6 inihi te SiC karaihe kotahi e ārahi ana i runga i te papa hiato SiC polycrystalline. Diameter 150mm momo P momo N

Whakaahuatanga Poto:

Ko te SiC monocrystalline 6-inihi te roa, he mea hanga ki te SiC polycrystalline, he otinga rauemi silicon carbide (SiC) auaha i hangaia mō ngā taputapu hiko mana-teitei, pāmahana-teitei, me te auau-teitei. Kei roto i tēnei papa he paparanga hohe SiC kotahi-kiriata e herea ana ki te turanga SiC polycrystalline mā roto i ngā tukanga motuhake, e whakakotahi ana i ngā āhuatanga hiko pai o te SiC monocrystalline me ngā painga utu o te SiC polycrystalline.
Ki te whakatauritea ki ngā papa SiC monocrystalline-katoa tuku iho, ko te SiC monocrystalline 6-inihi te roa e mau ana i runga i te papa hiato SiC polycrystalline e pupuri ana i te nekehanga hiko teitei me te ātete ngaohiko teitei, me te whakaiti nui i ngā utu hanga. Ko tōna rahi wafer 6-inihi (150 mm) e whakarite ana i te hototahi ki ngā raina hanga semiconductor o nāianei, e āhei ai te hanga tauine. Hei tāpiri, mā te hoahoa kawe hiko ka taea te whakamahi tika i roto i te hanga taputapu hiko (hei tauira, MOSFET, diodes), ka whakakore i te hiahia mō ngā tukanga tāpiri me te whakangawari i ngā rerenga mahi hanga.

Tukua mai he īmēra ki a mātou

Ngā Āhuatanga

Ngā tawhā hangarau

Rahi:	6 inihi
Diameter:	150 mm
Matotoru:	400-500 μm
Ngā Tawhā Kiriata SiC Monocrystalline
Momo maha:	4H-SiC, 6H-SiC rānei
Te Kukū o te Doping:	1×10¹⁴ - 1×10¹⁸ henimita⁻³
Matotoru:	5-20 μm
Ātete Rau:	10-1000 Ω/tapawhā
Te Nekehanga Irahiko:	800-1200 cm²/Vs
Te Nekehanga o te Pū:	100-300 cm²/Vs
Ngā Tawhā Papa Pūpare SiC Polycrystalline
Matotoru:	50-300 μm
Te Arahi Wera:	150-300 W/m·K
Ngā Tawhā Papa SiC Monocrystalline
Momo maha:	4H-SiC, 6H-SiC rānei
Te Kukū o te Doping:	1×10¹⁴ - 1×10¹⁸ henimita⁻³
Matotoru:	300-500 μm
Rahi o te witi:	> 1 mm
Te Pākari o te Mata:	< 0.3 mm RMS
Ngā Āhuatanga Mīhini me te Hiko
Te pakeketanga:	9-10 Mohs
Kaha Pehi:	3-4 GPa
Kaha Kume:	0.3-0.5 GPa
Te Kaha o te Papa Wehewehenga:	> 2 MV/cm
Te Manawanuitanga Horopeta Katoa:	> 10 Mrad
Ātete Pānga Takahanga Kotahi:	> 100 MeV·cm²/mg
Te Arahi Wera:	150-380 W/m·K
Awhe Pāmahana Whakahaere:	-55 ki te 600°C

Ngā Āhuatanga Matua

Ko te SiC monocrystalline 6-inihi te roa e ahu mai ana i runga i te papa hiato SiC polycrystalline e tuku ana i te taurite ahurei o te hanganga rauemi me te mahi, e pai ai mō ngā taiao ahumahi uaua:

1. Whai Huatanga Utu: Ka whakaitihia ngā utu e te turanga SiC polycrystalline ki te whakataurite ki te SiC monocrystalline-katoa, ā, ka whakarite te paparanga hohe SiC monocrystalline i te mahi kounga-ā-pūrere, he mea tino pai mō ngā tono utu-tairongo.

2. Ngā Āhuatanga Hiko Tino Pai: Ko te paparanga SiC monocrystalline e whakaatu ana i te nekenekehanga kawe teitei (>500 cm²/V·s) me te iti o te kiato hapa, e tautoko ana i te mahi auau teitei me te mana teitei o te taputapu.

3. Te Pūmautanga o te Pāmahana Teitei: Mā te ātete pāmahana teitei ā-roto o te SiC (>600°C) ka noho pūmau te papa hiato i raro i ngā āhuatanga tino kino, ā, he pai mō ngā waka hiko me ngā tono motuka ahumahi.

Rahi Wafer Paerewa 4.6-inihi: Ki te whakatauritea ki ngā papa SiC 4-inihi tuku iho, ka whakanui ake te hōputu 6-inihi i te hua maramara mā te neke atu i te 30%, ka whakaiti i ngā utu taputapu mō ia wae.

5. Hoahoa Arataki: Mā ngā paparanga momo-N, momo-P rānei kua pania i mua ka whakaitihia ngā mahi whakaurunga katote i roto i te hanga taputapu, ka whakapai ake i te whai huatanga o te whakaputa me te hua.

6. Whakahaerenga Wera Pai Rawa: Ko te kawe wera o te turanga SiC polycrystalline (~120 W/m·K) he rite ki te SiC monocrystalline, ā, he pai te aro ki ngā wero whakamarara wera i roto i ngā taputapu mana-teitei.

Mā ēnei āhuatanga ka whakanohohia te SiC monocrystalline arahi 6-inihi i runga i te papa hiato SiC polycrystalline hei otinga whakataetae mō ngā ahumahi pēnei i te pūngao whakahou, te kawe waka tereina, me te rererangi.

Ngā Taupānga Matua

Kua angitu te whakatinanatanga o te SiC monocrystalline 6-inihi i runga i te papa hiato SiC polycrystalline i roto i ētahi mara e tino hiahiatia ana:
1. Ngā Pūkaha Waka Hiko: Whakamahia i roto i ngā MOSFET SiC ngaohiko-tiketike me ngā diode hei whakarei ake i te pai o te inverter me te whakawhānui i te whānuitanga o te pākahiko (hei tauira, ngā tauira Tesla, BYD).

2. Ngā Puku Mōta Ahumahi: Ka whakahohe i ngā waeine hiko pāmahana-tiketike, auau-whakawhiti-tiketike, ka whakaiti i te whakapaunga pūngao i roto i ngā mīhini taumaha me ngā tāpoi hau.

3. Ngā Hurihuri Whakaahua-pūngao: Ka whakapai ake ngā taputapu SiC i te pai o te hurihanga o te rā (>99%), ā, ka whakaitihia anō hoki e te papa hiato ngā utu pūnaha.

4. Te Kawe Rerewē: Whakamahia ki ngā kaitahuri kukume mō ngā pūnaha rerewē tere-nui me te raro whenua, e tuku ana i te ātete ngaohiko-tiketike (>1700V) me ngā āhua kiato.

5. Rererangi: He mea tino pai mō ngā pūnaha hiko amiorangi me ngā ara iahiko whakahaere miihini rererangi, ka taea te tu atu i ngā pāmahana tino kino me te irahiko.

I roto i te mahi hanga, ko te SiC monocrystalline 6-inihi te roa e ahu mai ana i te hiko i runga i te papa hiato SiC polycrystalline he tino hototahi ki ngā tukanga taputapu SiC paerewa (hei tauira, te tuhi kohatu, te whakairo), kāore e hiahiatia he haumitanga whakapaipai tāpiri.

Ngā Ratonga XKH

Ka whakaratohia e XKH te tautoko whānui mō te SiC monocrystalline 6-inihi i runga i te papa hiato SiC polycrystalline, e kapi ana i te R&D ki te hanga papatipu:

1. Whakaritenga: Ka taea te whakarite i te matotoru o te paparanga monocrystalline (5–100 μm), te kukū tāpiringa (1e15–1e19 cm⁻³), me te whakatakotoranga tioata (4H/6H-SiC) hei whakatutuki i ngā whakaritenga rerekē o te taputapu.

2. Tukatuka Angiangi: He tuku nui o ngā papa 6-inihi me ngā ratonga angiangi o muri me te whakarewa mō te whakaurunga mono-ā-ringa.

3. Whakamana Hangarau: Kei roto ko te tātaritanga tioata XRD, te whakamātautau pānga Hall, me te ine ātete wera hei tere ake i te tohu paetae rauemi.

4. Tauira Tere: Ngā tauira 2 ki te 4 inihi (te tukanga ōrite) mā ngā whare rangahau hei whakatere i ngā huringa whanaketanga.

5. Tātaritanga me te Arotautanga o te Rahunga: Ngā otinga taumata-rauemi mō ngā wero tukatuka (hei tauira, ngā hapa o te paparanga epitaxial).

Ko tā mātou kaupapa matua he whakatū i te SiC monocrystalline 6-inihi te rahi hei whakahaere hiko i runga i te papa hiato SiC polycrystalline hei otinga pai mō ngā hikohiko mana SiC, e tuku ana i te tautoko mai i te tauira ki te whakaputa rahinga.

Whakamutunga

Mā te SiC monocrystalline 6-inihi e ārahi ana i runga i te papa hiato SiC polycrystalline ka tutuki he taurite nui i waenga i te mahi me te utu mā roto i tōna hanganga ranu mono/polycrystalline auaha. I te horapa haere o ngā waka hiko me te ahu whakamua o te Industry 4.0, ka whakaratohia e tēnei papa he turanga rauemi pono mō ngā hikohiko mana o te whakatupuranga e whai ake nei. E mihi ana a XKH ki ngā mahi tahi hei tūhura ake i te pūmanawa o te hangarau SiC.