HPSI SiCOI wafer 4 6inihi te herenga wai

Whakaahua Matua o te HPSI SiCOI wafer 4 6inihi te rahi o te hononga wai

Whakaahuatanga Poto:

Ka whakawhanakehia ngā paparanga haurua-whakamaroke teitei-parakore (HPSI) 4H-SiCOI mā te whakamahi i ngā hangarau honohono me te angiangi matatau. Ka hangaia ngā paparanga mā te honohono i ngā paparanga karawiti silicon 4H HPSI ki runga i ngā paparanga waikura wera mā roto i ngā tikanga matua e rua: te honohono hydrophilic (tika) me te honohono mata-whakahohe. Ka whakauruhia e tēnei paparanga he paparanga kua whakarerekētia waenga (pēnei i te silicon amorphous, te waikura konumohe, te waikura titanium rānei) hei whakapai ake i te kounga o te hononga me te whakaiti i ngā mirumiru, he mea tino pai mō ngā tono whatu. Ka tutuki te whakahaere matotoru o te paparanga karawiti silicon mā te SmartCut e hangai ana ki te whakaurunga katote, te huri me te whakakanapa CMP rānei. Ka tukuna e SmartCut he matotoru ōrite teitei (50nm–900nm me te ōrite ±20nm) engari ka puta pea he kino iti o te tioata nā te whakaurunga katote, ka pā ki te mahi a te taputapu whatu. Ka karohia e te huri me te whakakanapa CMP te kino o ngā rauemi, ā, he pai ake mō ngā kiriata matotoru (350nm–500µm) me ngā tono kuantum, PIC rānei, ahakoa he iti ake te ōrite matotoru (±100nm). Ko ngā paparanga paerewa 6-inihi he paparanga SiC 1µm ±0.1µm kei runga i te paparanga SiO2 3µm i runga i ngā paparanga Si 675µm me te maeneene mata tino pai (Rq < 0.2nm). Ka tutuki i ēnei paparanga HPSI SiCOI ngā mahi hanga MEMS, PIC, quantum, me ngā taputapu whatu me te kounga rauemi me te ngāwari o te tukanga.

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Ngā Āhuatanga

Tirohanga Whānui mō ngā Āhuatanga o te Wafer SiCOI (Silicon Carbide-on-Insulator)

Ko ngā papa SiCOI he papa haurua-whakatupuranga hou e whakakotahi ana i te Silicon Carbide (SiC) me te paparanga ārai, he maha ngā wā ko te SiO₂, ko te hapaira rānei, hei whakapai ake i te mahi i roto i te hikohiko mana, te RF, me te photonics. Kei raro nei he tirohanga taipitopito o ō rātou āhuatanga kua wehea ki ngā wāhanga matua:

Taonga	Whakaahuatanga
Te Hanganga o ngā Rauemi	Paparanga Silicon Carbide (SiC) e herea ana ki runga i tētahi papa whakamahana (ko te SiO₂ te hapaira rānei te nuinga)
Hanganga Karaihe	Ko ngā momo SiC 4H, 6H rānei te nuinga, e mōhiotia ana mō te kounga tioata teitei me te ōritetanga.
Ngā Āhuatanga Hiko	Te āpure hiko pakaru nui (~3 MV/cm), te āputa whānui (~3.26 eV mō te 4H-SiC), te ia turuturu iti
Te Arahi Wera	Te kawe wera teitei (~300 W/m·K), e āhei ai te tohatoha wera pai
Paparanga Hiko-ā-ira	Ka whakaratohia e te paparanga ārai (SiO₂, hapaira rānei) te wehenga hiko me te whakaiti i te kaha pirinoa
Ngā Āhuatanga Mīhini	He tino pakeke (~9 tauine Mohs), he kaha miihini tino pai, me te pumau wera
Whakaotinga Mata	He tino maeneene, he iti te matotoru o ngā hapa, he pai mō te hanga taputapu.
Ngā tono	Ngā hikohiko mana, ngā taputapu MEMS, ngā taputapu RF, ngā pūoko e hiahia ana ki te manawanui pāmahana me te ngaohiko teitei

Ko ngā papa SiCOI (Silicon Carbide-on-Insulator) he hanganga papa haurua-whakamua matatau, he mea tito mai i tētahi paparanga angiangi kounga teitei o te silicon carbide (SiC) e herea ana ki tētahi paparanga ārai, ko te silicon dioxide (SiO₂) te nuinga, ko te hapaira rānei. Ko te silicon carbide he haurua-whakamua whānui-rohe e mōhiotia ana mō tōna kaha ki te tu atu i ngā ngaohiko teitei me ngā pāmahana teitei, me te kawe wera pai me te pakeke miihini teitei, he mea tino pai mō ngā tono hiko mana-teitei, auau-teitei, me te pāmahana-teitei.

Ka whakaratohia e te paparanga ārai i roto i ngā papa SiCOI te wehenga hiko whai hua, ka whakaitihia te kaha pirinoa me ngā ia turuturu i waenga i ngā taputapu, ā, ka whakarei ake i te mahi whānui me te pono o te taputapu. Ka orohia te mata o te papa kia tino maeneene me te iti o ngā hapa, kia tutuki ai ngā tono pakari o te hanga taputapu moroiti me te nano-tauine.

Ehara i te mea ka whakapai ake noa tēnei hanganga rauemi i ngā āhuatanga hiko o ngā taputapu SiC engari ka tino whakarei ake hoki i te whakahaere wera me te pumau miihini. Nō reira, he whānuitia te whakamahinga o ngā papa SiCOI i roto i ngā hikohiko mana, ngā wāhanga auau reo irirangi (RF), ngā pūoko pūnaha hiko-iti (MEMS), me ngā hikohiko pāmahana-tiketike. I te nuinga, ka whakakotahi ngā papa SiCOI i ngā āhuatanga ā-tinana tino pai o te karawaka silicon me ngā painga wehewehe hiko o tētahi paparanga ārai, ka whakarato i tētahi turanga pai mō te whakatupuranga e whai ake nei o ngā taputapu haurua-whakaoti teitei.

Te tono a te wafer SiCOI

Ngā Pūrere Hikohiko Mana

Ngā pana hiko-tiketike me te mana-tiketike, ngā MOSFET, me ngā diode

Whai hua mai i te whānui o te āputa o te SiC, te ngaohiko pakaru teitei, me te pumau o te wera

Te whakaiti i te ngaronga hiko me te whakapai ake i te whai huatanga o ngā pūnaha whakawhiti hiko

Ngā Wāhanga Auautanga Reo Irirangi (RF)

Ngā transistors auau-tiketike me ngā whakakaha

Ko te iti o te kaha pirinoa nā te paparanga whakamarumaru ka whakarei ake i te mahi RF

He pai mō ngā pūnaha whakawhitiwhiti kōrero me ngā pūnaha radar 5G

Ngā Pūnaha Hikohiko Moroiti (MEMS)

Ngā pūoko me ngā kaiwhakaoho e mahi ana i roto i ngā taiao uaua

Mā te pakari ā-mīhini me te koretake o ngā matū ka roa ake te ora o te taputapu

Kei roto ko ngā pūoko pēhanga, ngā ine tere, me ngā gyroscope

Ngā Hikohiko Pāmahana-Teitei

Ngā hikohiko mō ngā tono motuka, rererangi, me ngā tono ahumahi

Mahi pono i ngā pāmahana teitei ina pakaru te silicon

Ngā Pūrere Whakaahua

Te whakaurunga ki ngā wāhanga optoelectronic i runga i ngā papa whakamātao

Ka whakahohe i te whakaahua whakaahua i runga i te maramara me te whakahaere wera pai ake

Ngā Pātai me ngā Whakautu a te Wafer SiCOI

P：He aha te SiCOI wafer?

A：Ko te wafer SiCOI he tikanga mō te wafer Silicon Carbide-on-Insulator. He momo papa haurua-ā-ira tēnei e herea ana he paparanga angiangi o te silicon carbide (SiC) ki runga i tētahi paparanga ārai, ko te nuinga he silicon dioxide (SiO₂) he hapaira rānei i ētahi wā. He rite te ariā o tēnei hanganga ki ngā wafer Silicon-on-Insulator (SOI) rongonui engari e whakamahi ana i te SiC hei utu mō te silicon.