Papa Whakakotahi Momo-N SiC Diameter6inihi Papa kounga teitei monocrystaline me te kounga iti
Ripanga tawhā noa mō ngā paparanga hiato SiC Momo-N
| 项目Ngā taonga | 指标Whakatakotoranga | 项目Ngā taonga | 指标Whakatakotoranga |
| 直径Diameter | 150±0.2mm | 正 面 ( 硅 面 ) 粗 糙 度 Te taratara o mua (Si-mata) | Ra≤0.2nm (5μm * 5μm) |
| 晶型Momo maha | 4H | Maramara Tapa, Rakuraku, Ngatata (tirotiro tirohanga) | Kāore |
| 电阻率Ātete | 0.015-0.025ohm ·cm | 总厚度变化TTV | ≤3μm |
| Matotoru o te paparanga whakawhiti | ≥0.4μm | 翘曲度Wāwhati | ≤35μm |
| 空洞Korekore | ≤5 ia/wafer (2mm>D>0.5mm) | 总厚度Matotoru | 350±25μm |
Ko te tohu "momo-N" e pā ana ki te momo tāpiringa e whakamahia ana i roto i ngā rauemi SiC. I roto i te ahupūngao haurua-irahiko, ko te tāpiringa ko te whakaurunga ā-tauirahiko o ngā poke ki roto i te haurua-irahiko hei whakarerekē i ōna āhuatanga hiko. Ko te tāpiringa momo-N ka whakauru i ngā huānga e whakarato ana i te nui rawa o ngā irahiko kore utu, ka hoatu ki te rauemi he kukū kawe utu kino.
Ko ngā painga o ngā papa hiato SiC momo-N ko:
1. Mahi pāmahana-teitei: He nui te kawe wera o te SiC, ā, ka taea te mahi i ngā pāmahana teitei, e tika ana mō ngā tono hiko mana-teitei me te auau-teitei.
2. Ngaohiko pakaru teitei: He nui te ngaohiko pakaru o ngā rauemi SiC, e āhei ai rātou ki te tu atu i ngā papa hiko teitei me te kore e pakaru te hiko.
3. Ātete matū me te ātete taiao: He ātete matū te SiC, ā, ka taea e ia te tu atu i ngā āhuatanga taiao kino, he mea e tika ana mō te whakamahi i roto i ngā tono uaua.
4. Te whakaiti i te ngaronga hiko: Ki te whakatauritea ki ngā rauemi silicon tuku iho, ka taea e ngā papa SiC te huri i te hiko me te whakaiti i te ngaronga hiko i roto i ngā taputapu hiko.
5. Whānui te āputa o te whitiki: He whānui te āputa o te whitiki o te SiC, e āhei ai te whakawhanake i ngā taputapu hiko ka taea te mahi i ngā pāmahana teitei ake me ngā kiato mana teitei ake.
I te nuinga, he nui ngā painga o ngā papa hiato SiC momo-N mō te whanaketanga o ngā taputapu hiko mahi-teitei, inā koa i roto i ngā tono e tino hira ana te mahi pāmahana teitei, te kiato mana teitei, me te huringa mana whai hua.