Matapihi Whatu Hapaira Whakaritea Te Tukunga Parakore Teitei ≥90%
Ngā tawhā hangarau
| Taonga | Matapihi Whatu |
| Rauemi | BK7, JGS1, UV Fused Silica, Sapphire me ētahi atu |
| Ahu | 1mm-300mm |
| Te manawanui ki ngā āhuatanga | ±0.05mm |
| Kounga mata | 20-10~60-40 |
| Papatahi o te mata | 1/4~1/8 |
| Āputa mārama | neke atu i te 90% |
| Paninga | 200-4000nm |
| Tono | Taiaho, tuku mārama, whakaaturanga, me ētahi atu. |
Ngā Āhuatanga Matua
1. Te Āheitanga ki te Taiao Tino Kaha
He tino pai te mahi a ngā matapihi whatu hapaira me te ira rewa o te 2053°C, e mau tonu ana te hanganga i roto i ngā taiao mahi tonu 1000°C. Ka taea tēnei pumau wera e te tauwehenga whakawhanui wera tino iti (CTE) o te 5.3×10⁻⁶/K i te tuaka-C, he tino pai ake i ngā karāhe whatu tikanga. I roto i te matū, he tino koretake ngā matapihi whatu hapaira, ā, he ātete ki ngā waikawa kaha katoa (haunga te HF) me ngā kawakore, he mea pai mō ngā taputapu tukatuka matū me ngā tono moana. I roto i te hangarau, he nui ake te kaha piko o ēnei matapihi i te 1000MPa (5-8 ngā wā kaha ake i te karāhe whatu paerewa) me te ātete pānga tino pai.
2. Ngā Painga Mahi Whatu
Ka tukuna e ngā matapihi whatu hapaira te whakawhiti >80% puta noa i te whānuitanga o te hihi (200-5500nm i te matotoru 2mm). Mā te whakatakotoranga tioata kua whakapaitia (hei tauira, te tuaka-C e poutū ana ki te ara mārama), ka whakaitihia ngā pānga birefringence. Ka tutuki te kounga o te mata i ngā whakaritenga whatu pakari me te papatahi o te λ/10 i te 633nm me te taratara o te mata <0.5nm RMS.
3. Ngā Pūkenga Hanga Matatau
Ka tautokohia e ā mātou matapihi whatu hapaira te tukatuka hōputu-rahi (diameter >300mm) me ngā āhuahanga uaua tae atu ki ngā whirihoranga aspheric me ngā whirihoranga takahanga. Mā te hangarau hiri taha motuhake ka tutuki ngā reiti turuturu <1×10⁻⁹Pa·m³/s mō ngā tono korehau. Mā ngā paninga waro rite taimana (DLC), ka eke te paepae kino i puta mai i te taiaho (LIDT) ki te 15J/cm² (1064nm, 10ns ngā pao).
Ngā Taupānga Matua
1. Te Parepare me te Rererangi
He rite ngā matapihi whatu hapaira ki ngā kōhao pere, e tu atu ana i ngā ru wera nui (>1000°C) i te wā e rere ana te oro nui. Ka oati ngā momo ātea-wāhanga mō te roa o te ora mahi ā-pōro i roto i ngā tono waka mokowhiti.
2. Taputapu Ahumahi
I roto i te hanga i ngā rauemi haurua-haurua, ka mahi ngā matapihi whatu hapaira hei tirohanga ātete-plasma i roto i ngā rūma whakairo me ngā rūma CVD. Ka whakamahia ēnei matapihi e ngā endoscope pāmahana-tiketike mō te whakaahua mārama i roto i ngā taiao oumu 1500°C.
3. Ngā Taputapu Pūtaiao
Mā ngā matapihi whatu hapaira tino parakore (ngā poke iti iho i te 5ppm) ka whakaitihia te mimiti hihi-X i roto i ngā raina hihi synchrotron. Mā te iti o te kore-raina ka tiakina te pono o te pā o te femtosecond i roto i ngā pūnaha taiaho tino tere.
4. Ngā Pūrere Tauhokohoko
Ka whakamahia e ngā waka ruku moana hohonu ngā matapihi whatu hapaira kua whakatauria mō te hohonutanga 6000m (>60MPa). Ka whakauruhia ēnei matapihi e ngā kāmera waea atamai hei taupoki tiaki, ka whakamahi i tō rātou ātete ki te rakuraku Mohs 9 hei whakapai ake i te roa.
Kei te whakawhānui tonu ngā matapihi whatu hapaira i ā rātou tono mā roto i ngā whanaketanga o te tukatuka hōputu-rahi, ngā āhuahanga uaua, me ngā āhuatanga mahi kua whakarei ake, e whakaū ana i tō rātou tūranga hei wāhanga nui puta noa i ngā ahumahi hangarau teitei.
Ngā ratonga XKH
Ka whakauruhia e te tūāpapa ratonga whānui a XKH te tohungatanga hanga matatau me te tautoko hangarau pakari hei tuku i ngā otinga matapihi whatu hapaira mai i te pito ki te pito. Ka tukuna e te wāhanga hanga ritenga he tukatuka tuhi-e hangai ana me ngā āheinga tahuri kōnae 2D/3D katoa, me ngā ratonga arotau Hoahoa mō te Hanga (DFM) e whakaiti ana i ngā mōrearea whakaputa me ngā utu. Ka mau tonu mātou i ngā āheinga tauira tere ārahi-a-umanga, e tuku ana i ngā tauira mahi Φ100mm i roto i ngā rā pakihi e 5 hei whakatere i ngā huringa whanaketanga hua. Kei roto i ngā maimoatanga mahi matatau ko ngā paninga kawe tika me te ātete rau ka taea te whakarerekē mai i te 10-1000Ω/□ mō ngā tono tiaki EMI, me ngā kiriata ārai-kohu motuhake e pupuri ana i te mārama whatu i roto i ngā taiao makuku nui.
Kei roto i te hanganga tautoko hangarau he tīma hangarau motuhake e whakamahi ana i te pūmanawa whakaata whatu Zemax me CodeV hei whakatauira i te mahi a te pūnaha me te matapae i te whanonga wera/mīhini i raro i ngā āhuatanga whakahaere. Ko tā mātou taiwhanga tātaritanga rauemi, he rite ki te karu hiko matawai (SEM) me te karu hihi-X horapa-pūngao (EDS), e whakarato ana i te tātaritanga pūtake o te rahunga hei whakapai ake i te pono. Kei roto i ngā ratonga whakamana taiao ngā whakamātautau huringa wera nui (-196℃ ki te 800℃) me te whakaaturanga rehu tote 500-haora e ai ki ngā paerewa MIL-STD-810G, e whakarite ana i te roa o te wāhanga i roto i ngā āhuatanga whakahaere uaua.
Ka whakatinanahia e ngā pūnaha whakaū kounga te whai i ngā rauemi katoa mai i te boule tioata ki te hua kua oti, me ia wāhanga e haere tahi ana me ngā tuhinga tiwhikete whānui. Ko ngā āheinga ine kounga hou ko te ine whakawhiti-āhua 4D mō te manatoko tika o te mata λ/50, te ine whakawhiti mārama-mā e tutuki ana i te taumira taratara mata 0.1nm, me te tātari ine ine e kapi ana i te whānuitanga ine 190-3300nm mō te tautuhi tuku/whakaata.
Ka aro atu ngā ratonga tāpiri-uara ki ngā whakaritenga tono motuhake, tae atu ki ngā otinga whakauru korehau e whakaatu ana i ngā taha whakarewa me te whakakaha ā-hiri mō ngā pūnaha korehau tino-tiketike (UHV). Ka whakarite ngā ratonga whakahaere tukunga hiko (ESD) i te ātete mata i waenga i te 10⁶-10⁹Ω hei ārai i te kohikohinga utu i roto i ngā taputapu tairongo. Ka tukuna ngā wāhanga katoa ki te takai whakamutunga i roto i ngā taiao rūma ma Akomanga 100, me te tatau matūriki whiriwhiri me te takai tunua-korehau mō ngā whakaritenga ma o te taumata semiconductor.
