6inihi SiC Epitaxiy wafer momo N/P e whakaaetia ana kia whakaritea

Ko te tukanga whakarite o te wafer epitaxial silicon carbide he tikanga e whakamahi ana i te hangarau Chemical Vapor Deposition (CVD). Ko ngā mātāpono hangarau me ngā mahi whakarite e whai ake nei:

Te mātāpono hangarau:

Te Whakatakotoranga Kohu Matū: Mā te whakamahi i te hau o te rauemi mata i roto i te wāhanga hau, i raro i ngā tikanga tauhohenga motuhake, ka pirau, ka whakatakotoria ki runga i te papa hei hanga i te kiriata angiangi e hiahiatia ana.

Tauhohenga hau: Mā te pyrolysis, te tauhohenga pakaru rānei, ka hurihia ngā hau mata o ngā rauemi mata i roto i te wāhanga hau i roto i te rūma tauhohenga.

Ngā taahiraa o te tukanga whakarite:

Te maimoatanga papa: Ka horoia te mata o te papa, ka tukatukahia hoki i mua hei whakarite i te kounga me te tioata o te papa epitaxial.

Te patuiro i te rūma tauhohenga: te whakarerekē i te pāmahana, te pēhanga me te tere rere o te rūma tauhohenga me ētahi atu tawhā hei whakarite i te pumau me te whakahaere i ngā āhuatanga tauhohenga.

Te tuku rauemi mata: te tuku i ngā rauemi mata hau e hiahiatia ana ki roto i te rūma tauhohenga, te whakaranu me te whakahaere i te tere rere e hiahiatia ana.

Te tukanga tauhohenga: Mā te whakamahana i te rūma tauhohenga, ka pāngia te rauemi hau e te tauhohenga matū i roto i te rūma hei whakaputa i te putunga e hiahiatia ana, arā, te kiriata silicon carbide.

Te whakamatao me te tango i ngā mea: I te mutunga o te tauhohenga, ka whakahekehia mārire te pāmahana hei whakamatao, hei whakapakeke hoki i ngā putunga i roto i te rūma tauhohenga.

Te whakamahana me te tukatuka i muri i te anga epitaxial: ka whakamahanahia, ka tukatukahia hoki te anga epitaxial kua whakatakotoria hei whakapai ake i ōna āhuatanga hiko me te whatu.

Tērā pea ka rerekē ngā mahi me ngā āhuatanga motuhake o te tukanga whakarite anga epitaxial silicon carbide i runga i ngā taputapu me ngā whakaritenga motuhake. He rerenga tukanga whānui me te mātāpono noa iho ēnei o runga ake nei, me whakarerekē me te arotau i te mahi motuhake kia rite ki te āhuatanga tūturu.