He karaihe silicon pania, he kiriata AR ārai-whakaata kua pania ritenga, he silicon monocrystalline
Ngā āhuatanga o te karaihe silicon pania:
1. Mahi whatu:
Awhe tuku: 1.2-7μm (tata ki te infrared waenga), tuku >90% i roto i te awhi matapihi hauhautanga 3-5μm (whai muri i te paninga).
Nā te teitei o te taupū whakaata (n≈ 3.4@4μm), me whakakikorua he kiriata ārai-whakaata (pēnei i te MgF₂/Y₂O₃) hei whakaiti i te ngaronga whakaata o te mata.
2. Te pumau o te wera:
He iti te tauwehenga whānui wera (2.6×10⁻⁶/K), he ātete pāmahana teitei (pāmahana whakahaere tae atu ki te 500℃), he pai mō ngā tono taiaho mana nui.
3. Ngā āhuatanga ā-ringa:
Ko te pakeke Mohs he 7, ātete ki te rakuraku, engari he pakarukaru rawa, me tiaki i te taha o te anga.
4. Ngā āhuatanga paninga:
Customized anti-reflection film (AR@3-5μm), high reflection film (HR@10.6μm for CO₂ laser), bandpass filter film, etc.
Ngā tono mō te karaihe silicon pania:
(1) Pūnaha whakaahua wera whero-whero
Hei wāhanga matua o ngā karāhe whero-whero (rohe 3-5μm, 8-12μm rānei) mō te aroturuki haumarutanga, te tirotiro ahumahi me ngā taputapu mō te tirohanga pō a te ope taua.
(2) Pūnaha whatu taiaho
CO₂ Taiaho (10.6μm): He karāhe whakaata teitei mō ngā kaiwhakaoho taiaho, mō te urungi hihi rānei.
Mā te muka taiaho (1.5-2μm): Ka whakapai ake te arotahi kiriata ārai-whakaata i te pai o te hononga.
(3) Ngā taputapu whakamātautau haurua-whakahaere
He arotahi mōkito whero-whero mō te kimi hapa o te wafer, ātete ki te waikura plasma (me whai parenga paninga motuhake).
(4) ngā taputapu tātaritanga āwhata
Hei wāhanga āwhata o te ine āwhata infrared Fourier (FTIR), e hiahiatia ana te tuku teitei me te iti o te hē o te ngaru.
Ngā tawhā hangarau:
Kua noho te karaihe silicon monocrystalline pania hei wāhanga matua e kore e taea te whakakapi i roto i te pūnaha whatu infrared nā te mea he pai te tuku mārama infrared, he pumau wera teitei me ngā āhuatanga paninga ka taea te whakarite. Mā ā mātou ratonga ritenga motuhake ka whakarite te mahi pai o ngā karaihe i roto i ngā tono laser, tirotiro me te whakaahua.
| Paerewa | Utu Teitei | |
| Rauemi | Hiraka | |
| Rahi | 5mm-300mm | 5mm-300mm |
| Manawanui Rahi | ±0.1mm | ±0.02mm |
| Pūwero Mārama | ≥90% | 95% |
| Kounga Mata | 60/40 | 20/10 |
| Te Pokapūtanga | 3' | 1' |
| Te Manawanui ki te Roa Arotahi | ±2% | ±0.5% |
| Paninga | Kāore i pania, AR, BBAR, Whakaata | |
Ratonga ritenga a XKH
Ka tukuna e XKH te tukanga whakaritenga katoa o ngā karaihe silicon monocrystalline kua pania: Mai i te kōwhiringa papa silicon monocrystalline (ātete >1000Ω·cm), te tukatuka whatu tika (porowhita/āwhatu, tika o te mata λ/4@633nm), te paninga ritenga (kiriata ārai-whakaata/whakaata teitei/tātari, tautoko i te hoahoa maha-roopu), ki te whakamātautau tino pakari (tere tuku, paepae kino laser, whakamātautau pono taiao), tautoko i te puranga iti (10 ngā wahi) ki te whakaputanga nui. Ka whakaratohia hoki e ia ngā tuhinga hangarau (ngā pihi paninga, ngā tawhā whatu) me te tautoko muri-hoko hei whakatutuki i ngā whakaritenga uaua o ngā pūnaha whatu infrared.





