1.7 | 3.52 |
| ngā matūriki BeO | 300 | 4.1 | 3.01 |
| ngā matūriki AlN | 150–250 | 2.69 | 3.26 |
| ngā matūriki SiC | 80–200 | 4.0 | 3.21 |
| Ngā matūriki B₄C | 29–67 | 4.4 | 2.52 |
| muka boron | 40 | ~5.0 | 2.6 |
| ngā matūriki TiC | 40 | 7.4 | 4.92 |
| ngā matūriki Al₂O₃ | 20–40 | 4.4 | 3.98 |
| Ngā pāhau SiC | 32 | 3.4 | – |
| ngā matūriki Si₃N₄ | 28 | 1.44 | 3.18 |
| ngā matūriki TiB₂ | 25 | 4.6 | 4.5 |
| ngā matūriki SiO₂ | 1.4 | <1.0 | 2.65 |
Taimana, te rauemi taiao tino pakari e mōhiotia ana (Mohs 10), he mea tino pai anō hokikawe wera (200–2200 W/(m·K)).
Paura moroiti taimana
Parahi, me te kawe wera/hiko teitei (401 W/(m·K)), te ngāwari, me te whai huatanga o te utu, e whakamahia whānuitia ana i roto i ngā IC.
Mā te whakakotahi i ēnei āhuatanga,taimana/parahi (Dia/Cu) composites—me te Cu hei anga, me te taimana hei whakakaha—kei te puta ake hei rauemi whakahaere wera o te whakatipuranga e whai ake nei.
02 Ngā Tikanga Hanga Matua
Ko ngā tikanga noa mō te whakarite taimana/parahi ko: te whakarewa paura, te tikanga pāmahana-tiketike me te pēhanga-tiketike, te tikanga rumaki rewa, te tikanga sintering plasma tukunga, te tikanga rehu matao, me ētahi atu.
Te whakataurite i ngā tikanga whakarite rerekē, ngā tukanga me ngā āhuatanga o ngā hiato taimana/parahi rahi-kotahi
| Tawhā | Te Whakarewa Paura | Te Pēhi Wera-Korehau | Te Whakapūtanga Plasma Korakora (SPS) | Te Pēhanga Teitei Te Pāmahana Teitei (HPHT) | Te Whakatakotoranga o te Rehu Matao | Te Uruhanga Rewa |
| Momo Taimana | MBD8 | HFD-D | MBD8 | MBD4 | PDA | MBD8/HHD |
| Matrix | Paura Cu 99.8% | 99.9% paura Cu hikohiko | Paura Cu 99.9% | Paura konukōre/Cu parakore | Paura Cu parakore | Te papa/rākau Cu parakore |
| Whakarerekētanga Atanga | – | – | – | B, Ti, Si, Cr, Zr, W, Mo | – | – |
| Rahi Matūriki (μm) | 100 | 106–125 | 100–400 | 20–200 | 35–200 | 50–400 |
| Te Wāhanga Rōrahi (%) | 20–60 | 40–60 | 35–60 | 60–90 | 20–40 | 60–65 |
| Te pāmahana (°C) | 900 | 800–1050 | 880–950 | 1100–1300 | 350 | 1100–1300 |
| Pēhanga (MPa) | 110 | 70 | 40–50 | 8000 | 3 | 1–4 |
| Wā (min) | 60 | 60–180 | 20 | 6–10 | – | 5–30 |
| Kiato Whānui (%) | 98.5 | 99.2–99.7 | – | – | – | 99.4–99.7 |
| Mahi | ||||||
| Te Arahi Wera Tino Pai (W/(m·K)) | 305 | 536 | 687 | 907 | – | 943 |
Ko nga tikanga hiato Dia/Cu noa ko:
(1)Te Whakarewa Paura
Ka whakakīkīhia, ka whakatōkia ngā paura taimana/Cu kua whakaranua. Ahakoa he iti te utu, he māmā hoki, ka puta he iti te mātotoru, he koretake ngā hanganga moroiti, ā, he iti hoki ngā rahi o te tauira i tēnei tikanga.
Swaeine whakauru
(1)Te Pēhanga Teitei Te Pāmahana Teitei (HPHT)
Mā te whakamahi i ngā mīhini perehi maha-paepae, ka uru te Cu rewa ki roto i ngā whatanga taimana i raro i ngā āhuatanga tino kino, ka puta he mea hanga kikī. Heoi, me whakamahi ngā pokepokea utu nui mō te HPHT, ā, kāore e pai mō te hanga nui.
Cte pēhi ubic
(1)Te Uruhanga Rewa
Ka uru te Cu rewa ki te taimana mā te urunga āwhina-pēhanga, mā te urunga rānei e pehia ana e te capillary. Ka tutuki i ngā rauemi whakakotahi te kawe wera >446 W/(m·K).
(2)Te Whakapūtanga Plasma Korakora (SPS)
Ka tere te whakakorikori o te iahiko pupuhi i ngā paura whakaranu i raro i te pēhanga. Ahakoa he whai hua, ka heke te mahi a te SPS i ngā wāhanga taimana >65 vol%.
Te hoahoa kauwhata o te pūnaha whakamahana plasma tukunga
(5) Te Whakatakotoranga o te Rehu Matao
Ka whakatereterehia ngā paura, ka whakatakotoria ki runga i ngā papa. He uaua ki tēnei tikanga hou te whakahaere i te whakaotinga o te mata me te whakamana i te mahi wera.
03 Whakarerekētanga Atanga
Mō te whakarite i ngā rauemi hiato, ko te makuku tahi i waenga i ngā wāhanga he mea nui mō te tukanga hiato, ā, he mea nui hoki e pā ana ki te hanganga atanga me te āhua hononga atanga. Ko te āhua kore-makuku i te atanga i waenga i te taimana me te Cu ka hua ake he ātete wera nui ki te atanga. Nō reira, he mea tino nui te whakahaere rangahau whakarerekētanga i te atanga i waenga i ngā mea e rua mā roto i ngā tikanga hangarau. I tēnei wā, e rua ngā tikanga matua hei whakapai ake i te raruraru atanga i waenga i te taimana me te whāriki Cu: (1) Te maimoatanga whakarerekētanga mata o te taimana; (2) Te maimoatanga whakarewa o te whāriki parahi.
Kauwhata whakarerekētanga: (a) Te whakakikorua tika ki te mata o te taimana; (b) Te whakakoi i te matrix
(1) Te whakarerekētanga o te mata o te taimana
Mā te whakakikorua i ngā huānga hohe pērā i te Mo, Ti, W me te Cr ki te paparanga mata o te wāhanga whakakaha ka taea te whakapai ake i ngā āhuatanga ā-kanohi o te taimana, ā, ka whakarei ake i tōna kawe wera. Mā te whakakoi ka taea e ngā huānga o runga ake nei te tauhohe ki te waro i runga i te mata o te paura taimana hei hanga i tētahi paparanga whakawhiti carbide. Mā tēnei ka pai ake te āhua mākū i waenga i te taimana me te turanga whakarewa, ā, mā te paninga ka ārai i te huringa o te hanganga o te taimana i ngā pāmahana teitei.
(2) Te whakarewa i te hanganga parahi
I mua i te tukatuka rauemi hiato, ka mahia te maimoatanga whakakoi-mua ki te parahi whakarewa, ka taea te whakaputa rauemi hiato he nui te kawe wera. Mā te tāpiri i ngā huānga hohe ki roto i te anga parahi, ehara i te mea ka taea anake te whakaiti i te koki mākū i waenga i te taimana me te parahi, engari ka puta hoki he paparanga karāhe totoka ka wairewa i roto i te anga parahi i te atanga taimana/Cu i muri i te tauhohenga. Mā tēnei, ka whakarerekētia, ka whakakīia hoki te nuinga o ngā āputa kei te atanga rauemi, ā, ka whakapai ake i te kawe wera.
04 Whakamutunga
Kāore ngā rauemi takai tuku iho i te kaha ki te whakahaere i te wera mai i ngā maramara matatau. Ko ngā rauemi Dia/Cu, me te CTE ka taea te whakarerekē me te kawe wera tino teitei, he otinga whakarerekētanga mō ngā hikohiko o te whakatupuranga e whai ake nei.
Hei hinonga hangarau matatau e whakauru ana i te ahumahi me te hokohoko, ka arotahi a XKH ki te rangahau me te whakawhanake me te whakaputa i ngā mea honohono taimana/parahi me ngā mea honohono konganuku mahi-teitei pērā i te SiC/Al me te Gr/Cu, e whakarato ana i ngā otinga whakahaere wera auaha me te kawe wera neke atu i te 900W/(m·K) mō ngā mara o te takai hiko, ngā waeine hiko me te rererangi.
XKH'Rauemi hiato whakakikoruatia ki te parahi taimana:
Wā tuku: Mei-12-2025