Ngā Waferi SiC Silicon Carbide 8inihi 200mm Momo 4H-N Tau whakaputanga matotoru 500um

Whakaahuatanga Poto:

Kei a Shanghai Xinkehui Tech. Co., Ltd te whiringa me ngā utu pai rawa atu mō ngā papa wafer silicon carbide kounga teitei me ngā papa tae atu ki te 8 inihi te whānui me ngā momo N- me te haurua-whakamātao. Ko ngā kamupene taputapu haurua-ira iti me te nui me ngā taiwhanga rangahau puta noa i te ao e whakamahi ana, e whakawhirinaki ana hoki ki ā mātou papa wafer silicone carbide.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Whakatakotoranga Papaaho SiC 200mm 8inihi

Rahi: 8 inihi;

Diameter: 200mm±0.2;

Matotoru: 500um±25;

Te Aronga o te Mata: 4 ki te [11-20]±0.5°;

Te whakatakotoranga o te kokoru:[1-100]±1°；

Hōhonutanga o te kōhao: 1±0.25mm；

Paipa iti: <1cm2;

Pereti Hex: Kāore e whakaaetia;

Ātete: 0.015~0.028Ω;

EPD:<8000cm2;

TED:<6000cm2

BPD:<2000cm2

TSD:<1000cm2

SF: horahanga <1%

TTV≤15um；

Warp≤40um；

Kopere≤25um；

Ngā rohe maha: ≤5%;

Rakuraku: <5 me te Roa Whakakotahi < 1 Te Diameter o te Wafer;

Maramara/Ngā Pokapū: Kāore e āhei te Whānui me te Hōhonutanga o te D>0.5mm;

Ngā Kapiti: Kāore;

Waikura: Kāore

Tapa angiangi: Angaanga;

Whakaotinga mata: Whakakanapa taha rua, Mata Si CMP;

Te Tākai: Rīpene Wafer Maha-Whāriki, Ipu Wafer Takitahi rānei;

Ko ngā uauatanga o nāianei mō te whakarite i ngā tioata 200mm 4H-SiC te nuinga

1) Te whakarite i ngā tioata purapura 200mm 4H-SiC kounga teitei;

2) Te kore-ōrite o te mara pāmahana rahi nui me te whakahaere tukanga nucleation;

3) Te whai huatanga o te kawe me te whanaketanga o ngā wāhanga hau i roto i ngā pūnaha tipu tioata nui;

4) Te pakaru o te karaihe me te horapa o ngā hapa i puta mai i te pikinga o te ahotea wera nui.

Hei whakakore i ēnei wero, hei whiwhi hoki i ngā angaanga SiC 200mm kounga teitei, e whakaarohia ana ēnei otinga:

Mō te whakarite i te tioata purapura 200mm, i akohia te mara rere pāmahana tika, me te huihuinga whānui, ā, i hangaia kia whai whakaaro ki te kounga tioata me te rahi whānui; Ka tīmata ki te tioata SiC 150mm, ka whakahaerehia te whakahoutanga tioata purapura hei whakawhānui haere i te tioata SiC kia tae rā anō ki te 200mm; Mā te tipu me te tukanga tioata maha, ka āta whakapai ake i te kounga tioata i te rohe whānui tioata, me te whakapai ake i te kounga o ngā tioata purapura 200mm.

Mō te whakarite i te tioata kawe hiko me te papahanga 200mm, kua arotauhia e te rangahau te hoahoa o te mara pāmahana me te mara rere mō te tipu tioata rahi nui, te kawe i te tipu tioata kawe hiko SiC 200mm, me te whakahaere i te ōritetanga o te tāpiringa. Whai muri i te tukatuka me te hanga o te tioata, i whiwhihia he ingota 4H-SiC kawe hiko 8-inihi me te diameter paerewa. Whai muri i te tapahi, te huri, te whakakanapa, te tukatuka kia whiwhi ai i ngā anga SiC 200mm me te matotoru o te 525um pea.