Te Wafer LNOI (Lithium Niobate i runga i te Ārai) Te Pūrongo Whakawhitiwhiti Kōrero Teitei Hiko-Whārangi
Kauwhata Taipitopito
Tirohanga Whānui
Kei roto i te pouaka wafer he awaawa ōrite, he rite tonu te rahi hei tautoko i ngā taha e rua o te wafer. Ko te pouaka karaihe he mea hanga i te kirihou PP mārama, he ātete ki te pāmahana, te kakahu me te hiko pateko. Ka whakamahia ngā tae rerekē o ngā tāpiri hei wehewehe i ngā wāhanga tukanga whakarewa i roto i te hanga haurua-ā-ira. Nā te iti o te rahi matua o ngā haurua-ā-ira, ngā tauira matotoru, me ngā whakaritenga rahi matūriki tino kaha i roto i te hanga, me whakarite kia ma te taiao o te pouaka wafer kia hono atu ai ki te kōhao tauhohenga pouaka taiao moroiti o ngā mīhini hanga rerekē.
Tikanga Hanga
He maha ngā mahi tika mō te hanga i ngā papa LNOI:
Hipanga 1: Te Whakatōnga o te Hīriamu IonKa whakaurua ngā iona heriuma ki roto i tētahi tioata LN papatipu mā te whakamahi i tētahi kaiwhakauru iona. Ka noho ēnei iona ki tētahi hohonutanga motuhake, ka hanga he papa ngoikore hei āwhina i te wetewete i te kiriata.
Hipanga 2: Te Hanganga Papa TūāpapaKa whakakōhuatia, ka whakapapahia rānei tētahi anga silicon, LN rānei ki te SiO2 mā te whakamahi i te PECVD, i te whakakōhuatanga wera rānei. Ka whakapūmautia tōna mata o runga kia pai ai te hononga.
Hipanga 3: Te here o te LN ki te papaKa hurihia te tioata LN kua whakatōkia ki te katote, ka tāpirihia ki te papa turanga mā te whakamahi i te hononga papa tika. I roto i ngā tautuhinga rangahau, ka taea te whakamahi i te benzocyclobutene (BCB) hei piripiri hei whakahaere i te hononga i raro i ngā āhuatanga kāore i te tino uaua.
Hipanga 4: Te Maimoatanga Wera me te Wehenga KiriataMā te whakamahana ka whakahohehia te hanganga mirumiru i te hohonutanga o te whakatō, ka taea te wehe i te kiriata angiangi (te paparanga LN o runga) mai i te papatipu. Ka whakamahia te kaha miihini hei whakaoti i te tango kiri.
Hipanga 5: Te Whakakanapa MataKa whakamahia te Oro Matū Ā-ringa (CMP) hei whakangawari i te mata LN o runga, hei whakapai ake i te kounga whatu me te hua o te taputapu.
Ngā Tawhā Hangarau
| Rauemi | Whatu Tau LiNbO3 ngā wafe (Mā or Pango) | |
| Kurī Te pāmahana | 1142±0.7℃ | |
| Te tapahi Koki | X/Y/Z me ētahi atu | |
| Diameter/rahi | 2”/3”/4” ±0.03mm | |
| Tōra(±) | <0.20 mm ±0.005mm | |
| Matotoru | 0.18～0.5mm, neke atu rānei | |
| Tuatahi Papatahi | 16mm/22mm/32mm | |
| TTV | <3μm | |
| Kopere | -30 | |
| Wāwhati | <40μm | |
| Te Whakatakotoranga Papatahi | Kei te wātea katoa | |
| Mata Momo | Taha Kotahi Kua Orohia (SSP)/Taha Takirua Kua Orohia (DSP) | |
| Kua orohia taha Ra | <0.5nm | |
| S/D | 20/10 | |
| Tapa Ngā Paearu | R=0.2mm Momo-C or Ihu pūru | |
| Kounga | Koreutu of pakaru (ngā mirumiru me ngā whakaurunga) | |
| Whatu kua tāpirihia | Mg/Fe/Zn/MgO me ētahi atu mō whatu tohu LN ngā papa mō ia i tonoa | |
| Wafer Mata Ngā Paearu | Taupū whakaata | Kāore=2.2878/Kāore=2.2033 Tikanga honohono roangaru/porosma @632nm. |
| Te poke, | Kāore | |
| Ngā matūriki c>0.3μ m | <=30 | |
| Rakuraku, Marara | Kāore | |
| Koha | Kāore he kapiti taha, he rakuraku, he tohu kani, he paru | |
| Tākai | Rōpū/Pouaka Wafer | 25 ngā wahi mō ia pouaka |
Ngā Take Whakamahi
Nā tōna ngāwari me tōna mahi, e whakamahia ana te LNOI puta noa i ngā ahumahi maha:
Ngā hangarau whakaahua:Ngā whakarerekētanga kiato, ngā taputapu maha-whakawhiti, me ngā ara iahiko whakaahua.
RF/Ororongo:Ngā whakarerekētanga oro-whatu, ngā tātari RF.
Rorohiko Kuantum:Ngā whakaranu auau kore-raina me ngā kaihanga takirua-ira.
Te Tiaki me te Rererangi:Ngā gyros whatu ngaronga iti, ngā taputapu whakawhiti auau.
Ngā Pūrere Hauora:Ngā pūoko koiora whatu me ngā whakamātautau tohu auau-tiketike.
Ngā Pātai Auau
P: He aha i pai ake ai te LNOI i te SOI i roto i ngā pūnaha whatu?
A:He pai ake ngā tauwehenga hiko-whatu o te LNOI, ā, he whānui ake te awhe mārama, e āhei ai te mahi teitei ake i roto i ngā ara iahiko photonic.
P: He mea whakahau te CMP i muri i te wehewehe?
A:Āe. He taratara te mata LN e kitea ana i muri i te tapatapahi irahiko, ā, me whakakanapa kia tutuki ai ngā whakaritenga mō te karaehe whatu.
Q: He aha te rahi mōrahi o te wafer e wātea ana?
A:Ko te rahi o ngā anga LNOI arumoni he 3 inihi me te 4 inihi te rahi, ahakoa kei te whakawhanakehia e ētahi kaiwhakarato ngā momo 6 inihi.
P: Ka taea te whakamahi anō i te paparanga LN i muri i te wehenga?
A:Ka taea te whakakanapa anō i te tioata turanga, me te whakamahi anō i ngā wā maha, ahakoa ka heke pea te kounga i muri i ngā huringa maha.
P: He hototahi ngā wafer LNOI ki te tukatuka CMOS?
A:Ae, kua hangaia kia rite ki ngā tukanga hanga haurua-ā-ira tuku iho, inā koa ka whakamahia ngā papa silicon.
