Arotahi Whatu SiC Parakore Teitei Cubic 4H-semi 6SP Rahi Whakaritea

Arotahi Whatu SiC Parakore Teitei Cubic 4H-semi 6SP Rahi Whakaahua Matua Whakaritea

Whakaahuatanga Poto:

Ko ngā karāhe SiC (ngā karāhe whatu silicon carbide) he wāhanga whatu tino tika i hangaia mai i te silicon carbide (SiC) tino parakore, e tuku ana i ngā āhuatanga ā-tinana me te mahi whatu tino pai. Nā te kawe wera tino teitei (490 W/m·K), te tauwehenga iti o te whakawhānui wera (4.0×10⁻⁶/K), me te pumau taiao tino pai, kua waiho ngā karāhe SiC hei whiringa pai mō ngā pūnaha whatu e mahi ana i roto i ngā āhuatanga tino kino. E whakaatu ana ēnei karāhe i te mahi tuku tino pai (te tuku kore paninga >70%) puta noa i ngā roangaru ultraviolet ki te infrared tawhiti (0.2-6 μm), e tino pai ana mō ngā pūnaha taiaho mana-teitei, ngā whatu ātea, me te whakaahua whatu i roto i ngā taiao ahumahi uaua.

Ko te tukanga hanga o ngā karaihe SiC e uru ana ki te huri tika, te oro tino tika, me ngā maimoatanga paninga motuhake hei whakatutuki i ngā mata whatu me te tika o te nanoscale (te taratara o te mata <1 nm). Ka taea te hanga i ngā āhua ritenga tae atu ki ngā mata aspheric me ngā mata kore-ahua hei whakatutuki i ngā whakaritenga hoahoa o ngā pūnaha whatu tino tika.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Ngā Āhuatanga o te Arotahi Whatu SiC

1. Te Hiranga o ngā Rauemi

Te Āhuatanga Tino Pai mō te Taiao: Ka ātete ki ngā pāmahana >1500°C, te waikura waikawa/kawakore kaha, me te irahiko pūngao nui, he mea tino pai mō ngā waka rererangi me ngā whare karihi.

Kaha Ā-Mīhini Tino Pai: Te pakeke tata ki te taimana (Mohs 9.5), te kaha piko >400 MPa, me te ātete pānga e nui atu ana i te karāhe whatu tuku iho.

Te Pūmautanga o te Wera: Ko te kawe wera he 100× teitei ake i te silica kua hanumi, ko te CTE he 1/10 noa iho o te karāhe noa, e whakarite ana i te pumau i raro i te huringa wera tere.

2. Ngā Painga Mahi Whatu

Te tuku whānui o te hihi (0.2-6 μm); ka taea e ngā paninga motuhake te arotau i te tuku ki te >95% i roto i ngā roopu motuhake (hei tauira, 3-5 μm waenga-IR).

He iti te ngaronga marara (<0.5%/cm), he pai te whakaotinga o te mata tae atu ki te paerewa keri-rarau 10/5, ā, he papatahi te mata λ/10@633 nm.

Te paepae kino teitei i puta mai i te taiaho (LIDT) >15 J/cm² (1064 nm, 10 ns ngā pao), he pai mō ngā pūnaha arotahi taiaho mana-tiketike.

3. Ngā Āheinga Mīhini Tika

Tautoko ana i ngā mata matatini (āporo, āhua kore) me te tika o te āhua <100 nm PV me te pokapū <1 arcmin.

Ka taea te hanga karaihe SiC nunui rawa (diameter >500 mm) mō ngā karu tiro whetū me ngā karu tirohanga ātea.

Ngā Whakamahinga Matua o te Arotahi Whatu SiC

1. Ngā Tirohanga Ātea me te Tiaki

Ngā karāhe tirotiro mamao amiorangi me ngā karu tirohanga ātea, e whakamahi ana i ngā āhuatanga mama o te SiC (kiato 3.21 g/cm³) me te ātete i te irahiko.

Ngā matapihi whatu rapu pere, e mau tonu ana te wera ā-rangi (>1000°C) i te wā e rere ana te oro nui.

2. Ngā Pūnaha Taiaho Mana-Tiketike

Ngā karāhe arotahi mō ngā taputapu tapahi/whakapiri taiaho ahumahi, e mau tonu ana te pānga roa ki ngā taiaho tonu akomanga-kW.

Ngā huānga hanga hihi i roto i ngā pūnaha whakakotahitanga herenga korehau (ICF), kia tika ai te tuku taiaho pūngao-tiketike.

3. Te Hanganga Ārahi me te Tika

Ngā papa whakaata SiC mō ngā whatu whakaahua EUV, me te whakarerekētanga wera <1 nm i raro i te rerenga wera 10 kW/m².

Ngā karāhe hiko aukume mō ngā taputapu tirotiro hihi-e, e whakamahi ana i te kawe hiko a SiC mō te whakahaere pāmahana hohe.

4. Tirotiro Ahumahi me te Pūngao

Ngā karāhe endoscope mō ngā oumu pāmahana teitei (mahi tonu 1500°C).

Ngā wāhanga whatu whero-whero mō ngā taputapu tuhi puna hinu, e ātete ana ki ngā pēhanga o raro i te poka (>100 MPa) me ngā mea waikura.

Ngā Painga Whakataetae Matua

1. Te Kaiārahi Mahi Whānui
He pai ake ngā karāhe SiC i ngā rauemi whatu tuku iho (te silica hanumi, ZnSe) i roto i te pumau wera/mīhini/matū, me ō rātou āhuatanga "te kawe hiko teitei + te whakawhānui iti" e whakaoti ana i ngā wero whakarerekētanga wera i roto i ngā whatu nui.

2. Te Whai Hua o te Huringa Ora
Ahakoa he nui ake ngā utu tīmatanga, ko te roa o te ora ratonga o ngā karaihe SiC (5-10× karāhe tikanga) me te kore tiaki e hiahiatia ana ka tino whakaiti i te utu katoa o te mana pupuri (TCO).

3. Te Herekoretanga Hoahoa
Mā ngā tukanga here-tauhohenga, CVD rānei, ka taea ngā hanganga whatu SiC māmā (ngā matua honikoma), ka tutuki ai ngā ōwehenga pakari-ki-taumaha kāore e taea te whakataurite.

Ngā Āheinga Ratonga XKH

1. Ratonga Hanga Ritenga

Ngā otinga pito-ki-pito mai i te hoahoa whatu (whakaahuatanga Zemax/Code V) ki te tukunga whakamutunga, e tautoko ana i ngā mata āhua korekore parabolic aspheric/off-tuaka.

Ngā paninga motuhake: ārai-whakaata (AR), waro rite-taimana (LIDT>50 J/cm²), ITO kawe hiko, me ētahi atu.

2. Ngā Pūnaha Whakapūmau Kounga

Ngā taputapu ine ine tae atu ki ngā ine whakawhiti 4D me ngā kōtaha mārama-mā e whakarite ana i te tika o te mata λ/20.

QC Taumata-rauemi: Tātaritanga whakatakotoranga karaihe XRD mō ia papa SiC.

3. Ngā Ratonga Tāpiri Uara

Tātari hononga hanganga-wera (whakatauira ANSYS) mō te matapae mahi.

Hoahoa arotautanga hanganga whakairinga arotahi SiC whakauru.

Whakamutunga

Kei te tautuhi anō ngā karāhe SiC i ngā rohe mahi o ngā pūnaha whatu tino tika mā roto i ō rātou āhuatanga rauemi kāore e taea te whakataurite. Mā ō mātou āheinga poutū kua whakauruhia ki roto i te hanganga rauemi SiC, te miihini tino tika, me te whakamātautau ka tukuna he otinga whatu hou mō ngā rāngai rererangi me ngā rāngai hanga matatau. Me ngā whanaketanga o te tipu tioata SiC, ka arotahi ngā whanaketanga ā muri ake nei ki ngā kōhao nui ake (>1m) me ngā āhuahanga mata matatini ake (ngā rarangi āhua kore).

Hei kaihanga matua mō ngā wāhanga whatu matatau, he tohunga a XKH ki ngā rauemi mahi-teitei tae atu ki te hapaira, te silicon carbide (SiC), me ngā anga silicon, e tuku ana i ngā otinga katoa mai i te tukatuka rauemi mata ki te whakaotinga tika. Kei roto i ā mātou tohungatanga:

1. Hanganga Ritenga: Te miihini tika o ngā āhuahanga uaua (āhua ā-porowhita, āhua korekore) me ngā tūponotanga ki te ±0.001mm

2. Ngā Rauemi Rerekē: Te tukatuka hapaira (ngā matapihi UV-IR), SiC (ngā whatu mana-teitei), me te silicon (IR/ngā whatu-iti)

3. Ngā Ratonga Tāpiri Uara:

Ngā paninga ārai-whakaata/pakari (UV-FIR)

Te whakapūmautanga kounga e tautokona ana e te ine (λ/20 papatahi)

Huihuinga rūma ma mō ngā tono tairongo-paru

E mahi ana mātou ki ngā ahumahi rererangi, haurua-ira, me te taiaho, ka whakakotahi mātou i te tohungatanga pūtaiao rauemi me te hanga matatau hei whakaputa i ngā karu whatu e tu atu ana i ngā taiao tino kino, me te arotau hoki i te mahi karu whatu.