Ko te mata kirikiri monocrystalline silicon kua whakakikoruatia he kiriata whakaahuru AR
Ko nga ahuatanga o te arotahi silicon paninga:
1. Mahinga whatu:
Te awhe whakawhiti: 1.2-7μm (tata ki te infrared ki waenganui-infrared), te whakawhiti> 90% i roto i te roopu matapihi o te rangi 3-5μm (i muri i te paninga).
Nā te nui o te taupū whakaata (n≈ 3.4@4μm), me whakakikoruatia he kiriata whakaata-whakaata (pērā i te MgF₂/Y₂O₃) hei whakaiti i te ngaronga whakaata o te mata.
2. Pumautanga ngaaariki:
He iti te whakareatanga whakareatanga waiariki (2.6×10⁻⁶/K), te parenga teitei o te pāmahana (te pāmahana whakahaere ki te 500 ℃), e tika ana mo nga tono laser mana teitei.
3. Ngā āhuatanga pūkaha:
Mohs pakeke 7, karawarawa parenga, engari he pakarukaru tiketike, me tiaki taha chamfering.
4. Nga ahuatanga whakakikorua:
Customized anti-reflection film (AR@3-5μm), high reflection film (HR@10.6μm for CO₂ laser), bandpass filter film, etc.
Ko nga tono mo te mata kirika pani:
(1) Pūnaha whakaata waiariki infrared
Hei waahanga matua o nga arotahi infrared (3-5μm or 8-12μm band) mo te aroturuki haumarutanga, te tirotiro ahumahi me nga taputapu tirohanga mo te po hoia.
(2) Pūnaha whatu taiaho
CO₂ Laser (10.6μm) : Te whakaata whakaata teitei mo te resonator laser, te urungi kurupae ranei.
Fiber laser (1.5-2μm): Ko te arotahi kiriata anti-whakaata te whakapai ake i te pai o te hono.
(3) Nga taputapu whakamatautau Semiconductor
Ko te whainga moroiti infrared mo te kitenga koha angiangi, he atete ki te waikura plasma (he whakamarumaru paninga motuhake e hiahiatia ana).
(4) taputapu tātari matakite
Hei waahanga matakite o Fourier infrared spectrometer (FTIR), ka hiahiatia te whakawhiti teitei me te iti o te ngaru o mua.
Tawhā Hangarau:
Ko te arotahi monocrystalline silicon kua whakakikoruatia hei waahanga matua e kore e taea te whakakapi i roto i te punaha whatu infrared na te pai o te tuku rama infrared, te teitei o te waiariki me nga ahuatanga paninga whakarite. Ko a maatau ratonga ritenga motuhake e whakarite ana i te mahi pai o nga arotahi i roto i te taiaho, te tirotiro me nga tono whakaahua.
Paerewa | Te utu nui | |
Rauemi | Silicon | |
Rahi | 5mm-300mm | 5mm-300mm |
Whakaaetanga Rahi | ±0.1mm | ±0.02mm |
Maama te tuwhera | ≥90% | 95% |
Kounga Mata | 60/40 | 20/10 |
Pokapū | 3' | 1' |
Whakaaetanga Roa Arotahi | ±2% | ±0.5% |
paninga | Kaore i pania, AR, BBAR, Whakaata |
XKH Ratonga ritenga
Ko te XKH e tuku ana i nga whakaritenga katoa o nga arotahi hiraka monocrystalline kua whakakikoruatia: Mai i te kowhiringa o te monocrystalline silicon substrate (te aukati> 1000Ω · cm), te tukatuka whatu tika (spherical / aspherical, te tika o te mata λ / 4@633nm), te paninga ritenga (anti-whakaata/whakaata teitei / kiriata tātari, te tautoko i te taiaho-whakaaro, te kaha o te taiahoa, te whakakorikori i te taiahoa (whakawhitinga) te whakamatautau), tautoko i te puranga iti (10 nga waahanga) ki te whakaputa nui. Ka whakarato hoki i nga tuhinga hangarau (nga pihi whakakikorua, nga tawhā whatu) me te tautoko i muri i te hoko ki te whakatutuki i nga hiahia o nga punaha whatu infrared.
Hoahoa Taipitopito



