Wafer LNOI (LiNbO3 i runga i te Ārai) 8inihi mō ngā Pūwhakarerekētanga Whatu Ngā Aratohu Ngaru Ngā Porowhita Whakauru
Kauwhata Taipitopito
Kupu Whakataki
Ko ngā papa rino Lithium Niobate on Insulator (LNOI) he rauemi matatau e whakamahia ana i roto i ngā tono whatu me ngā tono hiko matatau. Ka hangaia ēnei papa rino mā te whakawhiti i tētahi paparanga angiangi o te lithium niobate (LiNbO₃) ki runga i tētahi papa whakamātao, ko te silicon te nuinga, ko tētahi atu rauemi rānei e tika ana, mā te whakamahi i ngā tikanga matatau pēnei i te whakaurunga katote me te hononga papa rino. He maha ngā āhuatanga ōrite o te hangarau LNOI ki te hangarau papa rino Silicon on Insulator (SOI) engari ka whakamahia ngā āhuatanga whatu ahurei o te lithium niobate, he rauemi e mōhiotia ana mō ōna āhuatanga whatu piezoelectric, pyroelectric, me te kore-raina.
Kua nui te aro ki ngā wafer LNOI i roto i ngā mara pēnei i te whatu whakauru, te whakawhitiwhiti kōrero, me te rorohiko irahiko nā te mea he pai ake tā rātou mahi i roto i ngā tono auau-tiketike me te tere-tiketike. Ka hangaia ngā wafer mā te whakamahi i te tikanga "Smart-cut", e taea ai te whakahaere tika i te matotoru o te kiriata angiangi lithium niobate, kia tutuki ai ngā wafer i ngā whakaritenga e hiahiatia ana mō ngā tono rerekē.
Kaupapa
Ka tīmata te tukanga hanga i ngā papa LNOI me te tioata lithium niobate matotoru. Ka whakauruhia te tioata ki roto i te ion, ka whakaurua ngā ion helium kaha-teitei ki te mata o te tioata lithium niobate. Ka uru ēnei ion ki roto i te tioata ki tētahi hohonutanga motuhake, ka whakararuraru i te hanganga tioata, ka hanga he papa pakarukaru ka taea te whakamahi hei wehewehe i te tioata ki ngā paparanga angiangi. Ko te kaha motuhake o ngā ion helium te kaiwhakahaere i te hohonutanga o te whakaurunga, e pā tika ana ki te matotoru o te paparanga lithium niobate whakamutunga.
I muri i te whakaurunga katote, ka herea te tioata lithium niobate ki tētahi papa mā te whakamahi i tētahi tikanga e kiia nei ko te hononga wafer. Ko te tikanga o te tukanga hononga he tikanga hononga tika, ko te wā e pēhia ai ngā mata e rua (te tioata lithium niobate kua whakauruhia ki te katote me te papa) i raro i te pāmahana me te pēhanga teitei hei hanga i tētahi hononga kaha. I ētahi wā, ka whakamahia pea he rauemi piri pēnei i te benzocyclobutene (BCB) hei tautoko tāpiri.
Whai muri i te hononga, ka pāngia te angaanga e te tukanga whakamahana hei whakatika i ngā kino i puta mai i te whakaurunga katote, hei whakapakari hoki i te hononga i waenga i ngā paparanga. Ka āwhina hoki te tukanga whakamahana i te paparanga angiangi o te lithium niobate kia wehe atu i te tioata taketake, ka waiho he paparanga angiangi, kounga teitei o te lithium niobate ka taea te whakamahi mō te hanga taputapu.
Ngā Whakatakotoranga
He maha ngā āhuatanga nui o ngā wafer LNOI hei whakarite kia pai ai mō ngā tono mahi-teitei. Kei roto i ēnei:
Ngā Whakatakotoranga Rauemi;
| ;Rauemi; | ;Ngā Whakatakotoranga; |
| Rauemi | Taurite: LiNbO3 |
| Kounga Rauemi | Ngā mirumiru, ngā whakaurunga rānei <100μm |
| Te Whakatakotoranga | Tapahi-Y ±0.2° |
| Kiato | 4.65 karamu/cm³ |
| Te pāmahana o Curie | 1142 ±1°C |
| Māramatanga | >95% i roto i te awhe 450-700 nm (10 mm te matotoru) |
Ngā Whakatakotoranga Hanga;
| ;Tauwhā; | ;Whakatakotoranga; |
| Diameter | 150 mm ±0.2 mm |
| Matotoru | 350 μm ±10 μm |
| Papatahi | <1.3 µm |
| Rerekētanga Matotoru Katoa (TTV) | Wāhanga <70 μm @ 150 mm te anga |
| Rerekētanga Matotoru ā-Rohe (LTV) | <70 μm @ 150 mm te papa angiangi |
| Te taratara | Rq ≤0.5 nm (uara AFM RMS) |
| Kounga Mata | 40-20 |
| Ngā Matūriki (Kāore e taea te tango) | 100-200 μm ≤3 ngā matūriki |
| Maramara | <300 μm (papa katoa, kāore he rohe aukati) |
| Ngā pakaru | Kāore he pakaru (he angaanga katoa) |
| Te poke | Kāore he paru e kore e taea te tango (he papa katoa) |
| Te whakarara | <30 hēkona āwhata |
| Papa Tohutoro Aronga (tuaka-X) | 47 ±2 mm |
Ngā tono
He whānuitia ngā whakamahinga o ngā papa LNOI nā ō rātou āhuatanga ahurei, inā koa i roto i ngā mara o te photonics, te whakawhitiwhiti kōrero, me ngā hangarau irahiko. Ko ētahi o ngā whakamahinga matua ko:
Ngā Tirohanga Whānui:E whakamahia whānuitia ana ngā wafer LNOI i roto i ngā ara iahiko whatu whakauru, e āhei ai ngā taputapu photonic mahi-teitei pērā i ngā modulators, ngā arataki ngaru, me ngā resonators. Nā ngā āhuatanga whatu kore-raina teitei o te lithium niobate he mea pai rawa atu mō ngā tono e hiahia ana ki te whakahaere mārama pai.
Waea whakawhitiwhiti kōrero:E whakamahia ana ngā papa LNOI i roto i ngā pūwhakarerekētanga whatu, he wāhanga nui ēnei i roto i ngā pūnaha whakawhitiwhiti tere-teitei, tae atu ki ngā whatunga muka whatu. Nā te kaha ki te whakarerekē i te mārama i ngā auau teitei, he mea tino pai ngā papa LNOI mō ngā pūnaha whakawhitiwhiti kōrero hou.
Rorohiko Kuantum:I roto i ngā hangarau irahiko, ka whakamahia ngā anga LNOI hei hanga i ngā wāhanga mō ngā rorohiko irahiko me ngā pūnaha whakawhitiwhiti irahiko. Ka whakamahia ngā āhuatanga whatu kore-raina o te LNOI hei hanga i ngā takirua photon e hono ana, he mea nui mō te tohatoha kī irahiko me te whakamuna irahiko.
Ngā Pūoko:E whakamahia ana ngā papa LNOI i roto i ngā momo mahi pūoko, tae atu ki ngā pūoko whatu me ngā pūoko oro. Nā te kaha ki te taunekeneke ki te mārama me te oro, ka taea te whakamahi i ngā momo hangarau pūoko rerekē.
Ngā Pātai Auau
Q:He aha te hangarau LNOI?
Ko te hangarau LNOI he whakawhiti i tētahi kiriata angiangi o te lithium niobate ki runga i tētahi papa whakamahana, ko te silicon te tikanga. Ka whakamahia e tēnei hangarau ngā āhuatanga ahurei o te lithium niobate, pērā i ōna āhuatanga whatu kore-raina teitei, te piezoelectricity, me te pyroelectricity, e pai ai mō ngā whatu whakauru me ngā whakawhitiwhiti kōrero.
Q:He aha te rerekētanga i waenga i ngā wafer LNOI me ngā wafer SOI?
A: He rite tonu ngā paparanga LNOI me SOI nā te mea he paparanga angiangi o te rauemi e herea ana ki tētahi papa. Heoi, ka whakamahia e ngā paparanga LNOI te lithium niobate hei rauemi kiriata angiangi, ko ngā paparanga SOI ia ka whakamahia te silicon. Ko te rerekētanga matua kei roto i ngā āhuatanga o te rauemi kiriata angiangi, me te LNOI e tuku ana i ngā āhuatanga whatu me te piezoelectric pai rawa atu.
Q:He aha ngā painga o te whakamahi i ngā papa LNOI?
A: Ko ngā painga matua o ngā anga LNOI ko ō rātou āhuatanga whatu pai rawa atu, pērā i ngā tauwehenga whatu kore-raina teitei, me tō rātou kaha ā-pūkaha. Nā ēnei āhuatanga ka pai ai ngā anga LNOI mō te whakamahi i roto i ngā tono tere-teitei, auau-teitei, me te matūriki.
Q:Ka taea te whakamahi i ngā papa LNOI mō ngā tono matūriki?
Āe, e whakamahia whānuitia ana ngā wafer LNOI i roto i ngā hangarau irahiko nā te mea ka taea e rātou te whakaputa i ngā takirua photon e hono ana, me te hototahi ki ngā photonics whakauru. He mea nui ēnei āhuatanga mō ngā tono i roto i te rorohiko irahiko, te whakawhitiwhiti kōrero, me te whakamunatanga.
Q:He aha te matotoru noa o ngā kiriata LNOI?
A:Ko te matotoru o ngā kiriata LNOI he maha rau ngā nanometer ki ētahi maikiromita, i runga i te whakamahinga motuhake. Ka whakahaeretia te matotoru i te wā o te tukanga whakauru katote.
