I roto i te hanga haurua-ira, ahakoa ko te whakaahua-ipurangi me te whakairo ngā tukanga e whakahuatia pinepinetia ana, he rite tonu te hiranga o ngā tikanga whakatakoto kiriata epitaxial, kiriata angiangi rānei. E whakaatu ana tēnei tuhinga i ētahi tikanga whakatakoto kiriata angiangi e whakamahia ana i roto i te hanga maramara, tae atu kiMOCVD, te pupuhi o te magnetron, mePECVD.
He aha te hiranga o ngā tukanga kiriata angiangi i roto i te hanga maramara?
Hei tauira, whakaarohia he parāoa papatahi kua tunua noa. Mēnā ko ia anake, tera pea he reka koretake. Heoi, mā te paninga i te mata ki ngā ranu rerekē—pērā i te whakapiri pīni reka, i te tirikara moro reka rānei—ka taea e koe te whakarerekē katoa i tōna reka. He rite ēnei paninga whakarei ake i te reka kingā kiriata angiangii roto i ngā tukanga haurua-ira, ko te taro papatahi tonu e tohu ana i tepapa.
I roto i te hanga maramara, he maha ngā mahi a ngā kiriata angiangi—te whakamarumaru, te kawe hiko, te whakakore i te rama, te mimiti mārama, me ētahi atu—ā, me whai tikanga whakatakotoranga motuhake ia mahi.
1. Te Whakatakotoranga Kohu Matū Whakarewa-Waro (MOCVD)
He tikanga tino matatau, he tika hoki te MOCVD e whakamahia ana mō te whakatakoto i ngā kiriata angiangi semiconductor kounga teitei me ngā hanganga nano. He mahi nui tāna i roto i te hanganga o ngā taputapu pēnei i ngā LED, ngā laser, me ngā hikohiko mana.
Ngā Wāhanga Matua o te Pūnaha MOCVD:
- Pūnaha Tukunga Hau
Ko ia te kawenga mō te whakaurunga tika o ngā matū tauhohe ki roto i te rūma tauhohe. Kei roto i tēnei ko te whakahaere rere o:
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Ngā hau kawe
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Ngā matū whakarewa-ora
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Ngā hau haidīri
He maha ngā ara o te pūnaha mō te whakawhiti i waenga i ngā aratau tipu me ngā aratau horoi.
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Rūma Tauhohenga
Ko te ngākau o te pūnaha te wāhi e tupu ai te tipu tūturu o ngā rauemi. Kei roto i ngā wāhanga:-
Te kaitapahi kaitapaa (te pupuri turanga)
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Ngā pūoko whakamahana me te pāmahana
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Ngā tauranga whatu mō te aroturuki ā-roto
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Ngā ringa karetao mō te uta/tango aunoa i te wafer
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- Pūnaha Whakahaere Tipu
Kei roto ko ngā pūmana arorau ka taea te whakarite me te rorohiko manaaki. Mā ēnei ka āta aroturukihia me te taea te whakahoki anō puta noa i te tukanga whakatakoto. -
Aroturuki ā-Tūnga
Ko ngā taputapu pēnei i ngā pyrometer me ngā reflectometer ka ine i:-
Te matotoru o te kiriata
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Te pāmahana o te mata
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Te piko o te papa raro
Mā ēnei ka taea te urupare me te whakarerekētanga i te wā tonu.
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- Pūnaha Maimoatanga Pūwero
Ka rongoā i ngā hua paitini mā te whakamahi i te pirau wera, te whakakorikori matū rānei hei whakarite i te haumaru me te tutuki i ngā whakaritenga taiao.
Whirihoranga o te Pane Kaukau Hononga-Katia (CCS):
I roto i ngā tauhohenga MOCVD poutū, mā te hoahoa CCS ka taea te werohanga ōrite i ngā hau mā roto i ngā pūwero tauutuutu i roto i te hanganga pane kaukau. Mā tēnei ka whakaitihia ngā tauhohenga wawe, ka whakarei ake hoki i te ranunga ōrite.
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Tepūwero karāhe hurihurika āwhina anō hoki ki te whakaōrite i te paparanga rohe o ngā hau, kia pai ake ai te ōritetanga o te kiriata puta noa i te papa.
2. Te Whakapūtanga o te Magnetron
Ko te Magnetron sputtering he tikanga whakatakotoranga kohu ā-tinana (PVD) e whakamahia whānuitia ana mō te whakatakotoranga i ngā kiriata angiangi me ngā paninga, inā koa i roto i ngā taputapu hiko, ngā whatu, me ngā uku.
Te Kaupapa Mahi:
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Rauemi Whāinga
Ko te pūtake o te rauemi hei whakatakoto—te konganuku, te waikura, te nitride, me ētahi atu—kua whakamaua ki runga i te katote. -
Rūma Korehau
Ka whakahaerehia te tukanga i raro i te haukūkū teitei hei karo i te poke. -
Te Whakaputa Plasma
Ka whakakorikoria he hau kore mahi, ko te argon te tikanga, hei hanga i te plasma. -
Te Whakamahinga o te Papa Aukume
Ka herea ngā irahiko e te papa aukume ki te ūnga hei whakarei ake i te whai huatanga o te ionization. -
Te Tukanga Whakapūpū
Ka pupuhihia te ūnga e ngā katote, ka panaia ngā ngota e haere ana i roto i te ruma ka putunga ki runga i te papa.
Ngā Painga o te Magnetron Sputtering:
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Te Whakatakotoranga Kiriata Kotahiputa noa i ngā rohe whānui.
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Te Kaha ki te Whakatakoto i ngā Matū Uaua, tae atu ki ngā koranu me ngā uku.
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Ngā Tawhā Tukanga Ka Taea te Whakarerekēmō te whakahaere tika i te matotoru, te hanganga, me te hanganga moroiti.
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Kounga Kiriata Teiteime te piri kaha me te kaha ā-mīhini.
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Hototahitanga Rauemi Whānui, mai i ngā konganuku ki ngā waikura me ngā nitride.
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Mahi Pāmahana-Iti, e tika ana mō ngā papa e pāngia ana e te pāmahana.
3. Te Whakatakotoranga Kohu Matū Whakarei-Plasma (PECVD)
E whakamahia whānuitia ana te PECVD mō te whakatakoto i ngā kiriata angiangi pērā i te silicon nitride (SiNx), te silicon dioxide (SiO₂), me te silicon amorphous.
Mātāpono:
I roto i te pūnaha PECVD, ka whakaurua ngā hau matūmua ki roto i te rūma korehau, kei reira teplasma tukunga kanapaka hangaia mā te whakamahi i:
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Te whakaohooho RF
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Ngaohiko teitei DC
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Ngā pūtake ngaruiti, ngā pūtake pāorooro rānei
Ka whakahohehia e te parāoa ngā tauhohenga hau, ka puta he momo tauhohe ka putunga ki runga i te papa hei hanga i tētahi kiriata angiangi.
Ngā Hipanga Whakatakoto:
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Te Hanganga Plasma
I te whakaohokia e ngā āpure hikohiko, ka whakaionia ngā hau o mua hei hanga i ngā rauropi me ngā katote tauhohe. -
Tauhohenga me te Kawe
Ka pāngia ēnei momo e ngā tauhohenga tuarua i a rātou e neke ana ki te papa oneone. -
Tauhohenga Mata
Kia tae atu ki te papa, ka mimiti, ka tauhohe, ka hanga he kiriata totoka. Ka tukuna ētahi hua taha hei hau.
Ngā Painga o te PECVD:
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Te ōritetanga tino paii roto i te hanganga kiriata me te matotoru.
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Piripiri Kahaahakoa i ngā pāmahana whakatakotoranga iti rawa.
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Ngā Reiti Whakatakotoranga Teitei, e pai ana mō te whakaputa i te tauine ahumahi.
4. Ngā Tikanga Whakaahua Kiriata Angiangi
He mea nui te mārama ki ngā āhuatanga o ngā kiriata angiangi mō te whakahaere kounga. Ko ngā tikanga noa ko:
(1) Te Whakarerekētanga o te Hihi-X (XRD)
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KaupapaTātarihia ngā hanganga karaihe, ngā pūmau whatunga, me ngā whakatakotoranga.
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KaupapaE ai ki te Ture a Bragg, e ine ana i te horapa o ngā hihi-X mā roto i tētahi rauemi tioata.
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Ngā tonoTe karaihe, te tātari ā-wāhanga, te ine taumahatanga, me te aromatawai kiriata angiangi.
(2) Te Matawai Irahiko Matawai (SEM)
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KaupapaMātakihia te āhua me te hanganga moroiti o te mata.
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Kaupapa: Ka whakamahi i tētahi hihi irahiko hei matawai i te mata o te tauira. Ka whakaatuhia ngā taipitopito o te mata e ngā tohu kua kitea (hei tauira, ngā irahiko tuarua me ngā irahiko kua marara whakamuri).
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Ngā tonoPūtaiao rauemi, hangarau nano, koiora, me te tātari rahunga.
(3) Te Karuārai Kaha Atomika (AFM)
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Kaupapa: Ngā mata o te ahua i te taumira ngota, nanometa rānei.
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KaupapaKa matawaihia te mata e tētahi taputapu koi me te pupuri tonu i te kaha taunekeneke; ka puta he āhua whenua 3D mā ngā nekehanga poutū.
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Ngā tonoRangahau hanganga nano, ine taratara o te mata, rangahau koiora-ngota.
Wā tuku: Pipiri-25-2025