8inihi SiC Production kōeke angiangi 4H-N SiC tïpako

Whakaahuatanga Poto:

Ka whakamahia nga taputapu SiC 8-inihi i roto i nga taputapu hiko teitei, penei i nga MOSFET mana (Metal Oxide Semiconductor Field Effect Transistors), Schottky diodes me etahi atu taputapu hiko hiko.

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Taipitopito Hua

Tohu Hua

Ko te ripanga e whai ake nei e whakaatu ana i nga korero mo o maatau 8inihi SiC wafers:

8inihi N-momo SiC DSP Specs
Tau	Tūemi	Waeine	Whakaputa	Rangahau	Porekau
1:tawhā
1.1	polytype	--	4H	4H	4H
1.2	takotoranga mata	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2:Tawhā hiko
2.1	haupapa	--	n-momo Nitrogen	n-momo Nitrogen	n-momo Nitrogen
2.2	parenga	ohm ·cm	0.015~0.025	0.01~0.03	NA
3:Tawhā miihini
3.1	diameter	mm	200±0.2	200±0.2	200±0.2
3.2	matotoru	μm	500±25	500±25	500±25
3.3	Takotoranga kakari	°	[1- 100]±5	[1- 100]±5	[1- 100]±5
3.4	Hōhonu Kāniwha	mm	1~1.5	1~1.5	1~1.5
3.5	LTV	μm	≤5(10mm*10mm)	≤5(10mm*10mm)	≤10(10mm*10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	Kopere	μm	-25~25	-45~45	-65~65
3.8	Warp	μm	≤30	≤50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4: Hanganga
4.1	kiato moroiti	ea/cm2	≤2	≤10	≤50
4.2	ihirangi whakarewa	ngota/cm2	≤1E11	≤1E11	NA
4.3	TSD	ea/cm2	≤500	≤1000	NA
4.4	BPD	ea/cm2	≤2000	≤5000	NA
4.5	TED	ea/cm2	≤7000	≤10000	NA
5.Ko te kounga o mua
5.1	mua	--	Si	Si	Si
5.2	mutu mata	--	Si-kanohi CMP	Si-kanohi CMP	Si-kanohi CMP
5.3	matūriki	ea/wafer	≤100(rahi≥0.3μm)	NA	NA
5.4	rakuraku	ea/wafer	≤5, Tapeke Length≤200mm	NA	NA
5.5	Tapa maramara / nuku / kapiti / poke / poke	--	Karekau	Karekau	NA
5.6	Nga waahi polytype	--	Karekau	Horahanga ≤10%	Horahanga ≤30%
5.7	tohu o mua	--	Karekau	Karekau	Karekau
6: Te kounga o muri
6.1	mutu muri	--	C-kanohi MP	C-kanohi MP	C-kanohi MP
6.2	rakuraku	mm	NA	NA	NA
6.3	Te taha taha o muri maramara / nuku	--	Karekau	Karekau	NA
6.4	Te taratara o muri	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Te tohu o muri	--	Kaniwha	Kaniwha	Kaniwha
7:te taha
7.1	taha	--	Chamfer	Chamfer	Chamfer
8:Pake
8.1	tākainga	--	Epi-reri me te korehau tākainga	Epi-reri me te korehau tākainga	Epi-reri me te korehau tākainga
8.2	tākainga	--	Maha-wafer tākai rīpene	Maha-wafer tākai rīpene	Maha-wafer tākai rīpene