Papatūāpapa Kākano SiC Momo N Ritenga Dia153/155mm Mō Ngā Hikohiko Mana

Papatūāpapa Pūtake Kākano SiC Momo N Ritenga Dia153/155mm Mō Ngā Hikohiko Mana Whakaahua Matua

Whakaahuatanga Poto:

Ko ngā papa purapura Silicon Carbide (SiC) te rauemi tūāpapa mō ngā semiconductors o te whakatupuranga tuatoru, e mōhiotia ana e tō rātou kawe wera tino teitei, te kaha o te papa hiko pakaru pai rawa atu, me te nekehanga irahiko teitei. Nā ēnei āhuatanga ka tino hiahiatia rātou mō ngā hikohiko mana, ngā taputapu RF, ngā waka hiko (EV), me ngā tono pūngao whakahou. He tohunga a XKH ki te R&D me te hanga papa purapura SiC kounga teitei, e whakamahi ana i ngā tikanga tipu tioata matatau pērā i te Physical Vapor Transport (PVT) me te High-Temperature Chemical Vapor Deposition (HTCVD) hei whakarite i te kounga tioata ārahi i te ahumahi.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Whakauruhia

Kei a XKH ngā papa purapura SiC 4-inihi, 6-inihi, me te 8-inihi me te tāpiritanga momo-N/momo-P ka taea te whakarite, ka tutuki ai ngā taumata ātete o te 0.01-0.1 Ω·cm me ngā kiato nekehanga i raro i te 500 cm⁻², he mea tino pai mō te hanga MOSFET, Schottky Barrier Diodes (SBD), me IGBT. Ko tā mātou tukanga whakaputa poutū e kapi ana i te tipu tioata, te tapatapahi wafer, te oro, me te tirotiro, me te kaha whakaputa ia marama neke atu i te 5,000 wafer hei whakatutuki i ngā tono kanorau o ngā whare rangahau, ngā kaihanga semiconductor, me ngā kamupene pūngao whakahou.

Hei tāpiri, ka whakaratohia e mātou ngā otinga ritenga, tae atu ki:

Whakaritenga whakatakotoranga karaihe (4H-SiC, 6H-SiC)

Te tāpiritanga motuhake (Konumohe, Hauota, Pōroni, me ētahi atu)

Te oro tino maeneene (Ra < 0.5 nm)

Ka tautoko a XKH i te tukatuka tauira-ā-tauira, ngā whakawhitiwhiti kōrero hangarau, me te hanga tauira iti-rōpū hei tuku i ngā otinga papa SiC kua arotauhia.

Ngā tawhā hangarau

Te papa purapura silicon carbide
Momo maha	4H
Hapa whakatakotoranga mata	4°ki te<11-20>±0.5º
Ātete	whakaritenga
Diameter	205±0.5mm
Matotoru	600±50μm
Te taratara	CMP,Ra≤0.2nm
Te Kīanga o te Paipa Maikoro	≤1 ia/cm2
Ngā karawarawa	≤5, Roa Katoa ≤2 * Diameter
Ngā maramara/ngā nuku o te taha	Kāore
Te tohu laser o mua	Kāore
Ngā karawarawa	≤2, Roa Katoa ≤Diameter
Ngā maramara/ngā nuku o te taha	Kāore
Ngā rohe momo-maha	Kāore
Tohu laser whakamuri	1mm (mai i te taha o runga)
Tapa	Chamfer
Tākai	Rīpene maha-wafer

Ngā Papa Pūtake SiC - Ngā Āhuatanga Matua

1. Ngā Āhuatanga Ā-tinana Tino Pai

· He kawe wera teitei (~490 W/m·K), he nui ake i te silicon (Si) me te gallium arsenide (GaAs), he mea tino pai mō te whakamatao i ngā taputapu kiato-mana teitei.

· Te kaha o te mara pakaru (~3 MV/cm), e āhei ai te mahi pumau i raro i ngā āhuatanga ngaohiko teitei, he mea nui mō ngā kaitahuri EV me ngā waeine hiko ahumahi.

· He whānui te āputa ira (3.2 eV), e whakaiti ana i ngā ia turuturu i ngā pāmahana teitei, e whakarei ake ana hoki i te pono o te taputapu.

2. Kounga Tioata Pai Rawa

· Mā te hangarau tipu ranu PVT + HTCVD ka whakaitihia ngā hapa o ngā paipa iti, ka mau tonu te matotoru o te nekenekehanga i raro i te 500 cm⁻².

· Ko te kopere/anō o te angaanga < 10 μm me te taratara o te mata Ra < 0.5 nm, e whakarite ana i te hototahitanga ki te lithography tino tika me ngā tukanga whakatakotoranga kiriata angiangi.

3. Ngā Kōwhiringa Doping Kanorau

·Momo-N (Kua tāpirihia ki te hauota): Ātete iti (0.01-0.02 Ω·cm), kua arotauhia mō ngā taputapu RF auau-teitei.

· Momo-P (Kua tāpirihia ki te konumohe): He pai mō ngā MOSFET hiko me ngā IGBT, hei whakapai ake i te nekenekehanga o ngā kaikawe.

· SiC ā-haurua-whakamaroke (kua tāpirihia ki te Vanadium): Ātete > 10⁵ Ω·cm, kua whakaritea mō ngā kōwae pito-mua RF 5G.

4. Te Pūmautanga o te Taiao

· Ātete ki te pāmahana teitei (>1600°C) me te pakeke o te irahiko, he pai mō te rererangi, ngā taputapu karihi, me ētahi atu taiao tino kino.

Ngā Papa Pūtake Purapura SiC - Ngā Whakamahinga Matua

1. Ngā Hikohiko Mana

· Ngā Waka Hiko (EV): Whakamahia i roto i ngā rihi kei runga i te papa (OBC) me ngā inverters hei whakapai ake i te whai huatanga me te whakaiti i ngā tono whakahaere wera.

· Ngā Pūnaha Hiko Ahumahi: Ka whakarei ake i ngā kaitahuri photovoltaic me ngā whatunga atamai, ka eke ki te >99% te pai o te huringa hiko.

2. Ngā Pūrere RF

· Ngā Teihana Tūāpapa 5G: Mā ngā papa SiC haurua-whakamaroke ka taea te whakakaha i ngā whakakaha hiko RF GaN-on-SiC, e tautoko ana i te tuku tohu auau-tiketike, mana-tiketike.

Ngā Whakawhitiwhiti Kōrero Amiorangi: Nā ngā āhuatanga iti-ngaronga e pai ai mō ngā taputapu ngaru mirimita.

3. Pūngao Whakahou me te Rokiroki Pūngao

· Te Hiko o te Rā: Ka whakanui ake ngā SiC MOSFET i te pai o te tahuritanga DC-AC me te whakaiti i ngā utu pūnaha.

· Ngā Pūnaha Rokiroki Pūngao (ESS): Ka arotau i ngā kaitahuri ahunga-rua, ka whakaroa hoki i te roa o te ora o te pākahiko.

4. Te Tiaki me te Rererangi

· Ngā Pūnaha Radar: Ka whakamahia ngā taputapu SiC kaha-tiketike i roto i ngā radar AESA (Active Electronically Scanned Array).

· Te Whakahaere Mana o ngā Waka Ātea: He mea nui ngā papa SiC ātete-irahiko mō ngā misioni ātea hohonu.

5. Rangahau me ngā Hangarau Hou

· Rorohiko Kuantum: Mā te SiC tino-parakore ka taea te rangahau qubit hurihuri.

· Ngā Pūoko Pāmahana-Teitei: Whakamahia i roto i te tūhuratanga hinu me te aroturukitanga o ngā tauhohenga karihi.

Ngā Papa Pūtake Purapura SiC - Ngā Ratonga XKH

1. Ngā Painga o te Mekameka Tuku

· Hanganga poutū kua whakauruhia: Mana whakahaere katoa mai i te paura SiC tino parakore ki ngā anga kua oti, me te whakarite i ngā wā arahi mō ngā hua paerewa o te 4-6 wiki.

· Whakataetae utu: Mā ngā ōhanga tauine ka taea te whakaiti i ngā utu ki te 15-20% i ngā utu o ngā kaiwhakataetae, me te tautoko hoki mō ngā Whakaaetanga Wā-Roa (LTA).

2. Ratonga Whakaritenga

· Te whakatakotoranga karaihe: 4H-SiC (paerewa) 6H-SiC rānei (mō ngā whakamahinga motuhake).

· Te arotau i te tāpiringa: Ngā āhuatanga momo-N/momo-P/haumarutanga-haurua kua whakaritea.

· Te whakakanapa matatau: Te whakakanapa CMP me te maimoatanga mata epi-ready (Ra < 0.3 nm).

3. Tautoko Hangarau

· Whakamātautau tauira kore utu: Kei roto ko ngā pūrongo ine XRD, AFM, me te pānga Hall.

· Āwhina whakatauira taputapu: Tautoko i te tipu epitaxial me te arotautanga hoahoa taputapu.

4. Urupare Tere

· Tauira iti te rahinga: 10 ngā wafers iti rawa te ota, ka tukuna i roto i ngā wiki e 3.

· Ngā mahi whakahaere ā-ao: Ngā hononga mahi tahi me DHL me FedEx mō te tuku mai i te tatau ki te tatau.

5. Te Whakapūmau Kounga

· Tirotiro tukanga-katoa: E kapi ana i te āhua whenua o te hihi-X (XRT) me te tātaritanga kiato hapa.

· Ngā tiwhikete o te ao: E tutuki ana i ngā paerewa IATF 16949 (paerewa mō ngā motuka) me te AEC-Q101.

Whakamutunga

He tino pai ngā papa purapura SiC a XKH i roto i te kounga tioata, te pumau o te mekameka tuku, me te ngāwari whakaritenga, e mahi ana mō ngā hikohiko mana, ngā whakawhitiwhiti kōrero 5G, te pūngao whakahou, me ngā hangarau tiaki. Kei te haere tonu mātou ki te whakatairanga i te hangarau whakaputa papatipu SiC 8-inihi hei akiaki i te umanga semiconductor o te tuatoru o ngā whakatipuranga ki mua.

O mua: Pereti/tirei uku SiC mō te pupuri wafer 4 inihi 6 inihi mō te ICP

Panuku: Ngā Papatūāpapa Karaihe SiC Whakarite Dia 205/203/208 Momo 4H-N mō ngā Whakawhitiwhiti Kōrero Whatu