6inihi 150mm Silicon Carbide SiC Wafers momo 4H-N mō te Rangahau Hanga MOS, SBD rānei me te taumata Tauira
Ngā Āpure Tono
He mea nui te papa tioata kotahi silicon carbide 6-inihi te roa i roto i ngā ahumahi maha. Tuatahi, he whānuitia te whakamahinga i roto i te umanga semiconductor mō te hanga i ngā taputapu hiko mana-teitei pērā i ngā transistors hiko, ngā ara iahiko whakauru, me ngā kōwae hiko. Nā tōna kawe wera teitei me te ātete pāmahana teitei ka pai ake te tohatoha wera, ka hua ake he pai ake te whai hua me te pono. Tuarua, he mea nui ngā papa silicon carbide i roto i ngā mara rangahau mō te whakawhanake i ngā rauemi me ngā taputapu hou. Hei tāpiri, he maha ngā whakamahinga o te papa silicon carbide i roto i te mara o ngā optoelectronics, tae atu ki te hanga i ngā LED me ngā diode laser.
Ngā Whakatakotoranga Hua
Ko te whānui o te papa tioata kotahi, he mea hanga ki te silicon carbide, he 6-inihi te roa, he 6 inihi te whānui (tata ki te 152.4 mm). Ko te taratara o te mata he Ra < 0.5 nm, ā, ko te matotoru he 600 ± 25 μm. Ka taea te whakarite i te papa ki te kawe hiko momo-N, momo-P rānei, i runga i ngā hiahia o te kiritaki. Heoi anō, he tino pumau te āhua o te miihini, ā, ka taea te tu atu ki te pēhanga me te wiri.
| Diameter | 150±2.0mm（6 inihi） | ||||
| Matotoru | 350 μm±25μm | ||||
| Te Whakatakotoranga | I te tuaka: <0001>±0.5° | Te taha tuaka：4.0° ki te 1120±0.5° | |||
| Momo maha | 4H | ||||
| Ātete (Ω·cm) | 4H-N | 0.015~0.028 Ω·cm/0.015~0.025ohm·cm | |||
| 4/6H-SI | >1E5 | ||||
| Te aronga papatahi tuatahi | {10-10}±5.0° | ||||
| Te roa papatahi tuatahi (mm) | 47.5 mm±2.5 mm | ||||
| Tapa | Chamfer | ||||
| TTV/Pīkau/Whā (um) | ≤15 /≤40 /≤60 | ||||
| AFM Front (Si-face) | Pōrana Ra≤1 nm | ||||
| CMP Ra≤0.5 nm | |||||
| LTV | ≤3μm (10mm * 10mm) | ≤5μm (10mm * 10mm) | ≤10μm (10mm * 10mm) | ||
| TTV | ≤5μm | ≤10μm | ≤15μm | ||
| Kiri karaka/ngā rua/ngā kapiti/te poke/ngā paru/ngā miro | Kāore | Kāore | Kāore | ||
| ngā whakanekehanga | Kāore | Kāore | Kāore | ||
Ko te papa tioata kotahi silicon carbide 6-inihi te roa, he rauemi mahi-teitei e whakamahia whānuitia ana i roto i ngā ahumahi semiconductor, rangahau, me te optoelectronics. He pai te kawe wera, te pumau miihini, me te ātete pāmahana teitei, e pai ai mō te hanga taputapu hiko mana-teitei me te rangahau rauemi hou. Ka whakaratohia e mātou he maha ngā whakaritenga me ngā kōwhiringa whakaritenga hei whakatutuki i ngā tono rerekē a te kiritaki.Whakapā mai ki a mātou mō ētahi atu kōrero mō ngā papa waro silicon carbide!
Kauwhata Taipitopito
