Wafer AlN-on-NPSS: Paparanga Nitride Konumohe Mahi-Teitei i runga i te Papa Hapaira Kore-Oro mō ngā Taupānga Pāmahana-Teitei, Mana-Teitei, me te RF
Ngā Āhuatanga
Papa AlN Mahi-TeiteiE mōhiotia ana te Nitride Konumohe (AlN) mō ōnakawe wera teitei(~200 W/m·K),whānui te āputa, mengaohiko pakaru teitei, he rauemi tino pai mōmana nui, auau teitei, mepāmahana teiteingā tono.
Papa Hapira Kore-Oro (NPSS): Ka whakaratohia e te hapaira kāore i orohia hewhai hua, pakari ā-mīhinituranga, e whakarite ana i tētahi turanga pumau mō te tipu epitaxial me te kore e uaua te whakakanapa i te mata. Nā ngā āhuatanga miihini pai rawa atu o te NPSS ka pakari mō ngā taiao wero.
Te Pūmautanga Wera TeiteiKa taea e te anga AlN-on-NPSS te tu atu i ngā piki me ngā heke o te pāmahana, ā, he pai mō te whakamahi i roto ihikohiko mana, ngā pūnaha motuka, Ngā LED, mengā tono whatue hiahia ana ki te mahi pumau i roto i ngā āhuatanga pāmahana teitei.
Te Ārai HikoHe tino pai ngā āhuatanga ārai hiko o te AlN, ā, he tino pai mō ngā tono kei reirate wehewehe hikohe mea nui, tae atu kiNgā taputapu RFmengā hikohiko ngaruiti.
Te Whakamarara Wera Pai RawaMā te kawe wera teitei, ka whakarite te paparanga AlN i te tohatoha wera whai hua, he mea nui hei pupuri i te mahi me te roa o te wā e mahi ana ngā taputapu i raro i te mana me te auau teitei.
Ngā Tawhā Hangarau
| Tawhā | Whakatakotoranga |
| Te Diameter o te Wafer | 2-inihi, 4-inihi (e wātea ana ngā rahi ritenga) |
| Momo Papa | Papa Hapira Kore-Oro (NPSS) |
| Matotoru o te Paparanga AlN | 2µm ki te 10µm (ka taea te whakarite) |
| Matotoru o te Papa | 430µm ± 25µm (mō te 2-inihi), 500µm ± 25µm (mō te 4-inihi) |
| Te Arahi Wera | 200 W/m·K |
| Ātete Hiko | He teitei te whakamarumaru, he pai mō ngā tono RF |
| Te Pākari o te Mata | Ra ≤ 0.5µm (mō te paparanga AlN) |
| Te Parakore o ngā Rauemi | AlN parakore teitei (99.9%) |
| Tae | Mā/Mā-pōuri (paparanga AlN me te papa NPSS tae mārama) |
| Wāhanga Angiangi | < 30µm (noa) |
| Momo Doping | Kāore i tāpirihia (ka taea te whakarite) |
Ngā tono
TeWafer AlN-i runga i-NPSSkua hangaia mō te whānuitanga o ngā tono mahi-teitei puta noa i ngā ahumahi maha:
Ngā Hikohiko Mana-TiketikeNā te kaha kawe wera me ngā āhuatanga ārai wera o te paparanga AlN, he rauemi tino pai mōngā transistors mana, ngā whakatikatika, mengā IC hikoe whakamahia ana i roto iwaka, ahumahi, mepūngao whakahoungā pūnaha.
Ngā Wāhanga Auautanga Reo Irirangi (RF)Ko ngā āhuatanga pai rawa atu o te AlN hei ārai i te hiko, me tōna iti o te mate, ka taea ai te whakaputa iNgā pūwhakawhiti RF, Ngā HEMT (Ngā Pūwhakawhiti Nekeneke-Irahiko-Teitei), me ētahi atungā wāhanga ngaruitie mahi pai ana i ngā auau me ngā taumata mana teitei.
Ngā Pūrere Whatu: E whakamahia ana ngā papa AlN-on-NPSS i roto ingā taiaho taiaho, Ngā LED, menga kaitirotiro whakaahua, kei hea tekawe wera teiteimete pakari o te miihinihe mea nui kia mau tonu te mahi a ngā taputapu mō ngā wā roa.
Ngā Pūoko Pāmahana-TeiteiNā te kaha o te wafer ki te tu atu i te wera nui, he pai mōngā pūoko pāmahanamete aroturukitanga taiaoi roto i ngā ahumahi pēnei irererangi, waka, mehinu me te hau.
Tākai Ārai-Haumaru: Whakamahia i roto i ngā kaiwhakawera weramengā paparanga whakahaere werai roto i ngā pūnaha tākai, hei whakarite i te pono me te whai huatanga o ngā haurua-haurua.
Ngā Pātai me ngā Whakautu
P: He aha te painga matua o ngā anga AlN-on-NPSS i runga i ngā rauemi tuku iho pēnei i te silicon?
A: Ko te painga matua ko AlNkawe wera teitei, e āhei ai ki te tuku wera i roto i te huarahi whai hua, he mea tino pai mōmana nuimengā tono auau teiteihe mea nui te whakahaere wera. Hei tāpiri, hewhānui te āputaā, he tino paiārai hiko, e pai ake ai mō te whakamahi i roto iRFmengā taputapu ngaruitiki te whakataurite ki te silicon tuku iho.
Q: Ka taea te whakarite i te paparanga AlN i runga i ngā papa NPSS?
Āe, ka taea te whakarite i te matotoru o te paparanga AlN (mai i te 2µm ki te 10µm, neke atu rānei) kia tutuki ai ngā hiahia motuhake o tō tono. Ka tukuna hoki e mātou he whakaritenga mō te momo paninga (momo-N, momo-P rānei) me ētahi atu paparanga mō ngā mahi motuhake.
P: He aha te whakamahinga noa o tēnei anga whakarewa i roto i te umanga motuka?
A: I roto i te umanga motuka, he mea noa te whakamahi i ngā wafer AlN-on-NPSS i roto ihikohiko mana, Ngā pūnaha rama LED, mengā pūoko pāmahanaHe pai rawa atu te whakahaere wera me te ārai hiko e whakaratohia ana e rātou, he mea nui tēnei mō ngā pūnaha tino whai hua e mahi ana i raro i ngā āhuatanga pāmahana rerekē.
Kauwhata Taipitopito
