Papa hanga SiC 8inihi, papa hanga SiC 4H-N
Kei te ripanga e whai ake nei ngā whakatakotoranga o ā mātou wafer SiC 8 inihi:
| Ngā Whakatakotoranga DSP Momo-N 8inihi | |||||
| Tau | Taonga | Wāhanga | Te whakaputanga | Rangahau | Tānga |
| 1:ngā tawhā | |||||
| 1.1 | momo-maha | -- | 4H | 4H | 4H |
| 1.2 | te aronga o te mata | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2:Tauwhā hiko | |||||
| 2.1 | tāpiringa | -- | hauota momo-n | hauota momo-n | hauota momo-n |
| 2.2 | ātete | ohm ·cm | 0.015~0.025 | 0.01~0.03 | NA |
| 3:Tauwhātanga ā-mīhini | |||||
| 3.1 | whānui | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | matotoru | µm | 500±25 | 500±25 | 500±25 |
| 3.3 | Te aronga o te koki | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
| 3.4 | Hōhonutanga o te Kohao | mm | 1~1.5 | 1~1.5 | 1~1.5 |
| 3.5 | LTV | µm | ≤5 (10mm * 10mm) | ≤5 (10mm * 10mm) | ≤10 (10mm * 10mm) |
| 3.6 | TTV | µm | ≤10 | ≤10 | ≤15 |
| 3.7 | Kopere | µm | -25~25 | -45~45 | -65~65 |
| 3.8 | Wāwhati | µm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4:Hanganga | |||||
| 4.1 | te matotoru o ngā paipa iti | ia/cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | te ihirangi whakarewa | ngā ngota/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ia/cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | ia/cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | ia/cm2 | ≤7000 | ≤10000 | NA |
| 5. Kounga o mua | |||||
| 5.1 | mua | -- | Si | Si | Si |
| 5.2 | whakaotinga mata | -- | CMP mata-Si | CMP mata-Si | CMP mata-Si |
| 5.3 | matūriki | ea/wafer | ≤100 (rahi ≥0.3μm) | NA | NA |
| 5.4 | rakuraku | ea/wafer | ≤5, Roa Katoa ≤200mm | NA | NA |
| 5.5 | Tapa maramara/kōhao/ngatata/paru/paru | -- | Kāore | Kāore | NA |
| 5.6 | Ngā rohe momo-maha | -- | Kāore | Horahanga ≤10% | Horahanga ≤30% |
| 5.7 | tohu o mua | -- | Kāore | Kāore | Kāore |
| 6: Kounga o muri | |||||
| 6.1 | whakaotinga whakamuri | -- | MP kanohi-C | MP kanohi-C | MP kanohi-C |
| 6.2 | rakuraku | mm | NA | NA | NA |
| 6.3 | Te taha o ngā hapa o muri maramara/whakaurunga | -- | Kāore | Kāore | NA |
| 6.4 | Te taratara o te tuara | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Tohu whakamuri | -- | Te kokoru | Te kokoru | Te kokoru |
| 7: taha | |||||
| 7.1 | taha | -- | Chamfer | Chamfer | Chamfer |
| 8:Mōkihi | |||||
| 8.1 | tākai | -- | Kua rite mō te haurua-haurua me te korehau tākai | Kua rite mō te haurua-haurua me te korehau tākai | Kua rite mō te haurua-haurua me te korehau tākai |
| 8.2 | tākai | -- | Maha-wafer takai kāseti | Maha-wafer takai kāseti | Maha-wafer takai kāseti |
Kauwhata Taipitopito
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