Ko te Gallium Nitride (GaN) Epitaxial i Whakatipuhia ki runga i ngā Wafers Sapphire 4inihi 6inihi mō ngā MEMS
Ngā Āhuatanga o GaN i runga i ngā Wafer Sapphire
●Teitei te Whai Hua:E rima ngā wā ka nui ake te mana o ngā taputapu GaN i ngā taputapu silicon, e whakarei ake ana i te mahi i roto i ngā tono hiko maha, tae atu ki te whakanui RF me te optoelectronics.
●Whānui o te Āputa:Mā te whānui o te āputa ira o GaN ka taea te whakamahi i te pai o te mahi i ngā pāmahana teitei, he mea tino pai mō ngā tono mana-tiketike me te auau-tiketike.
●Te pakari:Mā te kaha o GaN ki te aro atu ki ngā āhuatanga tino kino (ngā pāmahana teitei me te irahiko) ka roa te mahi i roto i ngā taiao uaua.
●Rahi Iti:Mā te GaN ka taea te hanga i ngā taputapu kiato ake, māmā ake hoki ki te whakaritea ki ngā rauemi haurua-ā-ira tuku iho, ā, ka taea ai te whakamahi i ngā hikohiko iti ake, kaha ake hoki.
Whakarāpopototanga
Kei te puta ake te Gallium Nitride (GaN) hei haurua-whakauru whiriwhiri mō ngā tono matatau e hiahia ana ki te kaha me te whai hua nui, pēnei i ngā kōwae RF mua-mutunga, ngā pūnaha whakawhitiwhiti tere-tiketike, me te rama LED. Ko ngā wafer epitaxial GaN, ina whakatipuria ki runga i ngā papa hapaira, ka tukuna he huinga o te kawe wera teitei, te ngaohiko pakaru teitei, me te urupare auau whānui, he mea nui mō te mahi tino pai i roto i ngā taputapu whakawhitiwhiti ahokore, ngā radar, me ngā jammers. Kei te wātea ēnei wafer i roto i ngā diameter 4-inihi me te 6-inihi, me ngā matotoru GaN rerekē hei whakatutuki i ngā whakaritenga hangarau rerekē. Ko ngā āhuatanga ahurei o GaN e waiho ana hei kaitono matua mō te heke mai o ngā hikohiko mana.
Ngā Tawhā Hua
| Āhuatanga Hua | Whakatakotoranga |
| Te Diameter o te Wafer | 50mm, 100mm, 50.8mm |
| Papa raro | Hapira |
| Matotoru o te Paparanga GaN | 0.5 µm - 10 µm |
| Momo GaN/Whakaurunga | Momo-N (e wātea ana te momo-P mēnā ka tonoa) |
| Te Aronga o te Karaihe GaN | <0001> |
| Momo Whakakanapa | Taha-kotahi i whakakanapahia (SSP), Taha-rua i whakakanapahia (DSP) |
| Matotoru Al2O3 | 430 µm - 650 µm |
| TTV (Rerekētanga Matotoru Katoa) | ≤ 10 μm |
| Kopere | ≤ 10 μm |
| Wāwhati | ≤ 10 μm |
| Horahanga Mata | Te horahanga o te mata e taea ana te whakamahi > 90% |
Ngā Pātai me ngā Whakautu
P1: He aha ngā painga matua o te whakamahi i te GaN i runga i ngā semiconductors tuku iho e hangai ana ki te silicon?
A1He maha ngā painga nui o te GaN i runga i te silicon, tae atu ki te whānui ake o te āputa, e āhei ai ki te whakahaere i ngā ngaohiko pakaru teitei ake, me te mahi pai i ngā pāmahana teitei ake. Nā tēnei ka pai te GaN mō ngā tono mana-teitei, auau-teitei pērā i ngā kōwae RF, ngā whakakaha mana, me ngā LED. Mā te kaha o te GaN ki te whakahaere i ngā kiato mana teitei ake ka taea hoki te whakamahi i ngā taputapu iti ake, pai ake hoki ki te whakataurite ki ngā momo taputapu e hangai ana ki te silicon.
P2: Ka taea te whakamahi i ngā wafer GaN i runga i te Sapphire i roto i ngā tono MEMS (Micro-Electro-Mīhini Pūnaha)?
A2Āe, he pai ngā papa GaN i runga i te Sapphire mō ngā tono MEMS, inā koa ka hiahiatia he mana teitei, he pumau te pāmahana, me te iti o te haruru. Nā te pakari me te whai huatanga o te rauemi i roto i ngā taiao auau teitei, he mea tino pai mō ngā taputapu MEMS e whakamahia ana i roto i te whakawhitiwhiti ahokore, te pūoko, me ngā pūnaha radar.
P3: He aha ngā whakamahinga pea o GaN i roto i te whakawhitiwhiti kōrero ahokore?
A3E whakamahia whānuitia ana a GaN i roto i ngā kōwae RF mō te whakawhitiwhiti kōrero ahokore, tae atu ki ngā hanganga 5G, ngā pūnaha radar, me ngā jammers. Nā tōna kaha teitei me te kawe wera e tino pai ai mō ngā taputapu kaha teitei, auau teitei, e taea ai te mahi pai ake me ngā āhua iti ake ki te whakataurite ki ngā otinga e hangai ana ki te silicon.
P4: He aha ngā wā arahi me ngā rahinga iti rawa ota mō GaN i runga i ngā papa Sapphire?
A4Ka rerekē ngā wā arahi me ngā rahinga iti rawa o te ota i runga i te rahi o te wafer, te matotoru o te GaN, me ngā hiahia motuhake a te kiritaki. Tena koa whakapā mai ki a mātou mō ngā utu taipitopito me te wātea i runga i ō whakaritenga.
Q5: Ka taea e au te tiki i te matotoru o te paparanga GaN ritenga, i ngā taumata tāpiringa rānei?
A5Āe, ka taea e mātou te whakarite i te matotoru o te GaN me ngā taumata tāpiringa kia tutuki ai ngā hiahia tono motuhake. Tena koa whakamōhio mai ki a mātou i ō whakaritenga e hiahiatia ana, ā, ka whakaratohia e mātou he otinga kua whakaritea.
Kauwhata Taipitopito
