12inihi te anga Hapira C-Plane SSP/DSP
Kauwhata Taipitopito
Whakataki Hapira
He rauemi papa kotahi-kirikiri te papa hapaira i hangaia mai i te waikura konumohe hangai tino parakore (Al₂O₃). Ka whakatipuhia ngā kirikiri hapaira nui mā te whakamahi i ngā tikanga matatau pēnei i te Kyropoulos (KY) me te Tikanga Whakawhiti Wera (HEM), kātahi ka tukatukahia mā te tapahi, te whakatakoto, te huri, me te whakakanapa tika. Nā ōna āhuatanga ā-tinana, ā-whatu, me te matū tino pai, he mea nui te papa hapaira i roto i ngā mara o ngā semiconductors, optoelectronics, me ngā hikohiko kaihoko teitei.
Ngā Tikanga Hanga Hapaira Matua
| Tikanga | Kaupapa | Ngā Painga | Ngā Taupānga Matua |
|---|---|---|---|
| Tikanga Verneuil(Te Hanumitanga o te Mura) | Ka rewahia te paura Al₂O₃ tino parakore i roto i te mura o te hauwaiora, ka whakapakeke ngā pata i runga i te purapura, i te paparanga. | He iti te utu, he nui te whai huatanga, he tino māmā te tukanga | Ngā hapaira kounga-kohatu, ngā rauemi whatu o mua |
| Tikanga Czochralski (CZ) | Ka rewahia te Al₂O₃ i roto i te oko whakarewa, ā, ka tōia māriretia te karaihe purapura ki runga kia tupu ai te karaihe. | Ka whakaputa i ngā tioata nunui me te āhua pai | Ngā tioata taiaho, ngā matapihi whatu |
| Tikanga Kyropoulos (KY) | Mā te whakamatao puhoi e whakahaeretia ana ka taea e te karaihe te tipu haere i roto i te oko whakarewa. | Ka taea te whakatipu i ngā tioata rahi-rahi, iti te ahotea (tekau kirokaramu, neke atu rānei) | Ngā papa LED, ngā mata waea atamai, ngā wāhanga whatu |
| Tikanga HEM(Whakawhiti Wera) | Ka tīmata te whakamatao mai i te tihi o te para, ka tipu iho ngā tioata mai i te purapura | Ka whakaputa i ngā tioata tino nui (tae atu ki ngā rau kirokaramu) me te kounga ōrite | Ngā matapihi whatu nui, te rererangi, ngā whatu hōia |
Te Tirohanga o te Karaihe
| Te Aronga / Te Papa | Rārangi Miller | Ngā Āhuatanga | Ngā Taupānga Matua |
|---|---|---|---|
| Papa-C | (0001) | He poutū ki te tuaka-c, he mata porotaka, he rite te whakarite o ngā ngota | Ngā rama LED, ngā taiaho taiaho, ngā papa epitaxial GaN (e whakamahia whānuitia ana) |
| A-rererangi | (11-20) | E whakarara ana ki te tuaka-c, he mata kore-pororaru, e karo ana i ngā pānga pororaru | Ngā taputapu epitaxy GaN kore-polar, ngā taputapu optoelectronic |
| M-papa | (10-10) | E whakarara ana ki te tuaka-c, kore-polar, he ōrite teitei | Ngā taputapu epitaxy GaN mahi-teitei, optoelectronic |
| R-papa | (1-102) | E anga ana ki te tuaka-c, he tino pai ngā āhuatanga whatu | Ngā matapihi whatu, ngā pūoko infrared, ngā wāhanga laser |
Whakatakotoranga o te Wafer Hapira (Ka taea te whakarite)
| Taonga | Ngā Waferi Hapira 430μm C-plane(0001) 1-inihi | |
| Ngā Rauemi Karaihe | 99,999%, Teitei te Parakore, Monocrystalline Al2O3 | |
| Tau | Pirimia, Rite-Epi | |
| Te whakatakotoranga o te mata | Papa-C(0001) | |
| Te papa-C ki waho o te koki ki te tuaka-M 0.2 +/- 0.1° | ||
| Diameter | 25.4 mm +/- 0.1 mm | |
| Matotoru | 430 µm +/- 25 µm | |
| Taha Kotahi Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (SSP) | Mata o Muri | Papa whenua pai, Ra = 0.8 μm ki te 1.2 μm |
| Taha Rua Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (DSP) | Mata o Muri | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| TTV | < 5 µm | |
| PĪKO | < 5 µm | |
| WHAWHĀ | < 5 µm | |
| Te Horoi / Te Tākai | Te horoi rūma ma me te takai korehau Akomanga 100, | |
| 25 ngā wahi i roto i te takai rīpene kotahi, i te takai kotahi rānei. | ||
| Taonga | Ngā Waferi Hapira 430μm C-plane (0001) 2-inihi | |
| Ngā Rauemi Karaihe | 99,999%, Teitei te Parakore, Monocrystalline Al2O3 | |
| Tau | Pirimia, Rite-Epi | |
| Te whakatakotoranga o te mata | Papa-C(0001) | |
| Te papa-C ki waho o te koki ki te tuaka-M 0.2 +/- 0.1° | ||
| Diameter | 50.8 mm +/- 0.1 mm | |
| Matotoru | 430 µm +/- 25 µm | |
| Te whakatakotoranga papatahi tuatahi | Papa-A (11-20) +/- 0.2° | |
| Roa Papatahi Tuatahi | 16.0 mm +/- 1.0 mm | |
| Taha Kotahi Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (SSP) | Mata o Muri | Papa whenua pai, Ra = 0.8 μm ki te 1.2 μm |
| Taha Rua Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (DSP) | Mata o Muri | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| TTV | < 10 µm | |
| PĪKO | < 10 µm | |
| WHAWHĀ | < 10 µm | |
| Te Horoi / Te Tākai | Te horoi rūma ma me te takai korehau Akomanga 100, | |
| 25 ngā wahi i roto i te takai rīpene kotahi, i te takai kotahi rānei. | ||
| Taonga | Ngā Waferi Hapira 500μm C-plane(0001) 3-inihi | |
| Ngā Rauemi Karaihe | 99,999%, Teitei te Parakore, Monocrystalline Al2O3 | |
| Tau | Pirimia, Rite-Epi | |
| Te whakatakotoranga o te mata | Papa-C(0001) | |
| Te papa-C ki waho o te koki ki te tuaka-M 0.2 +/- 0.1° | ||
| Diameter | 76.2 mm +/- 0.1 mm | |
| Matotoru | 500 µm +/- 25 µm | |
| Te whakatakotoranga papatahi tuatahi | Papa-A (11-20) +/- 0.2° | |
| Roa Papatahi Tuatahi | 22.0 mm +/- 1.0 mm | |
| Taha Kotahi Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (SSP) | Mata o Muri | Papa whenua pai, Ra = 0.8 μm ki te 1.2 μm |
| Taha Rua Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (DSP) | Mata o Muri | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| TTV | < 15 µm | |
| PĪKO | < 15 µm | |
| WHAWHĀ | < 15 µm | |
| Te Horoi / Te Tākai | Te horoi rūma ma me te takai korehau Akomanga 100, | |
| 25 ngā wahi i roto i te takai rīpene kotahi, i te takai kotahi rānei. | ||
| Taonga | Ngā Waferi Hapira 650μm C-plane(0001) 4-inihi | |
| Ngā Rauemi Karaihe | 99,999%, Teitei te Parakore, Monocrystalline Al2O3 | |
| Tau | Pirimia, Rite-Epi | |
| Te whakatakotoranga o te mata | Papa-C(0001) | |
| Te papa-C ki waho o te koki ki te tuaka-M 0.2 +/- 0.1° | ||
| Diameter | 100.0 mm +/- 0.1 mm | |
| Matotoru | 650 µm +/- 25 µm | |
| Te whakatakotoranga papatahi tuatahi | Papa-A (11-20) +/- 0.2° | |
| Roa Papatahi Tuatahi | 30.0 mm +/- 1.0 mm | |
| Taha Kotahi Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (SSP) | Mata o Muri | Papa whenua pai, Ra = 0.8 μm ki te 1.2 μm |
| Taha Rua Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (DSP) | Mata o Muri | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| TTV | < 20 µm | |
| PĪKO | < 20 µm | |
| WHAWHĀ | < 20 µm | |
| Te Horoi / Te Tākai | Te horoi rūma ma me te takai korehau Akomanga 100, | |
| 25 ngā wahi i roto i te takai rīpene kotahi, i te takai kotahi rānei. | ||
| Taonga | Ngā Waferi Hapira 1300μm C-plane(0001) 6-inihi | |
| Ngā Rauemi Karaihe | 99,999%, Teitei te Parakore, Monocrystalline Al2O3 | |
| Tau | Pirimia, Rite-Epi | |
| Te whakatakotoranga o te mata | Papa-C(0001) | |
| Te papa-C ki waho o te koki ki te tuaka-M 0.2 +/- 0.1° | ||
| Diameter | 150.0 mm +/- 0.2 mm | |
| Matotoru | 1300 µm +/- 25 µm | |
| Te whakatakotoranga papatahi tuatahi | Papa-A (11-20) +/- 0.2° | |
| Roa Papatahi Tuatahi | 47.0 mm +/- 1.0 mm | |
| Taha Kotahi Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (SSP) | Mata o Muri | Papa whenua pai, Ra = 0.8 μm ki te 1.2 μm |
| Taha Rua Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (DSP) | Mata o Muri | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| TTV | < 25 µm | |
| PĪKO | < 25 µm | |
| WHAWHĀ | < 25 µm | |
| Te Horoi / Te Tākai | Te horoi rūma ma me te takai korehau Akomanga 100, | |
| 25 ngā wahi i roto i te takai rīpene kotahi, i te takai kotahi rānei. | ||
| Taonga | Ngā Waferi Hapira 1300μm C-plane(0001) 8-inihi | |
| Ngā Rauemi Karaihe | 99,999%, Teitei te Parakore, Monocrystalline Al2O3 | |
| Tau | Pirimia, Rite-Epi | |
| Te whakatakotoranga o te mata | Papa-C(0001) | |
| Te papa-C ki waho o te koki ki te tuaka-M 0.2 +/- 0.1° | ||
| Diameter | 200.0 mm +/- 0.2 mm | |
| Matotoru | 1300 µm +/- 25 µm | |
| Taha Kotahi Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (SSP) | Mata o Muri | Papa whenua pai, Ra = 0.8 μm ki te 1.2 μm |
| Taha Rua Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (DSP) | Mata o Muri | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| TTV | < 30 µm | |
| PĪKO | < 30 µm | |
| WHAWHĀ | < 30 µm | |
| Te Horoi / Te Tākai | Te horoi rūma ma me te takai korehau Akomanga 100, | |
| Tākai wahi kotahi. | ||
| Taonga | Ngā Waferi Hapira 1300μm C-plane(0001) 12-inihi | |
| Ngā Rauemi Karaihe | 99,999%, Teitei te Parakore, Monocrystalline Al2O3 | |
| Tau | Pirimia, Rite-Epi | |
| Te whakatakotoranga o te mata | Papa-C(0001) | |
| Te papa-C ki waho o te koki ki te tuaka-M 0.2 +/- 0.1° | ||
| Diameter | 300.0 mm +/- 0.2 mm | |
| Matotoru | 3000 µm +/- 25 µm | |
| Taha Kotahi Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (SSP) | Mata o Muri | Papa whenua pai, Ra = 0.8 μm ki te 1.2 μm |
| Taha Rua Kua Orohia | Mata o mua | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| (DSP) | Mata o Muri | Kua orohia, Ra < 0.2 nm (mā te AFM) |
| TTV | < 30 µm | |
| PĪKO | < 30 µm | |
| WHAWHĀ | < 30 µm | |
Te Tukanga Hanga Angiangi Hapira
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Te Tipu o te Karaihe
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Whakatipuhia ngā kōpura hapaira (100–400 kg) mā te whakamahi i te tikanga Kyropoulos (KY) i roto i ngā oumu tipu tioata motuhake.
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Te Keri me te Hanga Ingota
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Whakamahia he oko wiri hei tukatuka i te pōro hei porotaka porotaka, he whānui 2–6 inihi te whānui, he roa 50–200 mm.
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Te Whakamahana Tuatahi
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Tirohia ngā porotiti mō ngā hapa, ka mahi i te whakamahana pāmahana teitei tuatahi hei whakamama i te ahotea o roto.
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Te Tirohanga o te Karaihe
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Whakatauhia te whakatakotoranga tika o te ingota hapaira (hei tauira, papa-C, papa-A, papa-R) mā te whakamahi i ngā taputapu whakatakotoranga.
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Te Tapahi Kani Maha-Waea
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Tapatapahia te ingota kia angiangi kia rite ki te matotoru e hiahiatia ana mā te whakamahi i ngā taputapu tapahi maha-waea.
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Tirotiro Tuatahi me te Whakamahana Tuarua
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Tirohia ngā angiangi kua oti te tapahi (te matotoru, te papatahi, ngā hapa o te mata).
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Whakamahanatia anō mēnā e tika ana hei whakapai ake i te kounga o te tioata.
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Te Whakakorikori, te Huri me te Whakakanapa CMP
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Mahia te whakakoi, te huri mata, me te whakakanapa matū (CMP) me ngā taputapu motuhake hei hanga i ngā mata rite ki te whakaata.
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Te horoi
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Horoia ngā angaanga kia tino mā te whakamahi i te wai tino parakore me ngā matū i roto i te taiao ma te rūma hei tango i ngā matūriki me ngā poke.
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Tirotirohanga Whatu me te Ā-tinana
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Whakahaerehia te kimi tuku me te tuhi i ngā raraunga whatu.
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Ine i ngā tawhā angaanga tae atu ki te TTV (Total Thickness Variation), te kopere, te warp, te tika o te whakatakotoranga, me te taratara o te mata.
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Paninga (Whiringa)
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Tāpirihia ngā paninga (hei tauira, ngā paninga AR, ngā paparanga tiaki) kia rite ki ngā whakaritenga a te kiritaki.
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Tirotiro Whakamutunga me te Tākai
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Whakahaerehia he tirotiro kounga 100% i roto i tētahi rūma ma.
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Tākaihia ngā angitū ki roto i ngā pouaka rīpene i raro i ngā tikanga horoi Akomanga-100, ka hiritia ki te mīhini horoi ngote i mua i te tuku.
Ngā Whakamahinga o ngā Wafers Sapphire
Ko ngā anga hapaira, me tō rātou pakeke whakaharahara, tō rātou whakawhiti whatu tino pai, tō rātou mahi wera tino pai, me tō rātou ārai hiko, e whakamahia whānuitia ana puta noa i ngā ahumahi maha. Ehara i te mea ko ngā ahumahi LED tuku iho me ngā ahumahi hiko opto anake te mea e kapi ana i ā rātou tono, engari kei te whānui haere hoki ki ngā wāhanga haurua-ira, ngā hiko kaihoko, me ngā mara rererangi matatau me te parepare.
1. Ngā Ārahi-ā-Waka me ngā Optoelectronics
Ngā Papa LED
Ko ngā papa hapaira ngā papa matua mō te tipu epitaxial gallium nitride (GaN), e whakamahia whānuitia ana i roto i ngā hangarau LED kikorangi, LED mā, me ngā hangarau Mini/Micro LED.
Ngā Diode Taiaho (LD)
Hei papa mō ngā taiaho taiaho e hangai ana ki te GaN, ka tautoko ngā papa hapaira i te whanaketanga o ngā taputapu taiaho kaha-nui, roa te ora.
Nga kairapu whakaahua
I roto i ngā taputapu whakaahua ultraviolet me te infrared, ka whakamahia pinepinetia ngā angiangi hapaira hei matapihi mārama, hei papa whakamahana hoki.
2. Ngā Pūrere Ārahi-Haumaru
Ngā RFIC (Ngā Porowhita Whakauru Auautanga Reo Irirangi)
Nā te pai o te ārai hiko, he mea tino pai ngā angiangi hapaira mō ngā taputapu ngaruiti auau teitei me te mana teitei.
Hangarau Silicon-on-Sapphire (SoS)
Mā te whakamahi i te hangarau SoS, ka taea te whakaiti i te kaha o te pūngao pararutiki, ka whakarei ake i te mahi a te ara iahiko. He whānuitia te whakamahinga o tēnei i roto i ngā whakawhitiwhitinga RF me ngā hikohiko rererangi.
3. Ngā Whakamahinga Whatu
Matapihi Whatu Whero
He nui te whakawhiti i waenga i te 200 nm–5000 nm, ā, e whakamahia whānuitia ana te hapaira i roto i ngā pūoko infrared me ngā pūnaha arataki infrared.
Ngā Matapihi Taiaho Mana-Tiketike
Nā te pakeke me te ātete wera o te hapaira he mea tino pai mō ngā matapihi tiaki me ngā karāhe tiaki i roto i ngā pūnaha taiaho mana-tiketike.
4. Ngā Hikohiko Kaihoko
Ngā Taupoki Arotahi Kāmera
Mā te pakeke teitei o te hapaira ka ātete te waea atamai me ngā karu kāmera ki te rakuraku.
Ngā Pūoko Taputapu
Ka taea e ngā angiangi hapaira te noho hei uhi pakari, mārama hoki, hei whakapai ake i te tika me te pono o te mōhio ki ngā tapumati.
Ngā Mataaratanga Atamai me ngā Whakaaturanga Tino Pai
Ka whakakotahihia e ngā mata hapaira te ātete ki te rakuraku me te māramatanga whatu teitei, e rongonui ai i roto i ngā hua hiko teitei.
5. Te Rererangi me te Tiaki
Ngā Dome Infrared Missile
Ka noho mārama, ka pumau hoki ngā matapihi hapaira i raro i ngā āhuatanga pāmahana tiketike, tere tiketike.
Ngā Pūnaha Whatu Ātea
E whakamahia ana ēnei i roto i ngā matapihi whatu kaha-teitei me ngā taputapu mātakitaki i hangaia mō ngā taiao tino kino.
Ētahi atu Hua Hapira Noa
Ngā Hua Whatu
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Matapihi Whatu Hapaira
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E whakamahia ana i roto i ngā taiaho, ngā ine āwhata, ngā pūnaha whakaahua pūwero me ngā matapihi pūoko.
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Awhe tuku:UV 150 nm ki te waenga-IR 5.5 μm.
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Ngā Arotahi Hapira
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Whakamahia i roto i ngā pūnaha taiaho mana-tiketike me ngā whatu rererangi.
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Ka taea te hanga hei karaihe pūkohu, pūkohu, porotakaroa rānei.
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Ngā Pīrama Hapira
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E whakamahia ana i roto i ngā taputapu ine whatu me ngā pūnaha whakaahua tino tika.
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Rererangi me te Tiaki
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Ngā Dome Hapira
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Tiakina ngā kairapu infrared i roto i ngā pere, ngā UAV, me ngā waka rererangi.
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Ngā Taupoki Tiaki Hapira
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Ātete ki te pānga o te rere o te hau tere me ngā taiao uaua.
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Tākai Hua
Mō XINKEHUI
Ko Shanghai Xinkehui New Material Co., Ltd. tētahi o ngā kamupenete kaiwhakarato whatu me te hiko hiko nui rawa atu i Haina, i whakatūria i te tau 2002. I whakawhanakehia a XKH hei whakarato i ngā wafer me ētahi atu rauemi pūtaiao me ngā ratonga e pā ana ki te haurua-ira ki ngā kairangahau mātauranga. Ko ngā rauemi haurua-ira te kaupapa matua o tā mātou pakihi, ko tā mātou tīma he hangarau, mai i tōna tīmatanga, he nui te whai wāhi a XKH ki te rangahau me te whakawhanake i ngā rauemi hiko matatau, inā koa i te mara o ngā momo wafer/papa.
Ngā Hoa
Nā te hangarau rauemi haurua-ira tino pai, kua noho a Shanghai Zhimingxin hei hoa pono mō ngā kamupene rongonui o te ao me ngā whare wānanga rongonui. Nā te kaha o Zhimingxin ki te auaha me te hiranga, kua whakatūria e Zhimingxin he hononga mahi tahi hohonu me ngā kaiārahi ahumahi pēnei i a Schott Glass, Corning, me Seoul Semiconductor. Ehara i te mea kua whakapai ake ēnei mahi tahi i te taumata hangarau o ā mātou hua, engari kua whakatairangahia hoki te whanaketanga hangarau i roto i ngā mara o te hikohiko mana, ngā taputapu optoelectronic, me ngā taputapu haurua-ira.
Haunga te mahi tahi me ngā kamupene rongonui, kua whakatūria hoki e Zhimingxin ngā hononga mahi tahi rangahau mō te wā roa me ngā whare wānanga rongonui o te ao pērā i te Whare Wānanga o Harvard, te University College London (UCL), me te Whare Wānanga o Houston. Mā roto i ēnei mahi tahi, ehara i te mea ko te tautoko hangarau anake a Zhimingxin mō ngā kaupapa rangahau pūtaiao i roto i te ao mātauranga, engari ka whai wāhi atu hoki ki te whakawhanake i ngā rauemi hou me te auahatanga hangarau, kia mau tonu ai tō mātou tūnga ki mua i te umanga semiconductor.
Mā te mahi tahi tata me ēnei kamupene rongonui o te ao me ngā whare wānanga, kei te whakatairanga tonu a Shanghai Zhimingxin i te auahatanga me te whanaketanga hangarau, me te whakarato i ngā hua me ngā otinga o te ao hei whakatutuki i ngā hiahia e tipu haere ana o te mākete o te ao.
