Ngā Wafer Epitaxial GaN-on-SiC Whakaritenga (100mm, 150mm) – Ngā Kōwhiringa Papa SiC Maha (4H-N, HPSI, 4H/6H-P)
Ngā Āhuatanga
●Matotoru o te Paparanga EpitaxialKa taea te whakarite mai i1.0 µmki3.5 µm, kua arotauhia mō te kaha teitei me te mahi auau.
●Ngā Kōwhiringa Papa SiCE wātea ana me ngā momo papa SiC, tae atu ki:
- 4H-NHe 4H-SiC kounga teitei kua pania ki te hauota mō ngā tono auau-tiketike, mana-tiketike.
- HPSISiC Āhua-Whakamaroke Tino-Parakore mō ngā tono e hiahia ana kia wehea te hiko.
- 4H/6H-PKua whakaranua te 4H me te 6H-SiC mō te taurite o te tino whai hua me te pono.
●Ngā Rahi o te WaferKei te wātea i roto i100mmme150mmngā diameters mō te ngāwari o te tauine me te whakaurunga o te taputapu.
●Ngaohiko Pakaru TeiteiMā te hangarau GaN i runga i te SiC ka whakaratohia he ngaohiko pakaru teitei, ka taea ai te mahi pakari i roto i ngā tono mana-tiketike.
●Te Arahi Wera Teitei: Te kawe wera ā-roto o SiC (tata ki te 490 W/m·K) e whakarite ana i te tino pai o te mararatanga o te wera mō ngā tono e nui ana te mana.
Ngā Whakatakotoranga Hangarau
| Tawhā | Uara |
| Te Diameter o te Wafer | 100mm, 150mm |
| Matotoru o te Paparanga Epitaxial | 1.0 µm – 3.5 µm (ka taea te whakarite) |
| Ngā Momo Papa SiC | 4H-N, HPSI, 4H/6H-P |
| Te Arahi Wera SiC | 490 W/m·K |
| Ātete SiC | 4H-N: 10^6 Ω·cm,HPSIĀhua-whakamātao,4H/6H-PWhakaranu 4H/6H |
| Matotoru o te Paparanga GaN | 1.0 µm – 2.0 µm |
| Te Kukū o te Kaikawe GaN | 10^18 henimita^-3 ki te 10^19 henimita^-3 (ka taea te whakarite) |
| Kounga Mata Angiangi | Te Pakari o te RMS: < 1 nm |
| Te Kīanga o te Nekehanga | < 1 x 10^6 henimita^-2 |
| Kopere Wafer | < 50 µm |
| Papatahi o te Wafer | < 5 µm |
| Te Pāmahana Whakahaere Mōrahi | 400°C (he mea noa mō ngā taputapu GaN-on-SiC) |
Ngā tono
●Te Hikohiko Mana:He tino pai te whai huatanga o ngā anga GaN-on-SiC me te marara wera, ā, he mea tino pai mō ngā whakakaha hiko, ngā taputapu huri hiko, me ngā ara iahiko hurihuri hiko e whakamahia ana i roto i ngā waka hiko, ngā pūnaha pūngao hou, me ngā mīhini ahumahi.
●Ngā Whakakaha Mana RF:He tino pai te huinga o GaN me SiC mō ngā tono RF auau-tiketike, mana-tiketike pērā i te whakawhitiwhiti kōrero, ngā whakawhitiwhitinga amiorangi, me ngā pūnaha radar.
●Te Rererangi me te Tiaki:He pai ēnei angaanga mō ngā hangarau rererangi me te ārai e hiahia ana ki ngā hikohiko mana mahi teitei me ngā pūnaha whakawhitiwhiti kōrero ka taea te mahi i raro i ngā āhuatanga uaua.
●Ngā Whakamahinga Motuka:He mea tino pai mō ngā pūnaha hiko mahi-teitei i roto i ngā waka hiko (EV), ngā waka ranu (HEV), me ngā teihana utu, e āhei ai te hurihanga me te whakahaere hiko whai hua.
●Ngā Pūnaha Hōia me ngā Pūnaha Radar:E whakamahia ana ngā anga GaN-on-SiC i roto i ngā pūnaha radar nā te mea he tino pai te whai huatanga, he kaha ki te whakahaere i te hiko, me te mahi wera i roto i ngā taiao uaua.
●Ngā Whakamahinga mō te Ngaruiti me te Ngaru Mirimita:Mō ngā pūnaha whakawhitiwhiti kōrero o te whakatipuranga e whai ake nei, tae atu ki te 5G, ka whakaratohia e GaN-on-SiC te mahi tino pai i roto i ngā awhe ngaru ngaru me ngā ngaru mirimita-kaha teitei.
Ngā Pātai me ngā Whakautu
P1: He aha ngā painga o te whakamahi i te SiC hei papa mō te GaN?
A1:He pai ake te kawe wera o te Silicon Carbide (SiC), te ngaohiko pakaru teitei, me te kaha miihini ki te whakataurite ki ngā papa tuku iho pēnei i te silicon. Nā tēnei ka pai rawa atu ngā papa GaN-on-SiC mō ngā tono mana-teitei, auau-teitei, me te pāmahana-teitei. Ka āwhina te papa SiC ki te whakamarara i te wera i hangaia e ngā taputapu GaN, ka whakapai ake i te pono me te mahi.
P2: Ka taea te whakarite i te matotoru o te paparanga epitaxial mō ngā tono motuhake?
A2:Āe, ka taea te whakarite i te matotoru o te paparanga epitaxial i roto i te whānuitanga o1.0 µm ki te 3.5 µm, i runga i ngā whakaritenga mana me te auau o tō tono. Ka taea e mātou te whakarite i te matotoru o te paparanga GaN kia pai ai te mahi mō ngā taputapu motuhake pēnei i ngā whakakaha mana, ngā pūnaha RF, ngā ara iahiko auau-tiketike rānei.
P3: He aha te rerekētanga i waenga i ngā papa 4H-N, HPSI, me te 4H/6H-P SiC?
A3:
- 4H-NKo te 4H-SiC kua tāpirihia ki te hauota e whakamahia whānuitia ana mō ngā tono auau-tiketike e hiahia ana ki te mahi hiko teitei.
- HPSIMā te SiC Āhua-Whakamaroke Parakore-Teitei e whakarato te wehenga hiko, he mea tino pai mō ngā tono e hiahia ana kia iti te kawe hiko.
- 4H/6H-PHe ranunga o te 4H me te 6H-SiC e whakataurite ana i te mahi, e tuku ana i te huinga o te tino whai huatanga me te pakari, e tika ana mō ngā tono hikohiko mana maha.
P4: He pai ēnei anga GaN-on-SiC mō ngā tono mana-nui pēnei i ngā waka hiko me te pūngao whakahou?
A4:Ae, he pai ngā anga GaN-on-SiC mō ngā tono mana-teitei pērā i ngā waka hiko, te pūngao hou, me ngā pūnaha ahumahi. Mā te ngaohiko pakaru teitei, te kawe wera teitei, me ngā āheinga whakahaere mana o ngā taputapu GaN-on-SiC ka taea e rātou te mahi pai i roto i ngā huringa hurihanga me te whakahaere mana uaua.
Q5: He aha te matotoru o te nekehanga o ēnei papa?
A5:Ko te mātotoru o te nekehanga o ēnei anga GaN-on-SiC he tikanga noa iho< 1 x 10^6 henimita^-2, e whakarite ana i te tipu epitaxial kounga teitei, e whakaiti ana i ngā hapa me te whakapai ake i te mahi me te pono o te taputapu.
Q6: Ka taea e au te tono i tētahi rahi wafer motuhake, i tētahi momo papa SiC rānei?
A6:Ae, kei a mātou ngā rahi wafer ritenga (100mm me te 150mm) me ngā momo papa SiC (4H-N, HPSI, 4H/6H-P) hei whakatutuki i ngā hiahia motuhake o tō tono. Tena koa whakapā mai ki a mātou mō ētahi atu kōwhiringa whakaritenga me te matapaki i ō hiahia.
Q7: He pēhea te mahi a ngā anga GaN-on-SiC i ngā taiao tino kino?
A7:He pai rawa ngā papa GaN-on-SiC mō ngā taiao tino kino nā te mea he tino pumau te pāmahana, he kaha te whakahaere i te mana, ā, he tino pai hoki te kaha ki te tuku wera. He pai te mahi a ēnei papa i roto i ngā āhuatanga pāmahana teitei, mana teitei, me te auau teitei e kitea whānuitia ana i roto i ngā mahi rererangi, tiaki whenua, me ngā mahi ahumahi.
Whakamutunga
Ka whakakotahi ā mātou Wafer Epitaxial GaN-on-SiC ritenga i ngā āhuatanga matatau o GaN me SiC hei whakarato i te mahi tino pai i roto i ngā tono mana-teitei me te auau-teitei. Me ngā kōwhiringa papa SiC maha me ngā paparanga epitaxial ritenga, he pai ēnei wafer mō ngā ahumahi e hiahia ana ki te whai huatanga teitei, te whakahaere wera, me te pono. Ahakoa mō ngā hikohiko mana, ngā pūnaha RF, ngā tono parepare rānei, ka tukuna e ā mātou wafer GaN-on-SiC te mahi me te ngāwari e hiahiatia ana e koe.
Kauwhata Taipitopito
