Te tikanga ky o te karaihe boule sapphire kua tipu haere
Kauwhata Taipitopito
Tirohanga Whānui
A pōro hapairahe tioata kotahi nui, kua tupu ake i te wā e tipu haere ana o te waikura konumohe (Al₂O₃) e mahi ana hei rauemi whāngai mō ngā anga hapaira, ngā matapihi whatu, ngā wāhanga ātete-kakahu, me te tapahi kohatu utu nui. MeTe pakeketanga o te Mohs 9, te pumau wera tino pai(ira rewa ~2050 °C), mete māramatanga whānuimai i te UV ki te waenga-IR, ko te hapaira te rauemi paerewa e tika ana kia noho tahi ai te pakari, te ma, me te kounga whatu.
Ka tukuna e mātou ngā boule sapphire kore tae me te pania i hangaia mā ngā tikanga tipu kua whakamātauhia e te umanga, kua arotauhia mōTe epitaxy GaN/AlGaN, ngā karu tika, mengā wāhanga ahumahi pono-teitei.
He aha a Sapphire Boule mai i a Mātou
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Ko te kounga tioata tuatahi:he iti te ahotea ā-roto, he iti te ihirangi mirumiru/striae, he tino pai te whakahaere i te whakatakotoranga mō te tapahi me te epitaxy i raro.
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Ngāwari o te tukanga:Ngā kōwhiringa whakatipu KY/HEM/CZ/Verneuil hei whakataurite i te rahi, te ahotea, me te utu mō tō tono.
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Āhuahanga tauine:he porotakaroa, he āhua kāreti, he poraka rānei ngā poupou me ngā papatahi ritenga, ngā maimoatanga purapura/pito, me ngā papatahi tohutoro.
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Ka taea te whai me te tukurua:ngā tuhinga puranga, ngā pūrongo ine ine, me ngā paearu whakaae e hangai ana ki ō whakaritenga.
Ngā Hangarau Tipu
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KY (Kyropoulos):He pūoro nui te whānui, iti te ahotea; he pai mō ngā wafer epi-grade me ngā whatu ina he mea nui te ōritetanga o te birefringence.
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HEM (Tikanga Whakawhiti Wera):He tino pai ngā pikinga wera me te whakahaere ahotea; he mea ātaahua mō ngā karu whatu matotoru me ngā rauemi epi kounga teitei.
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CZ (Czochralski):He kaha te whakahaere i te whakatakotoranga me te āheinga ki te whakaputa anō; he kōwhiringa pai mō te tapahi auau, hua nui.
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Verneuil (Hanumitanga-Mumura):He iti te utu, he nui te kaha whakaputa; he pai mō ngā karu whānui, ngā wāhanga mīhini, me ngā tauira kohatu.
Te whakatakotoranga o te karaihe, te āhuahanga me te rahi
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Ngā aronga paerewa: papa-c (0001), waka rererangi-a (11-20), r-plane (1-102), papa-m (10-10); e wātea ana ngā waka rererangi ritenga.
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Te tika o te whakatakotoranga:≤ ±0.1° mā Laue/XRD (kia piri ake mēnā ka tonoa).
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Ngā Āhua:he poraka porotaka, he poraka kāreti rānei, he poraka tapawhā/tapawhā hāngai, me ngā tokotoko.
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Te rahi noa o te kōpaki: Ø30–220 mm, roa 50–400 mm(nui ake/iti ake i hangaia kia rite ki te tono).
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Ngā āhuatanga o te Mutunga/Tohutoro:te miihini i te mata o te purapura/te mata o te pito, ngā papatahi/ngā kōhao tohutoro, me ngā tohu pono mō te whakahāngaitanga o raro.
Ngā Āhuatanga Rauemi me te Whatu
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Te hanganga:Al₂O₃ karaihe kotahi, te parakore o ngā rauemi mata ≥ 99.99%.
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Kiato:~3.98 karamu/cm³
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Te pakeketanga:Mohs 9
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Taupū whakaata (589 nm): nₒ≈ 1.768,nₑ≈ 1.760 (uniaxial kino; Δn ≈ 0.008)
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Matapihi tuku: UV ki te ~5 µm(e whakawhirinaki ana ki te matotoru me te poke)
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Te kawe wera (300 K):~25 W·m⁻¹·K⁻¹
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CTE (20–300 °C):~5–8 × 10⁻⁶ /K (e whakawhirinaki ana ki te aronga)
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Te tauwehenga a Young:~345 GPa
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Hiko:He tino ārai (te ātete rōrahi i te nuinga o te wā ≥ 10¹⁴ Ω·cm)
Ngā Māka me ngā Kōwhiringa
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Te Taumata Epitaxy:He tino iti ngā mirumiru/striae me te whakaiti i te birefringence ahotea mō ngā wafer GaN/AlGaN MOCVD hua-teitei (2–8 inihi me runga ake i te raro).
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Taumata Whatu:He nui te tuku ā-roto me te ōritetanga mō ngā matapihi, ngā karāhe arotahi, me ngā tirohanga IR.
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Taumata Whānui/Mīhini:He rauemi pakari, he iti te utu mō ngā tioata mataaratanga, ngā pātene, ngā wāhanga pakaru, me ngā whare.
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Te Whakaranu/Tae:
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Kore tae(paerewa)
Kr:Al₂O₃(rūpi),Ti:Al₂O₃(Ti:sapphire) e mahi ana
Ētahi atu chromophores (Fe/Ti) mēnā ka tonoa
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Ngā tono
Ārahi-ārahi: Ngā papa mō ngā rama GaN LED, ngā rama moroiti-LED, ngā rama hiko HEMT, ngā taputapu RF (ngā rauemi whāngai rama hapaira).
Tirohanga Whānui me te Whakaahua: Ngā matapihi pāmahana teitei/pēhanga, ngā tirohanga IR, ngā matapihi poka taiaho, ngā taupoki pūoko.
Kaihoko me ngā Mea Kakahu: Ngā tioata mataaratanga, ngā taupoki arotahi kāmera, ngā taupoki pūoko tapumati, ngā wāhanga o waho kounga teitei.
Ahumahi me te Rererangi: Ngā pūwero, ngā nohoanga takirere, ngā mowhiti hiri, ngā matapihi tiaki, me ngā putanga tirotiro.
Te Tipu Reera/Karaihe: Ngā manaaki Ti:hapaira me te rupi mai i ngā pōro kua whakaranua.
Ngā Raraunga Tirohanga-Whai-Wā (He mea noa, hei tohutoro)
| Tawhā | Uara (Noa) |
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| Te hanganga | Al₂O₃ karaihe kotahi (≥ 99.99% parakore) |
| Te Whakatakotoranga | c / a / r / m (ritenga i runga i te tono) |
| Taupū @ 589 nm | nₒ≈ 1.768,nₑ≈ 1.760 |
| Awhe Tuku | ~0.2–5 µm (e whakawhirinaki ana ki te matotoru) |
| Te Arahi Wera | ~25 W·m⁻¹·K⁻¹ (300 K) |
| CTE (20–300 °C) | ~5–8 × 10⁻⁶/K |
| Te Tauwehenga o te Rangatahi | ~345 GPa |
| Kiato | ~3.98 karamu/cm³ |
| Te pakeketanga | Mohs 9 |
| Hiko | Ārai; ātete rōrahi ≥ 10¹⁴ Ω·cm |
Te Tukanga Hanga Angiangi Hapira
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Te Tipu o te Karaihe
Ka rewahia te alumina parakore-teitei (Al₂O₃) ka whakatupuhia hei poro karaihe hapaira kotahi mā te whakamahi i teKyropoulos (KY) or Czochralski (CZ)tikanga -
Te Tukatuka Ingota
Ka mīhinihia te ingot ki tētahi āhua paerewa — te kutikuti, te hanga diameter, me te tukatuka i te pito o te mata. -
Te tapatapahi
Ka tapatapahia te poro hapaira kia angiangi mā te whakamahi i tētahikani waea taimana. -
Te Whakakorikori-rua
Ka mirimirihia ngā taha e rua o te anga hei tango i ngā tohu kani, kia ōrite ai te matotoru. -
Te whakamahana
Ka whakamahanahia ngā papa kiatukuna te ahotea o rotoā, ka whakapai ake i te kounga me te mārama o te karaihe. -
Te Huri Tapa
Kua whakapikohia ngā taha o te papa angiangi hei ārai i te pakaru me te ngatata i te wā e tukatukahia ana. -
Te Whakamaunga
Ka whakamauhia ngā angiangi ki runga i ngā kawe, i ngā pupuri rānei hei whakakoi me te tirotiro tika. -
DMP (Whakakanapa Ā-ringa Takirua)
Ka orohia ngā mata o te papatahi mā te mīhini hei whakapai ake i te maeneene o te mata. -
CMP (Te Whakakanapa Matū Ā-ringa)
He taahiraa whakakoi pai e whakakotahi ana i ngā mahi matū me ngā mahi ā-ringa hei hanga i tētahimata whakaata. -
Tirotiro Tirohanga
Ka tirohia e ngā kaiwhakahaere, e ngā pūnaha aunoa rānei ngā hapa mata e kitea ana. -
Tirotiro Papatahi
Ka inehia te papatahi me te ōritetanga o te matotoru hei whakarite i te tika o ngā āhuatanga. -
Te Horoi RCA
Ka tangohia e te horoi matū paerewa ngā poke rauropi, konganuku, me ngā matūriki. -
Horoi Horoi
Ka tangohia e te horoi ā-ringa ngā matūriki moroiti e toe ana. -
Tirotiro i te Koha o te Mata
Ka kitea e te tirotiro whatu aunoa ngā hapa moroiti pēnei i ngā karawarawa, ngā poka, te poke rānei.
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Te Tipu o te Karaihe
Ka rewahia te alumina parakore-teitei (Al₂O₃) ka whakatupuhia hei poro karaihe hapaira kotahi mā te whakamahi i teKyropoulos (KY) or Czochralski (CZ)tikanga -
Te Tukatuka Ingota
Ka mīhinihia te ingot ki tētahi āhua paerewa — te kutikuti, te hanga diameter, me te tukatuka i te pito o te mata. -
Te tapatapahi
Ka tapatapahia te poro hapaira kia angiangi mā te whakamahi i tētahikani waea taimana. -
Te Whakakorikori-rua
Ka mirimirihia ngā taha e rua o te anga hei tango i ngā tohu kani, kia ōrite ai te matotoru. -
Te whakamahana
Ka whakamahanahia ngā papa kiatukuna te ahotea o rotoā, ka whakapai ake i te kounga me te mārama o te karaihe. -
Te Huri Tapa
Kua whakapikohia ngā taha o te papa angiangi hei ārai i te pakaru me te ngatata i te wā e tukatukahia ana. -
Te Whakamaunga
Ka whakamauhia ngā angiangi ki runga i ngā kawe, i ngā pupuri rānei hei whakakoi me te tirotiro tika. -
DMP (Whakakanapa Ā-ringa Takirua)
Ka orohia ngā mata o te papatahi mā te mīhini hei whakapai ake i te maeneene o te mata. -
CMP (Te Whakakanapa Matū Ā-ringa)
He taahiraa whakakoi pai e whakakotahi ana i ngā mahi matū me ngā mahi ā-ringa hei hanga i tētahimata whakaata. -
Tirotiro Tirohanga
Ka tirohia e ngā kaiwhakahaere, e ngā pūnaha aunoa rānei ngā hapa mata e kitea ana. -
Tirotiro Papatahi
Ka inehia te papatahi me te ōritetanga o te matotoru hei whakarite i te tika o ngā āhuatanga. -
Te Horoi RCA
Ka tangohia e te horoi matū paerewa ngā poke rauropi, konganuku, me ngā matūriki. -
Horoi Horoi
Ka tangohia e te horoi ā-ringa ngā matūriki moroiti e toe ana. -
Tirotiro i te Koha o te Mata
Ka kitea e te tirotiro whatu aunoa ngā hapa moroiti pēnei i ngā karawarawa, ngā poka, te poke rānei.
Poihāpeti Pōro (Al₂O₃ Karaihe Kotahi) — FAQ
Q1: He aha te boule hapaira?
A: He tioata kotahi kua tupu ake o te waikura konumohe (Al₂O₃). Koinei te "ingota" o te awa e whakamahia ana hei hanga i ngā anga hapaira, ngā matapihi whatu, me ngā wāhanga e roa ana te pakaru.
P2: He aha te hononga o te boule ki ngā wafers, ki ngā matapihi rānei?
A: Kua whakatakotoria te boule → tapatapahia → pania → orohia kia puta ai he anga epi-grade, he wāhanga whatu/mīhini rānei. He pānga nui te ōritetanga o te boule pūtake ki te hua o muri mai.
P3: He aha ngā tikanga whakatipu e wātea ana, ā, he aha ngā rerekētanga?
A: KY (Kyropoulos)meHEMhua nui,iti te ahoteaboules—he pai mō ngā epitaxy me ngā karu tirohanga matatau.CZ (Czochralski)he tino pai ngā tukuwhakahaere arongame te ōritetanga rota-ki-rota.Verneuil (te hanumitanga o te mura) is whai huamō ngā karu whānui me ngā tauira kohatu utu nui.
Q4: He aha ngā aronga e tukuna ana e koe? He aha te tika e kitea ana?
A: papa-c (0001), papa-a (11-20), papa-r (1-102), papa-m (10-10), me ngā tikanga. Ko te tika o te whakatakotoranga i te nuinga o te wā≤ ±0.1°i manatokohia e Laue/XRD (kia kaha ake mēnā ka tonoa).
Ngā Kiriata Āhua-Whiti me te Whakahaere Para i Roto i te Whare
He mea hanga katoa ā mātou boule sapphire kiataumata whatu, e whakarite ana i te tuku tere, te ōritetanga piripono, me te iti o te whakaurunga/mirumiru me te nekehanga mō ngā whatu me ngā hikohiko uaua. Ka whakahaerehia e mātou te whakatakotoranga tioata me te birefringence mai i te purapura ki te boule, me te whai i te rota katoa me te ōritetanga puta noa i ngā oma. Ka taea te whakarite i ngā rahinga, ngā whakatakotoranga (c-, a-, r-plane), me ngā manawanui ki ō hiahia tapahi/whakakanapa i raro iho.
He mea nui, ko ngā rauemi katoa e kore e tutuki i ngā whakaritenga katukatukahia katoatia i roto i te wharemā roto i tētahi tukanga mahi porowhita-kati—ka whakarōpūtia, ka hangarua, ka tukuna atu me te whai kawenga—kia whiwhi ai koe i te kounga pono me te kore he taumahatanga ki te whakahaere, ki te tutuki rānei i ngā whakaritenga. Mā tēnei huarahi ka whakaitihia te mōrearea, ka whakapotohia ngā wā arahi, ā, ka tautokona hoki ō whāinga pumau.
| Taumaha Ingota (kg) | 2 inihi | 4 inihi | 6 inihi | 8 inihi | 12 inihi | Ngā Tuhipoka |
|---|---|---|---|---|---|---|
| 10–30 | He pai | He pai | He iti/he taea | Ehara i te mea noa | Kāore i whakamahia | Tapatapa iti; 6 inihi te roa, e whakawhirinaki ana ki te whānui/roa e taea ana te whakamahi. |
| 30–80 | He pai | He pai | He pai | He iti/he taea | Ehara i te mea noa | He whānui te whakamahinga; i ētahi wā he papa whakamātautau 8 inihi te rahi. |
| 80–150 | He pai | He pai | He pai | He pai | Ehara i te mea noa | He taurite pai mō te whakaputanga 6–8 inihi. |
| 150–250 | He pai | He pai | He pai | He pai | R&D iti | Tautoko ana i ngā whakamātautau tuatahi 12″ me ngā whakaritenga tino poto. |
| 250–300 | He pai | He pai | He pai | He pai | He iti/he tino tohua | Te rahinga nui 8″; he whiriwhiringa o ngā oma 12″. |
| >300 | He pai | He pai | He pai | He pai | He pai | Tauine-rohe; 12 inihi te rahi ka taea me te whakahaere ōrite/hua tino kaha. |
