6inihi GaN-I-te-Hapaira
He paparanga-epi 150mm GaN 6 inihi i runga i te Silicon/Sapphire/SiC, he paparanga-epi Gallium nitride epitaxial
Ko te papa whakarewa hapaira 6-inihi te roa he rauemi haurua-ā-ira kounga teitei kei roto ko ngā paparanga o te gallium nitride (GaN) i whakatipuria ki runga i te papa whakarewa hapaira. He tino pai ngā āhuatanga kawe hiko o te rauemi, ā, he mea tino pai mō te hanga i ngā taputapu haurua-ā-ira mana-teitei me te auau-teitei.
Tikanga hanga: Ko te tukanga hanga ko te whakatipu i ngā paparanga GaN ki runga i te papa hapaira mā te whakamahi i ngā tikanga matatau pēnei i te tāpaetanga kohu matū whakarewa-ora (MOCVD) te epitaxy hihi ngota (MBE) rānei. Ka whakahaerehia te tukanga tāpaetanga i raro i ngā āhuatanga whakahaeretia hei whakarite i te kounga tioata teitei me te kiriata ōrite.
Ngā tono GaN-On-Sapphire 6inihi: E whakamahia whānuitia ana ngā maramara papa sapphire 6-inihi i roto i ngā whakawhitiwhiti kōrero ngaruiti, ngā pūnaha radar, te hangarau ahokore me te hikohiko opto.
Ko ētahi o ngā tono noa ko
1. Whakakaha mana Rf
2. Te umanga rama LED
3. Ngā taputapu whakawhitiwhiti whatunga ahokore
4. Ngā taputapu hiko i roto i te taiao pāmahana teitei
5. Ngā taputapu optoelectronic
Ngā whakatakotoranga hua
- Rahi: Ko te whānui o te papa he 6 inihi (tata ki te 150 mm).
- Te kounga o te mata: Kua orohia rawatia te mata kia rite ki te kounga whakaata tino pai.
- Matotoru: Ka taea te whakarite i te matotoru o te paparanga GaN kia rite ki ngā whakaritenga motuhake.
- Tākai: Kua tākaihia te papa ki ngā rauemi ārai-pūmau hei ārai i te kino i te wā e kawe ana.
- Ngā tapa tūnga: He tapa tūnga motuhake kei te papa hei āwhina i te whakataurite me te whakahaere i te wā e whakarite ana i te taputapu.
- Ētahi atu tawhā: Ka taea te whakarite i ngā tawhā motuhake pēnei i te angiangi, te ātete me te kukū tāpiringa kia rite ki ngā hiahia o te kiritaki.
He pai rawa ngā āhuatanga rauemi me ngā momo whakamahinga, ā, he kōwhiringa pono ngā anga papa hapaira 6-inihi mō te whakawhanake i ngā taputapu haurua-ā-ira mahi-teitei i roto i ngā momo ahumahi.
| Papa raro | 6” 1mm <111> momo-p Si | 6” 1mm <111> momo-p Si |
| Te Matotoru o te Epi | ~5um | ~7um |
| Epi ThickUnif | <2% | <2% |
| Kopere | +/-45um | +/-45um |
| Pakaru | <5mm | <5mm |
| BV Poutū | >1000V | >1400V |
| HEMT Al% | 25-35% | 25-35% |
| HEMT MatotoruToharite | 20-30nm | 20-30nm |
| Taupoki SiN Whakauru | 5-60nm | 5-60nm |
| 2DEG whakakotahitanga | ~1013cm-2 | ~1013cm-2 |
| Nekehanga | ~2000cm2/Vs (<2%) | ~2000cm2/Vs (<2%) |
| Rsh | <330ohm/tapawhā (<2%) | <330ohm/tapawhā (<2%) |
Kauwhata Taipitopito
