Rārangi Kaupapa
1.He Tirohanga Whānui me ngā Mahi Matua o te FOUP
2.Ngā Āhuatanga Hanganga me te Hoahoa o te FOUP
3. Ngā Aratohu Whakarōpū me te Whakamahinga o te FOUP
4. Ngā Mahi me te Hiranga o te FOUP i roto i te Hanganga Ārahi-Haumaru
5.Ngā Wero Hangarau me ngā Auahatanga Whanaketanga ā-Mārama
6. Ngā Otinga Whakaritenga me te Tautoko Ratonga a XKH
I roto i te tukanga hanga haurua-ira, ko te Front Opening Unified Pod (FOUP) he ipu nui e whakamahia ana mō te tiaki, te kawe, me te penapena i ngā wafer. Ka taea e roto te whakauru i te 25 ngā wahi wafer 300mm, ā, ko ōna wāhanga matua ko te ipu whakatuwhera-mua me te anga tatau motuhake mō te whakatuwhera me te kati. Ko te FOUP he kaikawe matua i roto i te pūnaha kawe aunoa i roto i ngā papanga wafer 12-inihi. I te nuinga o te wā ka kawehia i roto i te āhua kati, ā, ka tuwhera noa ina panaia ki te tauranga uta taputapu, ka taea ai te whakawhiti i ngā wafer ki te tauranga uta/tango o te taputapu.
Kua whakarerekētia te hoahoa o te FOUP kia rite ki ngā whakaritenga o te taiao moroiti. Kei muri ngā mokowā hei whakauru i te wafer, ā, kua hangaia te taupoki kia rite ki te rawhi o te whakatuwheratanga. Ka mahi ngā karetao whakahaere wafer i roto i te taiao hau ma o te Akomanga 1, kia kore ai e poke ngā wafer i te wā e tukuna ana. Hei tāpiri, ka nekehia te FOUP i waenga i ngā taputapu tukatuka mā te pūnaha whakahaere rauemi aunoa (AMHS). Ko te nuinga o ngā whare wafer hou e whakamahi ana i ngā pūnaha tereina o runga mō te kawe waka, ko ētahi whare tawhito ka whakamahi pea i ngā waka ārahi aunoa whenua (AGV).
Ehara i te mea ka taea anake e te FOUP te whakawhiti aunoa i ngā wafer engari he mahi rokiroki anō hoki. Nā te maha o ngā mahi hanga, ka roa pea ngā marama ki te whakaoti i te rere katoa o te tukanga ki ngā wafer. I te honoa ki te nui o ngā rahinga whakaputanga ia marama, ko te tikanga he tekau mano ngā wafer i roto i te whare hanga e haere tonu ana, e rongoatia ana rānei i tētahi wā. I te wā e rongoatia ana, ka horoia ngā FOUP ki te hauota i ia wā hei ārai i ngā poke kei pā ki ngā wafer, kia ma ai, kia pono ai hoki te tukanga whakaputa.
1. Ngā Mahi me te Hiranga o te FOUP
Ko te mahi matua o te FOUP he tiaki i ngā papa wafer mai i te ru me te poke o waho, inā koa te karo i ngā pānga ki te hua i te wā whakawhiti. Ka ārai pai i te makuku mā roto i ngā tikanga pēnei i te tango hau me te Whakahaere Āhuarangi ā-Rohe (LAC), kia noho haumaru ai ngā papa wafer i a rātou e tatari ana ki te taahiraa hanga e whai ake nei. Mā tana pūnaha hiri me te whakahaere ka taea anake te whakauru i ngā matū me ngā huānga e tika ana, ka whakaitihia te pānga kino o ngā VOC, te hāora, me te makuku ki ngā papa wafer.
I te mea ka taea e te FOUP e utaina katoatia ana ki ngā papa 25 te taumaha tae atu ki te 9 kirokaramu, me whakawhirinaki tōna kawe ki tētahi Pūnaha Whakahaere Rauemi Aunoa (AMHS). Hei whakahaere i tēnei, kua hangaia te FOUP me ngā huinga rerekē o ngā pereti hononga, ngā pine, me ngā kōhao, ā, kua rite ki ngā tohu hiko RFID hei ngāwari te tautuhi me te whakarōpū. Kāore e hiahiatia he mahi ā-ringa mō tēnei whakahaere aunoa, e whakaiti nui ana i ngā reiti hapa, e whakarei ake ana hoki i te haumaru me te tika o te tukanga hanga.
2. Hanganga me te Whakarōpūtanga o te FOUP
Ko ngā rahinga noa o te FOUP he 420 mm te whānui, 335 mm te hōhonu, ā, 335 mm te teitei. Ko ōna wāhanga hanganga matua ko: he OHT o runga (upoko harore) hei kawe i te hiki i runga ake; he tatau o mua hei urunga atu ki te taputapu; he kakau taha, he maha ngā tae kua tohua hei wehewehe i ngā wāhi tukatuka me ngā taumata poke rerekē; he wāhi kāri hei whakatakotoranga kāri karere; me te tohu RFID o raro hei tohu motuhake mō te FOUP, e taea ai e ngā taputapu me ngā hiki o runga te kite i a ia. E whā hoki ngā kōhao tautuhi me te tūnga o te turanga hei whakataurite ki ngā taputapu me te wehewehe i ngā wāhi tukatuka.
I runga i te whakamahinga, ka wehea ngā FOUP ki ngā momo e toru: PRD (mō te whakaputa), ENG (mō ngā wafer hangarau), me MON (mō ngā wafer aroturuki). Ka taea te whakamahi i ngā PRD FOUP mō te hanga hua, he pai ngā momo ENG mō te R&D, mō ngā whakamātautau rānei, ā, ko ngā momo MON he mea whakatapua ki te aroturuki tukanga mō ngā mahi pēnei i te CMP me te DIFF. He mea nui kia mōhiotia ka taea te whakamahi i ngā PRD FOUP mō ngā kaupapa ENG me te MON, ā, ka taea te whakamahi i ngā momo ENG mō te MON, engari he mōrearea te kounga i te mahi whakamuri.
Mā te taumata poke, ka taea te wehewehe i ngā FOUP ki te FE FOUP (tukanga o mua, kore-konganuku), BE FOUP (tukanga o muri, kei roto he konganuku), me ērā e motuhake ana mō ngā tukanga konganuku motuhake pēnei i te NI FOUP, CU FOUP, me te CO FOUP. Ko ngā FOUP mō ngā tukanga rerekē ka wehewehea mā te tae o ngā kakau taha, o ngā panera tatau rānei. Ka taea te whakamahi i ngā FOUP mai i ngā tukanga o mua i roto i ngā tukanga o muri, engari kaua rawa ngā FOUP o muri e whakamahia i roto i ngā tukanga o mua, nā te mea ka puta he tūponotanga poke.
Hei kaikawe matua i roto i te hanga haurua-haurua, mā te aunoatanga teitei me te whakahaere tino parahanga, ka whakarite te FOUP i te haumaru me te ma o ngā wafer i te wā o te tukanga whakaputa, ka waiho hei hanganga tino nui i roto i ngā whare hanga wafer hou.
Whakamutunga
E whakapau kaha ana a XKH ki te whakarato i ngā otinga Front-Opening Unified Pod (FOUP) kua whakaritea kia rite ki ō whakaritenga tukanga me ngā whakaritenga atanga taputapu. Mā te whakamahi i te hangarau rauemi matatau me ngā tukanga hanga tino tika, ka whakarite mātou kia tino āraihia e ia hua FOUP te hau, te ma, me te pumau miihini. He tohungatanga ahumahi hohonu tō tā mātou tīma hangarau, e tuku ana i te tautoko huringa ora whānui - mai i te kōrero whiriwhiri me te arotau hanganga ki te horoi me te tiaki - kia pai ai te whakaurunga me te mahi tahi whai hua i waenga i te FOUP me tō Pūnaha Whakahaere Rauemi Aunoa (AMHS) me ngā taputapu tukatuka. Ka whakatairangahia e mātou te haumaru o ngā wafer me te whakarei ake i te hua whakaputa hei whāinga matua. Mā roto i ngā hua auaha me ngā ratonga hangarau whānui, ka whakaratohia e mātou he taurangi pakari mō ō tukanga hanga semiconductor, ā, ka whakanui ake i te pai o te whakaputa me te hua hua.
Wā tuku: Hepetema-08-2025